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Effect of Oxygen Concentration and Annealing Theatment on the Optical Properties of the Transparent Conductive CdIn_2O_4 Thin Films 被引量:4
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作者 Bin WU Changyong CHEN and Shibin ZHANG(Physics Dept., Lanzhou University, Lanzhou 730000, China)Wanlu WANG and Kejun LIAO(Applied Physics Dept., Chongqing University, Chongqing 400044, China) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1998年第2期161-166,共6页
Transparent conductive cadmium indium oxide films (CdIn2O4) were prepared by r.f. reactive sputtering from Cd-In alloy targets under an Ar-O2 atmosphere. Electrical conductivity of the order of 105Ω-1.m-1 and the opt... Transparent conductive cadmium indium oxide films (CdIn2O4) were prepared by r.f. reactive sputtering from Cd-In alloy targets under an Ar-O2 atmosphere. Electrical conductivity of the order of 105Ω-1.m-1 and the optical transmission as high as 94% are easily attained by postdeposition annealing treatment. The effects of oxygen concentration in the reactive gas mixture and post-deposition annealing treatment on the optical transmittance as well as optical parameters, such as refractive index (n), extinction coefficient (k), real part (ε') and imaginary part (ε') of the dielectric constant, were studied in the visible and near-infrared region. The highfrequency dielectric constant ε∞ the plasma frequency ωP, and the conduction band effective mass mc of different samples were also investigated 展开更多
关键词 Thin Effect of Oxygen Concentration and annealing Theatment on the optical Properties of the Transparent Conductive CdIn2O4 Thin Films
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Effect of Annealing on the Morphology,Structure and Photoelectric Properties of AZO/Pt/FTO Trilayer Films
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作者 Li-Jing Huang Nai-Fei Ren +1 位作者 Bao-Jia Li Ming Zhou 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第3期281-288,共8页
Aluminum-doped zinc oxide/platinum/fluorine-doped tin oxide(AZO/Pt/FTO) trilayer films were prepared by sputtering 5-nm-thick Pt layers and 150-nm-thick AZO layers in sequence on commercial FTO glass.The effects of ... Aluminum-doped zinc oxide/platinum/fluorine-doped tin oxide(AZO/Pt/FTO) trilayer films were prepared by sputtering 5-nm-thick Pt layers and 150-nm-thick AZO layers in sequence on commercial FTO glass.The effects of onestep annealing and layer-by-layer annealing on the morphology,structure and photoelectric properties of the AZO/Pt/FTO trilayer films were comparatively analyzed.It is found that the both annealing approaches increased the grain size and improved the crystallinity of the films,leading to enhancement in transmittance and conductivity.However,layer-by-layer annealing led to the formation of quasi-continuous or continuous AZO layers,different from the sparsely distributed AZO particles brought about by one-step annealing,resulting in excellent optical and electrical properties.Specifically,after layer-by-layer annealing at 400 ℃ for both Pt and AZO layers,the AZO/Pt/FTO trilayer film showed an increase in average transmittance from 71.3% to 85.3% and a decrease in sheet resistance from 7.5 to 5.6 Ω/□,leading to the highest figure of merit of 3.64 × 10^(-2) Ω^(-1). 展开更多
关键词 annealing Magnetron sputtering optical property Electrical property AZO/Pt/FTO trilayer film
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Electrical and optical property of annealed Te-doped GaSb
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作者 Jie Su Tong Liu +6 位作者 Jingming Liu Jun Yang Guiying Shen Yongbiao Bai Zhiyuan Dong Fangfang Wang Youwen Zhao 《Journal of Semiconductors》 EI CAS CSCD 2017年第4期18-22,共5页
GaSb is the most suitable substrate in the epitaxial growth of mixed semiconductors of GaSb system.In this work,Te-doped GaSb bulk crystals with different doping concentration have been annealed at 550℃ for100 h in a... GaSb is the most suitable substrate in the epitaxial growth of mixed semiconductors of GaSb system.In this work,Te-doped GaSb bulk crystals with different doping concentration have been annealed at 550℃ for100 h in ambient antimony.The annealed samples have been studied by Hall effect measurement,infrared(IR)optical transmission,Glow discharge mass spectroscopy(GDMS) and photoluminescence(PL) spectroscopy.After annealing,Te-doped GaSb samples exhibit a decrease of carrier concentration and increase of mobility,along with an improvement of below gap IR transmission.Native acceptor related electrical compensation analysis suggests a formation of donor defect with deeper energy level.The mechanism of the variation of the defect and its influence on the material properties are discussed. 展开更多
关键词 Te-doped GaSb annealing Hall effect measurement photoluminescence spectroscopy IR optical transmission
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