Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters...Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.展开更多
A small and weak target detection method is proposed in this work that outperforms all other methods in terms of real-time capability.It is the first time that two-dimensional(2D)images are processed using only one-di...A small and weak target detection method is proposed in this work that outperforms all other methods in terms of real-time capability.It is the first time that two-dimensional(2D)images are processed using only one-dimensional1D structuring elements in a morphology-based approach,enabling the real-time hardware implementation of the whole image processing method.A parallel image readout and processing structure is introduced to achieve an ultra-low latency time on the order of nanoseconds,and a hyper-frame resolution in the time domain can be achieved by combining the row-by-row structure and the electrical rolling shutter technique.Experimental results suggest that the expected target can be successfully detected under various interferences with an accuracy of 0.1 pixels(1σ)under the worst sky night test condition and that a centroiding precision of better than 0.03 pixels(1σ)can be reached for static tests.The real-time detection method with high robustness and accuracy is attractive for application to all types of real-time small target detection systems,such as medical imaging,infrared surveillance,and target measurement and tracking,where an ultra-high processing speed is required.展开更多
基金National Science and Technology Major Project of China (Grant Nos. 2009ZX02204- 006 and 2017ZX02101007-002)the National Natural Science Foundation of China (Grant Nos. 51435006 and 51675195).
文摘Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.
基金support by the China NSF projects(Nos.61505094,61377012 and 51522505).
文摘A small and weak target detection method is proposed in this work that outperforms all other methods in terms of real-time capability.It is the first time that two-dimensional(2D)images are processed using only one-dimensional1D structuring elements in a morphology-based approach,enabling the real-time hardware implementation of the whole image processing method.A parallel image readout and processing structure is introduced to achieve an ultra-low latency time on the order of nanoseconds,and a hyper-frame resolution in the time domain can be achieved by combining the row-by-row structure and the electrical rolling shutter technique.Experimental results suggest that the expected target can be successfully detected under various interferences with an accuracy of 0.1 pixels(1σ)under the worst sky night test condition and that a centroiding precision of better than 0.03 pixels(1σ)can be reached for static tests.The real-time detection method with high robustness and accuracy is attractive for application to all types of real-time small target detection systems,such as medical imaging,infrared surveillance,and target measurement and tracking,where an ultra-high processing speed is required.
