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Optical Planar Waveguides in KTiOPO4 Crystals by MeV Oxygen Ion Implantation
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作者 陈峰 王雪林 +6 位作者 王克明 王磊 焦扬 王亮玲 路庆明 马宏骥 聂锐 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第6期1501-1503,共3页
We report on the optical planar waveguide formation in KTiOPO4 crystals by single or double oxygen ion implantation at energies of 2.4-3.0 MeV and doses of 1015 ions/cm^2. The dark-line spectroscopy properties are inv... We report on the optical planar waveguide formation in KTiOPO4 crystals by single or double oxygen ion implantation at energies of 2.4-3.0 MeV and doses of 1015 ions/cm^2. The dark-line spectroscopy properties are investigated by a prism-coupling method. With an effective refractive index method, the refractive index profiles of the waveguides are reconstructed. The program code TRIM'98 (transport of ions in matter) is used to simulate the implantation process of oxygen ions into the KTiOPO4 crystal. It is found that an inherent relationship exists between the nuclear damage and the refractive index changes induced by the ion-beam implantation. 展开更多
关键词 potassium titanyl phosphate FABRICATION
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