Analysis on Technical Measures on Energy Saving and Consumption Reducing During Stevia Sugar Production

Based on the analysis of actual energy consumptions during stevia sugar production,practical measures were proposed to save energy（ gas,water and powder） consumption and reduce cost through waste heat recycle and utilization,process improvement,equipment operation efficiency,application of newly energysaving equipment,and some project applications were provided as case study for some techniques and methods adopted in the production.

动、静态RRC工艺效果对比

RRC(Reducing Resist Consumption)在工艺涂覆过程中,经常用作光刻胶溶剂,用来减少光刻胶的使用量,还可以降低光刻胶中包含的微观气泡数量,对后续的显影、刻蚀等工艺具有明显的优化作用。现阶段常用的RRC涂覆方式有两种:一种称为静态RRC,即衬底静止不动;一种称为动态RRC,即衬底以一定速度旋转。通过几组工艺实验,简单对比了静态RRC与动态RRC的工艺效果,以供大家在以后的工艺制程中进行选择和分析使用。