Formation and Characterization of Pd,Pt and Pd-Pt Alloy Films on Polyimide by Catalyst-Enhanced Chemical Vapor Deposition

Platinum, palladium and their alloy films on polyimide were formed by catalyst-enhanced chemical vapor deposition （CVD） in the carrier gas （N2, O2） at 220-300℃ under reduced pressure and normal pressure. The deposition of palladium complexes [ Pd（（η3-allyl）（hfac） and Pd（hfac）2 ] gives pure palladium film, while the deposition of platinum needs the enhancement of palladium complex by mixing precursor platinum complex Pt（COD）Me2 and palladium complex in the same chamber. The co-deposition of Pd and Pt metals was used for the deposition of alloy films. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios vary under different co-deposition conditions. These metal films were characterized by XPS and SEM, and show a good adhesive property.

Abnormal IR Spectra of CO Adsorbed on the Surface of Glass Carbon Electrode Modified with Polypyrrole Film with Platinum Microparticles

Abnormal IR spectra of CO adsorbed at the surface of glass carbon electrode modified with polypyrrole film with Pt microparticles are reported.

Skin temperature measurement method

To improve the accuracy of skin temperature measurements in thermal comfort research,a new measurement method based on a new thermometer is proposed.A platinum film resistance（Pt1000）sensor of the thermometer is welded on a printed circuit board to eliminate the heat loss from the leads and avoid the influence of the surrounding thermal environment.In order to determine the suitable thickness of the board,a steady heat conduction model is established.The simulation results reveal that when the thickness of the board is 0.2 mm,the influence of the surrounding air can be effectively prevented and the skin temperature does not obviously increase.The experimental results of verification show that the maximum measurement error of the skin temperature measured by the thermometer is 0.24 ℃,and the average measurement error of the skin temperature is 0.04 ℃.The proposed method provides an effective and reliable option for the skin temperature measurement in thermal comfort research.

AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications

Surface acoustic wave（SAW） resonators with Pt/AlN/Si and Pt/AlN/Pt/Si configurations were fabricated by lift-off photolithography techniques. High-temperature performances of both configurations were investigated for temperature sensor applications. AlN films grown on Ptcoated Si substrates exhibit a lower（002） preferred orientation than those grown on Si substrates. The center frequencies of Pt/AlN/Si and Pt/AlN/Pt/Si configurations at room temperature are 424.1 and 456.4 MHz, respectively.The SAW was limited by Pt bottom electrodes to propagate in AlN layer. The temperature coefficient of frequency（TCF） values of Pt/AlN/Si and Pt/AlN/Pt/Si configurations are-51.6 × 10^-6 and-69.2 × 10^-6℃^-1, respectively.Compared with that of Pt/AlN/Si configuration, the TCF value of Pt/AlN/Pt/Si configuration decreases by 34.1 %.AlN resonator with the Pt floating bottom electrodes provides a large, quasi-constant temperature sensitivity which is suitable for temperature sensor applications.

Application of low-emissivity Pt layer on Ni alloy to high temperature

Platinum films were sputter-deposited on two groups of nickel alloy substrates, in which the first group was the samples with rough surface, and the other group with polished surface. The platinum thin-films were applied to serve as the low-emissivity layers to reflect thermal radiation. Then, the platinum-coated samples were heated in air at 600 ℃ for 200 h to explore the effect of high-temperature environment on the emissivity of coated platinum film. After annealing, the average IR emissivity （at the wavelength of 3-14 μm） of the platinum film was only about 0.1 for polished sample and 0.45 for rough sample. The diffusion between platinum and the nickelalloy elements at 600 ℃ had been also discussed.