Polycrystalline materials are extensively employed in industry.Its surface roughness significantly affects the working performance.Material defects,particularly grain boundaries,have a great impact on the achieved sur...Polycrystalline materials are extensively employed in industry.Its surface roughness significantly affects the working performance.Material defects,particularly grain boundaries,have a great impact on the achieved surface roughness of polycrystalline materials.However,it is difficult to establish a purely theoretical model for surface roughness with consideration of the grain boundary effect using conventional analytical methods.In this work,a theoretical and deep learning hybrid model for predicting the surface roughness of diamond-turned polycrystalline materials is proposed.The kinematic–dynamic roughness component in relation to the tool profile duplication effect,work material plastic side flow,relative vibration between the diamond tool and workpiece,etc,is theoretically calculated.The material-defect roughness component is modeled with a cascade forward neural network.In the neural network,the ratio of maximum undeformed chip thickness to cutting edge radius RT S,work material properties(misorientation angle θ_(g) and grain size d_(g)),and spindle rotation speed n s are configured as input variables.The material-defect roughness component is set as the output variable.To validate the developed model,polycrystalline copper with a gradient distribution of grains prepared by friction stir processing is machined with various processing parameters and different diamond tools.Compared with the previously developed model,obvious improvement in the prediction accuracy is observed with this hybrid prediction model.Based on this model,the influences of different factors on the surface roughness of polycrystalline materials are discussed.The influencing mechanism of the misorientation angle and grain size is quantitatively analyzed.Two fracture modes,including transcrystalline and intercrystalline fractures at different RTS values,are observed.Meanwhile,optimal processing parameters are obtained with a simulated annealing algorithm.Cutting experiments are performed with the optimal parameters,and a flat surface finish with Sa 1.314 nm is finally achieved.The developed model and corresponding new findings in this work are beneficial for accurately predicting the surface roughness of polycrystalline materials and understanding the impacting mechanism of material defects in diamond turning.展开更多
In this work, a kind of new vitrified bond based on Li2O-Al2O3-SiO2 glass ceramics was used to bond the diamond grains, which is made into grinding wheel and the cylindrical grinding process of polycrystalline diamond...In this work, a kind of new vitrified bond based on Li2O-Al2O3-SiO2 glass ceramics was used to bond the diamond grains, which is made into grinding wheel and the cylindrical grinding process of polycrystalline diamond compacts (PDCs) by using the new vitrified bond diamond grinding wheel was discussed. Several factors which influence the properties of grinding wheel such as amount of vitrified bond and the kinds and amount of stuff in grinding wheel were also investigated. It was found that the new vitrified bond can firmly combine diamond grains, when there are only diamonds and vitrified bond in the structure of grinding wheel, the longevity of the grinding wheel is about 2.5-3 times as that of resin bond grinding wheel for processing PDCs. The grinding size precision of PDCs can be improved from 4-0.03 mm to 4-0.01 mm because of larger Young's modulus of vitrified bond than resin bond. The grinding time of a PDC product can be 1.75-2.0 min from 3.25-3.5 min, so this kind of grinding wheel can save much time for processing PDCs. Also, there is hardly noise when using this new vitrified bond diamond grinding wheel to process PDCs. The amount of vitrified bond in grinding wheel influences the longevity of grinding wheel. When the size of diamond grains is 90-107 μm, the optimal amount of vitrified bond in grinding wheel is 21% (wt pct). When the amount of vitrified bond exceeds 21%, there are many pores in grinding block, which will decrease the longevity of grinding wheel. The existence of addition stuff such as Al2O3 or SiC can reduce the longevity of grinding wheel.展开更多
Thermal residual stresses in polycrystalline diamond compact(PDC)cutter arising from the difference in thermal expansion between the polycrystalline diamond(PCD)and the supporting tungsten carbide substrate after sint...Thermal residual stresses in polycrystalline diamond compact(PDC)cutter arising from the difference in thermal expansion between the polycrystalline diamond(PCD)and the supporting tungsten carbide substrate after sintering at high pressure and high temperature were investigated using finite element simulation,laboratory tests and theoretical analysis.The obtained results show that although compressive residual stresses exist both in the interface of PCD table and in the most region of PCD table surface, the tensile residual stress,which is a fatal shortage to PDC,can also occur near the outer diameter area of PCD table,and the maximum value is 690 MPa.Distribution of tensile stress in the PCD table is given through experimental results,which is well consistent with the numerical results.This finding may be significant in designing new PDC cutters with lower residual stress and high cutting behavior.展开更多
Practical experiences gained in the past several years show that the thermal residual stress(TRS) is a main cause leading polycrystalline diamond compacts(PDC) to premature failure.It is the very important to measure ...Practical experiences gained in the past several years show that the thermal residual stress(TRS) is a main cause leading polycrystalline diamond compacts(PDC) to premature failure.It is the very important to measure the TRS accurately for optimizing the interface and improving the service performance of PDC.In this paper,the TRS in 1913 flat-interface PDC was measured using improved stress-release method(ISRM). The TRS on the surface of polycrystalline diamond(PCD) table was obtained,which can be used to calculate the radial thermal residual stress(RTRS) at the interface of PCD table via a refutation process.The obtained results show that there are compressive residual stress at the PCD table interface and in the most region of PCD table surface.The exception occurs near the outer diameter of the PCD table,where the PDC begins to bend and put the PCD table surface into a tension state,an undesirable state for a brittle material.The ISRM has covered the shortage existing in traditional stress-release method,in which only finite points on the surface of PCD table can be tested for one specimen and one time.Simple as the experimental procedures are,the test results are also very accurate and reliable.This method provides the theoretical and experimental basis for testing TRS of PDC accurately.展开更多
The differential thermal expansion of the polycrystalline diamond layer and the tungsten carbide substrate results in large residual stresses as PDC cutters cooling after sintering.The residual stresses on the top sur...The differential thermal expansion of the polycrystalline diamond layer and the tungsten carbide substrate results in large residual stresses as PDC cutters cooling after sintering.The residual stresses on the top surface of the diamond layer of PDC were measured at five points along the radial direction of PDC using X-ray Diffraction Residual Stress Instrument,thus the stresses and their radial distribution were obtained.The results show that the stresses on the diamond surface are compressive,the biggest stress appears at the central point(about 1200 MPa),and that from the center to the edge of PDC,the magnitude of the stress decreases. A finite element analysis(FEA) was made to check the validity of the testing results.The FEA modeling results were found to correlate well with the measured values.Factors leading to the deviation between XRD experimental measurements and the calculations of residual stress by FEA were also analyzed.展开更多
The breakage mechanism of the polycrystalline diamond compact(PDC) cutters was analyzed by the energy theory of bending waves. The cutting tests of granite block were conducted on a multifunctional testing device by u...The breakage mechanism of the polycrystalline diamond compact(PDC) cutters was analyzed by the energy theory of bending waves. The cutting tests of granite block were conducted on a multifunctional testing device by using the cutter at three kinds of negative fore angles of 30°, 45° and 60°. The results show that, when the edge of the PDC layer is broken, the layer of tungsten cobalt is broken a little under the angle of 30°, while the layer of tungsten cobalt is broken continuously under the angle of 60°, their maximum depths are about 2 and 7 mm respectively in the two cases. The eccentric distance mainly depends on the negative fore angle of the cutter. When the cutter thrusts into the rock under an attack angle of 60°, the energy of bending waves reaches the maximum since the eccentric distance is the maximum. So the damage of cutter is the most serious. This test result is consistent with the conclusion of theoretical analysis well. The eccentric distance from the axial line of cutter to the point of action between the rock and cutter has great effect on the breakage of the cutter. Thus during the process of cutting, the eccentric distance should be reduced to improve the service life of PDC cutters.展开更多
A diamond film with a size of 6×6×0.5 mm^3 is fabricated by electron-assisted chemical vapor deposition. Raman spectrum analysis, x-ray diffraction and scanning electron microscope images confirm the high pu...A diamond film with a size of 6×6×0.5 mm^3 is fabricated by electron-assisted chemical vapor deposition. Raman spectrum analysis, x-ray diffraction and scanning electron microscope images confirm the high purity and large grain size, which is larger than 300 μm. Its resistivity is higher than 10^12 W· cm. Interlaced-finger electrodes are imprinted onto the diamond film to develop an x-ray detector. Ohmic contact is confirmed by checking the linearity of its current–voltage curve. The dark current is lower than 0.1 n A under an electric field of 30 k V cm^-1. The time response is 220 ps. The sensitivity is about 125 m A W^-1 under a biasing voltage of 100 V.A good linear radiation dose rate is also confirmed. This diamond detector is used to measure x-ray on a Z-pinch, which has a double-layer 'nested tungsten wire array'. The pronounced peaks in the measured waveform clearly characterize the x-ray bursts, which proves the performance of this diamond detector.展开更多
Diamond is a highly valuable material with diverse industrial applications,particularly in the fields of semiconductor,optics,and high-power electronics.However,its high hardness and chemical stability make it difficu...Diamond is a highly valuable material with diverse industrial applications,particularly in the fields of semiconductor,optics,and high-power electronics.However,its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond.To address these challenges,several polishing methods have been developed for both single crystal diamond(SCD)and polycrystalline diamond(PCD),including mechanical,chemical,laser,and ion beam processing methods.In this review,the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted.Specifically,various energy beam-based direct and assisted polishing technologies,such as laser polishing,ion beam polishing,plasma-assisted polishing,and laser-assisted polishing,are summarized.The current research progress,material removal mechanism,and infuencing factors of each polishing technology are analyzed.Although some of these methods can achieve high material removal rates or reduce surface roughness,no single method can meet all the requirements.Finally,the future development prospects and application directions of different polishing technologies are presented.展开更多
Polycrystalline grits(polygrits) have been used widely in industry as abrasives.Due to their higher impact strength and the friable nature,polygrits are more endurable and more efficient than monocrystal grits (monogr...Polycrystalline grits(polygrits) have been used widely in industry as abrasives.Due to their higher impact strength and the friable nature,polygrits are more endurable and more efficient than monocrystal grits (monogrits) in material removal applications.For example,polygrits of alumina may last longer and cut faster than monogrits.Similarly,polygrits of cubic boron nitride is a superior superabrasive than monogrits of the same. Although diamond superabrasives have been indispensable for constructional sawing applications and industrial grinding applications,there has no polygrits of diamond that are commercially available.In this research,we used a novel technology to sinter micron diamond fines to form polygrits of diamond.The characterization demonstrated that polygrits of diamond can be tough to withstand impact.But due to the presence of micro grains,the grit can sharpen itself without dulling by shedding the worn grains.This paper revealed many examples of using diamond polygrits.展开更多
High-quality polycrystalline diamond films with dominated(100)-oriented grains are realized by combining the thermally oxidation and the homogeneous second growth processes.Moreover,we investigate the wettability prop...High-quality polycrystalline diamond films with dominated(100)-oriented grains are realized by combining the thermally oxidation and the homogeneous second growth processes.Moreover,we investigate the wettability property of the polycrystalline diamonds in various stages.Different surface structures(with various grain sizes,voids,and orientations,etc.)and terminations(hydrogen or oxygen)have significant effects on the wettability of polycrystalline diamond films.The wettability is further closely related to the polarity of solutions.By measuring the contact angle and calculating the dispersion and polarity components,we estimate the surface energy of polycrystalline diamond films,and explore the factors affecting the surface energy.The modulations in growth quality and wettability property of polycrystalline diamond films provide valuable data for development of diamond-based multiple devices in practical applications.展开更多
We report the simultaneous enlarged growth of seven single crystal diamond(SCD) plates free from polycrystalline diamond(PCD) rim by using a microwave plasma chemical vapor deposition(MPCVD) system. Optical microscope...We report the simultaneous enlarged growth of seven single crystal diamond(SCD) plates free from polycrystalline diamond(PCD) rim by using a microwave plasma chemical vapor deposition(MPCVD) system. Optical microscope and atomic force microscope(AFM) show the typical step-bunching SCD morphology at the center, edge, and corner of the samples. The most aggressively expanding sample shows a top surface area three times of that of the substrate. The effective surface expanding is attributed to the utilization of the diamond substrates with(001) side surfaces, the spacial isolation of them to allow the sample surface expanding, and the adoption of the reported pocket holder. Nearly constant temperature of the diamond surfaces is maintained during growth by only decreasing the sample height, and thus all the other growth parameters can be kept unchanged to achieve high quality SCDs. The SCDs have little stress as shown by the Raman spectra. The full width at half maximum(FWHM) data of both the Raman characteristic peak and(004) x-ray rocking curve of the samples are at the same level as those of the standard CVD SCD from Element Six Ltd. The nonuniformity of the sample thickness or growth rate is observed, and photoluminescence spectra show that the nitrogen impurity increases with increasing growth rate. It is found that the reduction of the methane ratio in the sources gas flow from 5% to 3% leads to decrease of the vertical growth rate and increase of the lateral growth rate. This is beneficial to expand the top surface and improve the thickness uniformity of the samples. At last, the convenience of the growth method transferring to massive production has also been demonstrated by the successful simultaneous enlarged growth of 14 SCD samples.展开更多
基金National Natural Science Foundation of China(Nos.52175430,51935008 and 52105478)China National Postdoctoral Program for Innovative Talents(BX20200234)Open Fund of Tianjin Key Laboratory of Equipment Design and Manufacturing Technology(EDMT)for the support of this work。
文摘Polycrystalline materials are extensively employed in industry.Its surface roughness significantly affects the working performance.Material defects,particularly grain boundaries,have a great impact on the achieved surface roughness of polycrystalline materials.However,it is difficult to establish a purely theoretical model for surface roughness with consideration of the grain boundary effect using conventional analytical methods.In this work,a theoretical and deep learning hybrid model for predicting the surface roughness of diamond-turned polycrystalline materials is proposed.The kinematic–dynamic roughness component in relation to the tool profile duplication effect,work material plastic side flow,relative vibration between the diamond tool and workpiece,etc,is theoretically calculated.The material-defect roughness component is modeled with a cascade forward neural network.In the neural network,the ratio of maximum undeformed chip thickness to cutting edge radius RT S,work material properties(misorientation angle θ_(g) and grain size d_(g)),and spindle rotation speed n s are configured as input variables.The material-defect roughness component is set as the output variable.To validate the developed model,polycrystalline copper with a gradient distribution of grains prepared by friction stir processing is machined with various processing parameters and different diamond tools.Compared with the previously developed model,obvious improvement in the prediction accuracy is observed with this hybrid prediction model.Based on this model,the influences of different factors on the surface roughness of polycrystalline materials are discussed.The influencing mechanism of the misorientation angle and grain size is quantitatively analyzed.Two fracture modes,including transcrystalline and intercrystalline fractures at different RTS values,are observed.Meanwhile,optimal processing parameters are obtained with a simulated annealing algorithm.Cutting experiments are performed with the optimal parameters,and a flat surface finish with Sa 1.314 nm is finally achieved.The developed model and corresponding new findings in this work are beneficial for accurately predicting the surface roughness of polycrystalline materials and understanding the impacting mechanism of material defects in diamond turning.
文摘In this work, a kind of new vitrified bond based on Li2O-Al2O3-SiO2 glass ceramics was used to bond the diamond grains, which is made into grinding wheel and the cylindrical grinding process of polycrystalline diamond compacts (PDCs) by using the new vitrified bond diamond grinding wheel was discussed. Several factors which influence the properties of grinding wheel such as amount of vitrified bond and the kinds and amount of stuff in grinding wheel were also investigated. It was found that the new vitrified bond can firmly combine diamond grains, when there are only diamonds and vitrified bond in the structure of grinding wheel, the longevity of the grinding wheel is about 2.5-3 times as that of resin bond grinding wheel for processing PDCs. The grinding size precision of PDCs can be improved from 4-0.03 mm to 4-0.01 mm because of larger Young's modulus of vitrified bond than resin bond. The grinding time of a PDC product can be 1.75-2.0 min from 3.25-3.5 min, so this kind of grinding wheel can save much time for processing PDCs. Also, there is hardly noise when using this new vitrified bond diamond grinding wheel to process PDCs. The amount of vitrified bond in grinding wheel influences the longevity of grinding wheel. When the size of diamond grains is 90-107 μm, the optimal amount of vitrified bond in grinding wheel is 21% (wt pct). When the amount of vitrified bond exceeds 21%, there are many pores in grinding block, which will decrease the longevity of grinding wheel. The existence of addition stuff such as Al2O3 or SiC can reduce the longevity of grinding wheel.
基金Project(20070533113)supported by the Doctoral Foundation of Ministry of Education of China
文摘Thermal residual stresses in polycrystalline diamond compact(PDC)cutter arising from the difference in thermal expansion between the polycrystalline diamond(PCD)and the supporting tungsten carbide substrate after sintering at high pressure and high temperature were investigated using finite element simulation,laboratory tests and theoretical analysis.The obtained results show that although compressive residual stresses exist both in the interface of PCD table and in the most region of PCD table surface, the tensile residual stress,which is a fatal shortage to PDC,can also occur near the outer diameter area of PCD table,and the maximum value is 690 MPa.Distribution of tensile stress in the PCD table is given through experimental results,which is well consistent with the numerical results.This finding may be significant in designing new PDC cutters with lower residual stress and high cutting behavior.
基金supported by the Natural Science of Hunan(06JJ4062)
文摘Practical experiences gained in the past several years show that the thermal residual stress(TRS) is a main cause leading polycrystalline diamond compacts(PDC) to premature failure.It is the very important to measure the TRS accurately for optimizing the interface and improving the service performance of PDC.In this paper,the TRS in 1913 flat-interface PDC was measured using improved stress-release method(ISRM). The TRS on the surface of polycrystalline diamond(PCD) table was obtained,which can be used to calculate the radial thermal residual stress(RTRS) at the interface of PCD table via a refutation process.The obtained results show that there are compressive residual stress at the PCD table interface and in the most region of PCD table surface.The exception occurs near the outer diameter of the PCD table,where the PDC begins to bend and put the PCD table surface into a tension state,an undesirable state for a brittle material.The ISRM has covered the shortage existing in traditional stress-release method,in which only finite points on the surface of PCD table can be tested for one specimen and one time.Simple as the experimental procedures are,the test results are also very accurate and reliable.This method provides the theoretical and experimental basis for testing TRS of PDC accurately.
文摘The differential thermal expansion of the polycrystalline diamond layer and the tungsten carbide substrate results in large residual stresses as PDC cutters cooling after sintering.The residual stresses on the top surface of the diamond layer of PDC were measured at five points along the radial direction of PDC using X-ray Diffraction Residual Stress Instrument,thus the stresses and their radial distribution were obtained.The results show that the stresses on the diamond surface are compressive,the biggest stress appears at the central point(about 1200 MPa),and that from the center to the edge of PDC,the magnitude of the stress decreases. A finite element analysis(FEA) was made to check the validity of the testing results.The FEA modeling results were found to correlate well with the measured values.Factors leading to the deviation between XRD experimental measurements and the calculations of residual stress by FEA were also analyzed.
基金Project(06JJ20094) supported by the Natural Science Foundation of Hunan Province, China
文摘The breakage mechanism of the polycrystalline diamond compact(PDC) cutters was analyzed by the energy theory of bending waves. The cutting tests of granite block were conducted on a multifunctional testing device by using the cutter at three kinds of negative fore angles of 30°, 45° and 60°. The results show that, when the edge of the PDC layer is broken, the layer of tungsten cobalt is broken a little under the angle of 30°, while the layer of tungsten cobalt is broken continuously under the angle of 60°, their maximum depths are about 2 and 7 mm respectively in the two cases. The eccentric distance mainly depends on the negative fore angle of the cutter. When the cutter thrusts into the rock under an attack angle of 60°, the energy of bending waves reaches the maximum since the eccentric distance is the maximum. So the damage of cutter is the most serious. This test result is consistent with the conclusion of theoretical analysis well. The eccentric distance from the axial line of cutter to the point of action between the rock and cutter has great effect on the breakage of the cutter. Thus during the process of cutting, the eccentric distance should be reduced to improve the service life of PDC cutters.
基金supported by the National Key R&D Program of China(Grant No.2017YFE0301300)the Hunan Provincial Innovation Foundation for Postgraduate(Grant No.CX2018B588)。
文摘A diamond film with a size of 6×6×0.5 mm^3 is fabricated by electron-assisted chemical vapor deposition. Raman spectrum analysis, x-ray diffraction and scanning electron microscope images confirm the high purity and large grain size, which is larger than 300 μm. Its resistivity is higher than 10^12 W· cm. Interlaced-finger electrodes are imprinted onto the diamond film to develop an x-ray detector. Ohmic contact is confirmed by checking the linearity of its current–voltage curve. The dark current is lower than 0.1 n A under an electric field of 30 k V cm^-1. The time response is 220 ps. The sensitivity is about 125 m A W^-1 under a biasing voltage of 100 V.A good linear radiation dose rate is also confirmed. This diamond detector is used to measure x-ray on a Z-pinch, which has a double-layer 'nested tungsten wire array'. The pronounced peaks in the measured waveform clearly characterize the x-ray bursts, which proves the performance of this diamond detector.
基金sponsored by the National Natural Science Foundation of China(Nos.51835004,U22A20198)the Major Science and Technology Projects in Henan Province(221100230300)the 111 Project(No.B23011)。
文摘Diamond is a highly valuable material with diverse industrial applications,particularly in the fields of semiconductor,optics,and high-power electronics.However,its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond.To address these challenges,several polishing methods have been developed for both single crystal diamond(SCD)and polycrystalline diamond(PCD),including mechanical,chemical,laser,and ion beam processing methods.In this review,the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted.Specifically,various energy beam-based direct and assisted polishing technologies,such as laser polishing,ion beam polishing,plasma-assisted polishing,and laser-assisted polishing,are summarized.The current research progress,material removal mechanism,and infuencing factors of each polishing technology are analyzed.Although some of these methods can achieve high material removal rates or reduce surface roughness,no single method can meet all the requirements.Finally,the future development prospects and application directions of different polishing technologies are presented.
文摘Polycrystalline grits(polygrits) have been used widely in industry as abrasives.Due to their higher impact strength and the friable nature,polygrits are more endurable and more efficient than monocrystal grits (monogrits) in material removal applications.For example,polygrits of alumina may last longer and cut faster than monogrits.Similarly,polygrits of cubic boron nitride is a superior superabrasive than monogrits of the same. Although diamond superabrasives have been indispensable for constructional sawing applications and industrial grinding applications,there has no polygrits of diamond that are commercially available.In this research,we used a novel technology to sinter micron diamond fines to form polygrits of diamond.The characterization demonstrated that polygrits of diamond can be tough to withstand impact.But due to the presence of micro grains,the grit can sharpen itself without dulling by shedding the worn grains.This paper revealed many examples of using diamond polygrits.
基金supported by the Key-Area Research and Development Program of Guangdong Province(Grant No.2020B0101690001)the National Natural Science Foundation of China(Grant No.51972135)。
文摘High-quality polycrystalline diamond films with dominated(100)-oriented grains are realized by combining the thermally oxidation and the homogeneous second growth processes.Moreover,we investigate the wettability property of the polycrystalline diamonds in various stages.Different surface structures(with various grain sizes,voids,and orientations,etc.)and terminations(hydrogen or oxygen)have significant effects on the wettability of polycrystalline diamond films.The wettability is further closely related to the polarity of solutions.By measuring the contact angle and calculating the dispersion and polarity components,we estimate the surface energy of polycrystalline diamond films,and explore the factors affecting the surface energy.The modulations in growth quality and wettability property of polycrystalline diamond films provide valuable data for development of diamond-based multiple devices in practical applications.
基金Project supported by the National Key Research and Development Program of China(Grant Nos.2018YFB0406504 and 2016YFB0400105)the National Postdoctoral Program for Innovative Talents,China(Grant No.BX20190263)
文摘We report the simultaneous enlarged growth of seven single crystal diamond(SCD) plates free from polycrystalline diamond(PCD) rim by using a microwave plasma chemical vapor deposition(MPCVD) system. Optical microscope and atomic force microscope(AFM) show the typical step-bunching SCD morphology at the center, edge, and corner of the samples. The most aggressively expanding sample shows a top surface area three times of that of the substrate. The effective surface expanding is attributed to the utilization of the diamond substrates with(001) side surfaces, the spacial isolation of them to allow the sample surface expanding, and the adoption of the reported pocket holder. Nearly constant temperature of the diamond surfaces is maintained during growth by only decreasing the sample height, and thus all the other growth parameters can be kept unchanged to achieve high quality SCDs. The SCDs have little stress as shown by the Raman spectra. The full width at half maximum(FWHM) data of both the Raman characteristic peak and(004) x-ray rocking curve of the samples are at the same level as those of the standard CVD SCD from Element Six Ltd. The nonuniformity of the sample thickness or growth rate is observed, and photoluminescence spectra show that the nitrogen impurity increases with increasing growth rate. It is found that the reduction of the methane ratio in the sources gas flow from 5% to 3% leads to decrease of the vertical growth rate and increase of the lateral growth rate. This is beneficial to expand the top surface and improve the thickness uniformity of the samples. At last, the convenience of the growth method transferring to massive production has also been demonstrated by the successful simultaneous enlarged growth of 14 SCD samples.