Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP...Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP） source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ＇convex＇ shape and ＇saddle＇ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC q- RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.展开更多
基金supported by National Natural Science Foundation of China under Grant No. 11475038
文摘Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP） source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ＇convex＇ shape and ＇saddle＇ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC q- RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.
