介绍以高能紫外激光为光源的、研究 MIS 结构电荷特性的光Ⅰ-Ⅴ法。简述了该法实验原理、实验装置和测试方法;给出了由传统热氧化的 SiO_2介质膜和新型快速热氮化的 SiOxNy 膜(缩写为 RTNF)组成的 MIS 结构的光Ⅰ-Ⅴ实验数据、体电荷密...介绍以高能紫外激光为光源的、研究 MIS 结构电荷特性的光Ⅰ-Ⅴ法。简述了该法实验原理、实验装置和测试方法;给出了由传统热氧化的 SiO_2介质膜和新型快速热氮化的 SiOxNy 膜(缩写为 RTNF)组成的 MIS 结构的光Ⅰ-Ⅴ实验数据、体电荷密度和平均分布中心的实验结果。并就该法优缺点、应用前景及改进途径作了讨论.展开更多
A novel empirical large signal direct current (DC)Ⅰ-Ⅴ model is presented considering the high saturation voltage, high pinch-off voltage, and wide operational range of drain voltage for 4H-SiC MESFETs. A compariso...A novel empirical large signal direct current (DC)Ⅰ-Ⅴ model is presented considering the high saturation voltage, high pinch-off voltage, and wide operational range of drain voltage for 4H-SiC MESFETs. A comparison of the presented model with Statz, Materka, Curtice-Cubic, and recently reported 4H-SiC MESFET large signal Ⅰ-Ⅴ models is made through the Levenberg-Marquardt method for fitting in nonlinear regression. The results show that the new model has the advantages of high accuracy, easily making initial value and robustness over other models. The more accurate results are obtained by the improved channel modulation and saturation voltage coefficient when the device is operated in the sub-threshold and near pinch-off region. In addition the new model can be implemented to CAD tools directly, using for design of 4H-SiC MESFET based RF&MW circuit, particularly MMIC (microwave monolithic integrate circuit).展开更多
文摘介绍以高能紫外激光为光源的、研究 MIS 结构电荷特性的光Ⅰ-Ⅴ法。简述了该法实验原理、实验装置和测试方法;给出了由传统热氧化的 SiO_2介质膜和新型快速热氮化的 SiOxNy 膜(缩写为 RTNF)组成的 MIS 结构的光Ⅰ-Ⅴ实验数据、体电荷密度和平均分布中心的实验结果。并就该法优缺点、应用前景及改进途径作了讨论.
基金the National Defense Basic Research Program of China(Grant No.51327010101)
文摘A novel empirical large signal direct current (DC)Ⅰ-Ⅴ model is presented considering the high saturation voltage, high pinch-off voltage, and wide operational range of drain voltage for 4H-SiC MESFETs. A comparison of the presented model with Statz, Materka, Curtice-Cubic, and recently reported 4H-SiC MESFET large signal Ⅰ-Ⅴ models is made through the Levenberg-Marquardt method for fitting in nonlinear regression. The results show that the new model has the advantages of high accuracy, easily making initial value and robustness over other models. The more accurate results are obtained by the improved channel modulation and saturation voltage coefficient when the device is operated in the sub-threshold and near pinch-off region. In addition the new model can be implemented to CAD tools directly, using for design of 4H-SiC MESFET based RF&MW circuit, particularly MMIC (microwave monolithic integrate circuit).