Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

The gas heating mechanism in the pulse-modulated radio-frequency （rf） discharge at atmospheric pressure was inves- tigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature （Tg） in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that Tg decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the Tg, were studied. It was found that Tg decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the Tg can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from αto γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of Tg in the two modes show different features and the ion Joule heating is more important during the mode transition.

Numerical simulation of atmospheric pulsemodulated radio-frequency glow discharge ignition characteristics assisted by a pulsed discharge

A one-dimensional self-consistent fluid numerical model was developed to study the ignition characteristics of a pulsc-tmxlulated(PM)radio-frequency(RF)glow discharge in atmospheric helium assisted by a sub-microsecond voltage excited pulsed discharge.The temporal evolution of discharge current density and electron density during PM RF discharge burst was investigated to demonstrate the discharge ignition characteristics with or without the pulsed discharge.Under the assistance of pulsed discharge,the electron density in RF discharge burst reaches the magnitude of 1.87 x 1017-3m within 10 RF cycles,accompanied by the formation of sheath structure.It proposes that the pulsed discharge plays an important role in the ignition of PM RF discharge burst.Furthermore,the dynamics of PM RF glow discharge arc demonstrated by the spatiotcmporal evolution of the election density with and without pulsed discharge.The spatial profiles of electron density,electron energy and electric field at specific time instants arc given to explain the assistive role of the pulsed discharge on PM RF discharge ignition.

Simulation of radio-frequency atmospheric pressure glow discharge in γ mode

The existence of two diffe1：ent discharge modes has been verified in an rf （radio-frequency） atmospheric pressure glow discharge （APGD） by Shi [J. Appl. Phys. 97, 023306 （2005）]. In the first mode, referred to as a mode, the discharge current density is relatively low and the bulk plasma electrons acquire the energy due to the sheath expansion. In the second mode, termed γ mode, the discharge current density is relatively high, the secondary electrons emitted by cathodc under ion bombardment in the cathode sheath region play an important role in sustaining the discharge. In this paper, a one-dimensional self-consistent fluid model for rf APGDs is used to simulate the discharge mechanisms in the mode in helium discharge between two parallel metallic planar electrodes. The results show that as the applied voltage increases, the discharge current becomes greater and the plasma density correspondingly increases, consequentially the discharge transits from the a mode into the γ mode. The high collisionality of the APGD plasma results in significant drop of discharge potential across the sheath region, and the electron Joule heating and the electron collisional energy loss reach their maxima in the region. The validity of the simulation is checked with the available experimental and numerical data.

Simulation of DC glow discharge plasma with free-moving dust particles in the radial direction

A self-consistent fluid model is developed to investigate the radial distributions of dusty plasma parameters in a DC glow discharge,in which the extended fluid approach of plasma particles and the transport equations of dust particles are coupled.The electrical interaction between charged dust particles is considered in the model.The time evolution of radial distributions of dust density,plasma density,the radial component of electric field and the forces acting on dust particles when dust density tends to be stable,are obtained and analyzed under different discharge currents and dust particle radii.It is shown that the dust density structure is determined mainly by the radial electrostatic force,thermophoretic force and ion drag force in the discharge tube,and both discharge current and dust particle radius have an obvious effect on the transport processes of dust particles.The dust particles gather in the central region of the discharge tube for low discharge current and small dust radius,then dust voids are formed and become wider when the discharge current and dust radius increase.The plasma parameters in the dust gathering region are obviously affected by the dust particles due to the charging processes of electrons and ions to the dust surface.

Electrical features of radio-frequency atmospheric pressure helium discharge with and without dielectric electrodes

A comparative study of radio-frequency atmospheric pressure glow discharge(rf APGD)generated in helium with and without dielectric electrodes to investigate the effect of electrodes insulation on electrical features of APGD is presented. In the α mode, both the rf APGDs remain volumetric, stable and uniform. In the γ mode, the APGD without dielectric electrodes shrinks into a constricted plasma column whereas APGD with dielectric electrodes remains stable and retains the same volume without plasma constriction even at higher densities of discharge current. A comparison of electrical features of both rf APGDs in normal and abnormal glow discharge regimes is presented. In both APGDs with and without dielectric electrodes,impedance measurements have been performed and compared with equivalent circuit models.The measured impedance data is found to be in good agreement with simulated data.

Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen

In this paper, a 1D fluid model is developed to study the characteristics of a discharge in argon with small admixtures of oxygen at atmospheric pressure. This model consists of a series of equations, including continuity equations for electrons, positive ions, negative ions and neutral particles, the energy equation, and the Poisson equation for electric potential. Special attention has been paid to the electron energy dissipation and the mechanisms of electron heating, while the admixture of oxygen is in the range of 0.1%-0.6%. It is found that when the oxygen-to-argon ratio grows, the discharge is obviously divided into three stages： electron growth, electron reduction and the electron remaining unchanged. Furthermore, the cycle-averaged electric field, electron temperature, electron Ohmic heating, electron collisionless heating, electron energy dissipation and the net electron production are also studied in detail, and when the oxygen-to- argon ratio is relatively larger （R = 0.6%）, double value peaks of electron Ohmic heating appear in the sheath. According to the results of the numerical simulation, various oxygen-to-argon ratios result in different amounts of electron energy dissipation and electron heating.

Spectroscopic Study of a Radio-Frequency Atmospheric Pressure Dielectric Barrier Discharge with Anodic Alumina as the Dielectric

This paper presents the fabrication and a spectroscopic study of a stable radio- frequency dielectric barrier discharge （RF DBD） in Ar with a novel dielectric, anodic alumina, at atmospheric pressure. Dielectric electrodes are fabricated from commercially available low cost impure aluminum strips by a two-step anodization process in 0.3 M solution of oxalic acid. The discharge is found to be stable with excellent spatial uniformity for the RF input power range of 30～80 W. Excitation and rotational temperatures measured in the experiment range of 1472～3255 K and 434～484 K, respectively, as the input power changes from 30 W to 80 W. These temperature ranges are suitable for surface modification applications.

Aerodynamic actuation characteristics of radio-frequency discharge plasma and control of supersonic flow

In this paper, aerodynamic actuation characteristics of radio-frequency(RF) discharge plasma are studied and a method is proposed for shock wave control based on RF discharge. Under the static condition, a RF diffuse glow discharge can be observed; under the supersonic inflow, the plasma is blown downstream but remains continuous and stable.Time-resolved schlieren is used for flow field visualization. It is found that RF discharge not only leads to continuous energy deposition on the electrode surface but also induces a compression wave. Under the supersonic inflow condition, a weak oblique shock wave is induced by discharge. Experimental results of the shock wave control indicate that the applied actuation can disperse the bottom structure of the ramp-induced oblique shock wave, which is also observed in the extracted shock wave structure after image processing. More importantly, this control effect can be maintained steadily due to the continuous high-frequency(MHz) discharge. Finally, correlations for schlieren images and numerical simulations are employed to further explore the flow control mechanism. It is observed that the vortex in the boundary layer increases after the application of actuation, meaning that the boundary layer in the downstream of the actuation position is thickened. This is equivalent to covering a layer of low-density smooth wall around the compression corner and on the ramp surface, thereby weakening the compressibility at the compression corner. Our results demonstrate the ability of RF plasma aerodynamic actuation to control the supersonic airflow.

Effect of Duty Cycle on the Characteristics of Pulse-Modulhted Radio-Frequency Atmospheric Pressure Dielectric Barrier Discharge

Using a one-dimensional fluid model, the pulse-modulated radio-frequency dielectric barrier discharge in atmospheric helium is described. The influences of the pulse duty cycle on the discharge characteristics are studied. The numerical results show that the dependence of discharge characteristics on the duty cycle is sensitive in the region of around 40% duty cycle under the given simulation parameters. In the case of a larger duty cycle, the plasma density is higher, the discharge becomes more intense, but the power consumption is higher. When the duty cycle is lower, one can get a weaker discharge, lower plasma density and higher electron temperature in the bulk plasma. In practical applications, in order to get a higher plasma density and a lower power consumption, it is more important to choose a suitable duty cycle to modulate the RF power supply.

Effect of Addition of Nitrogen to a Capacitively Radio-Frequency Hydrogen Discharge

A hybrid PIC/MC model is developed in this work for H2-xN2 capacitively coupled radio-frequency （CCRF） discharges in which we take into account 43 kinds of collisions reaction processes between charged particles （e-, H3＋, H＋, H＋, N＋, N＋） and ground-state molecules （H2, H＋ N2）. In addition, the mean energies and densities of electrons and ions （ 3, H＋, H＋）, and electric field distributions in the H2-N2 CCRF discharge are simulated by this model. Furthermore, the effects of addition of a variable percentage of nitrogen （0-30%） into the H2 discharge on the plasma processes and discharge characteristics are studied. It is shown that by increasing the percentage of nitrogen added to the system, the RF sheath thickness will narrow, the sheath electric field will be enhanced, and the mean energy of hydrogen ions impacting the electrodes will be increased. Because the electron impact ionization and dissociative ionization rates increase when N2 is added to the system, the electron mean density will increase while the electron mean energy and hydrogen ion density near the electrodes will decrease. This work aims to provide a theoretical basis for experimental studies and technological developments with regard to H2-N2 CCRF plasmas.

Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C_2H_2 discharges

The role of pulse parameters on nanoparticle property is investigated self-consistently based on a couple of fluid model and aerosol dynamics model in a capacitively coupled parallel-plate acetylene（C2H2） discharge. In this model, the mass continuity equation, momentum balance equation, and energy balance equation for neutral gas are taken into account.Thus, the thermophoretic force arises when a gas temperature gradient exists. The typical results of this model are positive and negative ion densities, electron impact collisions rates, nanoparticle density, and charge distributions. The simulation is performed for duty ratio 0.4/0.7/1.0, as well as pulse modulation frequency from 40 kHz to 2.7 MHz for pure C2H2 discharges at a pressure of 500 mTorr. We find that the pulse parameters, especially the duty ratio, have a great affect on the dissociative attachment coefficient and the negative density. More importantly, by decreasing the duty ratio, nanoparticles start to diffuse to the wall. Under the action of gas flow, nanoparticle density peak is created in front of the pulse electrode,where the gas temperature is smaller.

TREATMENT OF METALS, POLYMER FILMS, AND FABRICS WITHA ONE ATMOSPHERE UNIFORM GLOW DISCHARGE PLASMA(OAUGDP) FOR INCREASED SURFACE ENERGY AND DIRECTIONAL ETCHING

Direct exposure of samples to the active species of air generated by a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) has been used to etch and to increase the surface energy of metallic surfaces, photoresist, polymer films, and nonwoven fab- rics. The OAUGDP is a non-thermal plasma with the classical characteristics of a DC normal glow discharge that operates in air (and other gases) at atmospheric pres- sure. Neither a vacuum system nor batch processing is necessary. A wide range of applications to metals, photoresist, films, fabrics, and polymeric webs can be accom- modated by direct exposure of the workpiece to the plasma in parallel-plate reactors. This technolopy is simple, it produces effects that can be obtained in no other way at one atmosphere; it generates minimal pollutants or unwanted by-products; and it is suitable for individual sample or online treatment of metallic surfaces, wafers, films, and fabrics. Early exposures of solid materials to the OAUGDP required minutes to produce rela- tively small increases of surface energy. These durations appeared too long for com- mercial application to fast-moving webs. Recent improvements in OAUGDP gas com- position, power density, plasma quality, recireulating gas flow, and impedance match- ing of the power supply to the parallel plate plasma reactor have made it possible to raise the surface energy of a variety of polymeric webs (PP, PET PE etc.) to levels of 60 to 70 dynes/cm with one second of exposure. In air plasmas, the high surface ener- gies are not durable, and fall to 50 dynes/cm after periods of weeks to months. Here, we report the exposure of metallic surfaces, photoresist, polymeric films, and nonwo- ven fabrics made of PP and PET to an impedance matched parallel plate OAUGDP for durations ranging from one second to several tens of seconds. Data will be re- ported on the surface energy, wettability, wickability, and aging effect of polymeric films and fabrics as functions of time of exposure, and time after exposure; the rate and uniformity of photoresist etching; and the production of sub-micron structures by OAUGDP etching at one atmosphere.

Surface Treatment of Polyethylene Terephthalate Film Using Atmospheric Pressure Glow Discharge in Air

Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (PET) film surface for improving hydrophilicity using the non-thermal plasma generated by atmospheric pressure glow discharge (APGD) in air is conducted. The discharge characteristics of APGD are shown by measurement of their electrical discharge parameters and observation of light-emission phenomena, and the surface properties of PET before and after the APGD treatment are studied using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). It is found that the APGD is homogeneous and stable in the whole gas gap, which differs from the commonly filamentary dielectric barrier discharge (DBD). A short time (several seconds) APGD treatment can modify the surface characteristics of PET film markedly and uniformly. After 10 s APGD treatment, the

Oxidative Degradation of 4-chlorophenol in Aqueous Induced by Plasma with Submersed Glow Discharge Electrolysis

The oxidative degradation of 4-chlorophenol （4-CP） in aqueous solution induced by plasma with submersed glow discharge has been investigated. The concentration of 4-CP and the reaction intermediates were determined by high performance liquid chromatography （HPLC）. Various influencing factors such as the initial pH, the concentration of 4-CP and the catalytic action of Fe^2＋ were examined. The results indicate that 4-CP is eventually degraded into inorganic ion, dioxide carbon and water. The attack of hydroxyl radicals on the benzene rings of 4-CP in the initial stage of oxidative reactions is presumed to be a key step. They also suggest that the reaction is of a pseudo-first order kinetic reaction and the proposed method is an efficient way for the 4-CP degradation,

Application of the Multi-Electrode in the Degradation of Alizarin Red Induced by Glow Discharge Plasma

This paper presents a novel set-up to be used in the degradation of dye, Various influencing factors, such as the voltage, the number of the anodes, and the catalytic action of Fe^2＋, were examined. Chemical oxygen demand （COD）, ultraviolet （UV）, FTIR absorption spectra, and atomic force microscopy （AFM） were used to monitor the degradation process. The results showed that the efficiency of degradation is raised by increasing the applied voltage, and is further improved when two or three anodes are used. Moreover, the use of Fe^2＋ ion can promote the degradation reaction and shorten the degradation time. So the multi-electrode instrument is more efficient in degrading the dye and should be further studied.

Numerical studies of atmospheric pressure glow discharge controlled by a dielectric barrier between two coaxial electrodes

The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.

Spatial distribution of electron characteristic in argon rf glow discharges

The spatial distributions of the electron density and the mean electron energy of argon radio frequency （rf） glow discharge plasma in a plasma-enhanced chemical vapour deposition （PECVD） system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one： the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.

Low Pressure DC Glow Discharge Air Plasma Surface Treatment of Polyethylene (PE) Film for Improvement of Adhesive Properties

The present work deals with the change in surface properties of polyethylene （PE） film using DC low pressure glow discharge air plasma and makes it useful for technical applications. The change in hydrophilicity of the modified PE film surface was investigated by measuring contact angle and surface energy as a function of exposure time. Changes in the morphological and chemical composition of PE films were analyzed by atomic force microscopy （AFM） and X-ray photoelectron spectroscopy （XPS）. The improvement in adhesion was studied by measuring T-peel and lap-shear strength. The results show that the wettability and surface energy of the PE film has been improved due to the introduction of oxygen-containing polar groups and an increase in surface roughness. The XPS result clearly shows the increase in concentration of oxygen content and the formation of polar groups on the polymer surface. The AFM observation on PE film shows that the roughness of the surface increased due to plasma treatment. The above morphological and chemical changes enhanced the adhesive properties of the PE＇film surfaces, which was confirmed by T-peel and lap-shear tests.

Numerical study of the self-pulsing of DC discharge:from corona to parallel-plate configurations

We present here an investigation of the self-pulsing phenomenon of negative corona and parallel-plate discharge in argon within one frame of a one-dimensional fluid model in cylinder–cylinder electrode geometry.The transition from corona to parallel-plate discharge is obtained by changing the inner and outer radii of the electrodes.The model reproduces the self-pulsing waveform well and provides the spatiotemporal behaviors of the charged particles and electric field during the pulse.The self-pulsing shows a common feature that occurs in various configurations and that does not depend on a specific electrode structure.The self-pulsing is the transformation between a weak-current Townsend mode and a large-current normal glow mode.The behavior of the positive ions is the dominant factor in the formation of the pulse.

Characteristics of a Normal Glow Discharge Excited by DC Voltage in Atmospheric Pressure Air

Atmospheric pressure glow discharges were generated in an air gap between a needle cathode and a water anode. Through changing the ballast resistor and gas gap width between the electrodes, it has been found that the discharges are in normal glow regime judged from the currentvoltage characteristics and visualization of the discharges. Results indicate that the diameter of the positive column increases with increasing discharge current or increasing gap width. Optical emission spectroscopy is used to calculate the electron temperature and vibrational temperature. Both the electron temperature and the vibrational temperature increases with increasing discharge current or increasing gap width. Spatially resolved measurements show that the maxima of electron temperature and vibrational temperature appeared in the vicinity of the needle cathode.