Measurement of electron density and electron temperature of a cascaded arc plasma using laser Thomson scattering compared to an optical emission spectroscopic approach

As advanced linear plasma sources, cascaded arc plasma devices have been used to generate steady plasma with high electron density, high particle flux and low electron temperature. To measure electron density and electron temperature of the plasma device accurately, a laser Thomson scattering（LTS） system, which is generally recognized as the most precise plasma diagnostic method, has been established in our lab in Dalian University of Technology. The electron density has been measured successfully in the region of 4.5？×10^19m^-3 to7.1？×10^20m^-3 and electron temperature in the region of 0.18 eV to 0.58 eV. For comparison,an optical emission spectroscopy（OES） system was established as well. The results showed that the electron excitation temperature（configuration temperature） measured by OES is significantly higher than the electron temperature（kinetic electron temperature） measured by LTS by up to 40% in the given discharge conditions. The results indicate that the cascaded arc plasma is recombining plasma and it is not in local thermodynamic equilibrium（LTE）. This leads to significant error using OES when characterizing the electron temperature in a non-LTE plasma.

Online diagnosis of electron excitation temperature in CH_4+H_2 discharge plasma at atmospheric pressure by optical emission spectra

Methane coupling under low temperature plasmas at atmospheric pressure is a green process by use of renewable sources of energy. In this study, CH4+H2 dis- charge plasma was on-line diagnosed by optical emission spectra so as to char- acterize the discharge system and to do spade work for the optimization of the technical parameters for future commercial production of methane coupling under plasmas. The study was focused on a calculation method for the online diagnosis of the electron excitation temperature in CH4+H2 discharge plasma at atmospheric pressure. The diagnostic method is easy, efficient and fairly precise. A serious er- ror in a literature was corrected during the reasoning of its series of equations formerly used to calculate electron temperatures in plasmas.

Diagnosis of Electron,Vibrational and Rotational Temperatures in an Ar/N2 Shock Plasma Jet Produced by a Low Pressure DC Cascade Arc Discharge

In this paper, a low pressure Ar/N2 shock plasma jet with clearly multicycle al- ternating zones produced by a DC cascade arc discharge has been investigated by an emission spectral method combined with Abel inversion analysis. Plasma emission intensity, electron, vi- brational and rotational temperatures of the shock plasma have been measured in the expansion and compression zones. The results indicate that the ranges of the measured electron temperature, vibrational temperature and rotational temperature are 1.1 eV to 1.6 eV, 0.2 eV to 0.7 eV and 0.19 eV to 0.22 eV, respectively, and it is found for the first time that the vibrational and rota- tional temperatures increase while the electron temperature decreases in the compression zones. The electron temperature departs from the vibrational and the rotational temperatures due to non-equilibrium plasma effects. Electrons and heavy particles could not completely exchange energy via collisions in the shock plasma jet under the low pressure of 620 Pa or so.

Time-Resolved Emission Spectroscopic Study of Laser-Induced Steel Plasmas

Laser-induced steel plasma is generated by focusing a Q-switched Nd：YAG visible laser（532 nm wavelength） with an irradiance of 1 x 109 W/cm2 on a steel sample in air at atmospheric pressure.An Echelle spectrograph coupled with a gateable intensified charge-coupled detector is used to record the plasma emissions.Using time-resolved spectroscopic measurements of the plasma emissions,the temperature and electron number density of the steel plasma are determined for many times of the detector delay.The validity of the assumption by the spectroscopic methods that the laser-induced plasma（LIP） is optically thin and is also in local thermodynamic equilibrium（LTE） has been evaluated for many delay times.From the temporal evolution of the intensity ratio of two Fe I lines and matching it with its theoretical value,the delay times where the plasma is optically thin and is also in LTE are found to be 800 ns,900 ns and 1000 ns.

Exploration of a MgO cathode for improving the intensity of pulsed discharge plasma at atmosphere

With regard to the lower density and energy of electrons in pulsed discharge plasma （PDP） at atmosphere, leading to the lower energy utilization of plasma, we propose a MgO cathode to enhance the plasma intensity according to field emission principle. The MgO cathode is prepared by an electro-depositing MgO film on a stainless steel plate. This way, the positive charges come to the cathode and accumulate on the surface of the MgO film, leading to the enhancement of the electric field intensity between the cathode and MgO film, and result in the strong emission of secondary electrons from the MgO cathode. As a result, the intensity of plasma can be enhanced. Herein, the effect of the MgO cathode on the intensity of PDP is investigated. It was shown that the discharge peak current was improved by 20% compared with that of without the MgO cathode. With increasing the MgO film thickness, discharge intensity, including the peak current, transforming charge and spectrum intensity first increased and then decreased. Higher enhancement of peak current, transforming charge and spectrum intensity were acquired with a higher peak voltage. Compared to a cathode without MgO film, the ozone production is higher with MgO cathode employed. The research proposes a novel approach for improving the intensity of discharge plasma, and also provides a reference for further application of PDP.

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system.The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera.The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry.An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm.The laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.

Variation of Radiation Emission with Argon Gas Pressure in UM Plasma Focus with the Hollow Anode

A Plasma Focus device (2.2 kJ, 12 kV) is studied as a pulsed X-ray source, operated with Argon at a filling pressure in the range of 0.7 to 2.5 mbar. The time resolved X-ray signals are measured with an array of PIN diode detectors. The X-ray emission produced by the plasma focus discharge at various pressures is investigated and compared. It is found that at the high pressure regime of more than 1.5 mbar, very consistent and high output of X-ray radiation is obtained, at the peak of the discharge current. A remarkable increase of about five times of the average X-ray yield is achieved at optimum pressure 1.7 mbar compared to that obtained at other pressures. An indirect method to determine the electron temperature of the plasma is achieved by using the array of 5 channel PIN diode detector coupled with Al foil of different thicknesses. The result shows that the electron temperature of the plasma is 7 keV, when the operating pressure is at 1.7 mbar. The maximum total X-ray yield is about 2.53 mJ per shot at optimum pressure, equivalent to the efficiency of 0.00012%.

Characteristics of Laser Produced Plasmas Obtained by Fast ICCD Photography, Schlieren Photography and Optical Emission Spectroscopy

Pulsed laser produced plasmas(LPP)are important for industrial applications and fundamental researches,and their complex,multi-physical and cross-chemical processes need to be investigated more comprehensively.In this work,images of the luminous plasma,the spatial density distribution,and the plasma parameters are experimentally investigated by using fast ICCD photography,schlieren photography,and optical emission spectroscopy.Plasmas are produced by a 1 064 nm,15 ns Nd:YAG laser.Free expanding and splitting phenomena are observed in vacuum(at the pressure of about 1×10 3Pa)and air(at the pressure of 20 Pa)using fast photography,respectively.Meanwhile,shock waves formed in the atmospheric laser produced plasma are visualized by schlieren photography.The formation of shock waves is interpreted with the Sedov-Taylor theory,and an averaged expansion velocity about 375 m/s of the shock waves is estimated during 200～1 000 ns.Atmospheric air is found to have significant confinement effects on the plasma expansions compared to that in vacuum or low pressure ambient.Based on the optical emission spectroscopy,after 1 000 ns,at 0.6 mm above the target,the plasma temperature is about 7 800 K and the electron number density is approximately 0.64×1016cm-3.

Plasma parameter diagnosis using hydrogen emission spectra of a quartz-chamber 2.45 GHz ECRIS at Peking University

A quartz-chamber 2.45 GHz electron cyclotron resonance ion source(ECRIS) was designed for diagnostic purposes at Peking University [Patent Number: ZL 201110026605.4]. This ion source can produce a maximum 84 m A hydrogen ion beam at 50 k V with a duty factor of 10%. The root-mean-square(RMS) emittance of this beam is less than 0.12π mm mrad. In our initial work,the electron temperature and electron density inside the plasma chamber had been measured with the line intensity ratio of noble gases. Based on these results, the atomic and molecular emission spectra of hydrogen were applied to determine the dissociation degree of hydrogen and the vibrational temperature of hydrogen molecules in the ground state, respectively. Measurements were performed at gas pressures from 4×10^(-4) to 1×10^(-3) Pa and at input peak RF power ranging from 1000 to 1800 W. The dissociation degree of hydrogen in the range of 0.5%-10% and the vibrational temperature of hydrogen molecules in the ground state in the range of 3500-8500 K were obtained. The plasma processes inside this ECRIS chamber were discussed based on these results.

Spectroscopic Studies of the Laser Produced Lead Plasma

Spectroscopic emission of lead plasma, generated by the fundamental （1064 nm） and second harmonics （532 nm） of a Q-switched pulsed Nd： YAG laser, is studied. The spectral lines of neutral atoms and singly ionized lead ions were shown predominantly. The profiles of neutral lead lines observed were used to extract the excitation temperature using Boltzmann plots, whereas electron number density was determined from the profile of Stark broadened line. The variations of excitation temperature and electron number density as a function of laser energy were studied.

Characteristics of Low Power CH_4/Air Atmospheric Pressure Plasma Jet

A low power atmospheric pressure plasma jet driven by a 24 kHz AC power source and operated with a CH4/air gas mixture has been investigated by optical emission spectrometer. The plasma parameters including the electron excitation temperature, vibrational temperature and rotational temperature of the plasma jet at different discharge powers are diagnosed based on the assumption that the kinetic energy of the species obeys the Boltzmann distribution. The electron density at different power is also investigated by HS Stark broadening. The results show that the plasma source works under non-equilibrium conditions. It is also found that the vibrational temperature and rotational temperat;ure increase with discharge power, whereas the electron excitation temperature seems to have a downward trend. The electron density increases from 0.8×10^21 m^-3 to 1.1×10^21 m^-3 when the discharge power increases from 53 W to 94 W.

Plasma Characteristic of Lightning Discharge Channel

The plasma characteristics of a lightning discharge channel are reviewed.The spectrum of the natural lightning is investigated by employing the slit-less spectrograph.It is found that the spectrum characteristics are closely related to the intensity of the lightning discharge.The lines in the lightning spectrum are classified into essential lines and characteristic lines,according to the characteristics of lightning spectra with different intensities.The characteristics of the lightning channel and the radiation of the lighting plasma are analyzed in the visible and infrared regions.It is shown that,the visible spectrum of lightning is determined by the radiation generated from the early stage to the development of lightning,while the near-infrared spectrum is determined by the radiation generated after current of lightning reaches the peak.The channel temperature and the electron density are calculated using the information obtained from the lightning spectrum.Both the temperature and the density decrease with the increasing length of lightning channel.Moreover,X-rays and neutrons are produced in the process of lighting mainly due to the pinch effects.

Electron-Proton Pairing at High Temperatures, Solar Flares, and the FIP Effect

We analyze the line data from solar flares to present evidence for the emission spectrum of the recently discussed electron-proton pairs at high temperatures. We also point out that since the pairing phenomenon provides an additional source for these lines—the conventional source being the highly ionized high-Z atoms already existing in the solar atmosphere, we have a plausible explanation of the FIP effect.

基于发射光谱的绝缘油中放电参数时间演化特性

为了研究绝缘油中击穿放电通道参数演化过程,搭建了绝缘油中放电发射光谱诊断平台,通过实验得到绝缘油中微秒级击穿放电过程的典型发射光谱和时间演化发射光谱,分别使用Stark展宽法和Boltzmann点法对绝缘油中放电等离子体通道的电子数密度和电子温度时间演化特性进行诊断。从绝缘油中放电击穿的典型发射光谱中可观察到H_(α)谱线、C_(2)斯旺带和电极金属原子发射谱线。对比放电电流波形与时间演化发射光谱可发现电流强度与光谱强度呈正相关。放电等离子体通道参数诊断结果表明:电子数密度在放电1~2μs时达到峰值1.12×10^(18)cm^(-3),18μs后稳定在10^(17)cm^(-3)量级;整个放电过程电子温度在7000~8200K范围内波动,总体呈上升趋势;根据参数诊断结果可判断绝缘油中放电等离子体通道处于局部热力学平衡状态。

Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

In this paper,a CO_(2) laser induced discharge plasma extreme ultraviolet(EUV)source experimental device was established.The optical emission spectroscopy was used to diagnose the characteristics of the plasma,and the evolution of electron temperature and electron density with time was obtained.The influence of discharge voltage on plasma parameters was analyzed and discussed.The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer.The EUV radiation intensity and conversion efficiency were discussed.

远程Ar等离子的发射光谱研究

远程等离子体可以有效避免电子与离子碰撞产生的刻蚀作用,加强自由基反应,取得更好的改性效果,在膜材料领域具有重要的应用价值。为了更加深入研究远程等离子体中电子状态及其变化规律,采用发射光谱法对远程Ar等离子体进行了诊断,研究了射频功率、反应腔室内压强、距放电中心距离对远程Ar等离子体发射光谱强度、电子密度和电子温度的影响。结果表明,在690~890 nm区域中特征峰较为集中,由ArⅠ原子谱线占主导,且谱线强度的变化规律和电子密度的变化规律相同。通过玻尔兹曼斜率法选取3条ArⅠ谱线计算了不同放电参数下的电子温度。电子温度随射频功率、反应腔室内压强、距放电中心距离的改变而改变。射频功率从30 W增加到150 W时,电子温度从3105.39 K降低至2552.91 K。压强从15 Pa增加到25 Pa时,电子温度从3066.53 K降低到2593.32 K,当压强继续增加到35 Pa时,电子温度则增加至2661.71 K。在距放电中心0~10 cm处由于等离子体电位增大,电子温度上升,而10 cm后电子温度不断下降在距放电中心80 cm处趋于0 K。通过分析ArⅠ696.894谱线的斯塔克展宽计算了远程Ar等离子体的电子密度,发现电子密度的数量级可达10^(16)cm^(-3)。射频功率从30 W增加到150 W时,电子密度从2.15×10^(16)cm^(-3)增加到2.88×10^(16)cm^(-3),压强从15 Pa增加到25 Pa时,电子密度从2.36×10^(16)cm^(-3)增加到2.90×10^(16)cm^(-3),当压强继续增加到35 Pa时,电子密度则降低至1.89×10^(16)cm^(-3)。增加轴向距离电子密度快速下降并在距放电中心80cm处趋于0cm^(-3)。可以通过控制放电参数及轴向距离来获得低浓度电子、离子氛围,有效避免电子与离子碰撞造成的刻蚀作用,获得更好的改性效果。

不同样品温度下激光诱导等离子体的空间分辨光谱

激光诱导击穿光谱(LIBS)已成为一种很好的材料含量鉴定技术,当前LIBS研究的一个热点方向是提高其检测灵敏度。在改善LIBS分析灵敏度时,最主要的是增加激光烧蚀等离子体(LAP)的光辐射,如火花放电辅助LIBS、磁场增强LIBS、空间约束LIBS、火焰增强的LIBS、共振增强LIBS和双脉冲LIBS。此外,升高烧蚀靶的温度也是提高LIBS光辐射和灵敏度的有效方法,因为烧蚀靶温度升高,其表面反射率降低,这能增强激光与靶之间的耦合。温度升高的靶将耦合更多的脉冲能量,从而增强LAP光辐射。另外,在靶温度升高后,靶也能加热其表面附近的气体,导致气体密度降低,气体密度的降低可以减少LAP与气体之间的碰撞,LAP膨胀过程中压力降低,从而间接地增加了LAP的光谱强度。加热的靶可以显著改善光谱发射强度,但这些研究仅给出了空间积分的光谱,没有进行空间分辨的光谱分析,而LAP光谱的空间分布将会随靶材温度的变化而变化。因此,有必要研究升高靶温度对LAP空间分辨光发射的影响。将铜靶加热到更高的温度,用Nd∶YAG激光器激发铜产生激光烧蚀的LAP。通过测量LAP发射,发现预热铜产生的LAP发射强度高于室温下的发射强度。对于空间分辨LAP光谱,发射强度随着离铜靶距离的增加先升高而后降低;靶温度也影响等离子体光谱的空间分布,与未加热的铜相比,预加热靶的空间分辨光谱发射区域移动到距离靶表面更远的位置。另外,根据空间分辨的光谱计算了电子温度和密度随距离铜靶的变化,空间分辨电子温度和密度的分布与发射强度相似,随着靶温度的升高高温高密度的等离子体进一步膨胀了。

基于发射光谱法的氩等离子体射流诊断研究

利用等离子体进行材料表面处理,其电子温度和电子密度会对材料表面的活性成分产生重要影响。为研究等离子体射流电子温度和电子密度,采用针-环电极结构搭建等离子体放电及光谱诊断试验平台,在大气中实现稳定等离子体射流;利用光谱仪采集氩等离子体的光谱数据,分别采用玻尔兹曼曲线斜率法和斯塔克展宽法计算,并对比分析等离子体射流尖端、射流尖端有无铜箔时等离子体射流的不同轴向位置、铜箔到射流喷口不同距离时射流作用在铜箔表面的电子温度和电子密度变化规律。结果表明:输入电压升高会导致电子温度升高,电子密度降低;等离子体电子温度随轴向距离增加而降低,电子密度随轴向距离先略微升高然后降低。尖端放置铜箔会在一定范围内对电子温度电子密度数值产生影响。当铜箔到射流喷口距离增加时,铜箔表面电子温度先上升后下降,电子密度先下降后上升。且外施电压增加,电子温度达到最大值的位置和电子密度达到最小值的位置到喷口距离越来越远。