Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- search...Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- searched and used due to the advantages of essentially digital output. Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method. In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by sys- tem level modeling and simulation method MuPEN （multi port element network）. A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library. The AC （alternating current） analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference. Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available.展开更多
This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by mask...This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.展开更多
文摘Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- searched and used due to the advantages of essentially digital output. Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method. In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by sys- tem level modeling and simulation method MuPEN （multi port element network）. A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library. The AC （alternating current） analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference. Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available.
基金Project (No. 61076110) supported by the National Natural Science Foundation of China
文摘This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.
