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THE EFFECTS OF NEGATIVE BIAS AND FLUX RATIO ON THE PROPERTIES OF TiN THIN FILMS FORMED BY FILTERED CATHODIC ARC PLASMA TECHNIQUE 被引量:2
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作者 Y.J.Zhang P.X.Yan +3 位作者 Z.G.Wu W.W.Zhang J.Wang Q.J.Xue 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2005年第3期369-374,共6页
The filtered cathodic vacuum-arc (FCVA) technique is a supplementary and alterna tive technique with respect to convendtional physical and chemical vapour deposi tion which can remove macro-particles effectively and m... The filtered cathodic vacuum-arc (FCVA) technique is a supplementary and alterna tive technique with respect to convendtional physical and chemical vapour deposi tion which can remove macro-particles effectively and make the deposition proces s at ambient temperature. In this work, high quality TiN thin films were deposi ted on silicon substrates at low temperature using the improved filtered cathodi c arc plasma (FCAP) technique. AFM, XRD, TEM were employed to characterize the T iN thin films. The effects of the negative substrate bias on the grain size, pre ferred crystalline orientation, surface roughness of TiN thin films were discuss ed. 展开更多
关键词 TIN filtered cathodic arc plasma preferred orientation
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Mode filtering based on ponderomotive force nonlinearity in a plasma filled rectangular waveguide 被引量:1
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作者 H SOBHANI H R SABOUHI +1 位作者 S FEILI E DADAR 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第10期70-74,共5页
Here a new scheme for mode filtering is proposed. Based on the ponderomotive force effect,propagation of the microwave dual-mode through a plasma-filled metallic rectangular waveguide is investigated. To excite the TE... Here a new scheme for mode filtering is proposed. Based on the ponderomotive force effect,propagation of the microwave dual-mode through a plasma-filled metallic rectangular waveguide is investigated. To excite the TE_(20) mode in a rectangular waveguide, the existence of fundamental modes is unavoidable. To filter the destructive mode(TE_(10)), the waveguide is filled with a collisional plasma. Based on the coupling effect, the energy of this destructive TE_(10) mode is transferred to the TE_(20) mode. The proposed structure acts like a mode convertor. The TE_(10) mode become more attenuated and instead the TE_(20) mode is amplified. The plasma filled rectangular waveguide acts as a mode filtering tool. 展开更多
关键词 mode filtering mode convertor collisional plasma ponderomotive force
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Analysis of electron energy distribution function in a magnetically filtered complex plasma
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作者 M K Deka H Bailung N C Adhikary 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第4期324-329,共6页
The electron energy distribution function (EEDF) for a magnetically filtered dusty plasma is studied in a dusty double plasma device where the electron energy can be varied from 0.15 eV to ~ 2.8 eV and plasma densi... The electron energy distribution function (EEDF) for a magnetically filtered dusty plasma is studied in a dusty double plasma device where the electron energy can be varied from 0.15 eV to ~ 2.8 eV and plasma density from 10 6 cm-3 to 10 9cm-3 . The characteristics of EEDF for these ranges of plasma parameters are investigated in a pristine plasma as well as in a dusty plasma. The results show that in the presence of dust, there is a drastic modification in EEDF patterns in a plasma with higher electron temperature and density than those in a low temperature and low density plasma produced by the magnetic filter. 展开更多
关键词 dusty plasma magnetic filter electron energy distribution function
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A tunable dual-narrowband band-pass filter using plasma quantum well structure
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作者 戴燚 刘少斌 +2 位作者 王身云 孔祥鲲 陈忱 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第6期370-374,共5页
A tunable dual-narrowband pass-band filter is designed. A one-dimensional photonic crystal (1D PC) is comprised of alternate dielectric layer and vacuum layer. Two quantum wells (QWs) as defects can be constructed... A tunable dual-narrowband pass-band filter is designed. A one-dimensional photonic crystal (1D PC) is comprised of alternate dielectric layer and vacuum layer. Two quantum wells (QWs) as defects can be constructed by sandwiching two plasma slabs symmetrically in the 1D PC, and a dual-narrowband pass-band filter is formed. The conventional finite- difference time-domain (FDTD) method and piecewise linear current density recursive convolution (PLCDRC)-FDTD method are applied to the dielectric and plasma, respectively. The simulation results illustrate that the dual-narrowband frequencies can be tuned by changing the plasma frequency. The pass band interval and the half-power bandwidths (-3-dB band widths) are related to the space interval between two QWs. 展开更多
关键词 quantum well dual-narrowband pass-band filter plasma
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CORRECTION OF WING INTERFERENCE WITH KALMAN FILTERING IN INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY
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作者 Jin Fu YANG Zhe Xiu PIAO +2 位作者 Xian Jin ZENG Zhuo Yong ZHANG Xin Hai CHEN 《Chinese Chemical Letters》 SCIE CAS CSCD 1992年第3期193-196,共4页
A Kalman filter was developed for correction of wing interference in ICP-AES.Modeling wing interference theoretically instead of experimentally, the filter can compensate the shift in wavelength position in scans, and... A Kalman filter was developed for correction of wing interference in ICP-AES.Modeling wing interference theoretically instead of experimentally, the filter can compensate the shift in wavelength position in scans, and therefore reduce the effect of the interference on detection limit. 展开更多
关键词 LINE CORRECTION OF WING INTERFERENCE WITH KALMAN filterING IN INDUCTIVELY COUPLED plasma ATOMIC EMISSION SPECTROMETRY LA
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等离子体发生器导流板结构优化研究
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作者 孙丽颖 张豪 +1 位作者 乔彬 于洁 《哈尔滨商业大学学报(自然科学版)》 CAS 2024年第1期57-63,共7页
高效滤芯是空气净化器的关键部件,当空气净化器中流向高效滤芯部分的送风不均匀时,会导致滤芯利用率较低,从而影响滤芯的过滤性能.为提高滤芯的使用效率进而改善装置的净化性能,可以在风机和高效滤芯之间放置导流型等离子体发生器,利用... 高效滤芯是空气净化器的关键部件,当空气净化器中流向高效滤芯部分的送风不均匀时,会导致滤芯利用率较低,从而影响滤芯的过滤性能.为提高滤芯的使用效率进而改善装置的净化性能,可以在风机和高效滤芯之间放置导流型等离子体发生器,利用发生器的导流板使送风气流更均匀的吹向滤芯.为探究适宜的导流板结构参数,采用数值模拟的方法对不同结构参数导流板下的流动过程进行分析,通过对比滤芯使用率和送风均匀性等指标,给出适宜的导流板长度和张开角度设计方案.研究结果表明,对于本文研究的净化器尺寸,导流板设计长度为100 mm、张开角度为10°时的送风更均匀.优化后的尾部导流板结构简单、设计合理、使用方便,分散了送风气流的方向,更有利于提高后端高效滤芯的利用率和使用寿命. 展开更多
关键词 等离子体发生器 导流板 数值模拟 结构优化 滤芯使用率 送风均匀性
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硅基钽酸锂异质晶圆键合工艺研究
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作者 陈哲明 丁雨憧 +3 位作者 邹少红 龙勇 石自彬 马晋毅 《人工晶体学报》 CAS 北大核心 2024年第4期634-640,共7页
5G移动通信的发展对声表面波滤波器提出了高频、小型化、集成化的要求。相较于传统压电体单晶材料,采用硅基压电单晶薄膜材料制备的声表面波滤波器具有高频、低插入损耗、高温稳定性等优势,是高性能声表面波器件发展的核心基础材料。Sma... 5G移动通信的发展对声表面波滤波器提出了高频、小型化、集成化的要求。相较于传统压电体单晶材料,采用硅基压电单晶薄膜材料制备的声表面波滤波器具有高频、低插入损耗、高温稳定性等优势,是高性能声表面波器件发展的核心基础材料。Smart-Cut^(TM)是制备硅基压电单晶薄膜材料的主要方法,键合工艺是其中的核心工序,键合质量决定了硅基压电单晶薄膜晶圆材料的质量,并影响器件性能。本文通过低温直接键合工艺,对等离子活化、兆声清洗、预键合、键合加固四道工序展开优化,最终实现了键合强度高达1.84 J/m^(2)、键合面积超过99.9%的高质量硅基钽酸锂异质晶圆键合。 展开更多
关键词 硅基钽酸锂 低温直接键合 等离子活化 兆声清洗 预键合 键合加固 声表面波滤波器
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Photonic crystal fiber polarization filter with two large apertures coated with gold layers
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作者 吴君君 李曙光 +1 位作者 刘强 石敏 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第11期247-253,共7页
A novel photonic crystal fiber(PCF) polarization filter is designed and fabricated; it consists of two large apertures coated with gold. The asymmetric structure separates the resonance position in the vertical dire... A novel photonic crystal fiber(PCF) polarization filter is designed and fabricated; it consists of two large apertures coated with gold. The asymmetric structure separates the resonance position in the vertical direction well. Due to the metal layer covering, loss is greatly improved. Finite element method is applied for numerical simulation. The influences of varying gold thickness and varying the diameters and the center positions of the larger apertures on filtering performance are evaluated. Theory of coupling between surface plasma and core mode is introduced. By modulating the parameters, we realize a single polarization filter at 1.31 μm and 1.55 μm. The basal mode loss in the y direction can reach 1408.80 dB/cm at 1.31 μm and 1911.22 dB/cm at 1.55 μm respectively, but basal mode loss in the x direction is relatively small, 0.82 dB/cm and 1.87 dB/cm. In addition, two kinds of broadband polarization filters are proposed. If the fiber length is set to 200 μm,the extinction ratio is greater than 20 dB with width of 570 nm and 490 nm. The filter has simple structure and excellent performance. 展开更多
关键词 photonic crystal fibers polarization filter surface plasma resonance
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PLASMADETEK-PED低温等离子发射气相色谱仪在10^(-6)~10^(-9)级气体分析领域的应用 被引量:1
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作者 黎文宇 许峰 +1 位作者 张文申 侯倩倩 《低温与特气》 CAS 2018年第2期32-40,共9页
等离子发射检测器(Plasma Emission Detector)是一种应用于气相色谱仪的新型检测器。加拿大LDetek仪器公司的Plasma Detek是一种超高灵敏度的检测器,可以很好的解决一般高纯气体或者混合气体的微量痕量分析,在特气和半导体气体方面也得... 等离子发射检测器(Plasma Emission Detector)是一种应用于气相色谱仪的新型检测器。加拿大LDetek仪器公司的Plasma Detek是一种超高灵敏度的检测器,可以很好的解决一般高纯气体或者混合气体的微量痕量分析,在特气和半导体气体方面也得到了越来越广泛的应用,并且取得了非常好的效果。 展开更多
关键词 等离子发射检测器 等离子体气相色谱仪 滤光片 超高灵敏度
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Remote Plasma Maintenance in Low-Pressure Discharges with an External Magnetic Field
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作者 Stiliyan Lishev Antonia Shivarova Khristo Tarnev 《Journal of Modern Physics》 2012年第10期1616-1625,共10页
The spatial structure of remote plasma regions in rf discharges is analyzed based on a 2D model of free-fall regime discharge maintenance. Since the study is directed towards description of the magnetic filter region ... The spatial structure of remote plasma regions in rf discharges is analyzed based on a 2D model of free-fall regime discharge maintenance. Since the study is directed towards description of the magnetic filter region in the tandem plasma sources of negative hydrogen ions, hydrogen discharges are considered, with a weak magnetic field located outside the region of the rf power deposition. With the formation of different regions in the discharge—the rf power deposition region, the region with electron magnetization, the transition between them and the region behind the filter—the results display superimposed effects of nonlocal discharge maintenance without and with a magnetic field. Slight decrease of the electron temperature accompanied with strong drop of the electron density is the “pure” effect of the plasma expansion in regions without external magnetic field. Strong drop of the electron temperature accompanied with formation of a maximum of the electron density in the filter region is the “pure” effect of the plasma expansion through a magnetic field. Based on the results for the spatial distribution of the electron density and temperature obtained with shifting the position of the magnetic filter, optimization of the source regarding high yield of volume-produced negative ions is discussed. 展开更多
关键词 REMOTE plasma Maintenance TANDEM plasma SOURCES Magnetic filter Hydrogen Discharges Free-Fall REGIME
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Holographic Imaging of Argon Plasma Images
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作者 Abdallah Mohamed Hamed Mohamed Aly Saudy 《Optics and Photonics Journal》 2014年第6期136-142,共7页
A coding and decoding process of argon plasma images using digital holography is proposed. The digital Fourier holography is applied to two images of matrix dimensions 512 × 512 pixels. The decoded images are imp... A coding and decoding process of argon plasma images using digital holography is proposed. The digital Fourier holography is applied to two images of matrix dimensions 512 × 512 pixels. The decoded images are improved using wiener filtering techniques. We have constructed three basic color images of the original image which is useful to extract the thermal distribution of the plasma image. Also, the profiles of the reconstructed images are checked showing better smooth profiles using wiener filter. The Mat-lab code is applied in the operation of image processing using Fourier techniques. 展开更多
关键词 Polychromatic Image Processing of plasma IMAGES FOURIER HOLOGRAPHY WIENER filterING
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PLASMADETEK-PED等离子发射气相色谱仪在半导体工业的10-9级气体分析应用
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作者 徐慕华 王建让 《低温与特气》 CAS 2017年第3期38-44,共7页
等离子发射检测器(Plasma Emission Detector)是一种应用于气相色谱仪的新型检测器。等离子体(plasma)不是一种新技术,早在20世纪30年代已经产生,到20世纪70年代随着电子和材料科学的发展,等离子体技术取得了较大的发展,在基础工业和高... 等离子发射检测器(Plasma Emission Detector)是一种应用于气相色谱仪的新型检测器。等离子体(plasma)不是一种新技术,早在20世纪30年代已经产生,到20世纪70年代随着电子和材料科学的发展,等离子体技术取得了较大的发展,在基础工业和高科技领域获得了广泛的应用。Plasma Detek是一种超高灵敏度的检测器,可以很好地解决一般高纯气体或者混合气体的微量痕量分析,加拿大LDetek仪器公司团队经过近20年的探索,Plasma在特气和半导体气体方面也得到了越来越广泛的应用,并且取得了非常好的效果。 展开更多
关键词 等离子发射检测器 等离子体 气相色谱仪 滤光片 超高灵敏度
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The Properties of the Rectangular Arc Ion Plating with Magnetic Filtering Shutter
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作者 石中兵 童洪辉 +5 位作者 刘小波 熊涛 李勇 严复秀 赵燕 杨作贵 《Plasma Science and Technology》 SCIE EI CAS CSCD 2004年第6期2581-2584,共4页
A major obstacle to the broad application of cathodic arc plasma deposition is the presence of macroparticles. In this paper, the properties of the large rectangular arc ion plating with a magnetic filtering shutter s... A major obstacle to the broad application of cathodic arc plasma deposition is the presence of macroparticles. In this paper, the properties of the large rectangular arc ion plating with a magnetic filtering shutter system to filter macroparticles are studied. It is proposed that the macroparticles in the plasma beam are effectively removed with the magnetic filtering shutter system, and the quality of the deposited films is improved. 展开更多
关键词 magnetic filtering shutter cathodic vacuum arc macroparticles removal plasma
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Conducted EMI Suppression in Plasma Cutting Power Supply 被引量:1
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作者 Abdolreza Esmaeli 孙力 赵克 《Plasma Science and Technology》 SCIE EI CAS CSCD 2005年第6期3170-3173,共4页
A systematic approach to the design of the conducted electromagnetic interference (EMI) filter of high-density plasma cutting power supply has been developed. Converter components have been accurately modeled, with ... A systematic approach to the design of the conducted electromagnetic interference (EMI) filter of high-density plasma cutting power supply has been developed. Converter components have been accurately modeled, with parasitic elements extracted to reveal their impacts on the EMI noises. Circuit simulations have been used to analyze and minimize the EMI noises. Conducted EMI noise measurement and filter design of this power supply have been achieved which successfully satisfy the FCC class B limits in the frequency range from 150 kHz to 30 MHz. The analyses and experimental results show that the designed filter guarantees that the required attenuation will be achieved. 展开更多
关键词 conducted electromagnetic interference (EMI) plasma cutting power supply electromagnetic compatibility (EMC) saber designer filter design
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一种大功率等离子体火炬电源系统及控制策略 被引量:1
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作者 何敏 朱超 +2 位作者 贾忠琪 孟繁星 于子泉 《核聚变与等离子体物理》 CAS CSCD 北大核心 2023年第3期312-316,共5页
在大功率等离子体电弧系统中,采用PWM整流加BUCK斩波电路作为电源系统主电路,通过设计主电路参数与控制环,使电源在稳态运行时具有较强的抵抗负载扰动的能力。对系统进行的仿真模拟结果和实验结果均验证了所提方案的有效性。
关键词 等离子体电弧 负载扰动 LCL滤波器
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NTP再生DPF孔道内沉积颗粒物的理化特性 被引量:1
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作者 卢奕睿 施蕴曦 +3 位作者 蔡忆昔 朱衎 何勇 周银 《内燃机学报》 EI CAS CSCD 北大核心 2023年第4期307-314,共8页
利用低温等离子体(NTP)喷射系统对已捕集颗粒物(PM)的柴油机颗粒捕集器(DPF)进行了低温(100℃)再生试验,并对DPF孔道内不同再生阶段的颗粒沉积物取样分析,通过热重分析仪(TGA)、透射电子显微镜(TEM)及拉曼光谱分析仪探究了DPF孔道内颗... 利用低温等离子体(NTP)喷射系统对已捕集颗粒物(PM)的柴油机颗粒捕集器(DPF)进行了低温(100℃)再生试验,并对DPF孔道内不同再生阶段的颗粒沉积物取样分析,通过热重分析仪(TGA)、透射电子显微镜(TEM)及拉曼光谱分析仪探究了DPF孔道内颗粒沉积物的氧化特性、纳米结构及石墨化程度的理化特性变化规律.结果表明:随着NTP再生DPF阶段的推进,DPF孔道内颗粒沉积物中元素碳(EC)组分的最大氧化速率温度(T_(max))和燃尽温度(T_(e))均明显降低.颗粒物团絮结构中较为薄弱的部分在NTP氧化作用下先断裂,分解成链状结构;初级碳颗粒的平均微晶长度减小,平均微晶层面间距增大.由于NTP活性物质O不断键入PM中,在PM微晶边缘处生成新的含氧官能团,使得PM样品的无序程度及无定型碳含量增加,PM的氧化活性提高. 展开更多
关键词 柴油机颗粒捕集器 低温等离子体 再生 颗粒物
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等离子体催化再生颗粒捕集器平台的设计与应用
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作者 竺新波 吴瀚鹏 +3 位作者 罗建斌 蒋素素 吴叶平 杨国华 《实验技术与管理》 CAS 北大核心 2023年第3期76-81,共6页
针对船舶颗粒捕集器再生过程中的碳烟低温氧化问题,设计了一套基于等离子体催化的实验平台。该平台由气体供给、等离子体催化、等离子体发生及监测和尾气检测装置四部分构成。平台可以Printex-U标准碳烟为模化物,开展不同工况下碳烟氧... 针对船舶颗粒捕集器再生过程中的碳烟低温氧化问题,设计了一套基于等离子体催化的实验平台。该平台由气体供给、等离子体催化、等离子体发生及监测和尾气检测装置四部分构成。平台可以Printex-U标准碳烟为模化物,开展不同工况下碳烟氧化的教学与探索性实验。借助该平台通过展示不同工况下柴油机碳烟的氧化过程,可以帮助学生融合主推进动力装置、工程热力学、大学化学和环境催化等专业课知识,更好地掌握船舶尾气减排与大气污染防治技术,培养学生解决复杂工程问题的能力和创新意识。 展开更多
关键词 船舶尾气 颗粒捕集器 碳烟 等离子体 催化氧化
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体外血浆脂蛋白过滤治疗急性脑梗死的回顾性研究
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作者 陈采玉 俞志刚 +6 位作者 郭全 彭伟 张文 徐湘茹 孙玉婷 费月蓉 方邦江 《上海医药》 CAS 2023年第19期63-66,87,共5页
目的:探讨体外血浆脂蛋白过滤(DELP)治疗急性脑梗死的临床疗效。方法:23例符合诊断标准的急性脑梗死患者先行西医常规治疗,再行DELP治疗,比较患者DELP治疗前后的美国国立卫生研究院卒中量表(NIHSS)、血脂水平及纤维蛋白原(FIB)指标、改... 目的:探讨体外血浆脂蛋白过滤(DELP)治疗急性脑梗死的临床疗效。方法:23例符合诊断标准的急性脑梗死患者先行西医常规治疗,再行DELP治疗,比较患者DELP治疗前后的美国国立卫生研究院卒中量表(NIHSS)、血脂水平及纤维蛋白原(FIB)指标、改良Barthel指数(MBI)变化,以及治疗后90 d随访患者改良Rankin量表(mRS)评分。结果:治疗后,患者血脂水平、FIB较治疗前明显改善,NIHSS评分低于治疗前,MBI评分高于治疗前(P<0.05)。治疗90 d后,mRS≤1的患者比例较高。结论:DELP对急性脑梗死患者血浆中的总胆固醇、低密度胆固醇、载脂蛋白A1、载脂蛋白B、载脂蛋白E、FIB等有良好的清除作用,这可能是DELP治疗急性脑梗死的重要机制之一。 展开更多
关键词 体外血浆脂蛋白过滤 急性脑梗死 回顾性研究
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大面积负离子束源磁过滤器的设计及实验研究
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作者 谢亚红 谢俊炜 +6 位作者 韦江龙 顾玉明 蒋才超 潘军军 许永建 谢远来 胡纯栋 《核聚变与等离子体物理》 CAS CSCD 北大核心 2023年第4期407-411,共5页
中性束注入是磁约束核聚变能研究中重要的辅助加热手段。大面积负离子源是中性束注入系统的核心部件。在负离子源工作过程中,负离子的电子结合能非常小(约0.75e V),极易被高能电子破坏。为此需要设计过滤磁场降低电子温度,减少负离子的... 中性束注入是磁约束核聚变能研究中重要的辅助加热手段。大面积负离子源是中性束注入系统的核心部件。在负离子源工作过程中,负离子的电子结合能非常小(约0.75e V),极易被高能电子破坏。为此需要设计过滤磁场降低电子温度,减少负离子的损失,同时也可以减少伴随引出的电子。根据大面积负离子束源的机械结构,分别设计了永磁体产生过滤磁场和利用等离子体电极(PG)电流产生磁场两种磁过滤器结构;通过有限元算法对产生的过滤磁场进行模拟分析和优化,完成了大面积负离子束源过滤磁场的研制。在负离子束源测试平台开展实验测试,引出区电子温度从5eV降至1eV。这个结果初步验证了大面积负离子束源的过滤磁场的性能,为大面积负离子束源的研制提供了支持。 展开更多
关键词 过滤磁场 中性束注入 等离子体电极 负离子束源
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废气再循环系统前端净化装置的设计
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作者 李立琳 李奕澎 +3 位作者 王小若 王鑫 魏金瑜 黄浩冉 《成组技术与生产现代化》 2023年第4期21-26,共6页
为解决废气再循环(Exhaust Gas Re-circulation,EGR)系统冷却器、电控阀等部件的积碳腐蚀问题,设计了一种放置于EGR系统前端的净化装置。该装置的连接层由管道法兰和紧固件组成;激化绝缘层由铁丝圈和绝缘环等组成;净化过滤层采用了低温... 为解决废气再循环(Exhaust Gas Re-circulation,EGR)系统冷却器、电控阀等部件的积碳腐蚀问题,设计了一种放置于EGR系统前端的净化装置。该装置的连接层由管道法兰和紧固件组成;激化绝缘层由铁丝圈和绝缘环等组成;净化过滤层采用了低温等离子体发生器和陶瓷过滤体;电源系统采用了整流滤波稳压电路和逆变电路,能将220 V交流电转化为频率可调的脉冲电。由于设计了高频变压器,因此该装置的电源系统能将电压幅值增大至净化装置工作所需的值。 展开更多
关键词 废气再循环系统 净化装置 低温等离子体 整流滤波稳压电路
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