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多晶硅薄膜材料与器件研究进展 被引量:3
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作者 饶瑞 徐重阳 《材料导报》 EI CAS CSCD 北大核心 2000年第7期25-26,共2页
多晶硅薄膜材料一直在半导体领域中扮演着重要角色。综述了多晶硅薄膜材料及其器件的特点、制备方法及研究进展。
关键词 多晶硅薄膜 多晶硅薄膜器件 应用 CVD SPC
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Analysis of laser induced thermal mechanical relationship of HfO_2/SiO_2 high reflective optical thin film at 1064 nm 被引量:6
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作者 戴罡 陈彦北 +2 位作者 陆建 沈中华 倪晓武 《Chinese Optics Letters》 SCIE EI CAS CSCD 2009年第7期601-604,共4页
A numerical model is developed for the calculation of transient temperature field of thin film coating induced by a long-pulsed high power laser beam. The electric field intensity distribution of HfO2/Si02 high reflec... A numerical model is developed for the calculation of transient temperature field of thin film coating induced by a long-pulsed high power laser beam. The electric field intensity distribution of HfO2/Si02 high reflective (HR) film is investigated to calculate the thermal field of the film. The thermal-mechanical relationships are discussed to predict the laser damage area of optical thin film under long pulse high energy laser irradiation. 展开更多
关键词 Electric fields Hafnium compounds High energy lasers High power lasers LASERS Pulsed laser applications silicon compounds Thin film devices Thin films
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