A nonlinear beam formulation is presented based on the Gurtin-Murdoch surface elasticity and the modified couple stress theory. The developed model theoretically takes into account coupled effects of the energy of sur...A nonlinear beam formulation is presented based on the Gurtin-Murdoch surface elasticity and the modified couple stress theory. The developed model theoretically takes into account coupled effects of the energy of surface layer and microstructures size- dependency. The mid-plane stretching of a beam is incorporated using von-Karman nonlinear strains. Hamilton＇s principle is used to determine the nonlinear governing equation of motion and the corresponding boundary conditions. As a case study, pull-in instability of an electromechanical nano-bridge structure is studied using the proposed formulation. The nonlinear governing equation is solved by the analytical reduced order method （ROM） as well as the numerical solution. Effects of various parameters including surface layer, size dependency, dispersion forces, and structural damping on the pull- in parameters of the nano-bridges are discussed. Comparison of the results with the literature reveals capability of the present model in demonstrating the impact of nano- scale phenomena on the pull-in threshold of the nano-bridges.展开更多
An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency （RF） micro electro-mechanical system （MEMS） switch is developed based on the Euler-Bernoulli beam an...An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency （RF） micro electro-mechanical system （MEMS） switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.展开更多
文摘A nonlinear beam formulation is presented based on the Gurtin-Murdoch surface elasticity and the modified couple stress theory. The developed model theoretically takes into account coupled effects of the energy of surface layer and microstructures size- dependency. The mid-plane stretching of a beam is incorporated using von-Karman nonlinear strains. Hamilton＇s principle is used to determine the nonlinear governing equation of motion and the corresponding boundary conditions. As a case study, pull-in instability of an electromechanical nano-bridge structure is studied using the proposed formulation. The nonlinear governing equation is solved by the analytical reduced order method （ROM） as well as the numerical solution. Effects of various parameters including surface layer, size dependency, dispersion forces, and structural damping on the pull- in parameters of the nano-bridges are discussed. Comparison of the results with the literature reveals capability of the present model in demonstrating the impact of nano- scale phenomena on the pull-in threshold of the nano-bridges.
基金supported by the National Natural Science Foundation of China(Nos.51505089 and61204116)the Opening Project of the Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory(Nos.ZHD201207 and 9140C030605140C03015)the Pearl River S&T Nova Program of Guangzhou(No.2014J2200086)
文摘An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency （RF） micro electro-mechanical system （MEMS） switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.
