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New digital drive phase control for improving bias stability of silicon MEMS gyroscope 被引量:3
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作者 夏国明 杨波 王寿荣 《Journal of Southeast University(English Edition)》 EI CAS 2011年第1期47-51,共5页
In order to improve the bias stability of the micro-electro mechanical system(MEMS) gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for impr... In order to improve the bias stability of the micro-electro mechanical system(MEMS) gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array(FPGA) with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability. 展开更多
关键词 silicon micro-electro mechanical system(mems gyroscope bias drift drive phase control field-programmable gate array(FPGA)
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MEMS微针的最新研究进展 被引量:4
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作者 曹玉田 朱军 +3 位作者 曹莹 李以贵 陈翔 陈迪 《微纳电子技术》 CAS 北大核心 2011年第9期577-582,共6页
介绍了MEMS微针技术在微针制备工艺、力学和流体性能模拟以及透皮给药方面研究的近况。描述了硅、金属和聚合物材料的微针制备工艺,分析了这些材料在MEMS微针应用上的优缺点。比如硅微针制备工艺成熟但是硅的质地太脆;金属微针机械强度... 介绍了MEMS微针技术在微针制备工艺、力学和流体性能模拟以及透皮给药方面研究的近况。描述了硅、金属和聚合物材料的微针制备工艺,分析了这些材料在MEMS微针应用上的优缺点。比如硅微针制备工艺成熟但是硅的质地太脆;金属微针机械强度高却不易载药;聚合物微针易于批量化复制但是机械强度差。进一步阐述了微针研究取得的进展,总结了微针技术发展需要解决的关键问题。微针制备工艺已经日趋成熟,微针将朝着可复制化、批量化方向发展,微针经皮给药将逐渐从动物实验转移到人体实验,以实现微针研究的最终目的——临床给药。 展开更多
关键词 微电子机械系统(mems) 微针 可溶性聚合物微针 经皮给药 流感病毒疫苗
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基于铝基含能配合物及CL-20含能微芯片的制备及表征
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作者 孟珂娟 马小霞 +1 位作者 李宇翔 张开黎 《火炸药学报》 EI CAS CSCD 北大核心 2024年第5期438-444,I0004,共8页
为提高含能微芯片的能量特性和燃烧特性,推进其在微推进器、微驱动器、微毁伤器等装置中的应用,通过在铜箔上原位生长含能配位聚合物(ECP)、电子束沉积n-Al及重结晶CL-20的方法制备了ECP@Al@CL-20的含能阵列,采用SEM、XRD、TG/DSC及高... 为提高含能微芯片的能量特性和燃烧特性,推进其在微推进器、微驱动器、微毁伤器等装置中的应用,通过在铜箔上原位生长含能配位聚合物(ECP)、电子束沉积n-Al及重结晶CL-20的方法制备了ECP@Al@CL-20的含能阵列,采用SEM、XRD、TG/DSC及高速摄影等表征方法对其微观形貌、物相组成、热分解特性、燃烧性能及贮存寿命进行了测试与分析。在此基础上,将其与微机电系统(MEMS)集成制得了功能性的ECP@Al@CL-20含能微芯片,并对含能微芯片进行了电容点火测试。结果表明,由于ECP的导热系数低,使ECP@Al@CL-20含能阵列从外到内的传热效率降低,导致放热峰温相比纯CL-20提高了8.5℃,从而提高了ECP@Al@CL-20的热稳定性;ECP@Al@CL-20含能阵列具有优异的燃烧性能,自持燃烧时间(340 ms)远大于ECP@Al的自持燃烧时间(120 ms),含能微芯片可在15 mJ的输入能量下激发。 展开更多
关键词 含能配位聚合物 微机电系统 纳米铝 CL-20 微加热器 含能微芯片 ECP mems
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面向聚合物微器件超声波精密封接的阵列微导能结构 被引量:4
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作者 罗怡 张苗苗 +1 位作者 孙屹博 王晓东 《光学精密工程》 EI CAS CSCD 北大核心 2011年第4期754-761,共8页
为提高聚合物超声波精密封接的可控性,预防高温度场下聚合物的熔融流延影响封接界面质量和精度,提出了阵列式微导能结构。以聚甲基丙烯酸甲酯(PMMA)微小管道的封接为实验对象,研究了阵列微导能结构的尺度对超声波封接过程的影响;采用热... 为提高聚合物超声波精密封接的可控性,预防高温度场下聚合物的熔融流延影响封接界面质量和精度,提出了阵列式微导能结构。以聚甲基丙烯酸甲酯(PMMA)微小管道的封接为实验对象,研究了阵列微导能结构的尺度对超声波封接过程的影响;采用热压成型工艺在被封接表面制作了5组不同高度的微结构。采用基于声波传递效率反馈的超声波精密封接方式,对超声波作用下聚合物界面的润湿行为进行了观察分析,讨论了结构尺度对超声波封接质量的影响。结果表明,随着微结构尺寸的增大,实现完全联接需要的超声波能量呈递增的趋势。该种微导能结构有效控制了聚合物熔融流延,获得了均一的封接面,可实现高质量精密封接。 展开更多
关键词 超声波精密封接 mems 聚合物器件 导能结构 润湿
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聚合物MEMS磁扭转微镜电流传感特性研究 被引量:4
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作者 王巨锋 黄梅红 +3 位作者 庄琳玲 刘士伟 胡奕彬 庄其仁 《光电子.激光》 EI CAS CSCD 北大核心 2015年第3期450-456,共7页
提出一种基于聚合物材料的新型微机电系统(MEMS)交流电传感器,对其关键部件聚合物MEMS磁扭转微镜的特性进行研究。磁扭转微镜基体材料采用聚碳酸酯(PC),扭转梁采用金属材料制作,永磁体内置于扭转微镜中,被聚合物材料所包埋,磁扭转微镜... 提出一种基于聚合物材料的新型微机电系统(MEMS)交流电传感器,对其关键部件聚合物MEMS磁扭转微镜的特性进行研究。磁扭转微镜基体材料采用聚碳酸酯(PC),扭转梁采用金属材料制作,永磁体内置于扭转微镜中,被聚合物材料所包埋,磁扭转微镜的反射面为反射光栅结构。对扭转微镜的特征参数对扭转力矩和扭转角度的影响进行了分析。结果表明,磁扭转微镜的力矩与通电导线的电流大小成正比,微镜稳态扭转振动时最大扭转角度与导线交流电流(a.c.)幅度成正比;扭转梁长度越长,扭转角幅度越大;而稳态振动扭转角幅度随着扭转梁半径的增大而减小。通过对扭转微镜反射光栅0级衍射光的接收与解调,得到归一化光强测量电流的灵敏度可达0.024/A。 展开更多
关键词 聚合物微机电系统(mems) 磁扭转微镜 反射光栅 电流传感器
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An improved noise reduction transformation for algorithm based on wavelet MEMS gyroscope 被引量:3
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作者 Jianguo YUAN Yantao YUAN +2 位作者 Feilong LIU Yu PANG Jinzhao LIN 《Frontiers of Optoelectronics》 CSCD 2015年第4期413-418,共6页
To solve the large noise problem for the low- precision gyroscopes in micro-electro mechanical systems (MEMS) of inertial navigation system, an improved noise reduction method, based on the analyses of the fast Four... To solve the large noise problem for the low- precision gyroscopes in micro-electro mechanical systems (MEMS) of inertial navigation system, an improved noise reduction method, based on the analyses of the fast Fourier transformation (FFT) noise reduction principle and the simple wavelet noise reduction principle, was proposed. Furthermore, the FFT noise reduction method, the simple wavelet noise reduction method and the improved noise reduction method were comparatively analyzed and experimentally verified in the case of the constant rate and dynamic rate. The experimental analysis results showed that the improved noise reduction method had a very good result in the noise reduction of the gyroscope data at different fi:equencies, and its performance was superior to those of the FFT noise reduction method and the simple wavelet noise reduction method. 展开更多
关键词 micro-electro mechanical systems (mems gyroscopes fast Fourier transformation (FFT) noise reduc-tion wavelet noise reduction
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MEMS-Based Low-Cost Flight Control System for Small UAVs 被引量:1
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作者 付旭 周兆英 +1 位作者 熊威 郭奇 《Tsinghua Science and Technology》 SCIE EI CAS 2008年第5期614-618,共5页
Small unmanned air vehicles (UAVs) can be used for various kinds of surveillance and data collection missions. The UAV flight control system is the key to a successful mission. This paper describes a low-cost micro-... Small unmanned air vehicles (UAVs) can be used for various kinds of surveillance and data collection missions. The UAV flight control system is the key to a successful mission. This paper describes a low-cost micro-electro mechanical system-based flight control system for small UAVs. The integrated hardware flight control system weighs only 24 g. The system includes a highly-integrated wireless transmission link, which is lighter than traditional links. The flight control provides altitude hold control and global positioning system navigation based on gain scheduling proportional-integral-derivative control. Flight tests to survey the grass quality of a large lawn show that the small UAV can fly autonomously according to a series of pre-arranged waypoints with a controlled altitude while the wireless video system transmits images of the surveillance target to a ground control station. 展开更多
关键词 micro-electro mechanical system (mems unmanned air vehicle (UAV) global positioning system (GPS) flight control NAVIGATION
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Barom etric altim eter in wireless com m unication network indoor positioning system
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作者 胡正群 张丽荣 《Journal of Beijing Institute of Technology》 EI CAS 2013年第3期380-386,共7页
A differential barometric altimetry technology based on the digital pressure sensors is put forward by using the existing mobile phone base station as reference. The height of known base sta- tion is precise. The pres... A differential barometric altimetry technology based on the digital pressure sensors is put forward by using the existing mobile phone base station as reference. The height of known base sta- tion is precise. The pressure and temperature of the known base station is measured by sensors and transmitted to users. The absolute height value of user will be calculated by combining the baromet- ric pressure values and temperature values from the base station with the locally measured values. In order to decrease system errors caused by inconsistency between the measured pressure value at base station and the locally measured pressure value, weights correction is applied based on multiple reference stations. The calculated height value is accurate due to eliminating the measured errors caused by irregular changes of atmospheric pressure, with the error less than 1 m. Resolution of ele- vation positioning depends upon the resolution of the pressure sensor, the relationship between which is approximately linear. When the resolution of sensor is 0.01 hPa, the resolution of elevation positioning is about 0. 1 m. In addition, the data frame format at base station is designed in this arti- cle. Experimental results show that the method is accurate, reliable, stable and has the ability to distinguish floors and stair steps. 展开更多
关键词 differential barometric altimetry wireless communication indoor positioning system micro-electro mechanical system (mems MS5534C BP5607
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Attitude Determination for MAVs Using a Kalman Filter 被引量:5
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作者 刘成 周兆英 付旭 《Tsinghua Science and Technology》 SCIE EI CAS 2008年第5期593-597,共5页
This paper presents a Kalman filter to effectively and economically determine the Euler angles for micro aerial vehicles (MAVs), whose size and payload are severely limited. The filter uses data from a series of mic... This paper presents a Kalman filter to effectively and economically determine the Euler angles for micro aerial vehicles (MAVs), whose size and payload are severely limited. The filter uses data from a series of micro-electro mechanical system sensors to determine the selected 3 variables of the direction cosine matrix and the bias of the rate gyro sensors as state elements in a dynamic model, with the gravitational acceleration to build a measurement model. For high speed maneuvers, rigid motion equations are used to correct the measurements of the gravitational acceleration. The filter is designed to automatically tune its gain based on the dynamic system state. Simulations indicate that the Euler angles can be determined with standard deviations less than 3°. The algorithm was successfully implemented in a miniature attitude measurement system suitable for MAVs. Aerobatic flights show that the attitude determination algorithm works effectively. The attitude determination algorithm is effective and economical, and can also be applied to bionic robofishs and land vehicles, whose size and payload are also greatly limited. 展开更多
关键词 attitude determination Kalman filter micro-electro mechanical system (mems micro aerial vehicle (MAV)
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