FBAR滤波器TRL校准的仿真与测试

针对薄膜体声波谐振腔(FBAR)滤波器测试夹具误差校准,提出一种改进的TRL校准方法,将三维电磁仿真和TRL计算结合,用于测试套件(夹具和TRL校准件)的前期设计与优化,确保TRL校准件达到足够精度。由于DUT(device under test,待测器件)参数未知,实测中采用四种不同结构的测试套件,校准前各组测试结果差异较大,但TRL校准后高度吻合,通带内的差异小于0.2 dB,不但精准确定DUT真实参数,而且表明本TRL校准方法对于不同结构夹具去嵌入的有效性。该仿真计算不仅可以设计高精度测试套件,避免过度依靠实测,并且可与实测相互验证,并可推广到其他微波器件的测量,节省测试成本。

一种带有尾电流源反馈的FBAR振荡器

为改善振荡器相位噪声性能,设计了一种带有尾电流源反馈的薄膜体声波谐振器(FBAR)振荡器。研究表明,尾电流源晶体管闪烁噪声和谐振回路是振荡器相位噪声的主要来源。为了降低尾电流源晶体管闪烁噪声对振荡器相位噪声的影响,采用两组对称分离且工作在亚阈值区域的P型金属氧化物半导体(PMOS)偏置电流源进行尾电流反馈。与传统单个尾电流源相比,该技术具有更好的相位噪声性能。同时,基于对Hajimiri噪声模型的分析,利用尾电流源反馈技术,控制振荡器在振幅达到峰值及零穿越点时的电流大小,以进一步改善相位噪声性能。高Q值谐振器可以显著提高振荡器的整体相位噪声性能,因此,设计采用高Q值微机电系统(MEMS)器件FBAR作为谐振腔,并通过TSMC 180 nm RF CMOS工艺完成电路设计。结果表明:该振荡器输出频率为1.93 GHz,整体电路功耗为580μW,在1 kHz偏频处相位噪声为-89.7 dBc/Hz,计算得到灵敏值(Factor Of Merit,FOM)为217 dB。

Non-volatile dynamically switchable color display via chalcogenide stepwise cavity resonators

High-resolution multi-color printing relies upon pixelated optical nanostructures,which is crucial to promote color display by producing nonbleaching colors,yet requires simplicity in fabrication and dynamic switching.Antimony trisulfide(Sb_(2)S_(3))is a newly rising chalcogenide material that possesses prompt and significant transition of its optical characteristics in the visible region between amorphous and crystalline phases,which holds the key to color-varying devices.Herein,we proposed a dynamically switchable color printing method using Sb_(2)S_(3)-based stepwise pixelated Fabry-Pérot(FP)cavities with various cavity lengths.The device was fabricated by employing a direct laser patterning that is a less timeconsuming,more approachable,and low-cost technique.As switching the state of Sb_(2)S_(3) between amorphous and crystalline,the multi-color of stepwise pixelated FP cavities can be actively changed.The color variation is due to the profound change in the refractive index of Sb_(2)S_(3) over the visible spectrum during its phase transition.Moreover,we directly fabricated sub-50 nm nano-grating on ultrathin Sb_(2)S_(3) laminate via microsphere 800-nm femtosecond laser irradiation in far field.The minimum feature size can be further decreased down to~45 nm(λ/17)by varying the thickness of Sb_(2)S_(3) film.Ultrafast switchable Sb_(2)S_(3) photonic devices can take one step toward the next generation of inkless erasable papers or displays and enable information encryption,camouflaging surfaces,anticounterfeiting,etc.Importantly,our work explores the prospects of rapid and rewritable fabrication of periodic structures with nano-scale resolution and can serve as a guideline for further development of chalcogenide-based photonics components.

微型FBAR器件性能优化设计

利用有限元仿真软件建立了薄膜体声波谐振器模型,研究了不同谐振面积(3600~10000μm^(2))条件下,电极形状(矩形、梯形、圆形和正五边形)及变迹角(30°、36°、40°和45°)对寄生谐振的影响,得到史密斯阻抗曲线和不圆度值,讨论了阶梯负载结构对横向声波泄露的抑制作用。仿真结果表明,电极形状为非正五边形,变迹角为40°时,对寄生谐振的抑制效果最好;在谐振面积为3600μm^(2)时,其不圆度为6.45%,与谐振面积为10000μm^(2)时矩形电极相当。设计的电极阶梯负载结构提升了并联谐振点处的品质因数,当电极横向尺寸为60μm时,二阶电极负载结构的品质因数为1378,比无电极负载结构的品质因数高10.07%。

Tunable superconducting resonators via on-chip control of local magnetic field

Superconducting microwave resonators play a pivotal role in superconducting quantum circuits.The ability to finetune their resonant frequencies provides enhanced control and flexibility.Here,we introduce a frequency-tunable superconducting coplanar waveguide resonator.By applying electrical currents through specifically designed ground wires,we achieve the generation and control of a localized magnetic field on the central line of the resonator,enabling continuous tuning of its resonant frequency.We demonstrate a frequency tuning range of 54.85 MHz in a 6.21-GHz resonator.This integrated and tunable resonator holds great potential as a dynamically tunable filter and as a key component of communication buses and memory elements in superconducting quantum computing.

Layered metastructure containing freely-designed local resonators for wave attenuation

Combining periodic layered structure with three-dimensional cylindrical local resonators,a hybrid metastructure with improved wave isolation ability was designed and investigated through theoretical and numerical approaches.The metastructure is composed of periodic rubber layers and concrete layers embedded with three-dimensional resonators,which can be freely designed with multi local resonant frequencies to attenuate vibrations at required frequencies and widen the attenuation bandgap.The metastructure can also effectively attenuate seismic responses.Compared with layered rubber-based structures,the metastructure has more excellent wave attenuation effects with greater attenuation and wider bandgap.

Asymmetrical Fabry-Perot cavity slot micro-ring resonator and its sensing characteristics

To achieve high quality factor and high-sensitivity refractive index sensor,a slot micro-ring resonator(MRR)based on asymmetric Fabry-Perot(FP)cavity was proposed.The structure consisted of a pair of elliptical holes to form an FP cavity and a microring resonator.The two different optical modes generated by the micro-ring resonator were destructively interfered to form a Fano line shape,which improved the system sensitivity while obtaining a higher quality factor and extinction ratio.The transmission principle of the structure was analyzed by the transfer matrix method.The transmission spectrum and mode field distribution of the proposed structure were simulated by the finite difference time domain(FDTD)method,and the key structural parameters affecting the Fano line shape in the device were optimized.The simulation results show that the quality factor of the device reached 22037.1,and the extinction ratio was 23.9 dB.By analyzing the refractive index sensing characteristics,the sensitivity of the structure was 354 nm·RIU−1,and the detection limit of the sensitivity was 2×10−4 RIU.Thus,the proposed compact asymmetric FP cavity slot micro-ring resonator has obvious advantages in sensing applications owing to its excellent performance.

薄膜体声波谐振器FBAR技术在滤波器的应用研究及其专利数据分析

本文简单介绍了薄膜体声波谐振器FBAR的具体结构、工作原理以及FBAR技术的应用,重点介绍了FBAR技术在滤波器的应用及其工作原理,梳理了常见的几种FBAR滤波器结构,最后通过检索分析,从多个角度对FBAR技术在滤波器应用领域的专利申请进行专利分析,为后续企业在该应用领域进行专利布局提供一定的参考价值。

Disorder effects in NbTiN superconducting resonators

Disordered superconducting materials like NbTiN possess a high kinetic inductance fraction and an adjustable critical temperature, making them a good choice for low-temperature detectors. Their energy gap(D), critical temperature(T_(c)),and quasiparticle density of states(QDOS) distribution, however, deviate from the classical BCS theory due to the disorder effects. The Usadel equation, which takes account of elastic scattering, non-elastic scattering, and electro–phonon coupling,can be applied to explain and describe these deviations. This paper presents numerical simulations of the disorder effects based on the Usadel equation to investigate their effects on the △, Tc, QDOS distribution, and complex conductivity of the NbTiN film. Furthermore, NbTiN superconducting resonators with coplanar waveguide(CPW) structures are fabricated and characterized at different temperatures to validate our numerical simulations. The pair-breaking parameter α and the critical temperature in the pure state T_(c)^(P) of our NbTiN film are determined from the experimental results and numerical simulations. This study has significant implications for the development of low-temperature detectors made of disordered superconducting materials.

Dielectric Resonator Magnetoelectric Dipole Arrays with Low Cross Polarization,Backward Radiation,and Mutual Coupling for MIMO Base Station Applications

Dielectric resonator magnetoelectric dipole(DRMED)arrays with enhanced isolation,reduced cross-polarization,and backward radiation are proposed for base station(BS)applications.The proposed antenna comprises an elevated dielectric resonator antenna(DRA)on a small metal plate above a sizeable common ground plane.The DRA is designed in its T Eδ11 mode,acting like a magnetic dipole.The surface current excited by the differential probes flowing on the small ground plane is equivalent to an electric dipole.Since these two equivalent dipoles are orthogonal,they have the magnetoelectric dipole characteristics with reduced backward radiation.Meanwhile,the small ground planes can be treated as decoupling structures to provide a neutralization path to cancel the original coupling path.A linearly-polarized 4-element prototype array was verified experimentally in previous work.Here,a dual-polarized DRMED antenna is presented to construct a 2-element and 4×4 array for BS applications.To investigate its MIMO performance,sophisticated multi-cell scenario simulations are carried out.By using the proposed dualpolarized DRMED array,the cellular system capacityis improved by 118.6%compared to a conventional DRA array.This significant MIMO system improvement is mainly due to the reduced backward radiation and,therefore,reduced inter-cell interferences.Measurements align well with the simulations.

Application of the N + 2 Transversal Network Method to the Study of a Coupled Resonator Filter

This paper presents a new approach to synthesize admittance function polynomials and coupling matrices for coupled resonator filters. The N + 2 transversal network method is applied to study a coupled resonator filter. This method allowed us to determine the polynomials of the reflection and transmission coefficients. A study is made for a 4 poles filter with 2 transmission zeros between the N + 2 transversal network method and the one found in the literature. A MATLAB code was designed for the numerical simulation of these coefficients for the 6, 8, and 10 pole filter with 4 transmission zeros.

边缘负载FBAR谐振器有限元仿真分析

外部激励施加于薄膜体声波谐振器(FBAR)时会激发纵向与横向剪切的振动,引发能量损耗,为了减少寄生谐振,降低FBAR器件的工作损耗,提高器件的品质因数,故需要抑制横向剪切振动。该文采用有限元仿真法讨论了顶电极边缘负载参数对FBAR器件横向寄生的影响,并通过COMSOL仿真软件实现且制备了结构完整的谐振器。测试结果表明,负载结构可有效提升器件品质因数约10%。

FBAR电极和压电薄膜制备工艺研究

薄膜体声波谐振器(FBAR)制备工艺中,压电薄膜及金属电极的质量和形貌直接影响了器件的性能如品质因数、插入损耗及带宽等。研究了决定FBAR性能的关键工艺,包括Mo电极的刻蚀、AlN压电薄膜的溅射和腐蚀,从而实现高质量电极及压电薄膜结构。同步调节光刻胶掩膜侧壁角度和刻蚀选择比,得到了平缓的底电极侧壁角度,实现了有利于AlN溅射连续性的底电极形貌,通过调节溅射工艺中N_(2)流量组分和温度等参数得到高质量的AlN薄膜,对比不同质量分数和温度的腐蚀溶液对AlN腐蚀工艺的影响,对AlN腐蚀不净及钻蚀问题进行分析,得到最佳的AlN腐蚀条件。最终工艺优化后制备出的FBAR经测试具有良好的滤波器特性,该研究对FBAR制备工艺和性能的提升具有借鉴意义。

薄膜体声波谐振器(FBAR)滤波器研究

薄膜体声波谐振器(FBAR)滤波器具有小尺寸、高频、宽频带、高功率容量等特点,符合5G通信系统对射频滤波器的要求,因而成为射频滤波器的研究热点。对FBAR滤波器的结构原理、电路拓扑形式、关键材料和空腔结构方案四个方面进行了综合阐述与研究。首先介绍了FBAR的基本结构、描述了其工作原理,并指出用于衡量性能优劣的两个关键参数——有效压电耦合系数k_(eff)^(2)和品质因数Q。然后概括了FBAR滤波器的电路拓扑形式,并分析了Ladder形式、Lattice形式和Ladder-Lattice组合形式三种电路拓扑形式的特点。随后研究了FBAR滤波器的关键材料——压电材料与电极材料,并进行了性能特性的比较。其次总结了FBAR的空腔工艺制备方案,重点关注硅反面刻蚀型与空气隙型两大类,并给出了对比与讨论。最后对FBAR滤波器的进一步发展做出了展望。

大于3 GHz超宽带FBAR滤波器结构设计与仿真

该文提出了一种获得相对带宽约为70.61%的基于氮化铝薄膜的超宽带薄膜体声波谐振器(FBAR)滤波器的设计方法,即在中心频率为6.5 GHz下滤波器的带宽为4.835 GHz。仿真分析表明,通过串并联电感的方式,并在电感端串并联电容,可消除因增加电感而带来的谐波谐振点干扰对带通的影响,实现了FBAR滤波器的超宽带。该工作开辟了设计和制作带宽超过3 GHz的超宽带体声波滤波器的新途径。

Portable FBAR based E-nose for cold chain real-time bananas shelf time detection

Being cheap,nondestructive,and easy to use,gas sensors play important roles in the food industry.However,most gas sensors are suitable more for laboratory-quality fast testing rather than for cold-chain continuous and cumulative testing.Also,an ideal electronic nose(E-nose)in a cold chain should be stable to its surroundings and remain highly accurate and portable.In this work,a portable film bulk acoustic resonator(FBAR)-based E-nose was built for real-time measurement of banana shelf time.The sensor chamber to contain the portable circuit of the E-nose is as small as a smartphone,and by introducing an air-tight FBAR as a reference,the E-nose can avoid most of the drift caused by surroundings.With the help of porous layer by layer(LBL)coating of the FBAR,the sensitivity of the E-nose is 5 ppm to ethylene and 0.5 ppm to isoamyl acetate and isoamyl butyrate,while the detection range is large enough to cover a relative humidity of 0.8.In this regard,the E-nose can easily discriminate between yellow bananas with green necks and entirely yellow bananas while allowing the bananas to maintain their biological activities in their normal storage state,thereby showing the possibility of real-time shelf time detection.This portable FBAR-based E-nose has a large testing scale,high sensitivity,good humidity tolerance,and low frequency drift to its surroundings,thereby meeting the needs of cold-chain usage.

The parallel-plate resonator:An RF probe for MR and MRI studies over a wide frequency range

We explore the use of the parallel-plate resonator for the study of thin cuboid samples over a wide range of magnetic resonance frequencies.The parallel-plate resonator functions at frequencies from tens to hundreds of MHz.Seven parallel-plate resonators are presented and discussed in a frequency range from 8 to 500 MHz.Magnetic resonance experiments were performed on both horizontal and vertical bore magnet systems with lithium and hydrogen nuclei.Parallel-plate radiofrequency(RF)probes are easy to build and easy to optimize.Experiments and simulations showed good sensitivity of the parallel-plate RF probe geometry with a small decrease in sensitivity at higher frequencies.

Vibration attenuation of meta-mortar with spring-mass resonators

Metamaterial based on local resonance has excellent vibration attenuation ability in low frequency.In this research,an attempt was performed to make meta-mortar with spring-mass resonators to attenuate vibration and shock hazards.Single-spring-mass resonators and dual-spring-mass resonators were designed and made using lead or aluminum blocks and SWPB springs encased by PMMA(polymethyl methacrylate)or aluminum frames.These resonators were placed into mortar blocks to make metamortar specimens.Vibration attenuation effect was investigated by sweeping vibration with frequency from 50 Hz to 2000 Hz.All these meta-mortar blocks exhibit excellent vibration attenuation ability in the designed band gaps.With dual-spring-mass resonators,meta-mortar blocks have two distinct vibration attenuation bands.

Electrode design for multimode suppression of aluminum nitride tuning fork resonators

This paper is focused on electrode design for piezoelectric tuning fork resonators.The relationship between the performance and electrode pattern of aluminum nitride piezoelectric tuning fork resonators vibrating in the in-plane flexural mode is investigated based on a set of resonators with different electrode lengths,widths,and ratios.Experimental and simulation results show that the electrode design impacts greatly the multimode effect induced from torsional modes but has little influence on other loss mechanisms.Optimizing the electrode design suppresses the torsional mode successfully,thereby increasing the ratio of impedance at parallel and series resonant frequencies(R_(p)/R_(s))by more than 80%and achieving a quality factor(Q)of 7753,an effective electromechanical coupling coefficient(kt_(eff)^(2))of 0.066%,and an impedance at series resonant frequency(R_(m))of 23.6 kΩ.The proposed approach shows great potential for high-performance piezoelectric resonators,which are likely to be fundamental building blocks for sensors with high sensitivity and low noise and power consumption.

Classic analogue of Autler–Townes-splitting transparency using a single magneto-optical ring resonator

We show that an optical transparency can be obtained by using only one single magneto-optical ring resonator. This effect is based on the splitting of counterclockwise and clockwise modes in the ring resonator. Within a proposed resonator-waveguide configuration the superposition between the two degeneracy broken modes produces a transparency window,which can be closed, open, and modified by tuning the applied magnetic field. This phenomenon is an analogue of Autler–Townes splitting, and the magnetic field is equivalent to the strong external pump field. We provide a theoretic analysis on the induced transparency, and numerically demonstrate the effect using full-wave simulation. Feasible implication of this effect and its potential applications are also discussed.