中频反应溅射SiO_2膜与直流溅射ITO膜的在线联镀

多数 ITO透明导电玻璃生产线在实现 Si O2 膜与 ITO膜在线联镀时 ,应用 Si O2 靶射频溅射沉积 Si O2膜工艺和 ITO靶直流溅射沉积 ITO膜工艺 ,如果 Si O2 膜应用硅靶反应磁控溅射工艺 ,存在这种工艺是否可以与 ITO靶直流溅射沉积 ITO膜工艺在线联用以及如何实现联用的问题。作者对现有的生产线进行了改造设计、加工 ,做了大量实验、质谱分析和多项测试研究 ,成功地实现反应溅射 Si O2 膜与 ITO膜在线联镀 ,做到Si O2 镀膜室的工作状态的变化基本上不影响

Influence of MgO contents on silica supported nano-size gold catalyst for carbon monoxide total oxidation

A series of nano-size gold catalysts were prepared by deposition-precipitation method using silica material promoted with different amounts of MgO as the carrier. The influences of MgO addition on the structure and property of the nano-size gold catalysts were characterized by X-ray diffraction （XRD）, transmission electron microscopy （TEM）, O2 temperature-programmed desorption （O2-TPD）, and inductively coupled with plasma atomic emission spectroscopy （ICP-AES） techniques. The total oxidation of CO was chosen as the probe reaction. The results suggest that for the gold catalysts supported on the silica material after MgO modification, the size of the gold particles is pronouncedly reduced, the oxygen mobility is enhanced, and the catalytic activity for low-temperature CO oxidation is greatly improved. The gold catalyst modified by 6 wt% MgO （Mg/SiO2 weight ratio） shows higher CO oxidation activity, over which the temperature of CO total oxidation is lower about 150 K than that over the silica directly supported gold catalyst.

Alkali-activation reactivity of chemosynthetic Al_2O_3-2SiO_2 powders and their ^(27)Al and ^(29)Si magic-angle spinning nuclear magnetic resonance spectra

Pure Al2O3-2SiO2 powders were prepared by sol-gel and coprecipitation methods, and their alkaliactivation reactivities were compared. The alkali-activation reactivity of the powder prepared by the so]-gel method was higher than that of the powder prepared by the coprecipitation method. The powders were investigated by 27Al and 29Si magic-angle spinning nuclear magnetic resonance spectroscopy （MAS NMR） to understand the relationship between their structure and alkali-activation reactivity. The 27Al MAS NMR data showed that the five-coordinate AI content of the powder prepared by the sol-gel method was higher than that of the powder prepared by coprecipitation. The higher content of five-coordinate Al corresponded to higher alkali-activation reactivity. The 29Si MAS NMR data showed that for the powder prepared by the sol-gel method, silicon was replaced by aluminum at secondary coordination sites of the central Si atoms during calcination. However, for the powder prepared by single-batch coprecipitation, the main change was from a low degree of polycondensation to a high degree of polycondensation.

波长1064nm脉冲激光高阈值反射膜的研制

研究 Ｈｆ Ｏ２／ Ｓｉ Ｏ２ 高反射膜的制备工艺及其激光诱导损伤阈值的比较测试，分别采用了反应蒸镀 Ｈｆ Ｏ２、反应离子辅助蒸镀 Ｈｆ Ｏ２、反应离子辅助蒸镀金属 Ｈｆ 的源材料形成 Ｈｆ Ｏ２ 薄膜。采用这三种工艺制备了 Ｈｆ Ｏ２ ／ Ｓｉ Ｏ２ 高反射膜，在中心波长 １０６４ｎｍ 处，反射率 Ｒ≥９９．５％ ，其中反应蒸镀 Ｈｆ Ｏ２ ／ Ｓｉ Ｏ２ 高反射膜损伤阈值最高，可达 ６０ Ｊ／ｃｍ ２（１０６４ｎｍ ，５ｎｓ）。

反应RF磁控溅射法制备非晶氧化硅薄膜及其特性研究

在氧气和氩气的混合气体中 ,在没有额外加热的条件下用反应射频 (RF)溅射硅靶制备了非晶氧化硅(a- Si O2 )薄膜 ,并测试分析了薄膜的结构和电特性与 O2 / Ar流量比的关系。当固定氩气流量 ,改变氧气流量时 ,薄膜沉积速率先急剧减少 ,再增大 ,然后又减少。当 O2 / Ar≥ 0 .0 75时 ,得到满足化学配比的氧化硅薄膜。并且 ,随着 O2 / Ar流量比的增大 ,薄膜的电阻、电场击穿强度都有所增大 ,而在 HF缓冲溶液 (BHF)中的腐蚀速率下降。所有的样品中无明显的 H- OH水分子的红外吸收峰。比较发现反应射频 (RF)磁控溅射法制备的a- Si O2 薄膜具有良好的致密性和绝缘性。

硅靶中频反应磁控溅射二氧化硅薄膜的特性研究

报道了中频双靶反应磁控溅射制备二氧化硅 (Si O2 )薄膜的装置、工艺及薄膜特性。对制备的 Si O2 薄膜的化学配比和元素化学态进行了 SAM和 XPS分析 ,测试了膜层对钠离子 (Na+ )阻挡性能、光学折射率和可见光的透过率。研究表明作者开发的中频双靶反应磁控溅射沉积 Si O2 薄膜的设备和工艺可以高速率、大面积制备高质量的 Si O2 膜。

Preparation and Application of a Nanocomposite (MPNS/SMA) in Leather Making

A nanocomposite of MPNS/（Styrene-maleic anhydride） was prepared by the polymerization of methacryloxypropyl nano SiO2 （MPNS）, styrene （ST） and maleic anhydride （MA） with benzoyl peroxide （BPO） as initiator in toluene. The prepared samples were characterized by Fourier transform infrared spectroscopy （PT-IR） and transmission electron microscope （TEM）. Meanwhile, the nanocomposite was applied as a tanning agent in leather making and the results showed that leather treated with MPNS/SMA nanocomposite has excellent quality.

Effects of aluminum co-doping on photoluminescence properties of Ce^(3+)-doped SiO_2 glasses

SiO2 glasses co-doped with Al3+ ions were prepared by a sol-gel method by holding 0.5% of Ce3+ ions constant and varying the Al3+ ions concentrations.Thermal stability,the structural,chemical and the optical properties of the samples were studied by using differential scanning calorimetric(DSC),thermo gravimetric analysis(TGA),X-ray diffraction(XRD),scanning electron microscopy(SEM),energy dispersive spectroscopy(EDS),UV-vis spectroscopy and photoluminescence spectroscopy(PL).The DSC and TGA of samples depicted that the presence of dopant and co-dopant decreased the endothermic peak temperature and the yield respectively.SEM images showed that the particles were in the nano-range and spherical in shape.The XRD showed that all the samples were amorphous.The UV absorption measurements indicated that the presence of Al3+ ions significantly reduced the SiO2 absorption band,increased the absorbance intensity of SiO2 and decreased the transmittance as compared to the presence of the Ce3+ ions alone.The photoluminescence results displayed an optimum increase in luminescence intensity when the ratio of Al:Ce was 10:1 and further increase in aluminum content quenched the luminous intensity.