In this study, forced nonlinear vibration of a circular micro-plate under two-sided electrostatic, two-sided Casimir and external harmonic forces is investigated analytically. For this purpose, at first, von Karman pl...In this study, forced nonlinear vibration of a circular micro-plate under two-sided electrostatic, two-sided Casimir and external harmonic forces is investigated analytically. For this purpose, at first, von Karman plate theory including geometrical nonlinearity is used to obtain the deflection of the micro-plate. Galerkin decomposition method is then employed, and nonlinear ordinary differential equations (ODEs) of motion are determined. A harmonic balance method (HBM) is applied to equations and analytical relation for nonlineaT frequency response (F-R) curves are derived for two categories (including and neglecting Casimir force) separately. The analytical results for three cases:(1) semi-linear vibration;(2) weakly nonlinear vibration;(3) highly non linear vibration, are validated by comparing with the numerical solutio ns. After validation, the effects of the voltage and Casimir force on the natural frequency of two-sided capacitor system are investigated. It is shown that by assuming Casimir force in small gap distances, reduction of the natural frequency is considerable. The influences of the applied voltage, damping, micro-plate thickness and Casimir force on the frequency response curves have been presented too. The results of this study can be useful for modeling circular parallel-plates in nano /microelectromechanical transducers such as microphones and pressure sensors.展开更多
This paper presents a rotating parallel-plate capacitor;one of the plates is assumed to turn about the common vertical axis through the centers of the square plates. Viewing the problem from a purely geometrical point...This paper presents a rotating parallel-plate capacitor;one of the plates is assumed to turn about the common vertical axis through the centers of the square plates. Viewing the problem from a purely geometrical point of view, we evaluate the overlapping area of the plates as a function of the rotated angle. We then envision the rotation as being a mechanical continuous process. We consider two different rotation mechanisms: a uniform rotation with a constant angular velocity and, a rotation with a constant angular acceleration—we then evaluate the overlapping area as a continuous function of time. From the electrostatic point of view, the time-dependent overlapping area of the plates implies a time-dependent capacitor. Such a variable, a time-dependent capacitor has never been reported in literature. We insert this capacitor into a series with a resistor, forming a RC circuit. We analyze the characteristics of charging and discharging scenarios on two different parallel tracks. On the first track we drive the circuit with a DC power sup-ply. We study the implications of the rotation modes. We compare the response of each case to the corresponding tradi-tional constant capacitor of an equivalent RC circuit;the quantified results are intuitively just. On the second track, we drive the circuit with an AC source. Similar to the analysis of the first track, we generate the relevant electrical characteristics. In the latter case, we also analyze the sensitivity of the response of the circuit with respect to the fre-quency of the source. The analyses of the circuits encounter nontrivial differential equations. We utilize Mathematica [1] to solve these equations.展开更多
文摘In this study, forced nonlinear vibration of a circular micro-plate under two-sided electrostatic, two-sided Casimir and external harmonic forces is investigated analytically. For this purpose, at first, von Karman plate theory including geometrical nonlinearity is used to obtain the deflection of the micro-plate. Galerkin decomposition method is then employed, and nonlinear ordinary differential equations (ODEs) of motion are determined. A harmonic balance method (HBM) is applied to equations and analytical relation for nonlineaT frequency response (F-R) curves are derived for two categories (including and neglecting Casimir force) separately. The analytical results for three cases:(1) semi-linear vibration;(2) weakly nonlinear vibration;(3) highly non linear vibration, are validated by comparing with the numerical solutio ns. After validation, the effects of the voltage and Casimir force on the natural frequency of two-sided capacitor system are investigated. It is shown that by assuming Casimir force in small gap distances, reduction of the natural frequency is considerable. The influences of the applied voltage, damping, micro-plate thickness and Casimir force on the frequency response curves have been presented too. The results of this study can be useful for modeling circular parallel-plates in nano /microelectromechanical transducers such as microphones and pressure sensors.
文摘This paper presents a rotating parallel-plate capacitor;one of the plates is assumed to turn about the common vertical axis through the centers of the square plates. Viewing the problem from a purely geometrical point of view, we evaluate the overlapping area of the plates as a function of the rotated angle. We then envision the rotation as being a mechanical continuous process. We consider two different rotation mechanisms: a uniform rotation with a constant angular velocity and, a rotation with a constant angular acceleration—we then evaluate the overlapping area as a continuous function of time. From the electrostatic point of view, the time-dependent overlapping area of the plates implies a time-dependent capacitor. Such a variable, a time-dependent capacitor has never been reported in literature. We insert this capacitor into a series with a resistor, forming a RC circuit. We analyze the characteristics of charging and discharging scenarios on two different parallel tracks. On the first track we drive the circuit with a DC power sup-ply. We study the implications of the rotation modes. We compare the response of each case to the corresponding tradi-tional constant capacitor of an equivalent RC circuit;the quantified results are intuitively just. On the second track, we drive the circuit with an AC source. Similar to the analysis of the first track, we generate the relevant electrical characteristics. In the latter case, we also analyze the sensitivity of the response of the circuit with respect to the fre-quency of the source. The analyses of the circuits encounter nontrivial differential equations. We utilize Mathematica [1] to solve these equations.
