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运用低温Purge降低LPCVD氮化硅工艺的微粒污染 被引量:2
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作者 罗浚涛 程秀兰 《电子与封装》 2013年第2期32-36,共5页
LPCVD制备的氮化硅薄膜具有良好的阶梯覆盖性,但是这种薄膜的应力偏高,在石英工艺腔管使用到8μm后易形成剥落微粒。特别是半导体工艺发展到了亚微米阶段,这一问题对于产品良率的影响也越来越大。文中以垂直式LPCVD设备为研究对象,通过... LPCVD制备的氮化硅薄膜具有良好的阶梯覆盖性,但是这种薄膜的应力偏高,在石英工艺腔管使用到8μm后易形成剥落微粒。特别是半导体工艺发展到了亚微米阶段,这一问题对于产品良率的影响也越来越大。文中以垂直式LPCVD设备为研究对象,通过利用晶圆冷却时间,运用降低工艺腔体温度并使用N2Purge的方法来改善微粒状况。通过大量对比实验来得出最优温度设定。运用这种方式不但改善了LPCVD设备制备氮化硅膜的微粒状况,还延长了设备的维护周期,增加设备利用时间。 展开更多
关键词 微粒污染 垂直型炉管 低温N2purge 剥落微粒
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Application of response surface methodology for optimization of purge gas recycling to an industrial reactor for conversion of CO_2 to methanol 被引量:1
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作者 Hadiseh Khalilpourmeymandi Azadeh Mirvakili +1 位作者 Mohammad Reza Rahimpour Alireza Shariati 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2017年第5期676-687,共12页
Nowadays, by the increasing attention to environment and high rate of fuel production, recycling of purge gas as reactant to a reactor is highly considered. In this study, it is proposed that the purge gases of methan... Nowadays, by the increasing attention to environment and high rate of fuel production, recycling of purge gas as reactant to a reactor is highly considered. In this study, it is proposed that the purge gases of methanol production unit, which are approximately15.018 t·h^(-1) in the largest methanol production complexes in the world, can be recycled to the reactor and utilized for increasing the production rate. Purge gas streams contain 63% hydrogen,20% carbon monoxide and carbon dioxide as reactants and 17% nitrogen and methane as inert. The recycling effect of beneficial components on methanol production rate has been investigated in this study. Simulation results show that methanol production enhances by recycling just hydrogen, carbon dioxide and carbon monoxide which is an effective configuration among the others. It is named as Desired Recycle Configuration(DRC) in this study. The optimum fraction of returning purge gas is calculated via one dimensional modeling of process and Response Surface Methodology(RSM) is applied to maximize the methanol flow rate and minimize the carbon dioxide flow rate. Simulation results illustrate that methanol flow rate increases by 0.106% in DRC compared to Conventional Recycle Configuration(CRC) which therefore shows the superiority of applying DRC to CRC. 展开更多
关键词 Methanol synthesis Recycling purge gas streams Novel configuration Response surface methodology
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PURGE OF MALIGNANT CELLS FROM BONE MARROW BY HEMATOPORPHYRIN DERIVATIVES AND LIGHT EXPOSURE IN VITRO
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作者 徐承熊 林琳 +6 位作者 黄夜萤 刘红岩 王秀荣 王云霞 张伯龙 李秀荣 侯虞华 《Chinese Journal of Cancer Research》 SCIE CAS CSCD 1990年第1期20-23,共4页
During autologous bone marrow graft in treatment of malignant diseases, it is critical to purge malignant cells from the marrow. In the present study, the sensitivity to photodynamic inactivation of 3 leukemic cell li... During autologous bone marrow graft in treatment of malignant diseases, it is critical to purge malignant cells from the marrow. In the present study, the sensitivity to photodynamic inactivation of 3 leukemic cell lines was compared with their counterpart normal hematopoietic cells. After mouse leukemic L1210 cells were treated with a preparation of hematoporphyrin derivatives, YHpD, 10 μg/ml for 1 hr. and irradiated with blacklight (peak wavelength 395 nm, light intensity 0.6 mW/cm2) for 5 minutes, the survival rate of clonogenic cells decreased to <10%, while that of bone marrow granulocyte macrophage progenitor cells (CFU-GM) in DBA/2 mice remained at nearly normal level (>80%). Similar results were obtained when human leukemic HL-60 cells were compared with human CFU-GM and mouse leukemic L615 cells with CFU-GM in 615 strain mice. It is suggested that hematoporphyrin photoradiation may be useful for Iselectively killing leukemic cells in bone marrow. 展开更多
关键词 GM purge OF MALIGNANT CELLS FROM BONE MARROW BY HEMATOPORPHYRIN DERIVATIVES AND LIGHT EXPOSURE IN VITRO CFU
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肯天获得Ultra PurgeTM品牌,螺杆清洗料供应能力提高
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《现代塑料》 2016年第12期6-6,共1页
肯天(全球领先的螺杆清洗料、脱摸剂和模具维护产品开发,生产和销售商)宣布已收购了Moulds Plus International的Ultra Purge、”清洗料业务包括Ultra PurgeTM品牌,产品和工艺技术.以及其他业务资产,
关键词 供应能力 清洗 品牌 螺杆 产品开发 purge PLUS 销售商
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THEORETICAL ANALYSIS OF USING AIRFLOW TO PURGE RESIDUAL WATER IN AN INCLINED PIPE
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作者 沈芳 严宗毅 +1 位作者 赵耀华 Kiyoshi Horii 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI 2002年第6期694-702,共9页
A refined theoretical analysis for using the spiral airflow and axial airflow to purge residual water in an inclined pipe was presented. The computations reveal that, in most cases, the spiral flow can purge the resid... A refined theoretical analysis for using the spiral airflow and axial airflow to purge residual water in an inclined pipe was presented. The computations reveal that, in most cases, the spiral flow can purge the residual water in the inclined pipe indeed while the axial flow may induce back flow of the water, just as predicted in the experiments presented by Horii and Zhao et al. In addition, the effects of various initial conditions on water purging were studied in detail for both the spiral and axial flow cases. 展开更多
关键词 spiral flow axial flow water purging two-phase flow pipe flow
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Numerical investigation of the interaction between upstream cavity purge flow and main flow in low aspect ratio turbine cascade 被引量:10
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作者 Jia Wei Liu Huoxing 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2013年第1期85-93,共9页
In modern gas turbines, rim seal located between the stator-disc and rotor-disc is used to prevent hot-gas ingestion into the inner stage-gap of high pressure turbine. However, the purge flow supplied to the cavity th... In modern gas turbines, rim seal located between the stator-disc and rotor-disc is used to prevent hot-gas ingestion into the inner stage-gap of high pressure turbine. However, the purge flow supplied to the cavity through the rim seal interacts with the main flow, producing additional aerodynamic loss due to the mixing process which plays a significant role in the formation, development and evolution of downstream secondary flow. In this paper, a set of cascade representative of low aspect ratio turbine is selected to numerically investigate the influence of upstream cavity purge flow on the hub secondary flow structure and aerodynamic loss. Cascade with/without upstream cavity and four different purge mass flow rates are all taken into account in this simulation. Then, a deep insight into the loss mechanism of interaction between purge flow and main flow is gained. The results show that the presence of cavity and purge flow has a significant impact on the main flow which not only changes the vortex structure in both the passage and upstream cavity, but also alters the cascade exit flow angle distribution along the spanwise. Moreover, aerodynamic loss in the cascade rises with the increase of purge flow rate while the sealing effect is also enhanced. Therefore, the effect of upstream cavity purge flow must be considered in the process of turbine aerodynamic design. What is more, it is necessary to minimize the purge flow rate in order to reduce aerodynamic loss on the premise of satisfying cooling requirements. 展开更多
关键词 Aerodynamic loss Low aspect ratio purge flow Turbine Upstream cavity
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Purge and trap method to determine alpha factors of VOC liquid-phase mass transfer coefficients 被引量:1
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作者 S.C.Lee L.Y.Chan C.Y.Chan 《Chinese Science Bulletin》 SCIE EI CAS 2000年第S1期76-79,共4页
A theoretical approach and laboratory practice of determining the alpha factors of volatile organic compound (VOC) liquid-phase mass transfer coefficients are present in this study. Using Purge & Trap Concentrator... A theoretical approach and laboratory practice of determining the alpha factors of volatile organic compound (VOC) liquid-phase mass transfer coefficients are present in this study. Using Purge & Trap Concentrator, VOC spiked water samples are purged by high-purity nitrogen in the laboratory, the VOC liquid-phase mass transfer rate constants under the laboratory conditions are then obtained by observing the variation of VOCs purged out of the water with the purge time. The alpha factors of VOC liquid-phase mass transfer coefficients are calculated as the ratios of the liquid-phase mass transfer rate constants in real water samples to their counterparts in pure water under the same experimental conditions. This direct and fast approach is easy to control in the laboratory, and would benefit mutual comparison among researchers, so might be useful for the study of VOC mass transfer across the liquid-gas interface. 展开更多
关键词 mass transfer COEFFICIENT purge and TRAP VOLATILE organic compounds ALPHA factor.
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Study on Chrome-free Purging Plugs for Steel Ladles
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作者 Yunpeng ZHOU Wang FENG +2 位作者 Shankha CHATTERJEE Andus BUHR Sebastian KLAUS 《China's Refractories》 CAS 2024年第2期41-47,共7页
Purging plug refractories in China typically contain around 3 mass% of super-fine chromium oxide in the matrix in order to improve the performance of the purging plugs, primarily, slag corrosion and wear resistance. A... Purging plug refractories in China typically contain around 3 mass% of super-fine chromium oxide in the matrix in order to improve the performance of the purging plugs, primarily, slag corrosion and wear resistance. Alternatives to chromium oxide containing refractories have gained interest due to health concerns related to the formation of soluble chromium compounds over long storage periods of refractory wastes. Super-ground reactive alumina can replace chromium oxide in purging plug refractories and this paper discussed the new reactive alumina E-SY 88 in comparison to chromium oxide in a typical purging plug castable. The mixing behaviour, wet castable properties, as well as cured, dried, and fired properties at different temperatures up to 1 600 ℃ were compared. In addition, the hot modulus of rupture, creep behaviour, thermal shock resistance and slag corrosion resistance were tested. The microstructure after slag corrosion was investigated by SEM. The results prove that E-SY 88 is an economically viable technical alternative to chromium oxide in purging plug refractories. 展开更多
关键词 purging plug alumina-spinel castable WORKABILITY chromium-free thermal shock resistance
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Effect of Zircon Addition on Properties of Corundum Porous Materials
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作者 CHEN Haonan LIU Xin +3 位作者 ZHANG Shiming LI Ying WANG Di JIA Quanli 《China's Refractories》 CAS 2024年第1期7-13,共7页
This paper aims to improve the corrosion resistance of dispersive purging plugs.White fused corundum particles and fine powder,α-Al_(2)O_(3) micropowder,Cr_(2)O_(3) micropowder,Guangxi clay and zircon powder were use... This paper aims to improve the corrosion resistance of dispersive purging plugs.White fused corundum particles and fine powder,α-Al_(2)O_(3) micropowder,Cr_(2)O_(3) micropowder,Guangxi clay and zircon powder were used as the main raw materials.The mass ratio of white fused corundum particles and fine powder was fixed at 85:15,and 0,1%,2%,or 3%(by mass)of zircon fine powder was added to replace the same amount of white fused corundum fine powder.The corundum porous material was prepared by the particle stacking pore-forming method at 1650℃for 3 h.The effect of the zircon addition on the properties and microstructure of porous materials was investigated.The results show that:after adding zircon,the permeability of the porous material increases,the cold and hot strengths increase obviously,and the expansion rate after firing decreases.When the addition of zircon is 2%,the comprehensive performance of the specimen is optimal with the smallest linear change rate and the highest permeability. 展开更多
关键词 porous materials zircon fines purging plug PERMEABILITY
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Effects of Nano-CaCO_(3)Addition on Properties of Corundum-based Dispersive Purging Plugs
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作者 SU Yuqing ZHU Yening +5 位作者 YU Baisong XI Zijian WEI Juncong TU Junbo ZHANG Houxing WANG Yilong 《China's Refractories》 CAS 2023年第4期28-32,共5页
In order to improve the properties of corundum based dispersive purging plugs,dispersive purging plug specimens were prepared using tabular corundum(1-0.15 and≤0.15 mm)as the aggregates,tabular corundum(≤0.044 mm)an... In order to improve the properties of corundum based dispersive purging plugs,dispersive purging plug specimens were prepared using tabular corundum(1-0.15 and≤0.15 mm)as the aggregates,tabular corundum(≤0.044 mm)andα-Al_(2)O_(3)micropowder(d_(50)=0.6μm)as the matrix,Secar 71 cement as the binder,introducing different amounts of nano-CaCO_(3),casting into shapes,and firing at different temperatures(1200 or 1600℃)for 4 h.The effects of the nano-CaCO_(3) extra-addition(0,0.5%,1.0%,1.5%and 2.0%,by mass)on the consistency of the castables as well as the properties and microstructure of the dispersive purging plug specimens were studied.The results show that:(1)with the fixed water addition,the consistency of the corundum castables decreases as the nano-CaCO_(3)addition increases;(2)with the increasing nano-CaCO_(3)addition,the bulk density of the specimens fired at different temperatures for 4 h decreases,the apparent porosity,the cold strength and the hot modulus of rupture all increase,the gas permeability does not change significantly;(3)the specimens fired at 1600℃ for 4 h have obviously better cold comprehensive performance than those fired at 1200℃for 4 h;(4)when the nano-CaCO_(3)addition is 1.5%,the comprehensive performance of the specimen is the optimal. 展开更多
关键词 dispersive purging plugs CONSISTENCY nano-calcium carbonate
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吹扫捕集气相色谱-质谱法定性分析人尿中挥发性有机物 被引量:9
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作者 黄毅 饶竹 王超 《分析测试学报》 CAS CSCD 北大核心 2007年第z1期64-66,共3页
The volatile organic compounds in male and female urine were analyzed using P&T/GC-MS.More than 70 VOCs in samples were identified.Identification of compound were based on NIST05 library and relative references.Co... The volatile organic compounds in male and female urine were analyzed using P&T/GC-MS.More than 70 VOCs in samples were identified.Identification of compound were based on NIST05 library and relative references.Compounds in double urines included short-chain alcohols,ketones,aldehyde,sulfether,aliphatic hydrocarbon,aromatic hydrocarbon and chlorinated hydrocarbon.The nicotine in urine was identified.The source of VOCs in urine was briefly discussed in the article. 展开更多
关键词 VOCS URINE purge and trap GC-MS
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高速公路两侧农业土壤中挥发性有机化合物污染研究 被引量:2
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作者 刘劲松 孙晓慧 +3 位作者 叶伟红 潘荷芳 王静 高亮 《分析测试学报》 CAS CSCD 北大核心 2007年第z1期213-214,共2页
The pollution of VOCs was studied on both side of highway.With the determination method of purge and trap concentration coupled with gas chromatography-mass spectrometry,we found that the degree of pollution near the ... The pollution of VOCs was studied on both side of highway.With the determination method of purge and trap concentration coupled with gas chromatography-mass spectrometry,we found that the degree of pollution near the highway was not very bad. 展开更多
关键词 purge and trap GC-MS VOCS Soil
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一种改进的热流道清洗剂
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作者 赵虹 《现代塑料加工应用》 CAS 北大核心 2010年第3期42-42,共1页
据“www.ptonline.com,2010年4月”报道,位于纽约州Depew的Shuman塑料公司的Dyna—Purge分公司改进了用于有色料在热流道系统中快速切换的清除剂Dyna-PurgeP的性能。增强的清洗剂配方具有双重净除作用,可以渗入窄狭的通道,使降解... 据“www.ptonline.com,2010年4月”报道,位于纽约州Depew的Shuman塑料公司的Dyna—Purge分公司改进了用于有色料在热流道系统中快速切换的清除剂Dyna-PurgeP的性能。增强的清洗剂配方具有双重净除作用,可以渗入窄狭的通道,使降解产物松动并移除降解产物。该公司称这种新增的净除作用特别适用于有狭窄通道和拐角的老式设备。 展开更多
关键词 热流道系统 清洗剂 降解产物 purge .com 快速切换 www 清除剂
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耐高热的清机料
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作者 严淑芬 《现代塑料加工应用》 CAS 北大核心 2015年第3期25-25,共1页
据“www.ptonline.com”报道,纽约州迪普舒曼塑料有限公司Dyna—Purge Div.开发出一种新型清洗吹扫耐高温热塑性塑料清机料Dyna—Purge E2。2013年12月俄亥俄州阿克伦大学高分子科学与高分子工程研究所对该材料进行独立研究,
关键词 耐高热 purge 热塑性塑料 高分子科学 .com 分子工程 俄亥俄州 WWW
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AutoCAD文件的压缩
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作者 邹利民 《电脑知识与技术》 2006年第2期180-180,共1页
本文简单叙述了精减AutoCAD文件大小的二种方法,并对此进行了比较。
关键词 AUTOCAD purge WBLOCK 命令 压缩
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Sequential analysis of dimethyl sulfur compounds in seawater 被引量:6
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作者 Meng Li Dong Xing Yuan Quan Long Li Xiao Ying Jin 《Chinese Chemical Letters》 SCIE CAS CSCD 2007年第1期99-102,共4页
A sequential method for the determination of dimethyl sulfur compounds, including dimethylsulfide (DMS), dimethylsulfonio- propionate (DMSP) and dimethylsulfoxide (DMSO), in seawater samples has been developed. ... A sequential method for the determination of dimethyl sulfur compounds, including dimethylsulfide (DMS), dimethylsulfonio- propionate (DMSP) and dimethylsulfoxide (DMSO), in seawater samples has been developed. Detection limit of 2.5 pmol of DMS in 25 mL sample, corresponding to 0.10 nmol/L, was achieved. Recoveries for dimethyl sulfur compounds were in the range of 68.6- 78.3%. The relative standard deviations (R.S.D.s) for DMS, DMSP and DMSO determination were 3.0, 5.4 and 7.4%, respectively. 展开更多
关键词 Dimethylsulfide (DMS) Dimethylsulfoniopropionate (DMSP) Dimethylsulfoxide (DMSO) purge and trap Microwave irradiation Sequential analysis
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Analysis of volatile components in a Chinese fish sauce,Fuzhou Yulu, by gas chromatography-mass spectrometry 被引量:1
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作者 Yuan-fan YANG Shen-ru CHEN +1 位作者 Hui NI Xing-qian YE 《Journal of Zhejiang University-Science B(Biomedicine & Biotechnology)》 SCIE CAS CSCD 2008年第12期977-981,共5页
Volatile components of Fuzhou Yulu, a Chinese fish sauce, were analyzed by gas chromatography-mass spectrometry (GC-MS), and two pretreatment methods, i.e., purge and trap (P&T) GC-MS and ethyl acetate extraction... Volatile components of Fuzhou Yulu, a Chinese fish sauce, were analyzed by gas chromatography-mass spectrometry (GC-MS), and two pretreatment methods, i.e., purge and trap (P&T) GC-MS and ethyl acetate extraction followed by GC-MS, were compared. P&T-GC-MS method determined 12 components, including sulfur-containing constituents (such as dimethyl disulfide), nitrogen-containing constituents (such as pyrazine derivatives), aldehydes and ketones. Ethyl acetate extraction fol- lowed by GC-MS method detected 10 components, which were mainly volatile organic acids (such as benzenepropanoic acid) and esters. Neither of the two methods detected alcohols or trimethylamine. This study offers an important reference to determine volatile flavor components of traditional fish sauce through modem analysis methods. 展开更多
关键词 Fish sauce Fuzhou Yulu Volatile component purge and trap Gas chromatography-mass spectrometry (GC-MS)
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浅谈OVEN控制中的要点
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作者 陈璐健 《科技创新与应用》 2012年第22期81-81,共1页
在最近的项目中遇到了一些涂布线,在涂布线的生产调试中,一般都会有OVEN的控制这个环节;而且每条线由于产品不同,其中的重要参数会有不同,再加上各个环节之间的相互影响,所以其控制环节的很多参数就很难统一,需要进行试验而去取得。
关键词 LFL 滤波 purge
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SolarT60 Pigtail管线烧红故障分析及改造 被引量:1
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作者 林建伟 许海峰 张笑龙 《天津科技》 2013年第5期9-11,共3页
明珠号FPSO于2010年在渤中25-1油田临时复产后,先后出现3次两台索拉透平T60机组在燃气模式下,燃油pigtail管线烧红的现象。对T60机组燃油pigtail管线烧红的原因进行分析,通过PCD Forward Purge系统改造,保证在燃气模式下燃油管线内有持... 明珠号FPSO于2010年在渤中25-1油田临时复产后,先后出现3次两台索拉透平T60机组在燃气模式下,燃油pigtail管线烧红的现象。对T60机组燃油pigtail管线烧红的原因进行分析,通过PCD Forward Purge系统改造,保证在燃气模式下燃油管线内有持续的冷却PCD气体,彻底解决机组燃油管线被烧红的安全隐患。 展开更多
关键词 Solar TURBINE Pigtail管线 故障分析 PCD FORWARD purge改造
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Auto CAD R12.0技术拾零
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作者 付柏青 蒙智民 安静 《智能建筑与城市信息》 1995年第1期40-40,共1页
关键词 自动编辑 DWG文件 purge AUTOCAD命令 系统变量 输入层 AUTOCADR12 捕捉方式 LAYER DWG图形
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