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A CO_2 laser rapid-thermal-annealing SiO_x based metal-oxide-semiconductor light emitting diode
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作者 林俊荣 林恭如 《Chinese Optics Letters》 SCIE EI CAS CSCD 2007年第10期601-601,共1页
Enhanced near-infrared (NIR) electroluminescence (EL) of a metal-oxide-semiconductor light emitting device (MOSLED) made on CO2 laser-annealed SiOx film is demonstrated. An EL power of near 50 nW from CO2 laser ... Enhanced near-infrared (NIR) electroluminescence (EL) of a metal-oxide-semiconductor light emitting device (MOSLED) made on CO2 laser-annealed SiOx film is demonstrated. An EL power of near 50 nW from CO2 laser rapid-thermal-annealing (RTA) MOSLED under a biased voltage of 85 V and a current density of 2.3 mA/cm^2 is preliminarily reported. 展开更多
关键词 PECVD Si A CO2 laser rapid-thermal-annealing SiOx based metal-oxide-semiconductor light emitting diode CO ITO high
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Ll_0 FePt thin films with 001crystalline growth fabricated by ZnO addition and rapid thermal annealing
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作者 刘曦 Ishio Shunji 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第8期627-631,共5页
FePt films with a high degree of order S of the L10 structure (S 〉 0.90) and well defined [001] crystalline growth perpendicular to the film plane are fabricated on thermally oxidized Si substrates by the addition ... FePt films with a high degree of order S of the L10 structure (S 〉 0.90) and well defined [001] crystalline growth perpendicular to the film plane are fabricated on thermally oxidized Si substrates by the addition of ZnO and a successive rapid thermal annealing (RTA) process. The optimum condition to prepare high-ordering L10 FePtZnO films is 20 vol% ZnO addition and 450 ℃ annealing. The effect of the ZnO additive on the ordering process of the L10 FePtZnO films is discussed. In the annealing process, Zn atoms move to the film surface and evaporate. The motion of the Zn atoms accelerates the intergrain exchange and decreases the ordering temperature. 展开更多
关键词 FePt thin film magnetic recording material rapid-thermal-annealing oxide addition
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