Research on Large Depth Diameter Ratio Ultra-precision Aspheric Grinding System

In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.

Wheel Setting Error Modeling and Compensation for Arc Envelope Grinding of Large-Aperture Aspherical Optics

Precision grinding is a key process for realizing the use of large-aperture aspherical optical elements in laser nuclear fusion devices,large-aperture astronomical telescopes,and high-resolution space cameras.In this study,the arc envelope grinding process of large-aperture aspherical optics is investigated using a CM1500 precision grinding machine with a maximum machinable diameter ofΦ1500 mm.The form error of the aspherical workpiece induced by wheel setting errors is analytically modeled for both parallel and cross grinding.Results show that the form error is more sensitive to the wheel setting error along the feed direction than that along the lateral direction.It is a bilinear function of the feed-direction wheel setting error and the distance to the optical axis.Based on the error function above,a method to determine the wheel setting error is proposed.Subsequently,grinding tests are performed with the wheels aligned accurately.Using a newly proposed partial error compensation method with an appropriate compensation factor,a form error of 3.4μm peak-to-valley(PV)for aΦ400 mm elliptical K9 glass surface is achieved.

Sensor-Based Inspection of the Formation Accuracy in Ultra-Precision Grinding （UPG） of Aspheric Surface Considering the Chatter Vibration

This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progress, the grinding speed of grinding wheel and spindle, and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy. In the meantime, a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments. The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters. It is found that the accuracy of aspheric surface can be less than 4 μm when the grinding speed is 1400r/min and the wheel speed is 100 r/min with the oil pressure being 1.1 MPa.