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Influencing Factors of Reheating Shrinkage Rate of Glass Substrate on LTPS Process 被引量:1
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作者 WANG Weilai TIAN Yingliang +4 位作者 WANG Wei LIU Yaru SUN Shibing LüFeng CHEN Xinxin 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2020年第4期682-685,共4页
Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass... Different heating treatments with the variation of heating rates,holding temperatures and holding time were used to simulate the LTPS procedure.The experimental results show that the reheating shrinkage rates of glass substrates are rarely changed with increasing the heating rate,but strongly enhanced by raising the holding temperature and time,which shows that the reheating shrinkage of glass is closely related to heat treatment and structural relaxation.The production process of glass is critical to the reheating shrinkage of glass. 展开更多
关键词 low temperature ploy-silicon(LTPS) glass substrates reheating shrinkage rate structural relaxation
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