THE EFFECTS OF NEGATIVE BIAS AND FLUX RATIO ON THE PROPERTIES OF TiN THIN FILMS FORMED BY FILTERED CATHODIC ARC PLASMA TECHNIQUE

The filtered cathodic vacuum-arc (FCVA) technique is a supplementary and alterna tive technique with respect to convendtional physical and chemical vapour deposi tion which can remove macro-particles effectively and make the deposition proces s at ambient temperature. In this work, high quality TiN thin films were deposi ted on silicon substrates at low temperature using the improved filtered cathodi c arc plasma (FCAP) technique. AFM, XRD, TEM were employed to characterize the T iN thin films. The effects of the negative substrate bias on the grain size, pre ferred crystalline orientation, surface roughness of TiN thin films were discuss ed.

Mode filtering based on ponderomotive force nonlinearity in a plasma filled rectangular waveguide

Here a new scheme for mode filtering is proposed. Based on the ponderomotive force effect,propagation of the microwave dual-mode through a plasma-filled metallic rectangular waveguide is investigated. To excite the TE_（20） mode in a rectangular waveguide, the existence of fundamental modes is unavoidable. To filter the destructive mode（TE_（10））, the waveguide is filled with a collisional plasma. Based on the coupling effect, the energy of this destructive TE_（10） mode is transferred to the TE_（20） mode. The proposed structure acts like a mode convertor. The TE_（10） mode become more attenuated and instead the TE_（20） mode is amplified. The plasma filled rectangular waveguide acts as a mode filtering tool.

Analysis of electron energy distribution function in a magnetically filtered complex plasma

The electron energy distribution function （EEDF） for a magnetically filtered dusty plasma is studied in a dusty double plasma device where the electron energy can be varied from 0.15 eV to ～ 2.8 eV and plasma density from 10 6 cm-3 to 10 9cm-3 . The characteristics of EEDF for these ranges of plasma parameters are investigated in a pristine plasma as well as in a dusty plasma. The results show that in the presence of dust, there is a drastic modification in EEDF patterns in a plasma with higher electron temperature and density than those in a low temperature and low density plasma produced by the magnetic filter.

A tunable dual-narrowband band-pass filter using plasma quantum well structure

A tunable dual-narrowband pass-band filter is designed. A one-dimensional photonic crystal （1D PC） is comprised of alternate dielectric layer and vacuum layer. Two quantum wells （QWs） as defects can be constructed by sandwiching two plasma slabs symmetrically in the 1D PC, and a dual-narrowband pass-band filter is formed. The conventional finite- difference time-domain （FDTD） method and piecewise linear current density recursive convolution （PLCDRC）-FDTD method are applied to the dielectric and plasma, respectively. The simulation results illustrate that the dual-narrowband frequencies can be tuned by changing the plasma frequency. The pass band interval and the half-power bandwidths （-3-dB band widths） are related to the space interval between two QWs.

CORRECTION OF WING INTERFERENCE WITH KALMAN FILTERING IN INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY

A Kalman filter was developed for correction of wing interference in ICP-AES.Modeling wing interference theoretically instead of experimentally, the filter can compensate the shift in wavelength position in scans, and therefore reduce the effect of the interference on detection limit.

PLASMADETEK-PED低温等离子发射气相色谱仪在10^(-6)～10^(-9)级气体分析领域的应用

等离子发射检测器(Plasma Emission Detector)是一种应用于气相色谱仪的新型检测器。加拿大LDetek仪器公司的Plasma Detek是一种超高灵敏度的检测器,可以很好的解决一般高纯气体或者混合气体的微量痕量分析,在特气和半导体气体方面也得到了越来越广泛的应用,并且取得了非常好的效果。

Photonic crystal fiber polarization filter with two large apertures coated with gold layers

A novel photonic crystal fiber（PCF） polarization filter is designed and fabricated; it consists of two large apertures coated with gold. The asymmetric structure separates the resonance position in the vertical direction well. Due to the metal layer covering, loss is greatly improved. Finite element method is applied for numerical simulation. The influences of varying gold thickness and varying the diameters and the center positions of the larger apertures on filtering performance are evaluated. Theory of coupling between surface plasma and core mode is introduced. By modulating the parameters, we realize a single polarization filter at 1.31 μm and 1.55 μm. The basal mode loss in the y direction can reach 1408.80 dB/cm at 1.31 μm and 1911.22 dB/cm at 1.55 μm respectively, but basal mode loss in the x direction is relatively small, 0.82 dB/cm and 1.87 dB/cm. In addition, two kinds of broadband polarization filters are proposed. If the fiber length is set to 200 μm,the extinction ratio is greater than 20 dB with width of 570 nm and 490 nm. The filter has simple structure and excellent performance.

PLASMADETEK-PED等离子发射气相色谱仪在半导体工业的10-9级气体分析应用

等离子发射检测器(Plasma Emission Detector)是一种应用于气相色谱仪的新型检测器。等离子体(plasma)不是一种新技术,早在20世纪30年代已经产生,到20世纪70年代随着电子和材料科学的发展,等离子体技术取得了较大的发展,在基础工业和高科技领域获得了广泛的应用。Plasma Detek是一种超高灵敏度的检测器,可以很好地解决一般高纯气体或者混合气体的微量痕量分析,加拿大LDetek仪器公司团队经过近20年的探索,Plasma在特气和半导体气体方面也得到了越来越广泛的应用,并且取得了非常好的效果。

Remote Plasma Maintenance in Low-Pressure Discharges with an External Magnetic Field

The spatial structure of remote plasma regions in rf discharges is analyzed based on a 2D model of free-fall regime discharge maintenance. Since the study is directed towards description of the magnetic filter region in the tandem plasma sources of negative hydrogen ions, hydrogen discharges are considered, with a weak magnetic field located outside the region of the rf power deposition. With the formation of different regions in the discharge—the rf power deposition region, the region with electron magnetization, the transition between them and the region behind the filter—the results display superimposed effects of nonlocal discharge maintenance without and with a magnetic field. Slight decrease of the electron temperature accompanied with strong drop of the electron density is the “pure” effect of the plasma expansion in regions without external magnetic field. Strong drop of the electron temperature accompanied with formation of a maximum of the electron density in the filter region is the “pure” effect of the plasma expansion through a magnetic field. Based on the results for the spatial distribution of the electron density and temperature obtained with shifting the position of the magnetic filter, optimization of the source regarding high yield of volume-produced negative ions is discussed.

Holographic Imaging of Argon Plasma Images

A coding and decoding process of argon plasma images using digital holography is proposed. The digital Fourier holography is applied to two images of matrix dimensions 512 × 512 pixels. The decoded images are improved using wiener filtering techniques. We have constructed three basic color images of the original image which is useful to extract the thermal distribution of the plasma image. Also, the profiles of the reconstructed images are checked showing better smooth profiles using wiener filter. The Mat-lab code is applied in the operation of image processing using Fourier techniques.

The Properties of the Rectangular Arc Ion Plating with Magnetic Filtering Shutter

A major obstacle to the broad application of cathodic arc plasma deposition is the presence of macroparticles. In this paper, the properties of the large rectangular arc ion plating with a magnetic filtering shutter system to filter macroparticles are studied. It is proposed that the macroparticles in the plasma beam are effectively removed with the magnetic filtering shutter system, and the quality of the deposited films is improved.

Conducted EMI Suppression in Plasma Cutting Power Supply

A systematic approach to the design of the conducted electromagnetic interference （EMI） filter of high-density plasma cutting power supply has been developed. Converter components have been accurately modeled, with parasitic elements extracted to reveal their impacts on the EMI noises. Circuit simulations have been used to analyze and minimize the EMI noises. Conducted EMI noise measurement and filter design of this power supply have been achieved which successfully satisfy the FCC class B limits in the frequency range from 150 kHz to 30 MHz. The analyses and experimental results show that the designed filter guarantees that the required attenuation will be achieved.

等离子体发生器导流板结构优化研究

高效滤芯是空气净化器的关键部件,当空气净化器中流向高效滤芯部分的送风不均匀时,会导致滤芯利用率较低,从而影响滤芯的过滤性能.为提高滤芯的使用效率进而改善装置的净化性能,可以在风机和高效滤芯之间放置导流型等离子体发生器,利用发生器的导流板使送风气流更均匀的吹向滤芯.为探究适宜的导流板结构参数,采用数值模拟的方法对不同结构参数导流板下的流动过程进行分析,通过对比滤芯使用率和送风均匀性等指标,给出适宜的导流板长度和张开角度设计方案.研究结果表明,对于本文研究的净化器尺寸,导流板设计长度为100 mm、张开角度为10°时的送风更均匀.优化后的尾部导流板结构简单、设计合理、使用方便,分散了送风气流的方向,更有利于提高后端高效滤芯的利用率和使用寿命.

高脂血症型胰腺炎患者内脏脂肪组织面积与双重滤过血浆置换临床疗效的相关性分析

目的探讨高脂血症型胰腺炎(hyperlipidemic pancreatitis,HLAP)患者内脏脂肪组织面积(visceral fat area,VFA)与双重滤过血浆置换(double filtered plasmapheresis,DFPP)临床疗效的相关性。方法选取2020年1月—2022年12月自贡市第一人民医院收治的行DFPP治疗的HLAP患者,根据临床疗效不同分为有效组和无效组。比较2组的一般资料及VFA;通过多元Logistic回归分析无效结局的影响因素;分析VFA水平与疗效无效概率的剂量反应关系,基于影响因素逐步Logistic回归模型。结果共纳入225例患者,其中有效组180例,无效组45例。饮酒史(OR=3.603,95%CI:2.577~4.868,P=0.018)、高体质量指数(body mass index,BMI)(OR=2.407,95%CI:1.381~3.672,P=0.016)、高急性生理学与慢性健康状况评分系统Ⅱ(acute physiology and chronic health status scoring system II,APACHEⅡ)评分(OR=3.087,95%CI:2.061~4.352,P=0.026)、高空腹血糖(FPG)(OR=1.313,95%CI:1.007~2.578,P=0.009)、高总胆固醇(TC)(OR=2.511,95%CI:1.485~3.776,P=0.025)、高三酰甘油(TG)(OR=4.885,95%CI:3.859~6.150,P=0.035)、高低密度脂蛋白胆固醇(LDL-C)(OR=3.165,95%CI:2.139~4.430,P=0.010)、低高密度脂蛋白胆固醇(HDL-C)(OR=4.163,95%CI:3.137~5.428,P=0.011)、高白细胞介素-6(interleukin-6,IL-6)(OR=2.117,95%CI:1.091~3.382,P=0.006)、高白细胞介素-8(interleukin-8,IL-8)(OR=3.115,95%CI:2.089~4.380,P=0.023)、高C反应蛋白(CRP)(OR=1.975,95%CI:1.049~3.240,P=0.035)、高降钙素原(procalcitonin,PCT)(OR=3.665,95%CI:2.639~4.930,P=0.036)、高血淀粉酶(OR=4.547,95%CI:3.521~5.812,P=0.041)、高血脂肪酶(OR=2.229,95%CI:1.203~3.494,P=0.043)、VFA大(OR=2.827,95%CI:1.801~4.092,P=0.031)是疗效无效的影响因素。剂量反应关系分析提示:随着VFA增加,临床疗效无效的发生概率也相应增加。回归方程P=1/[1+exp(-3.265+1.282×饮酒史+0.878×BMI+1.127×APACHEⅡ评分+0.272×FPG+0.921×TC+1.586×TG+1.152×LDLC+1.426×HDL-C+0.750×IL-6+1.136×IL-8+0.681×CRP+1.299×PCT+1.514×血淀粉酶+0.802×血脂肪酶+1.039×VFA)]。结论HLAP患者VFA与DFPP临床疗效具有显著相关性。随着VFA的增加,临床疗效无效的发生概率逐渐升高。

复杂背景下激光等离子体光斑中心亚像素提取方法

激光等离子体光斑中心提取由于图像降噪效果不佳,导致复杂背景下的中心提取不准确,因此,设计一种新的复杂背景下激光等离子体光斑中心亚像素提取方法。该方法采用多图平均法和高斯滤波算法,将两者结合,降噪处理激光等离子体光斑图像,完整图像预处理。引入Zernike矩法,提取激光等离子体光斑中心,采用圆拟合方法优化该算法,实现光斑图像中心亚像素提取。实验结果表明,所提方法在复杂背景下提取激光等离子体光斑中心亚像素时,提取的光斑中心图像更加清晰,并且信噪比达到了47.0 dB以上,提取的中心位置的绝对误差仅为1 mm,说明该方法提取准确性较高,图像质量更好。

一种数控等离子切割烟尘回收装置

现代工业生产领域中,与传统火焰切割技术相比较,数控等离子切割技术在金属板材加工环节展现出更高的切割精度与更快的作业速度,因而在机械制造业中的应用日渐普及。然而,大型数控等离子切割设备在切割钢铁材料过程中会释放大量的切割粉尘,这些粉尘自工件下方向外喷散,导致车间内烟尘弥漫,工作环境恶化。为有效保护劳动者健康,优化工作环境,提升生产效率,公司已依照环境保护标准,对运行中的两台数控等离子切割机实施了烟尘处理及设备改良措施,并已取得显著成果。

硅基钽酸锂异质晶圆键合工艺研究

5G移动通信的发展对声表面波滤波器提出了高频、小型化、集成化的要求。相较于传统压电体单晶材料,采用硅基压电单晶薄膜材料制备的声表面波滤波器具有高频、低插入损耗、高温稳定性等优势,是高性能声表面波器件发展的核心基础材料。Smart-Cut^(TM)是制备硅基压电单晶薄膜材料的主要方法,键合工艺是其中的核心工序,键合质量决定了硅基压电单晶薄膜晶圆材料的质量,并影响器件性能。本文通过低温直接键合工艺,对等离子活化、兆声清洗、预键合、键合加固四道工序展开优化,最终实现了键合强度高达1.84 J/m^(2)、键合面积超过99.9%的高质量硅基钽酸锂异质晶圆键合。

磁过滤弯管的金属等离子体传输研究

测定了磁过滤弯管出口离子电流与阴极弧流的关系 .磁过滤弯管内表面中 ,靠近大径中心一侧的表面 (内侧面 )和远离大径中心一侧的表面 (外侧面 )与等离子体的相互作用是独立的 .整个磁过滤弯管偏压较仅仅Bilek板偏压有更高的离子传输效率 .

改性明矾浆和滤食性动物控制月湖的蓝藻水华

2 0 0 0年初夏宁波月湖发生大面积蓝藻水华。同年 8月 1m2 水面喷洒 5 5 .6 g改性明矾浆应急除藻后 ,蓝藻水华基本消失。 2 0 0 0年底和 2 0 0 1年初 ,1hm2 水面放养尾均重 2 5 .6 g鲢、鳙鱼种35 0 0尾和平均体长 7.5cm的三角帆蚌蚌种 6 70 0尾。 2 0 0 1和 2 0 0 2年不再出现蓝藻水华 ,水体表观质量明显提高 ,透明度保持在 10 0cm以上。 2 0 0 1年 8月份月湖浮游蓝藻数量比 2 0 0 0年同期下降 87.5 % ,总氮下降 2 6 .0 % ,总磷下降 70 .0 %

白细胞滤器对新鲜冰冻血浆凝血因子及血浆蛋白的影响

目的探讨经白细胞过滤器过滤后的新鲜冰冻血浆(Freshfrozen plasma,FFP)中凝血因子的生物活性及血浆蛋白含量变化。方法随机抽取30份新鲜冰冻血浆,置于37℃水浴融化,在超净工作台内留取过滤前后血浆样本各2ml,使用Sysmex1500全自动血凝仪测定凝血酶原时间(PT)、活化部分凝血酶时间(APTT)、凝血酶时间(TT)、纤维蛋白原(Fbg)、凝血因子Ⅶ(FⅦ:C)、凝血因子Ⅷ(FⅧ:C)、凝血因子Ⅸ(FⅨ:C)水平;用BECKMANLX20全自动生化分析仪对TP、ALB进行检测。结果过滤前后的新鲜冰冻血浆TT、Fbg、FⅦ、FⅨ、TP、ALB水平的差异均无显著性(P>0·05)。APTT、PT、FⅧ过滤前后的差异有显著性(P<0·05),但仍在参考值范围内。结论过滤前后新鲜冰冻血浆中凝血因子的活性差异变化及血浆蛋白的含量在参考值范围内,适用于临床治疗。