Photoluminescence of silicone oil treated by fluorocarbon plasma

We investigated photoluminescence characteristics of silicone oils treated by C2F6 and CHF3 plasma. The silicone oil treated by the C2F6 plasma emitted a white light mainly composed of 415 nm, 469 nm, and 554 nm emissions, while that treated by the CHF3 plasma emitted a pink light （415 nm）. Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the photoluminescence was correlated with the Si-C bond, the carbon-related defects and the oxygen vacancies. It was suggested that the light emitting at 554 nm was related to the Si-C bond and the carbon-related defects, while the pink emission at 415 nm was related to the oxygen vacancies.

O_2流量对O_2/C_2F_6等离子体处理的硅油光致发光性能影响

研究了O2/C2F6等离子体处理的硅油光致发光性能.发光谱覆盖了250～600 nm的光谱范围,由290nm、410 nm、468 nm、481 nm、491 nm和552 nm的6个发光峰组成.O2流量的增大使290 nm、410 nm、552 nm的发光峰增强,468 nm的发光峰强度减弱.光致发光性能与等离子体作用导致的氧缺乏中心、C悬挂键、Si悬挂键的形成有关.