Magnetic induction-free abrasive wire sawing(MIFAWS)is a method that combines magnetic fields with traditional free abrasive wire sawing technologies.Magnetic abrasive particles(MAPs)are attracted on a magnetized wire...Magnetic induction-free abrasive wire sawing(MIFAWS)is a method that combines magnetic fields with traditional free abrasive wire sawing technologies.Magnetic abrasive particles(MAPs)are attracted on a magnetized wire,thus leading to an increase in their number into the cutting zone.The number of instantaneous-effective abrasive particles(IEAPs)adsorbed on the wire surface has a great influence on the cutting efficiency of the saw wire.In this study,a mathematic model of the movement of the MAP is presented,and the factors influencing the IEAPs number,including slurry-supply speed and slurry dynamic viscosity,are investigated both by means of simulation analysis and experiments.The results indicate that the number of IEAPs decreases with an increase in the slurry supply speed.The cutting efficiency increases gradually with the increase of slurry supply speed,but the growth rate of wire saw cutting efficiency slows down when the slurry supply speed exceeds a given threshold.The number of IEAPs adsorbed by saw wire increases with a decrease in the dynamic viscosity of the cutting fluid,while the cutting efficiency first increases and then decreases.The cutting efficiency attains its highest value when the dynamic viscosity of the cutting fluid is 0.0047 Pa⋅s.The experimental results agree with the simulation results,and provide some guidance for the practical application of the MIFAWS process.展开更多
The size effect of impact abrasive particles on wear and surface hardening behavior of high-manganese steel was studied.Impact wear tests were carried out on MLD-10 tester with abrasive particle sizes of 6.0–0.75 mm,...The size effect of impact abrasive particles on wear and surface hardening behavior of high-manganese steel was studied.Impact wear tests were carried out on MLD-10 tester with abrasive particle sizes of 6.0–0.75 mm,respectively.The results showed that the impact wear behavior and surface hardening mechanism of high-manganese steel were affected by the size of abrasive particles.A critical size of abrasive particle might exhibit to distinguish the impact wear behavior.When the abrasive particle size was larger than 0.75 mm,the wear mass loss generally showed a decreasing trend with the decrease of the abrasive particle size.Dislocation strengthening and mechanical twinning contributed to the good work hardening behavior.However,effective surface hardening layer could not be formed for sample tested with particle size of 0.75 mm and the wear mass loss was the highest among all the conditions.The weak hardening effect led to the sharp increase of the wear mass loss.Press-in abrasives could be observed on the wear surface when the abrasive particle size was larger than 0.75 mm.The press-in abrasives were peeled off from the wear surface and broken,leaving deep grooves and peeling pits.Material exchange with the sample would occur with the flow of abrasives.A large area of furrow was formed on the wear surface.For particle size of 0.75 mm,aggregated abrasives formed a dynamic buffer layer on the surface and the stress distribution was more even.The formation of buffer layer would lower the effect of the impact load and the work hardening effect could not be fully activated.The mutual extrusion among the abrasives,friction wheel and sample caused plastic deformation of the worn surface during impact test.The present study would help guiding to select the application field of high-manganese steel more precisely.展开更多
The cleaning of copper interconnect chemical mechanical polishing(CMP) is a key process in integrated circuits(ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is consid...The cleaning of copper interconnect chemical mechanical polishing(CMP) is a key process in integrated circuits(ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is considered as the main particle contamination. Abrasive particle residuals can cause device failure which need to be removed efficiently. In this paper, a type of CMP cleaner was used for particle removal using a cleaning solution consisting of FA/O Ⅱ chelating agent and FA/O Ⅰ surfactant. By varying the parameters of brush rotation speed, brush gap,and de-ionized water(DIW) flow rate,a series of experiments were performed to determine the best cleaning results. Atomic force microscope(AFM) measurement was used to characterise the surface morphology of the copper surface and the removal of abrasive particles. A scanning electron microscope(SEM) with EDX was used to observe and analyze the particles shape and elements. The optima parameters of CMP cleaner were obtained. Under those conditions, the abrasive silica particles were removed effectively.展开更多
Abrasive wear is a common failure phenomenon that often limits the service life of sealing elements. Evaluation and comparison of the abrasion resistance of polytetrafluoroethylene (PTFE) were conducted using Al2O3par...Abrasive wear is a common failure phenomenon that often limits the service life of sealing elements. Evaluation and comparison of the abrasion resistance of polytetrafluoroethylene (PTFE) were conducted using Al2O3particleswithsizesintherange5to200 μmonapin-on-flattribo-testerunderdryreciprocatingsliding conditions at room temperature. Based on the examined worn surface characteristics of both PTFE and 316L stainless steel (as a counterpart) and the analyzed coefficient of friction (COF) evolutions, the wear mechanism and particle size effect have been explored in detail. The results demonstrate that the abrasive size is the main contributing factor, which can drastically impact the wear mechanism and tribological properties of tribo-pairs. The COF exhibits different evolution characteristics (trends) for different abrasive sizes. For moderate particle sizes, the COF trends become more complicated and the most evident wear of the metallic counterpart is evident. The activity behaviors of abrasives are dominated by the particle size. Particles can becomes embedded in one of the tribo-pair materials to plough-cut the counterpart, thus causing two-body abrasive wear. The abrasives can also behave as free rolling bodies, which play the role of third body to realize three-body "PTFE-abrasive-316L"abrasion. When abrasives are involved in the wear process, both the wear rate and COF of the metallic counterpart increase, but the material removal rate of the PTFE is reduced. The results obtained can offer guidelines regarding the design and protection of seals.展开更多
基金This work was funded by the financial support of the NBPT 2021 Research Institute Special Project(NZ21JG004)General Scientific Research Project of Zhejiang Department of Education No.Y202147367.
文摘Magnetic induction-free abrasive wire sawing(MIFAWS)is a method that combines magnetic fields with traditional free abrasive wire sawing technologies.Magnetic abrasive particles(MAPs)are attracted on a magnetized wire,thus leading to an increase in their number into the cutting zone.The number of instantaneous-effective abrasive particles(IEAPs)adsorbed on the wire surface has a great influence on the cutting efficiency of the saw wire.In this study,a mathematic model of the movement of the MAP is presented,and the factors influencing the IEAPs number,including slurry-supply speed and slurry dynamic viscosity,are investigated both by means of simulation analysis and experiments.The results indicate that the number of IEAPs decreases with an increase in the slurry supply speed.The cutting efficiency increases gradually with the increase of slurry supply speed,but the growth rate of wire saw cutting efficiency slows down when the slurry supply speed exceeds a given threshold.The number of IEAPs adsorbed by saw wire increases with a decrease in the dynamic viscosity of the cutting fluid,while the cutting efficiency first increases and then decreases.The cutting efficiency attains its highest value when the dynamic viscosity of the cutting fluid is 0.0047 Pa⋅s.The experimental results agree with the simulation results,and provide some guidance for the practical application of the MIFAWS process.
基金The authors are grateful to the support from the Youth Teacher International Exchange&Growth Program(No.QNXM20220024)and the Jianlong Steel Corporation.
文摘The size effect of impact abrasive particles on wear and surface hardening behavior of high-manganese steel was studied.Impact wear tests were carried out on MLD-10 tester with abrasive particle sizes of 6.0–0.75 mm,respectively.The results showed that the impact wear behavior and surface hardening mechanism of high-manganese steel were affected by the size of abrasive particles.A critical size of abrasive particle might exhibit to distinguish the impact wear behavior.When the abrasive particle size was larger than 0.75 mm,the wear mass loss generally showed a decreasing trend with the decrease of the abrasive particle size.Dislocation strengthening and mechanical twinning contributed to the good work hardening behavior.However,effective surface hardening layer could not be formed for sample tested with particle size of 0.75 mm and the wear mass loss was the highest among all the conditions.The weak hardening effect led to the sharp increase of the wear mass loss.Press-in abrasives could be observed on the wear surface when the abrasive particle size was larger than 0.75 mm.The press-in abrasives were peeled off from the wear surface and broken,leaving deep grooves and peeling pits.Material exchange with the sample would occur with the flow of abrasives.A large area of furrow was formed on the wear surface.For particle size of 0.75 mm,aggregated abrasives formed a dynamic buffer layer on the surface and the stress distribution was more even.The formation of buffer layer would lower the effect of the impact load and the work hardening effect could not be fully activated.The mutual extrusion among the abrasives,friction wheel and sample caused plastic deformation of the worn surface during impact test.The present study would help guiding to select the application field of high-manganese steel more precisely.
基金Project supported by the Major National Science and Technology Special Projects(No.2016ZX02301003-004-007)the Natural Science Foundation of China(No.61704046)+1 种基金the Scientific Innovation Grant for Excellent Young Scientists of Hebei University of Technology(No.2015007)the Hebei Natural Science Foundation Project(No.F2018202174)
文摘The cleaning of copper interconnect chemical mechanical polishing(CMP) is a key process in integrated circuits(ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is considered as the main particle contamination. Abrasive particle residuals can cause device failure which need to be removed efficiently. In this paper, a type of CMP cleaner was used for particle removal using a cleaning solution consisting of FA/O Ⅱ chelating agent and FA/O Ⅰ surfactant. By varying the parameters of brush rotation speed, brush gap,and de-ionized water(DIW) flow rate,a series of experiments were performed to determine the best cleaning results. Atomic force microscope(AFM) measurement was used to characterise the surface morphology of the copper surface and the removal of abrasive particles. A scanning electron microscope(SEM) with EDX was used to observe and analyze the particles shape and elements. The optima parameters of CMP cleaner were obtained. Under those conditions, the abrasive silica particles were removed effectively.
基金This work was supported by the National Natural Science Foundation of China(Nos.51775503 and 51875343)the Natural Science Foundation of Zhejiang Province(No.LY17E050020)+1 种基金the China Postdoctoral ScienceFoundation(Nos.2017M620152and 2018T110392)Jiangxi Natural Science Foundation of China(20171BCD40009).
文摘Abrasive wear is a common failure phenomenon that often limits the service life of sealing elements. Evaluation and comparison of the abrasion resistance of polytetrafluoroethylene (PTFE) were conducted using Al2O3particleswithsizesintherange5to200 μmonapin-on-flattribo-testerunderdryreciprocatingsliding conditions at room temperature. Based on the examined worn surface characteristics of both PTFE and 316L stainless steel (as a counterpart) and the analyzed coefficient of friction (COF) evolutions, the wear mechanism and particle size effect have been explored in detail. The results demonstrate that the abrasive size is the main contributing factor, which can drastically impact the wear mechanism and tribological properties of tribo-pairs. The COF exhibits different evolution characteristics (trends) for different abrasive sizes. For moderate particle sizes, the COF trends become more complicated and the most evident wear of the metallic counterpart is evident. The activity behaviors of abrasives are dominated by the particle size. Particles can becomes embedded in one of the tribo-pair materials to plough-cut the counterpart, thus causing two-body abrasive wear. The abrasives can also behave as free rolling bodies, which play the role of third body to realize three-body "PTFE-abrasive-316L"abrasion. When abrasives are involved in the wear process, both the wear rate and COF of the metallic counterpart increase, but the material removal rate of the PTFE is reduced. The results obtained can offer guidelines regarding the design and protection of seals.