The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment resul...The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment result show that the phase shift offset should be π when the algorithm is used, and this algorithm has gotten better result than the original 4 sample algorithm.展开更多
In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship ...In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately prOPoOrtional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2 and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.展开更多
文摘The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment result show that the phase shift offset should be π when the algorithm is used, and this algorithm has gotten better result than the original 4 sample algorithm.
文摘In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately prOPoOrtional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2 and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.
