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Investigation of the polysilicon p-i-n diode and diode string as a process compatible and portable ESD protection device
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作者 姜一波 杜寰 韩郑生 《Journal of Semiconductors》 EI CAS CSCD 2012年第7期60-64,共5页
The polysilicon p-i-n diode displays noticeable process compatibility and portability in advanced tech- nologies as an electrostatic-discharge (ESD) protection device. This paper presents the reverse breakdown, curr... The polysilicon p-i-n diode displays noticeable process compatibility and portability in advanced tech- nologies as an electrostatic-discharge (ESD) protection device. This paper presents the reverse breakdown, current leakage and capacitance characteristics of fabricated polysilicon p-i-n diodes. To evaluate the ESD robustness, the forward and reverse TLP I-V characteristics were measured. The polysilicon p-i-n diode string was also investigated to further reduce capacitance and fulfill the requirements of tunable cut-in or reverse breakdown voltage. Finally, to explain the effects of the device parameters, we analyze and discuss the inherent properties ofpolysilicon p-i-n diodes. 展开更多
关键词 polysilicon p-i-n diode ESD polysilicon p-i-n diode string
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Research on high-voltage 4H-SiC P-i-N diode with planar edge junction termination techniques 被引量:1
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作者 张发生 李欣然 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第6期366-371,共6页
The planar edge termination techniques of junction termination extension (JTE) and offset field plates and fieldlimiting rings for the 4H-SiC P i-N diode were investigated and optimized by using a two-dimensional de... The planar edge termination techniques of junction termination extension (JTE) and offset field plates and fieldlimiting rings for the 4H-SiC P i-N diode were investigated and optimized by using a two-dimensional device simulator ISE-TCAD10.0. By experimental verification, a good consistency between simulation and experiment can be observed. The results show that the reverse breakdown voltage for the 4H-SiC P-i-N diode with optimized JTE edge termination can accomplish near ideal breakdown voltage and much lower leakage current. The breakdown voltage can be near 1650 V, which achieves more than 90 percent of ideal parallel plane junction breakdown voltage and the leakage current density can be near 3 ×10^-5 A/cm2. 展开更多
关键词 silicon carbide p-i-n diode junction termination technique simulation breakdown voltage
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A 4H-SiC merged P–I–N Schottky with floating back-to-back diode 被引量:1
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作者 陈伟中 秦海峰 +3 位作者 许峰 王礼祥 黄义 韩郑生 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第2期660-664,共5页
A novel 4 H-Si C merged P–I–N Schottky(MPS)with floating back-to-back diode(FBD),named FBD-MPS,is proposed and investigated by the Sentaurus technology computer-aided design(TCAD)and analytical model.The FBD feature... A novel 4 H-Si C merged P–I–N Schottky(MPS)with floating back-to-back diode(FBD),named FBD-MPS,is proposed and investigated by the Sentaurus technology computer-aided design(TCAD)and analytical model.The FBD features a trench oxide and floating P-shield,which is inserted between the P+/N-(PN)junction and Schottky junction to eliminate the shorted anode effect.The FBD is formed by the N-drift/P-shield/N-drift and it separates the PN and Schottky active region independently.The FBD reduces not only the Vturn to suppress the snapback effect but also the Von at bipolar operation.The results show that the snapback can be completely eliminated,and the maximum electric field(Emax)is shifted from the Schottky junction to the FBD in the breakdown state. 展开更多
关键词 4H-SIC merged p-i-n Schottky(MPS) snapback effect turnover voltage floating back-to-back diode(FBD)
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Dual-polarization wavelength conversion of 16-QAM signals in a single silicon waveguide with a lateral p-i-n diode[Invited] 被引量:1
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作者 FRANCESCO DA Ros ANDRZEJ GAJDA +8 位作者 ERIK LIEBIG EDSON P.DA SILVA ANNA PECZEK PETER D.GIROUARD ANDREAS MAI KLAUS PETERMANN LARS ZIMMERMANN MICHAEL GALILI LEIF K.OXENLOWE 《Photonics Research》 SCIE EI 2018年第5期I0048-I0054,共7页
A polarization-diversity loop with a silicon waveguide with a lateral p-i-n diode as a nonlinear medium is used to realize polarization insensitive four-wave mixing. Wavelength conversion of seven dual-polarization 16... A polarization-diversity loop with a silicon waveguide with a lateral p-i-n diode as a nonlinear medium is used to realize polarization insensitive four-wave mixing. Wavelength conversion of seven dual-polarization 16-quadrature amplitude modulation(QAM) signals at 16 GBd is demonstrated with an optical signal-to-noise ratio penalty below 0.7 dB. High-quality converted signals are generated thanks to the low polarization dependence(≤0.5 dB) and the high conversion efficiency(CE) achievable. The strong Kerr nonlinearity in silicon and the decrease of detrimental free-carrier absorption due to the reverse-biased p-i-n diode are key in ensuring high CE levels. 展开更多
关键词 Invited Dual-polarization wavelength conversion of 16-QAM signals in a single silicon waveguide with a lateral p-i-n diode QAM
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AMOLED像素电路的设计与仿真研究 被引量:3
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作者 沈匿 林祖伦 +3 位作者 陈文彬 祁康成 王小菊 杨隆杰 《电子器件》 CAS 2011年第5期550-554,共5页
为了解决驱动管阈值电压漂移带来的OLED亮度不均匀的问题,介绍了一种新的AMOLED四管像素电路,利用HSPICE仿真软件详细分析了电路各参数对其输出特性的影响,同时给出了参数设计的方法。最后从延长OLED的使用寿命出发,对电路进行了改进并... 为了解决驱动管阈值电压漂移带来的OLED亮度不均匀的问题,介绍了一种新的AMOLED四管像素电路,利用HSPICE仿真软件详细分析了电路各参数对其输出特性的影响,同时给出了参数设计的方法。最后从延长OLED的使用寿命出发,对电路进行了改进并根据已设计的参数进行了仿真,结果表明改进后的电路功能不变,且在驱动阶段,驱动电流变化为0.01μA,小于一个灰阶对应的电流,满足显示的要求。 展开更多
关键词 AMOLED 四管像素驱动电路 仿真 阈值电压漂移 多晶硅薄膜晶体管
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采用多晶硅场板降低单光子雪崩二极管探测器暗计数 被引量:4
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作者 韩冬 孙飞阳 +2 位作者 鲁继远 宋福明 徐跃 《物理学报》 SCIE EI CAS CSCD 北大核心 2020年第14期263-270,共8页
针对削弱暗计数噪声对单光子雪崩二极管(single-photon avalanche diode,SPAD)探测器的影响,本文研究了采用多晶硅场板降低SPAD器件暗计数率(dark count rate,DCR)的机理和方法.基于0.18-μm标准CMOS工艺,在一种可缩小的P+/P阱/深N阱器... 针对削弱暗计数噪声对单光子雪崩二极管(single-photon avalanche diode,SPAD)探测器的影响,本文研究了采用多晶硅场板降低SPAD器件暗计数率(dark count rate,DCR)的机理和方法.基于0.18-μm标准CMOS工艺,在一种可缩小的P+/P阱/深N阱器件结构的P+有源区和浅沟道隔离区(shallow trench isolation,STI)之间淀积了一层多晶硅场板来减小器件暗计数噪声.测试结果表明,多晶硅场板的淀积使SPAD器件的DCR降低了一个数量级,其在高温下的暗计数性能甚至优于室温下的未淀积多晶硅场板的器件.通过TCAD仿真进一步发现,SPAD器件保护环区域的峰值电场被多晶硅场板引入到STI内部,保护环区域的整体电场降低了25%;最后通过对DCR的建模计算得出,多晶硅场板削弱了具有高缺陷密度的保护环区域的电场,使缺陷相关DCR显著降低,从而有效改善了SPAD的暗计数性能. 展开更多
关键词 单光子雪崩二极管 暗计数率 多晶硅场板 缺陷辅助隧穿
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功率VDMOS器件ESD防护结构设计研究
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作者 毕向东 张世峰 韩雁 《半导体技术》 CAS CSCD 北大核心 2011年第8期604-608,共5页
随着半导体工艺的不断发展,器件的特征尺寸在不断缩小,栅氧化层也越来越薄,使得器件受到静电放电破坏的概率大大增加。为此,设计了一种用于保护功率器件栅氧化层的多晶硅背靠背齐纳二极管ESD防护结构。多晶硅背靠背齐纳二极管通过在栅... 随着半导体工艺的不断发展,器件的特征尺寸在不断缩小,栅氧化层也越来越薄,使得器件受到静电放电破坏的概率大大增加。为此,设计了一种用于保护功率器件栅氧化层的多晶硅背靠背齐纳二极管ESD防护结构。多晶硅背靠背齐纳二极管通过在栅氧化层上的多晶硅中不同区域进行不同掺杂实现。该结构与现有功率VDMOS制造工艺完全兼容,具有很强的鲁棒性。由于多晶硅与体硅分开,消除了衬底耦合噪声和寄生效应等,从而有效减小了漏电流。经流片测试验证,该ESD防护结构的HBM防护级别达8 kV以上。 展开更多
关键词 纵向双扩散金属氧化物半导体 静电损伤防护 多晶硅齐纳二极管 开启电压 人体静电放电模型
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利用P型场环调节表面电场的积累层LDMOS
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作者 孙旭 陈星弼 《微电子学》 CAS 北大核心 2019年第1期132-135,共4页
提出了一种在N型外延层中带有P型场环的积累层LDMOS。当器件耐压时,N型漂移区中浮空P型场环能调节漂移区的电场分布,以提高器件的耐压。当器件正向导通时,漂移区上方介质层的多晶硅二极管会在漂移区表面形成一层电子积累层,大幅提高器... 提出了一种在N型外延层中带有P型场环的积累层LDMOS。当器件耐压时,N型漂移区中浮空P型场环能调节漂移区的电场分布,以提高器件的耐压。当器件正向导通时,漂移区上方介质层的多晶硅二极管会在漂移区表面形成一层电子积累层,大幅提高器件的导电能力,从而降低器件的比导通电阻。数值仿真结果表明,该LDMOS的比导通电阻从传统结构的371mΩ·cm2降低到60.9mΩ·cm2。相比于没有场环的传统结构,该LDMOS的耐压从660V提高到765V。 展开更多
关键词 积累层LDMOS P型场限环 多晶硅二极管
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Two-dimensional threshold voltage model of a nanoscale silicon-on-insulator tunneling field-effect transistor
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作者 李妤晨 张鹤鸣 +4 位作者 张玉明 胡辉勇 王斌 娄永乐 周春宇 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第3期528-533,共6页
The tunneling field-effect transistor(TFET) is a potential candidate for the post-CMOS era.In this paper,a threshold voltage model is developed for this new kind of device.First,two-dimensional(2D) models are used... The tunneling field-effect transistor(TFET) is a potential candidate for the post-CMOS era.In this paper,a threshold voltage model is developed for this new kind of device.First,two-dimensional(2D) models are used to describe the distributions of potential and electric field in the channel and two depletion regions.Then based on the physical definition of threshold voltage for the nanoscale TFET,the threshold voltage model is developed.The accuracy of the proposed model is verified by comparing the calculated results with the 2D device simulation data.It has been demonstrated that the effects of varying the device parameters can easily be investigated using the model presented in this paper.This threshold voltage model provides a valuable reference to TFET device design,simulation,and fabrication. 展开更多
关键词 tunnel field-effect transistor band-to-band tunneling subthreshold swing gated p-i-n diode
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低压MOSFET集成ESD保护结构的设计方法 被引量:1
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作者 方绍明 赵美英 《集成电路应用》 2020年第9期192-194,共3页
为了有效防止低压MOSFET在受到静电击穿而损坏产品,需要设计专门的静电保护二极管,并联在MOSFET的栅极和源极之间,以对栅氧化层进行保护。静电保护结构的设计规则尺寸、注入剂量和级联结构,都会影响保护效果。设计者需在弄清ESD保护工... 为了有效防止低压MOSFET在受到静电击穿而损坏产品,需要设计专门的静电保护二极管,并联在MOSFET的栅极和源极之间,以对栅氧化层进行保护。静电保护结构的设计规则尺寸、注入剂量和级联结构,都会影响保护效果。设计者需在弄清ESD保护工作机理后、根据产品静电等级需要,确定保护二极管的特性参数,并结合工艺可行性及成本等因素,设计出最合适的ESD保护结构。 展开更多
关键词 集成电路制造 MOSFET 保护二极管 静电 人体模式 多晶硅 注入 栅源
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