Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO₃) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software

Interest in energy harvesters has grown rapidly over the last decade. The cantilever shaped piezoelectric energy harvesting beam is one of the most employed designs, due to its simplicity and flexibility for further performance enhancement. The research effort in the MEMS Piezoelectric vibration energy harvester designed using three types of cantilever materials, Lithium Niobate (LiNbO3), Aluminum Nitride (AlN) and Zinc Oxide (ZnO) with different substrate materials: aluminum, steel and silicon using COMSOL Multiphysics package were designed and analyzed. Voltage, mechanical power and electrical power versus frequency for different cantilever materials and substrates were modeled and simulated using Finite element method (FEM). The resonant frequencies of the LiNbO3/Al, AlN/Al and ZnO/Al systems were found to be 187.5 Hz, 279.5 Hz and 173.5 Hz, respectively. We found that ZnO/Al system yields optimum voltage and electrical power values of 8.2 V and 2.8 mW, respectively. For ZnO cantilever on aluminum, steel and silicon substrates, we found the resonant frequencies to be 173.5 Hz, 170 Hz and 175 Hz, respectively. Interestingly, ZnO/steel yields optimal voltage and electrical power values of 9.83 V and 4.02 mW, respectively. Furthermore, all systems were studied at different differentiate frequencies. We found that voltage and electrical power have increased as the acceleration has increased.

Solar cell-based hybrid energy harvesters towards sustainability

Energy harvesting plays a crucial role in modern society.In the past years,solar energy,owing to its renewable,green,and infinite attributes,has attracted increasing attention across a broad range of applications from small-scale wearable electronics to large-scale energy powering.However,the utility of solar cells in providing a stable power supply for vari-ous electrical appliances in practical applications is restricted by weather conditions.To address this issue,researchers have made many efforts to integrate solar cells with other types of energy harvesters,thus developing hybrid energy har-vesters(HEHs),which can harvest energy from the ambient environment via different working mechanisms.In this re-view,four categories of energy harvesters including solar cells,triboelectric nanogenerators(TENGs),piezoelectric nanogenerators(PENGs),and thermoelectric generators(TEGs)are introduced.In addition,we systematically summar-ize the recent progress in solar cell-based hybrid energy harvesters(SCHEHs)with a focus on their structure designs and the corresponding applications.Three hybridization designs through unique combinations of TENG,PENG,and TEG with solar cells are elaborated in detail.Finally,the main challenges and perspectives for the future development of SCHEHs are discussed.

Modeling and power performance improvement of a piezoelectric energy harvester for low-frequency vibration environment

A novel oscillator structure, bimorph piezoelectric cantilever beam with two-stepped variable thicknesses,is proposed to improve the energy harvestingperformance of the vibration energy harvester (VEH) under low-frequency vibration environment. Firstly, the piezoelectric cantilever is segmented to obtain the energy functions based on the Euler-Bernoulli beam assumptions, and the Galerkin approach is utilized to discretize the energy functions. Applying boundary conditions and continuity conditions enforced at separation locations, the electromechanical coupled governing equations for the piezoelectric energy harvesterareintroduced by means of the Lagrange equations. Furthermore, the steady state response expressions are obtained for harmonic base excitations at arbitrary frequencies. Numerical results are computed and the effects ofthe lengths-ratio, thicknesses-ratio,end thicknessand load resistance on the output voltage, harvested power and power density are discussed. Moreover, to verify thecorrectness ofanalytical results, the finite element method (FEM)simulationis also conducted to analyze performance of the proposed VEH, where a good agreement is presented. All the results show thatthe present oscillator structureis moreefficient than the conventional uniform beam structure, specifically, for vibration energy harvesting in low-frequency environment.

COUPLED ANALYSIS FOR THE HARVESTING STRUCTURE AND THE MODULATING CIRCUIT IN A PIEZOELECTRIC BIMORPH ENERGY HARVESTER

The authors analyze a piezoelectric energy harvester as an electro-mechanically coupled system. The energy harvester consists of a piezoelectric bimorph with a concentrated mass attached at one end, called the harvesting structure, an electric circuit for energy storage, and a rectifier that converts the AC output of the harvesting structure into a DC input for the storage circuit. The piezoelectric bimorph is assumed to be driven into flexural vibration by an ambient acoustic source to convert the mechanical energies into electric energies. The analysis indicates that the performance of this harvester, measured by the power density, is characterized by three important non-dimensional parameters, i.e., the non-dimensional inductance of the storage circuit, the non-dimensional aspect ratio （length/thickness） and the non-dimensional end mass of the harvesting structure. The numerical results show that： （1） the power density can be optimized by varying the non-dimensional inductance for each fixed non-dimensional aspect ratio with a fixed non-dimensional end mass; and （2） for a fixed non-dimensional inductance, the power density is maximized if the non-dimensional aspect ratio and the non-dimensional end mass are so chosen that the harvesting structure, consisting of both the piezoelectric bimorph and the end mass attached, resonates at the frequency of the ambient acoustic source.

Low-frequency and broadband vibration energy harvester driven by mechanical impact based on layer-separated piezoelectric beam

Vibration energy harvesting is to transform the ambient mechanical energy to electricity. How to reduce the resonance frequency and improve the conversion efficiency is very important. In this paper, a layer-separated piezoelectric cantilever beam is proposed for the vibration energy harvester(VEH) for low-frequency and wide-bandwidth operation, which can transform the mechanical impact energy to electric energy. First,the electromechanical coupling equation is obtained by the Euler-Bernoulli beam theory.Based on the average method, the approximate analytical solution is derived and the voltage response is obtained. Furthermore, the physical prototype is fabricated, and the vibration experiment is conducted to validate the theoretical principle. The experimental results show that the maximum power of 0.445 μW of the layer-separated VEH is about3.11 times higher than that of the non-impact harvester when the excitation acceleration is 0.2 g. The operating frequency bandwidth can be widened by increasing the stiffness of the fundamental layer and decreasing the gap distance of the system. But the increasing of operating frequency bandwidth comes at the cost of reducing peak voltage. The theoretical simulation and the experimental results demonstrate good agreement which indicates that the proposed impact-driving VEH device has advantages for low-frequency and wide-bandwidth. The high performance provides great prospect to scavenge the vibration energy in environment.

Modeling and analysis of piezoelectric beam with periodically variable cross-sections for vibration energy harvesting

A bimorph piezoelectric beam with periodically variable cross-sections is used for the vibration energy harvesting. The effects of two geometrical parameters on the first band gap of this periodic beam are investigated by the generalized differential quadrature rule （GDQR） method. The GDQR method is also used to calculate the forced vibration response of the beam and voltage of each piezoelectric layer when the beam is subject to a sinusoidal base excitation. Results obtained from the analytical method are compared with those obtained from the finite element simulation with ANSYS, and good agreement is found. The voltage output of this periodic beam over its first band gap is calculated and compared with the voltage output of the uniform piezoelectric beam. It is concluded that this periodic beam has three advantages over the uniform piezoelectric beam, i.e., generating more voltage outputs over a wide frequency range, absorbing vibration, and being less weight.

Energy harvester array using piezoelectric circular diaphragm for rail vibration

Generating electric energy from mechanical vibration using a piezoelectric circular membrane array is presented in this paper.The electrical characteristics of the functional array consisted of three plates with varies tip masses are examined under dynamic conditions.With an optimal load resistor of 11 k,an output power of 21.4 m W was generated from the array in parallel connection at 150 Hz under a pre-stress of 0.8 N and a vibration acceleration of9.8 m/s2.Moreover,the broadband energy harvesting using this array still can be realized with different tip masses.Three obvious output power peaks can be obtained in a frequency spectra of 110 Hz to 260 Hz.The results show that using a piezoelectric circular diaphragm array can increase significantly the output of energy compared with the use of a single plate.And by optimizing combination of tip masses with piezoelectric elements in array,the frequency range can be tuned to meet the broadband vibration.This array may possibly be exploited to design the energy harvesting for practical applications such as future high speed rail.

Analysis on Output Power for Multi-direction Piezoelectric Vibration Energy Harvester

To predict the performance of multi-direction piezoelectric vibration energy harvester,an equation for calculating its output power is obtained based on elastic mechanics theory and piezoelectricity theory.Experiments are performed to verify theoretical analysis.When the excitation direction is along Y direction,a maximal output power about 0.139 mW can be harvested at a resistive load of 65kΩ and an excitation frequency of 136 Hz.Theoretical analysis agrees well with experimental results.Furthermore,the performance of multi-direction vibration energy harvester is experimentally tested.The results show that the multi-direction vibration energy harvester can harvest perfect energy as the excitation direction changes in XY plane,YZ plane,XZ plane and body diagonal plane of the harvester.

Harvesting Energy from Asphalt Pavement by Piezoelectric Generator

This paper presents the way to harvest mechanical energy from asphalt pavement by piezoelectric generator. Results show that the potential energy in asphalt pavement can be up to 150 kW/h per lane per kilometre. Part of the mechanical energy can be harvested by piezoelectric transducers. The performance of seven typical transducers is examined through finite element analysis. Results show that PZT piles and multilayer, cymbal and bridge can work in asphalt pavement environment. PZT piles and multilayer have higher energy converting rate, However, the total harvested energy is small if these transducers are embedded directly in pavement. A prototype pavement generator is developed using PZT piles to increase the harvested energy. The generator can harvest more than 50 kW/h energy from the pavement under heavy traffic. 8-16 PZT piles are recommended for one generator. Round shape is suggested for the PZT piles to reduce the concentration of stress. And multilayer structure is recommended for PZT piles to decrease the electric potential of generator. The generator can be extended as sensor in the asphalt pavement, which can be used to monitor the traffic, pavement stress and temperature.

Complete Charging for Piezoelectric Energy Harvesting System

Under an in-phase assumption, the complete charging for an energy harvesting system is studied, which consists of a piezoelectric energy harvester(PEH), a bridge rectifier, a filter capacitor, a switch, a controller and a rechargeable battery. For the transient charging, the results indicate that the voltage across the filter capacitor increases as the charging proceeds, which is consistent with that reported in the literature. However, a new finding shows that the charging rate and energy harvesting efficiency decrease over time after their respective peak values are acquired.For the steady-state charging, the results reveal that the energy harvesting efficiency can be adjusted by altering the critical charging voltage that controls the transition of the system. The optimal energy harvesting efficiency is limited by the optimal efficiency of the transient charging. Finally, the relationship between the critical charging voltage and the equivalent resistance of the controller and rechargeable battery is established explicitly.

Piezoelectric energy harvesting from morphing wing motions for micro air vehicles

Wing flapping and morphing can be very beneficial to managing the weight of micro air vehicles through coupling the aerodynamic forces with stability and control. In this letter, harvesting energy from the wing morphing is studied to power cameras, sensors, or communication devices of micro air vehicles and to aid in the management of their power. The aerodynamic loads on flapping wings are simulated using a three-dimensional unsteady vortex lattice method. Active wing shape morphing is considered to enhance the performance of the flapping motion. A gradient-based optimization algorithm is used to pinpoint the optimal kinematics maximizing the propellent efficiency. To benefit from the wing deformation, we place piezoelectric layers near the wing roots. Gauss law is used to estimate the electrical harvested power. We demonstrate that enough power can be generated to operate a camera. Numerical analysis shows the feasibility of exploiting wing morphing to harvest energy and improving the design and performance of micro air vehicles.

Design of piezoelectric energy harvesting devices subjected to broadband random vibrations by applying topology optimization

Converting ambient vibration energy into electrical energy by using piezoelectric energy harvester has attracted a lot of interest in the past few years.In this paper,a topology optimization based method is applied to simultaneously determine the optimal layout of the piezoelectric energy harvesting devices and the optimal position of the mass loading.The objective function is to maximize the energy harvesting performance over a range of vibration frequencies.Pseudo excitation method （PEM） is adopted to analyze structural stationary random responses,and sensitivity analysis is then performed by using the adjoint method.Numerical examples are presented to demonstrate the validity of the proposed approach.

A review of nonlinear piezoelectric energy harvesting interface circuits in discrete components

Piezoelectric energy harvesting is considered as an ideal power resource for low-power consumption gadgets in vibrational environments.The energy extraction efficiency depends highly on the interface circuit,and should be highly improved to meet the power requirements.The nonlinear interface circuits in discrete components have been extensively explored and developed with the advantages of easy implementation,stable operation,high efficiency,and low cost.This paper reviews the state-of-the-art progress of nonlinear piezoelectric energy harvesting interface circuits in discrete components.First,the working principles and the advantages/disadvantages of four classical interface circuits are described.Then,the improved circuits based on the four typical circuits and other types of circuits are introduced in detail,and the advantages/disadvantages,output power,efficiency,energy consumption,and practicability of these circuits are analyzed.Finally,the future development trends of nonlinear piezoelectric energy harvesting circuits,e.g.,self-powered extraction,low-power consumption,and broadband characteristic,are predicted.

Design and dynamic analysis of integrated architecture for vibration energy harvesting including piezoelectric frame and mechanical amplifier

Vibration energy harvesters(VEHs) can transform ambient vibration energy to electricity and have been widely investigated as promising self-powered devices for wireless sensor networks, wearable sensors, and applications of a micro-electro-mechanical system(MEMS). However, the ambient vibration is always too weak to hinder the high energy conversion efficiency. In this paper, the integrated frame composed of piezoelectric beams and mechanical amplifiers is proposed to improve the energy conversion efficiency of a VEH. First, the initial structures of a piezoelectric frame(PF) and an amplification frame(AF) are designed. The dynamic model is then established to analyze the influence of key structural parameters on the mechanical amplification factor. Finite element simulation is conducted to study the energy harvesting performance, where the stiffness characteristics and power output in the cases of series and parallel load resistance are discussed in detail. Furthermore, piezoelectric beams with variable cross-sections are introduced to optimize and improve the energy harvesting efficiency. Advantages of the PF with the AF are illustrated by comparison with conventional piezoelectric cantilever beams. The results show that the proposed integrated VEH has a good mechanical amplification capability and is more suitable for low-frequency vibration conditions.

Integration of a nonlinear energy sink and a piezoelectric energy harvester

A mechanical-piezoelectric system is explored to reduce vibration and to harvest energy. The system consists of a piezoelectric device and a nonlinear energy sink （NES）, which is a nonlinear oscillator without linear stiffness. The NES-piezoelectric sys- tem is attached to a 2-degree-of-freedom primary system subjected to a shock load. This mechanical-piezoelectric system is investigated based on the concepts of the percentages of energy transition and energy transition measure. The strong target energy transfer occurs for some certain transient excitation amplitude and NES nonlinear stiffness. The plots of wavelet transforms are used to indicate that the nonlinear beats initiate energy transitions between the NES-piezoelectric system and the primary system in the tran- sient vibration, and a 1：1 transient resonance capture occurs between two subsystems. The investigation demonstrates that the integrated NES-piezoelectric mechanism can re- duce vibration and harvest some vibration energy.

Multi-Direction Piezoelectric Energy Harvesting Techniques

With the development of portable and self-powering electronic devices, micro-electromechanical system (MEMS) and wireless sensor networks, research on piezoelectric energy harvesting techniques has been paid more and more attention. To enhance the ambient adaptability and improve the generating efficiency, the multi-directional piezoelectric energy harvesting techniques turns to be a research hotspot. The current status of the multi-directional piezoelectric energy harvesting techniques was firstly reviewed. The characteristics of existed multi-directional piezoelectric harvester were then analyzed. An improved structure of multi-directional piezoelectric harvester was finally proposed. The multi-directional piezoelectric energy harvester has a good prospect in miniaturization, more sensitive to vibration directions and better energy efficiency.

Pedestrian walking characteristics at stairs according to width change for application of piezoelectric energy harvesting

This work aims at finding pedestrian walking characteristics at U-type stairs according to the width change of stairs and appropriate spot for installing piezoelectric energy harvesting.The number of pedestrian at two kinds of stairs(one is stairs with 1.5 m in width and the other is stairs with 3 m in width) was estimated by calculating the number of steps on the stairs by a zone which is divided into 30 cm×30 cm.The result shows high density in the middle in the case of narrow stairs but traffic is concentrated on stair inside(pillar side) in stairs with large width.In conclusion,the location for installation of piezoelectric energy harvesting system should be considered differently on stairs width and the number of installation depends on total expected traffic and the expected traffic for a device.

Recent advancement of flow-induced piezoelectric vibration energy harvesting techniques:principles,structures,and nonlinear designs

Energy harvesting induced from flowing fluids(e.g.,air and water flows)is a well-known process,which can be regarded as a sustainable and renewable energy source.In addition to traditional high-efficiency devices(e.g.,turbines and watermills),the micro-power extracting technologies based on the flow-induced vibration(FIV)effect have sparked great concerns by virtue of their prospective applications as a self-power source for the microelectronic devices in recent years.This article aims to conduct a comprehensive review for the FIV working principle and their potential applications for energy harvesting.First,various classifications of the FIV effect for energy harvesting are briefly introduced,such as vortex-induced vibration(VIV),galloping,flutter,and wake-induced vibration(WIV).Next,the development of FIV energy harvesting techniques is reviewed to discuss the research works in the past three years.The application of hybrid FIV energy harvesting techniques that can enhance the harvesting performance is also presented.Furthermore,the nonlinear designs of FIV-based energy harvesters are reported in this study,e.g.,multi-stability and limit-cycle oscillation(LCO)phenomena.Moreover,advanced FIV-based energy harvesting studies for fluid engineering applications are briefly mentioned.Finally,conclusions and future outlook are summarized.

Design, Modeling and Analysis of Implementing a Multilayer Piezoelectric Vibration Energy Harvesting Mechanism in the Vehicle Suspension

This paper deals with the design, modeling and analysis of implementing a Multilayer Piezoelectric Vibration Energy Harvesting (ML PZT VEH) Mechanism in the vehicle suspension. The principle of work of the proposed ML PZT VEH mechanism is reducing the relative motion of the suspension, amplifying the applied force to the PZT by a specific design of mechanism and combining a single layer PZT into multilayer PZT to increase the produced electricity. To maintain the performance of suspension as the original suspension, the ML PZT VEH mechanism is mounted in series with the spring of the suspension. The proposed ML PZT VEH mechanism and its implementation to the vehicle suspension were mathematically modeled. Responses of the vehicle before and after implementing ML PZT VEH mechanism were simulated. The results show the proposed mechanism can produce output voltage of 2.75 and power of 7.17 times bigger than direct mounting to the vehicle suspension. And the simulation result shows that mounting ML PZT VEH mechanism in series with the spring of the vehicle suspension does not change the performance of suspension.

Nonlinear energy harvesting from vibratory disc-shaped piezoelectric laminates

Implementing resonators with geometrical nonlinearities in vibrational energy harvesting systems leads to considerable enhancement of their operational bandwidths. This advantage of nonlinear devices in comparison to their linear counterparts is much more obvious especially at small-scale where transition to nonlinear regime of vibration occurs at moderately small amplitudes of the base excitation. In this paper the nonlinear behavior of a disc-shaped piezoelectric laminated harvester considering midplane-stretching effect is investigated. Extended Hamilton’s principle is exploited to extract electromechanically coupled governing partial differential equations of the system. The equations are firstly order-reduced and then analytically solved implementing perturbation method of multiple scales. A nonlinear finite element method(FEM) simulation of the system is performed additionally for the purpose of verification which shows agreement with the analytical solution to a large extent. The frequency response of the output power at primary resonance of the harvester is calculated to investigate the effect of nonlinearity on the system performance. Effect of various parameters including mechanical quality factor, external load impedance and base excitation amplitude on the behavior of the system are studied. Findings indicate that in the nonlinear regime both output power and operational bandwidth of the harvester will be enhanced by increasing the mechanical quality factor which can be considered as a significant advantage in comparison to linear harvesters in which these two factors vary in opposite ways as quality factor is changed.