A laser collimating system based on 2-D position sensitive detector (PSD) is presented in this paper. The working principle of PSD is depicted in detail. A calibration device was developed to check the nonlinearity er...A laser collimating system based on 2-D position sensitive detector (PSD) is presented in this paper. The working principle of PSD is depicted in detail. A calibration device was developed to check the nonlinearity errors of PSD and a multilayer feedforward neural network based on error back-propagation algorithm was used to compensate errors. With the aid of computer-based data acquisition system, an automatic dynamic measuring process was realized. A series of experiments, including comparison tests with laser interferometer, were done to evaluate the performance of the measuring system. The experimental results show that the spatial straightness errors of guide rails can be measured with high accuracy. The maximum differences between the device and laser interferometer are 0.027 mm in Y direction, and 0.053 mm in X direction in the measuring distance of 6 m.展开更多
Based on Lucovsky equation,the response solution of 1-D position sensitive detector(PSD) is given under the condition of parallel light oblique incidence and Gaussian beam oblique incidence,and the response characteri...Based on Lucovsky equation,the response solution of 1-D position sensitive detector(PSD) is given under the condition of parallel light oblique incidence and Gaussian beam oblique incidence,and the response characteristics are analyzed by numerical calculation. The relation between oblique incident angle and output current is introduced and illustrated.展开更多
文摘A laser collimating system based on 2-D position sensitive detector (PSD) is presented in this paper. The working principle of PSD is depicted in detail. A calibration device was developed to check the nonlinearity errors of PSD and a multilayer feedforward neural network based on error back-propagation algorithm was used to compensate errors. With the aid of computer-based data acquisition system, an automatic dynamic measuring process was realized. A series of experiments, including comparison tests with laser interferometer, were done to evaluate the performance of the measuring system. The experimental results show that the spatial straightness errors of guide rails can be measured with high accuracy. The maximum differences between the device and laser interferometer are 0.027 mm in Y direction, and 0.053 mm in X direction in the measuring distance of 6 m.
基金Program of the Science and Technology Department of Fujian Province(2007F5040)
文摘Based on Lucovsky equation,the response solution of 1-D position sensitive detector(PSD) is given under the condition of parallel light oblique incidence and Gaussian beam oblique incidence,and the response characteristics are analyzed by numerical calculation. The relation between oblique incident angle and output current is introduced and illustrated.
