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PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM 被引量:1
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作者 Y.F.Hu H.Shen +1 位作者 Z.Y.Liu L.S.Wen 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2003年第4期309-312,共4页
Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells. In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film, is discussed. ... Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells. In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film, is discussed. On the film we developed poly-crystalline silicon thin film solar cells with efficiency up to 6.05% without anti-reflection coating. 展开更多
关键词 poly-crystalline silicon thin film rtcvd (rapid thermal chem- ical vapor deposition) ssp (silicon sheet from powder)
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