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Heat Resisting Mechanism of Heat-Resisting Aluminum Alloy Conductor and Its Application in Transmission Line
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作者 尤传永 《Electricity》 2003年第4期40-45,共6页
In this paper the heat withstanding mechanism of heat-resisting aluminum alloy conductor is discussed, the types and performance of the conductor and its application on transmission lines are analyzed and introduced, ... In this paper the heat withstanding mechanism of heat-resisting aluminum alloy conductor is discussed, the types and performance of the conductor and its application on transmission lines are analyzed and introduced, and suggestions on accelerating exploitation and application of the conductor are put forward. 展开更多
关键词 heat-resisting aluminum alloy conductor heat withstanding mechanism current carrying capacity softening characteristics mechanical strength residual rate
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Distributed Energy Saving Mechanism Based on CoMP in LTE-A System 被引量:1
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作者 Fei Zheng Wenjing Li +2 位作者 Luoming Meng Peng Yu Lei Peng 《China Communications》 SCIE CSCD 2016年第7期39-47,共9页
To reduce the energy consumption of the LTE-A system,a distributed energy-saving mechanism based on Co MP(Co MPDESM) is proposed to solve the inadequate coverage problem under the dormant cells.First,the network is di... To reduce the energy consumption of the LTE-A system,a distributed energy-saving mechanism based on Co MP(Co MPDESM) is proposed to solve the inadequate coverage problem under the dormant cells.First,the network is divided into clusters based on the equivalent cell principle.Then,we transfer global optimization into a group of subproblems.Second,a joint processing-based cooperative cell selection model is constructed to determine cooperative cells and dormant cells.Third,the compensative cells with a determined threshold are selected to control users' access.Finally,a simulation is implemented in Matlab.Results show that the energy-saving rate can reach 36.4% and that the mechanism meets the network coverage requirement.Thus,joint processing can be effectively applied in an energy saving mechanism and used to improve the network performance of edge users without increasing transmission power. 展开更多
关键词 LTE-A distributed energy-saving mechanism CoMP equivalent cell principle energy-saving rate
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Mechanism of Hetero-nuclear β-type Chelates Formed by Rare Earths with p-sulphoaminobromophosphonazo
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作者 袁莉 查飞 +1 位作者 高锦章 陈慧 《Rare Metals》 SCIE EI CAS CSCD 2000年第4期269-274,共6页
The reaction behavior of forming the hetero-nuclear β-type chelates of rare earth ions (RE 3+) with p-sulphoaminobromophosphonazo(BPA-pSN) in ClCH_2COOH-CH_3COONa buffer solutions were studied by a spectrophotometri... The reaction behavior of forming the hetero-nuclear β-type chelates of rare earth ions (RE 3+) with p-sulphoaminobromophosphonazo(BPA-pSN) in ClCH_2COOH-CH_3COONa buffer solutions were studied by a spectrophotometric method. The interaction of RE 3+ with BPA-pSN, which can forms hetero-nuclear β-type chelates having composition ratio of RE_1 (light rare earth):BPA-pSN:RE_2(heavy rare earth ion)=1∶3∶1, is a first-order reaction. Meanwhile, BPA-pSN can only forms homo-nuclear β-type chelates with heavy rare earth ions, having a composition ratio of RE∶BPA-pSN=1∶2 and being a second-order reaction. The rate constants of forming homo-and hetero-nuclear β-type chelates were obtained and the mechanism of forming hetero-nuclear β-type chelates was proposed. 展开更多
关键词 Rate constant Reaction mechanism Hetero-nuclear β-type chelates
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The Mechanism of Critical Strain of Serrated Yielding in Strain Rate Domain
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作者 符师桦 蔡玉龙 +2 位作者 杨素丽 张青川 伍小平 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第2期79-82,共4页
The mechanism of the critical strain of serrated yielding is studied via tension tests at various strain rates. Betore the critical strain, it is deduced that dislocations are not pinned at high strain rates, and disl... The mechanism of the critical strain of serrated yielding is studied via tension tests at various strain rates. Betore the critical strain, it is deduced that dislocations are not pinned at high strain rates, and dislocations at low strain rates are pinned but cannot escape. The critical strain depends on the first pinning process at high strain rates and on the first unpinning process at low strain rates. The calculated results based on the two criteria are in good consistency with the experiment. 展开更多
关键词 of IS The mechanism of Critical Strain of Serrated Yielding in Strain Rate Domain that RATE HIGH
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Hydrogen Abstraction Reaction Mechanisms and Rate Constants for Isoflurane with a Cl Atom at 200~2000 K:A Theoretical Investigation
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作者 任宏江 杨晓慧 +2 位作者 李小军 李江涛 杨菊香 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 2015年第9期1317-1327,共11页
The kinetics and mechanisms of H abstraction reaction between isoflurane and a CI atom have been investigated using DFT and G3(MP2) methods of theory. The geometrical structures of all species were optimized by the ... The kinetics and mechanisms of H abstraction reaction between isoflurane and a CI atom have been investigated using DFT and G3(MP2) methods of theory. The geometrical structures of all species were optimized by the wB97XD/6-311++G** method. Intrinsic reaction coordinate (IRC) analysis has been carried out for the reaction channels. Thermochemistry data have been obtained by utilizing the high accurate model chemistry method G3(MP2) combined with the standard statistical thermodynamic calculations. Gibbs free energies were used for reaction channels analysis. Two channels were obtained, which correspond to P(1) and P(2). The rate constants for the two channels over a wide temperature range of 200-2000 K were also obtained. The results show that the barriers of P(1) and P(2) reaction channels are 50.36 and 50.34 kJ/mol, respectively, predicting that it exists two competitive channels. The calculated rate constant is in good agreement with the experiment value. Additionally, the results also show that the rate constants also increase from 1.85x10^-16 to 2.16x 10^12 cm3.moleculel.s-1 from 200 to 2000 K 展开更多
关键词 isoflurane CI atom reaction mechanisms rate constants G3(MP2)
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Theoretical Research on the Multi-channel Reaction Mechanism of CHF Radical with HNCO by Density Functional Theory
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作者 HAN Yan-Xia KONG Chao +3 位作者 HOU Li-Jie WU Bo-Wan CHEN Dong-Ping GAO Li-Guo 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 2015年第8期1151-1160,共10页
The reaction mechanism of CHF radical with HNCO was investigated by the B3LYP method of density functional theory (DFT), while the geometries and harmonic vibration frequencies of reactants, intermediates, transitio... The reaction mechanism of CHF radical with HNCO was investigated by the B3LYP method of density functional theory (DFT), while the geometries and harmonic vibration frequencies of reactants, intermediates, transition states and products were calculated at the B3LYP/6-311++G** level. In the temperature range of 100-2600 K, the statistical thermody- namics and Eyring transition state theory with Winger correction were used to study the thermodynamic and kinetic characters of the channel with low energy barrier. In addition, the analysis on the combining interaction between CHF radical and HNCO was performed by atom-in-molecules theory (AIM) and natural bond orbitals (NBO) analysis. The calculation results indicated that the reaction of CHF radical with HNCO had ten channels, and the channel of NH direct extraction (CHF + HNCO→IM6→TS7→IM7→CHFNH + CO) in singlet state was the main channel with low potential energy and high equilibrium constant and reaction rate constant. CHFNH and CO were the main products. 展开更多
关键词 CHF radical isocyanic acid mechanism equilibrium constant rate constant
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Effects of strain rates on mechanical properties of limestone under high temperature 被引量:10
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作者 Tang Furong Mao Xianbiao +2 位作者 Zhang Lianying Yin Huiguang Li Yan 《Mining Science and Technology》 EI CAS 2011年第6期857-861,共5页
The experimental tests for limestone specimens at 700 °C in uniaxial compression were carried out to inves- tigate the mechanical effects of loading rates on limestone by using a MTS810 rock mechanics servo- cont... The experimental tests for limestone specimens at 700 °C in uniaxial compression were carried out to inves- tigate the mechanical effects of loading rates on limestone by using a MTS810 rock mechanics servo- controlled testing system considering the loading rate as a variable. The mechanical properties of limestone such as the stress-strain curve, variable characteristics of peak strength and the modulus of elasticity of limestone were studied under the strain rates ranging from 1.1 10à5 to 1.1 10à1 sà1. (1) Sharp decreases were shown for the peak strength and elastic modulus of limestone from 1.1 10à5 to 1.1 10à4 sà1 at 700 °C as well as a downward trend was shown from 1.1 10à4 to 1.1 10à1 sà1 with the rise of the strain rate. (2) The peak strain increased from 1.1 10à5 to 1.1 10à4 sà1, however, there was no obvious changes shown for the peak strain of limestone from 1.1 10à4 to 1.1 10à1 sà1. These results can provide valuable references for the rock blasting effect and design of mine. 展开更多
关键词 Strain rates High temperature Mechanical properties Limestone
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Anti-plane analysis of semi-infinite crack in piezoelectric strip 被引量:5
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作者 郭俊宏 刘萍 +1 位作者 卢子兴 秦太验 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI 2011年第1期75-82,共8页
Using the complex variable function method and the technique of the conformal mapping, the fracture problem of a semi-infinite crack in a piezoelectric strip is studied under the anti-plane shear stress and the in-pla... Using the complex variable function method and the technique of the conformal mapping, the fracture problem of a semi-infinite crack in a piezoelectric strip is studied under the anti-plane shear stress and the in-plane electric load. The analytic solutions of the field intensity factors and the mechanical strain energy release rate are presented under the assumption that the surface of the crack is electrically impermeable. When the height of the strip tends to infinity, the analytic solutions of an infinitely large piezoelectric solid with a semi-infinite crack are obtained. Moreover, the present results can be reduced to the well-known solutions for a purely elastic material in the absence of the electric loading. In addition, numerical examples are given to show the influences of the loaded crack length, the height of the strip, and the applied mechanical/electric loads on the mechanical strain energy release rate. 展开更多
关键词 piezoelectric strip semi-infinite crack complex variable function method field intensity factor mechanical strain energy release rate
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Effects of cooling rate and Al on MnS formation in medium-carbon non-quenched and tempered steels 被引量:14
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作者 Meng-long Li Fu-ming Wang +3 位作者 Chang-rong Li Zhan-bing Yang Qing-yong Meng and Su-fen Tao 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2015年第6期589-597,共9页
The effect of Al on the morphology of MnS in medium-carbon non-quenched and tempered steel was investigated at three different cooling rates of 0.24, 0.43, and 200°C·s^-1. The formation mechanisms of three t... The effect of Al on the morphology of MnS in medium-carbon non-quenched and tempered steel was investigated at three different cooling rates of 0.24, 0.43, and 200°C·s^-1. The formation mechanisms of three types of MnS were elucidated based on phase diagram information combined with crystal growth models. The morphology of MnS is governed by the precipitation mode and the growth conditions. A monotectic reaction and subsequent fast solidification lead to globular Type I MnS. Type II MnS inclusions with different morphological characteristics form as a result of a eutectic reaction followed by the growth in the Fe matrix. Type III MnS presents a divorced eutectic morphology. At the cooling rate of 0.24°C·s^-1, the precipitation of dispersed Type III MnS is significantly enhanced by the addition of 0.044wt% acid-soluble Al(Als), while Type II MnS clusters prefer to form in steels with either 0.034wt% or 0.052wt% Als. At the relatively higher cooling rates of 200°C·s^-1 and 0.43°C·s^-1, the formation of Type I and Type II MnS inclusions is promoted, and the influence of Al is negligible. The results of this work are expected to be employed in practice to improve the mechanical properties of non-quenched and tempered steels. 展开更多
关键词 medium carbon steels cooling rate aluminum content manganese sulfide formation mechanisms
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Exact solutions of two semi-infinite collinear cracks in piezoelectric strip 被引量:3
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作者 卢子兴 刘萍 郭俊宏 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI 2011年第11期1399-1406,共8页
Using the complex variable function method and the conformal mapping technique, the fracture problem of two semi-infinite collinear cracks in a piezoelectric strip is studied under the anti-plane shear stress and the ... Using the complex variable function method and the conformal mapping technique, the fracture problem of two semi-infinite collinear cracks in a piezoelectric strip is studied under the anti-plane shear stress and the in-plane electric load on the partial crack surface. Analytic solutions of the field intensity factors and the mechanical strain energy release rate are derived under the assumption that the surfaces of the crack are electrically impermeable. The results can be reduced to the well-known solutions for a purely elastic material in the absence of an electric load. Moreover, when the distance between the two crack tips tends to infinity, analytic solutions of a semi-infinite crack in a piezoelectric strip can be obtained. Numerical examples are given to show the influence of the loaded crack length, the height of the strip, the distance between the two crack tips, and the applied mechanical/electric loads on the mechanical strain energy release rate. It is shown that the material is easier to fail when the distance between two crack tips becomes shorter, and the mechanical/electric loads have greater influence on the propagation of the left crack than those of the right one. 展开更多
关键词 piezoelectric strip semi-infinite collinear crack complex variable function method field intensity factor mechanical strain energy release rate
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Variation of vertical and horizontal drilling rates depending on some rock properties in the marble quarries 被引量:7
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作者 Servet Demirdag Nazmi Sengun +3 位作者 Ibrahim Ugur Tamer Efe Deniz Akbay Rasit Altindag 《International Journal of Mining Science and Technology》 SCIE EI 2014年第2期269-273,共5页
The main objective of this study is to determine the rates of vertically and horizontally oriented drilling processes in marble quarries and to observe the factors affecting the drilling rates in terms of physical and... The main objective of this study is to determine the rates of vertically and horizontally oriented drilling processes in marble quarries and to observe the factors affecting the drilling rates in terms of physical and mechanical properties of the rocks. In situ drilling tests were performed in different marble quarries with different marble types and drilling times and penetration rates for a series of successive depthincrements were trying to be determined under vertically and horizontally oriented conditions. In order to understand the relation between the parameters that are investigated within the scope of this research, uniaxial compressive strength, Brazilian tensile strength, impact strength, Bohme abrasion strength, P-wave velocity, porosity, unit volume weight, Schmidt hardness index and brittleness index values were correlated with the drilling rates. It was noticed that the porosity and unit volume weight could be taken as the key parameters among them for obtaining meaningful correlation with drilling performance. It was also observed that the physical and mechanical rock properties are more relevant in vertical drilling than horizontal drilling. 展开更多
关键词 Mechanical properties Drilling Drilling rate Marble quarry
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CHARACTERISTCS OF FLUID FILM IN OPTIMIZED SPIRAL GROOVE MECHANICAL SEAL 被引量:8
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作者 ZHOU Jianfeng GU Boqin 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第6期54-61,共8页
In order to investigate the sealing performance variation resulted from the thermal deformation of the end faces, the equations to calculate the fluid film pressure distribution, the bearing force and the leakage rate... In order to investigate the sealing performance variation resulted from the thermal deformation of the end faces, the equations to calculate the fluid film pressure distribution, the bearing force and the leakage rate are derived, for the fluid film both in parallel gap and in wedgy gap. The geometrical parameters of the sealing members are optimized by means of heat transfer analysis and complex method. The analysis results indicate that the shallow spiral grooves can generate hydrodynamic pressure while the rotating ring rotates and the bearing force of the fluid film in spiral groove end faces is much larger than that in the flat end faces. The deformation increases the bearing force of the fluid film in flat end faces, but it decreases the hydrodynamic pressure of the fluid film in spiral groove end faces. The gap dimensions which determine the characteristics of the fluid film is obtained by coupling analysis of the frictional heat and the thermal deformation in consideration of the equilibrium condition of the bearing force and the closing force. For different gap dimensions, the relation- ship between the closing force and the leakage rate is also investigated, based on which the leakage rate can be controlled by adjusting the closing force. 展开更多
关键词 Mechanical seal Pressure distribution Optimal design Bearing force Leakage rate
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Trends in gravity changes from 2009 to 2013 derived from ground-based gravimetry and GRACE data in North China 被引量:3
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作者 Shen Chongyang Xuan Songbai +1 位作者 Zou Zhengbo Wu Guiju 《Geodesy and Geodynamics》 2015年第6期423-428,共6页
North China is a key region for studying geophysical progress. In this study, ground-based and Gravity Recovery and Climate Experiment(GRACE) gravity data from 2009 to 2013 are used to calculate the gravity change r... North China is a key region for studying geophysical progress. In this study, ground-based and Gravity Recovery and Climate Experiment(GRACE) gravity data from 2009 to 2013 are used to calculate the gravity change rate(GCR) using the polynomial fitting method. In general, the study area was divided into the Shanxi rift, Jing-Jin-Ji(Beijing-Tianjin-Hebei Province), and Bohai Bay Basin(BBB) regions. Results of the distribution of the GCR determined from ground-based gravimetry show that the GCR appears to be "negativepositive-negative" from west to east, which indicates that different geophysical mechanisms are involved in the tectonic activities of these regions. However, GRACE solutions are conducted over a larger spatial scale and are able to show a difference between southern and northern areas and a mass redistribution of land water storage. 展开更多
关键词 North China Ground-based gravimetry Gravity Recovery and Climate Experiment(GRACE) Polynomial fitting method Gravity changes rate Tectonic activities Geophysical mechanisms Mass redistribution
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Exploring the methane combustion reaction: A theoretical contribution
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作者 彭亚 蒋仲安 陈举师 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第2期334-343,共10页
This paper represents an attempt to extend the mechanisms of reactions and kinetics of a methane combustion reaction.Three saddle points(SPs) are identified in the reaction CH_4+ O(~3P) → OH + CH_3 using the co... This paper represents an attempt to extend the mechanisms of reactions and kinetics of a methane combustion reaction.Three saddle points(SPs) are identified in the reaction CH_4+ O(~3P) → OH + CH_3 using the complete active space selfconsistent field and the multireference configuration interaction methods with a proper active space. Our calculations give a fairly accurate description of the regions around the twin first-order SPs(~3A' and ~3A〞) along the direction of O(~3P) attacking a near-collinear H–CH_3. One second-order SP^(2nd)(~3E) between the above twin SPs is the result of the C_(3v) symmetry Jahn–Teller coupling within the branching space. Further kinetic calculations are performed with the canonical unified statistical theory method with the temperature ranging from 298 K to 1000 K. The rate constants are also reported. The present work reveals the reaction mechanism of hydrogen-abstraction by the O(~3P) from methane, and develops a better understanding for the role of SPs. In addition, a comparison of the reactions of O(~3P) with methane through different channels allows a molecule-level discussion of the reactivity and mechanism of the title reaction. 展开更多
关键词 combustion reaction reaction mechanism rate constant saddle point
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Mechanism and kinetics study on the ozonolysis reaction of 2,3,7,8-TCDD in the atmosphere 被引量:6
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作者 Jing Bai Xiaomin Sun +3 位作者 Chenxi Zhang Chen Gong Jingtian Hu Jianghua Zhang 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2014年第1期181-188,共8页
The ozonolysis of 2,3,7,8-tetra-chlorodibenzo-p-dioxin (2,3,7,8-TCDD) is an efficient degradation way in the atmosphere. The ozonolysis process and possible reactions path of Criegee Intermediates with NO and H2O ar... The ozonolysis of 2,3,7,8-tetra-chlorodibenzo-p-dioxin (2,3,7,8-TCDD) is an efficient degradation way in the atmosphere. The ozonolysis process and possible reactions path of Criegee Intermediates with NO and H2O are introduced in detail at the method of MPWB1K/6-31+G(d,p)//MPWB1K/6- 311+G(3df,2p) level. In ozonolysis, H2O is an important source of OH radical formation and initiated the subsequent degradation reaction. The Rice-Ramsperger-Kassel-Marcus (RRKM) theory was applied to calculate rate constants with the temperature ranging from 200 to 600 K. The rate constant of reaction between 2,3,7,8-TCDD and 03 is 4.80 × 10^-20 cm3/(mole.sec) at 298 K and 760 Tort. The atmospheric lifetime of the reaction species was estimated according to rate constants, which is helpful for the atmospheric model study on the degradation and risk assessment of dioxin. 展开更多
关键词 ozonolysis reaction of 2 3 7 8-TCDD chemical mechanism and kinetics study rate constants atmospheric lifetime
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Mechanism and rate constants for complete series reactions of 19 fluorophenols with atomic H 被引量:1
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作者 Rui Gao Xiaoyan Sun +2 位作者 Wanni Yu Qingzhu Zhang Wenxing Wang 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2014年第1期154-159,共6页
Fluorine-containing halogenated fluorophenol may have effect as intermediate species involved in the formation of polyfluorinated dibenzo-p-dioxin/dibenzofurans (PFDDs/Fs). The mechanism for the atomic H initiated r... Fluorine-containing halogenated fluorophenol may have effect as intermediate species involved in the formation of polyfluorinated dibenzo-p-dioxin/dibenzofurans (PFDDs/Fs). The mechanism for the atomic H initiated reactions with complete series of nineteen fluorophenol congeners was studies using the density functional theory. At the MPWB1K,/6-31+G(d,p) level, the geometries and frequencies of reactants, transition states, and products were obtained, and the accurate energetic values were acquired at the MPWB 1K/6-311 +G(3df,2p) level. The rate constants were evaluated by the canonical variational transition-state theory with the small curvature tunneling contribution over a wide temperature range of 600-1000 K. The study shows that the intramolecular hydrogen-bond in the ortho-substituted FPs as well as the inductive effect of the electron-withdrawing fluorine and steric repulsion of multiple substitutions may ultimately be responsible for the relative strength of the O-H bonds in FPs. The results can be used for further studies on PFDD/Fs formation mechanism. 展开更多
关键词 fluorophenols fluorophenoxy radicals atomic H hydrogen bond reaction mechanism rate constants
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Mechanism and kinetic properties of NO_3-initiated atmospheric degradation of DDT
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作者 Cai Liu Shanqing Li +3 位作者 Rui Gao Juan Dang Wenxing Wang Qingzhu Zhang 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2014年第3期601-607,共7页
In this article, the NO3 radical-initiated atmospheric oxidation degradation of DDT was theoretically investigated using molecular orbital theory calculations. All the calculations of intermediates, transition states ... In this article, the NO3 radical-initiated atmospheric oxidation degradation of DDT was theoretically investigated using molecular orbital theory calculations. All the calculations of intermediates, transition states and products were performed at the MPWB1K/6-311+G(3df,2p)//MPWB1K/6- 31+G(d,p) level of theory. Several energetically favorable reaction pathways were revealed. The formation mechanisms of secondary pollutants were presented and discussed. The rate constants were deduced over the temperature range of 273-333 K using canonical variational transition-state (CVT) theory with the small curvature tunneling (SCT) method. Our study shows that H abstraction from the alkyl group and NO3 addition to the Ca atom of the benzene ring are the dominant reaction pathways. The rate-temperature formula of the overall rate constants is k(T)(DDT+NO3) = (7.21 ~ 10-15)exp(-153.81/T) cm3/(mol.sec) over the possible atmospheric temperature range of 273-333 K. The atmospheric lifetime of DDT determined by NO3 radical is about 52.5 days, which indicates that it can be degraded in the gas phase within several months. 展开更多
关键词 DDT NO3 radicals atmospheric oxidation reaction mechanism rate constants
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Coarsening Behavior of Gamma Prime Precipitates in a Nickel Based Single Crystal Superalloy 被引量:8
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作者 S.Tang L.K.Ning +1 位作者 T.Z.Xin Z.Zheng 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2016年第2期172-176,共5页
The γ/γ' microstructural evolution in a nickel based single crystal superalloy during load-free thermal exposure at 900 ℃ has been further investigated in this paper. The growth characteristics of γ' precipitate... The γ/γ' microstructural evolution in a nickel based single crystal superalloy during load-free thermal exposure at 900 ℃ has been further investigated in this paper. The growth characteristics of γ' precipitates were discussed in detail. The generation of interfacial dislocations would accelerate the rate of coalescence in the dendrite arms. The average sizes of precipitates were used to compare interface with diffusion controlled growth mechanism and no mechanism seems obviously dominant, although the square rate law gives slightly better fit. The coarsening behavior may be controlled by diffusion through the ragged interface between the γ' precipitate and the y matrix. 展开更多
关键词 Single crystal superalloy Coarsening Interfacial dislocations Rate controlling mechanism
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Effect of polishing parameters on abrasive free chemical mechanical planarization of semi-polar(1122) aluminum nitride surface 被引量:3
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作者 Khushnuma Asghar D.Das 《Journal of Semiconductors》 EI CAS CSCD 2016年第3期115-121,共7页
An abrasive free chemical mechanical planarization(AFCMP) of semi-polar(1122) Al N surface has been demonstrated. The effect of slurry p H, polishing pressure, and platen velocity on the material removal rate(MRR... An abrasive free chemical mechanical planarization(AFCMP) of semi-polar(1122) Al N surface has been demonstrated. The effect of slurry p H, polishing pressure, and platen velocity on the material removal rate(MRR) and surface quality(RMS roughness) have been studied. The effect of polishing pressure on the AFCMP of the(1122) Al N surface has been compared with that of the(1122) Al Ga N surface. The maximum MRR has been found to be 562 nm/h for the semi-polar(1122) Al N surface, under the experimental conditions of 38 k Pa pressure,90 rpm platen velocity, 30 rpm carrier velocity, slurry p H 3 and 0.4 M oxidizer concentration. The best root mean square(RMS) surface roughness of 1.2 nm and 0.7 nm, over a large scanning area of 0.70×0.96 mm^2, has been achieved on AFCMP processed semi-polar(1122) AlN and(AlGaN) surfaces using optimized slurry chemistry and processing parameters. 展开更多
关键词 Al N AFCMP chemical mechanical planarization material removal rate surface roughness
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