Etching characteristics and surface modification of InGaSnO thin films under Cl_(2)/Ar plasma

Indium gallium tin oxide(IGTO)thin films have the potential for high mobility and lowtemperature processing,which makes them suitable for applications such as display backplanes and high-voltage switching devices.However,very few studies have investigated the plasmaetching characteristics of IGTO and changes in its properties after etching.In this study,the etching characteristics of IGTO were investigated using Cl_(2)/Ar plasma,and changes in surface properties were analyzed.Results showed that the etch rate increased with an increase in the proportion of Cl_(2),with the highest etch rate observed at 69 nm min^(-1)in pure Cl_(2)plasma with a gas flow rate of 100 sccm.Furthermore,increased radio-frequency power caused a rise in the etch rate,while a process pressure of 15 m Torr was optimal.The primary etching mechanism for IGTO thin films under Cl_(2)plasma was a chemical reaction,and an increased work function indicated the occurrence of defects on the surface.In addition,the etching process reduced the surface roughness of Cl_(2)-containing plasma,whereas the etching process in pure Ar plasma increased surface roughness.This study contributes to a better understanding of the plasmaetching characteristics of IGTO and changes in its properties after etching,providing valuable insights for IGTO-based applications.

Influence of air addition on surface modification of polyethylene terephthalate treated by an atmospheric pressure argon plasma brush

An atmospheric pressure argon plasma brush with air addition is employed to treat polyethylene terephthalate(PET)surface in order to improve its hydrophilicity.Results indicate that the plasma plume generated by the plasma brush presents periodically pulsed current despite a direct current voltage is applied.Voltage-current curve reveals that there is a transition from a Townsend discharge regime to a glow one during one discharge period.Optical emission spectrum indicates that more oxygen atoms are produced in the plume with increasing air content,which leads to the better hydrophilicity of PET surface after plasma treatment.Besides,an aging behavior is also observed.The hydrophilicity improvement is attributed to the production of oxygen functional groups,which increase in number with increasing air content.Moreover,some grain-like structures are observed on the treated PET surface,and its mean roughness increases with increasing air content.These results are of great importance for the hydrophilicity improvement of PET surface with a large scale.

The Aging Study on Polyethylene Terephthalate with Surface Modification by Water Vapor Plasma

The aging effects of the contact angle and surface energy on polyethylene terephthalate (PET) have been investigated with surface modification by water vapor plasma. The experimental results show that the contact angle of water and PET decreases obviously and surface energy increases. However, with the increase of the aging time, the contact angle and surface energy change back gradually to original state.

Compounded Surface Modification of ZK60 Mg Alloy by High Current Pulsed Electron Beam+Micro-plasma Oxidation

In this study, compounded surface modification technology-high current pulsed electron beam （HCPEB） ＋ micro-plasma oxidation （MPO） was applied to treat ZK60 Mg alloys. The characteristics of the microstructure of ZK60 Mg alloy after single MPO and HCPEB＋MPO compounded treatment were investigated by SEM. The results showed that the density of the ceramic layer of HCPEB＋MPO-treated ZK60 Mg alloy was improved and defects were reduced compared to that under MPO treatment alone. Surface modified layer of ZK60 Mg alloys treated by HCPEB＋MPO was divided into three zones, namely the top loose ceramic zone, middle compact zone and inside HCPEB-induced melted zone. Corrosion resistance of ZK60 Mg alloy before and after the compounded surface modification was measured in a solution of 3.5% NaCl by potentiodynamic polarization curves. It was found that the corrosion current density of ZK60 Mg alloys could be reduced by about three orders of magnitude, from 311μA/cm^2 of the original sample to 0.2μA/cm^2 of the HCPEB＋MPO-treated sample. This indicates the great application potential of the HCPEB＋MPO compounded surface modification technology in improving the corrosion resistance of ZK60 Mg alloys in the future.

Modeling of Inner Surface Modification of a Cylindrical Tube by Plasma-Based Low-Energy Ion Implantation

The inner surface modification process by plasma-based low-energy ion implantation（PBLEII）with an electron cyclotron resonance（ECR）microwave plasma source located at the central axis of a cylindrical tube is modeled to optimize the low-energy ion implantation parameters for industrial applications.In this paper,a magnetized plasma diffusion fluid model has been established to describe the plasma nonuniformity caused by plasma diffusion under an axial magnetic field during the pulse-off time of low pulsed negative bias.Using this plasma density distribution as the initial condition,a sheath collisional fluid model is built up to describe the sheath evolution and ion implantation during the pulse-on time.The plasma nonuniformity at the end of the pulse-off time is more apparent along the radial direction compared with that in the axial direction due to the geometry of the linear plasma source in the center and the difference between perpendicular and parallel plasma diffusion coefficients with respect to the magnetic field.The normalized nitrogen plasma densities on the inner and outer surfaces of the tube are observed to be about 0.39 and 0.24,respectively,of which the value is 1 at the central plasma source.After a 5μs pulse-on time,in the area less than 2 cm from the end of the tube,the nitrogen ion implantation energy decreases from 1.5 keV to 1.3 keV and the ion implantation angle increases from several degrees to more than 40°;both variations reduce the nitrogen ion implantation depth.However,the nitrogen ion implantation dose peaks of about 2×10^（10）-7×10^（10）ions/cm^2 in this area are 2-4 times higher than that of 1.18×10^（10）ions/cm^2 and 1.63×10^（10）ions/cm^2 on the inner and outer surfaces of the tube.The sufficient ion implantation dose ensures an acceptable modification effect near the end of the tube under the low energy and large angle conditions for nitrogen ion implantation,because the modification effect is mainly determined by the ion implantation dose,just as the mass transfer process in PBLEII is dominated by low-energy ion implantation and thermal diffusion.Therefore,a comparatively uniform surface modification by the low-energy nitrogen ion implantation is achieved along the cylindrical tube on both the inner and outer surfaces.

STUDY ON THE SURFACE MODIFICATION OF NANOMETER CARBON PARTICLES IN ATMOSPHERIC PLASMA

The surface modification of nanometer carbon material has been studied by using an Induced Dielectric Barrier Discharge Plasma device (IDBD). The experimental results show that with different work gases and different discharge conditions, the surface behaviors of carbon black can be changed according to needs, including the use of different functional groups and the change of the surface roughness of carbon particles etc., which increased the grinding and dispersion abilities in binder.

Investigation of biomass surface modification using non-thermal plasma treatment

The effects of non-thermal plasma （NTP） treatment on biomass in the form of pulverized palmbased empty fruit bunches （EFB） are investigated. Specifically, this study investigates the effects of NTP treatment on the surface reactivity, morphology, oxygen-to-carbon （O/C） ratio of the EFB at varying treatment times. The surface reactivity is determined by the reaction of antioxidant functional groups or reactive species with 2,2-diphenyl-l-picrylhydrazyl （DPPH）. By measuring the concentration of the DPPH with a spectrophotometer, the change in the amount of antioxidant functional groups can be measured to determine the surface reactivity. The reactions of the various lignin components in the EFB with respect to the NTP treatment are discussed by qualitatively assessing the changes in the Fourier transform infrared （FTIR） spectra. The surface morphology is examined by a scanning electron microscope. To determine the amount of oxygen deposited on the EFB by the air-based NTP treatment, the oxygen and carbon contents are measured by an energy dispersive x-ray detector to determine the O/C ratio. The results show that the NTP reactor produced reactive species such as atomic oxygen and ozone, increasing the surface reactivity and chemical scavenging rate of the EFB. Consequently, the surface morphology changed, with an observed rougher surface from the images of the EFB samples. The change in the appearance of the surface is accompanied by a high O/C ratio, and is caused by reactions of certain components of lignin due to the NTP treatment, The lignin component that was modified is believed to be syringyl, as the syringyl portion in the lignin of EFBs is higher compared to the other components. Syringyl components are detected in the range of F-FIR wavenumbers of 1109-1363 cm-1. With increasing NTP treatment times, the absorbance （of the peaks in the PTIR spectra） for syringyl related C-H and lignin associated C=C bonds decreases as the syringyl decomposes. The resulting release of carboxyl compounds increases the absorbance for the carbonyl C=O group. The results show that NTP treatment is able to modify the surface properties of EFB, and that the surface reactivity can be increased to improve their conversion and processing efficiencies.

Investigation on the Effects and Mechanisms of PTFE Surface Modification by Low Pressure Plasma

Using argon as the work gas, the effects and mechanisms of poly（tetrafluoroethylene） （PTFE） film surface modification were investigated in a low pressure plasma reactor. Results show that higher hydrophilicity with little degradation, in terms of the scanning electron microscopy （SEM）, was obtained after treatment, especially when the sample was placed in the post-discharge area. More polar functional groups and higher surface free energy, especially the polar component, formed on the PTFE surface were responsible for the modification. For the relatively high purity radicals and rare discharge particles in the post-discharge area, the etching was restrained and the introducing reactions were enhanced, and thus, a better modification occurred there.

Comparison of Surface Modification of CR-39 Polymer Film Using RF and DC Glow Discharges Plasma

Surfaces of optical elements are deposited by antireflection coatings (ARCs) to decrease the reflection of light. Surface needs treatment before depositing the ARC one of treatment processes by plasma for adhesion improvement and surface hardening. A comparison of RF and DC glow discharges treated CR-39 polymer films gives insight into the mechanism of these surface processes. The surface properties of the plasma-treated samples are examined by microscopy techniques include contact angle measurements, scanning electron microscopy (SEM), atomic force microscopy (AFM), infrared (IR) spectroscopy and refractive index measurements. Results show that the plasma treatment modifies the polymer surface in both composition and morphology. It is found that the surface wettability is enhanced after plasma treatment. It is found that, RF plasma is more effective than DC plasma in CR-39 surface modification, as it implants more oxygen atoms into the surface and makes the contact angle declining to a lower level.

Investigation of Atmospheric Plasma Discharge and Its Application to Surface Modification of Textile Materials

In this paper, an improved quasi-stable atmospheric pressure dielectric barrier discharge (DBD) plasma source is achieved after carefully controlled discharge voltage and current, discharge power, working gas, treatment period, and gap between the electrodes. This plasma source has been used to modify the surface of Polybutylene Terephthalate (PBT) melt-blown nonwovens and Polyester (PET) fabrics, and the various influences on surface modification and the aging effect of treated polymeric materials have been systematically investigated. In addition, the method of spectrum analysis is also used for diagnosing plasma parameters such as electron temperature. Experimental results indicate that both the wettablity and permeation of treated PBT melt-blown nonwovens and dyeing ability of treated PET fabrics are certainly improved.

All-organic modification coating prepared with large-scale atmospheric-pressure plasma for mitigating surface charge accumulation

The surface charge accumulation on polymers often leads to surface flashover.Current solutions are mainly based on the introduction of inorganic fillers.The high-cost process and low compatibility remain formidable challenges.Moreover,existing researches on all-organic insulation focus on capturing electrons,contrary to alleviating charge accumulation.Here,an all-organic modification coating was prepared on polystyrene(PS)with the large-scale atmospheric-pressure plasma,which exhibits outperformed function in mitigating surface charge accumulation.The surface charge dissipation rate and surface conductivity are promoted by about 1.37 and 9.45 times,respectively.Simulation and experimental results show that this all-organic modification coating has a smaller electron affinity potential compared with PS.The decrease of electron affinity potential may result in accelerated surface charge decay of PS,which has never been involved in previous works.Moreover,this coating also has good reliability in a repeated surface flashover.This facile and large-scale approach brings up a novel idea for surface charge regulation and the manufacture of advanced dielectric polymers.

Surface Modification of NiTi Alloy via Cathodic Plasma Electrolytic Deposition and its Effect on Ni Ion Release and Osteoblast Behaviors

To reduce Ni ion release and improve biocompatibility of NiTi alloy, the cathodic plasma electrolytic deposition （CPED） technique was used to fabricate ceramic coating onto a NiTi alloy surface. The formation of a coating with a rough and micro-textured surface was confirmed by X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy, re- spectively. An inductively coupled plasma mass spectrometry test showed that the formed coating significantly reduced the release of Ni ions from the NiTi alloy in simulated body fluid. The in- fluence of CPED treated NiTi substrates on the biological behaviors of osteoblasts, including cell adhesion, cell viability, and osteogenic differentiation function （alkaline phosphatase）, was inves- tigated in vitro. Immunofluorescence staining of nuclei revealed that the CPED treated NiTi alloy was favorable for cell growth. Osteoblasts on CPED modified NiTi alloy showed greater cell viability than those for the native NiTi substrate after 4 and 7 days cultures. More importantly, osteoblasts cultured onto a modified NiTi sample displayed significantly higher differentiation lev-els of alkaline phosphatase. The results suggested that surface functionalization of NiTi alloy with ceramic coating via the CPED technique was beneficial for cell proliferation and differentiation. The approach presented here is useful for NiTi implants to enhance bone osseointegration and reduce Ni ion release in vitro.

Formation of carbon and oxygen rich surface layer on high purity magnesium by atmospheric carbon dioxide plasma

Carbon and oxygen-rich corrosion barrier layer formed on Mg by a simple and scalable CO_(2) atmospheric plasma(CO_(2)-AP)process.The reactive CO_(2)-AP interacts with the Mg surface and forms a unique layered structure with the top MgCO_(3)/MgO-intermixed particulates pillars and the bottom dense layer.The surface features were simultaneously formed on the nano-/micro-structured MgO layer by carbonate molecules,plasma-active CO_(2) molecules,and/or other volatile organic compounds on the nano-/micro-structured MgO particle layer.The resulting surfaces after CO_(2)-AP were either hydrophobic or hydrophilic and exhibited lower anodic current or high resistance for Mg corrosion.For the hydrophobic surfaces of CO_(2)-AP treated Mg,molecular dynamic simulations were performed to understand the origin of hydrophobicity and identified that the amorphous carbon layers formed on the Mg surface are the source.The environmentally benign abundant-gas-based process enables the cost reduction associated with waste treatment,generation of by-product,and supply of raw material.

Effect of plasma step gradient modification on surface electrical properties of epoxy resin

In this paper,plasma fluorination is combined with plasma silicon deposition to achieve step gradient modification on an epoxy resin surface.The physicochemical characteristics of samples are investigated and the electrical performances measured.The obtained results show that compared with untreated and single treated samples,the samples treated by step gradient modification significantly improve the flashover performance.According to experiment and simulation,the mechanism explanations are summarized as follows.First,it is found that the step gradient conductivity can effectively optimize the electric field distribution of a needle-needle electrode.Then,step gradient modification suppresses the accumulation of surface charge at the triple junction and makes the charge distribution more uniform.Furthermore,it can accelerate the surface dissipation on a high electrical field region and control the dissipation rate on a low electrical field region.All these results can restrain surface discharge and increase the flashover voltage.The step gradient modification method proposed in this paper provides a new idea for improving the surface insulation performance.

Enhancing surface adhesion of polytetrafluoroethylene induced by two-step in-situ treatment with radiofrequency capacitively coupled Ar/Ar+CH_(4)+NH_(3) plasma

Although some progress in plasma modification of the polytetrafluoroethylene(PTFE) surface has been made recently,its adhesion strength still needs to be further improved.In this work,the surface of a PTFE sample was treated with a two-step in-situ method.Firstly,the PTFE surface was treated with capacitively coupled Ar plasma to improve its mechanical interlocking performance;then,Ar+NH_(3)+CH_(4) plasma was used to deposit an a-CNx:H cross-linking layer on the PTFE surface to improve the molecular bonding ability.After treatment,a high specific surface area of 2.20 and a low F/C ratio of 0.32 were achieved on the PTFE surface.Its surface free energy was increased significantly and its maximum adhesion strength reached77.1 N·10 mm^(-1),which is 56% higher than that of the single-step Ar plasma-treated sample and32% higher than that of the single-step Ar+CH_(4)+NH_(3) plasma-treated sample.

Surface modification of silicone rubber by CF4 radio frequency capacitively coupled plasma for improvement of flashover

The flashover performance of insulating materials plays an important role in the development of high-voltage insulation systems.In this paper,silicone rubber(SIR)is modified by CF4 radio frequency capacitively coupled plasma(CCP)for the improvement of surface insulation performance.The discharge mode and active particles of CCP are diagnosed by the digital single-lens reflex and the spectrometer.Scanning electron microscopy and x-ray photoelectron spectroscopy are used for the surface physicochemical properties of samples,while the surface charge dissipation,charge accumulation measurement,and flashover test are applied for the surface electrical characteristics.Experimental results show that the fluorocarbon groups can be grafted and the surface roughness increases after plasma treatment.Besides,the surface charge dissipation is decelerated and the positive charge accumulation is inhibited obviously for the treated samples.Furthermore,the surface flashover voltage can be increased by 26.67%after 10 min of treatment.It is considered that strong electron affinity of C–F and increased surface roughness can contribute to deepening surface traps,which not only inhibits the development of secondary electron emission avalanche but also alleviates the surface charge accumulation and finally improves the surface flashover voltage of SIR.

Surface Modification of Biodegradable Poly(D,L-lactic acid) by Nitrogen and Nitrogen/Hydrogen Plasma for Improving Surface Hydrophilicity

Enhancement of the surface hydrophilicity of biodegradable poly （D,L-lactic acid） （PLA） films is studied. The PLA films were treated by nitrogen plasma （PLA-N2） and nitro- gen/hydrogen plasma （PLA-N2/H2）, respectively. The surface properties and microstructure of PLA-N2 and PLA-N2/H2 were studied by static contact angle measurement, surface free energy calculation, X-ray photoelectron spectroscopy （XPS） and atomic force microscopy （AFM）. It is confirmed that the surface hydrophilicity of PLA-N2 and PLA-N2/H2 was higher than that of pristine PLA, and the surface hydrophilicity of PLA-N2 films was better than that of PLA-N2/H2.

Surface Modification of Poly Vinyl Chloride (PVC) Using Low Pressure Argon and Oxygen Plasma

In this study, commercial poly vinyl chloride （PVC） films were treated by oxygen and argon plasmas in a cylindrical glass tube which was surrounded by a DC variable magnetic field, with different sample positions in the plasma reactor and also different exposure durations. Effects of the plasma treatment on the hydrophilic properties of the films were studied by mea- suring the water drop contact angle on the surface of the samples. The surface topography of the untreated and plasma treated films was analyzed and compared by atomic force microscopy （AFM）. The optical characteristic changes in treated samples were investigated using reflective spectrophotometry. Also, the chemical changes which appeared on the surface of the samples were investigated using Fourier transform infrared spectroscopy （FTIR）. The results show that the plasma treated PVC becomes more hydrophilic with an enhanced wettability. A sharp de- crease in the water contact angle may also be a consequence of the surface texturization. The aging effect on wettability of the samples was also investigated. The results show that the effect of oxygen plasma on the surface properties of the samples is more pronounced compared with that of argon plasma.

Surface Modification of Electrospun Poly(L-lactide)/Poly(ε-caprolactone)Fibrous Membranes by Plasma Treatment and Gelatin Immobilization

Biopolymer fibers have great potential for technical applications in biomaterials.The surface properties of fibers are of importance in these applications.In this study,electrospun poly(L-lactide)(PLLA)/poly(ε-caprolactone)(PCL)membranes were modified by cold plasma treatment and coating gelatin to improve the surface hydrophilic properties.The morphologies of the fibers were observed by scanning electron microscopy(SEM).Atomic force microscopy(AFM)was employed to show the surface characteristics of the fibers.The chemical feature of the fibrous membrane surfaces was examined by X-ray photoelectron spectroscopy(XPS).The surface wettability of the fibrous membrane was also characterized by water contact angle measurements.All these results show that plasma treatment can have profound effects on the surface properties of fibrous membranes by changing their surface physical and chemical features.Gelatin-PLLA/PCL membrane has great potential in applications of tissue engineering scaffolds.