Integrated circuit chips are produced on silicon wafers.Robotic cluster tools are widely used since they provide a reconfigurable and efficient environment for most wafer fabrication processes.Recent advances in new s...Integrated circuit chips are produced on silicon wafers.Robotic cluster tools are widely used since they provide a reconfigurable and efficient environment for most wafer fabrication processes.Recent advances in new semiconductor materials bring about new functionality for integrated circuits.After a wafer is processed in a processing chamber,the wafer should be removed from there as fast as possible to guarantee its high-quality integrated circuits.Meanwhile,maximization of the throughput of robotic cluster tools is desired.This work aims to perform post-processing time-aware scheduling for such tools subject to wafer residencytime constraints.To do so,closed-form expression algorithms are derived to compute robot waiting time accurately upon the analysis of particular events of robot waiting for singlearm cluster tools.Examples are given to show the application and effectiveness of the proposed algorithms.展开更多
Current door-opening methods are mainly developed on tracked, wheeled and biped robots by applying multi-DOF manipulators and vision systems. However, door-opening methods for six-legged robots are seldom studied, esp...Current door-opening methods are mainly developed on tracked, wheeled and biped robots by applying multi-DOF manipulators and vision systems. However, door-opening methods for six-legged robots are seldom studied, especially using 0-DOF tools to operate and only force sensing to detect. A novel door-opening method for six-legged robots is developed and imple- mented to the six-parallel-legged robot. The kinematic model of the six-parallel-legged robot is established and the model of measuring the positional relationship between the robot and the door is proposed. The measurement model is completely based on only force sensing. The real- time trajectory planning method and the control strategy are designed. The trajectory planning method allows the maximum angle between the sagittal axis of the robot body and the normal line of the door plane to be 45°. A 0-DOF tool mounted to the robot body is applied to operate. By integrating with the body, the tool has 6 DOFs and enough workspace to operate. The loose grasp achieved by the tool helps release the inner force in the tool. Experiments are carried out to validate the method. The results show that the method is effective and robust in opening doors wider than 1 m. This paper proposes a novel door-opening method for six-legged robots, which notably uses a O-DOF tool and only force sensing to detect and open the door.展开更多
Off-line programming （OLP） system becomes one of the most important programming modules for the robotic belt grinding process, however there lacks research on increasing the grinding dexterous space depending on the...Off-line programming （OLP） system becomes one of the most important programming modules for the robotic belt grinding process, however there lacks research on increasing the grinding dexterous space depending on the OLP system. A new type of grinding robot and a novel robotic belt grinding workcell are forwarded, and their features are briefly introduced. An open and object-oriented off-line programming system is developed for this robotic belt grinding system. The parameters of the trimmed surface are read from the initial graphics exchange specification （IGES） file of the CAD model of the workpiece. The deBoor-Cox basis function is used to sample the grinding target with local contact frame on the workpiece. The numerical formula of inverse kinematics is set up based on Newton＇s iterative procedure, to calculate the grinding robot configurations corresponding to the grinding targets. After the grinding path is obtained, the OLP system turns to be more effective than the teach-by-showing system. In order to improve the grinding workspace, an optimization algorithm for dynamic tool frame is proposed and performed on the special robotic belt grinding system. The initial tool frame and the interval of neighboring tool frames are defined as the preparation of the algorithm. An optimized tool local frame can be selected to grind the complex surface for a maximum dexterity index of the robot. Under the optimization algorithm, a simulation of grinding a vane is included and comparison of grinding workspace is done before and after the tool frame optimization. By the algorithm, the grinding workspace can be enlarged. Moreover the dynamic tool frame can be considered to add one degree-of-freedom to the grinding kinematical chain, which provides the theoretical support for the improvement of robotic dexterity for the complex surface grinding.展开更多
为解决数控机床刀具无拆卸条件下,基于机械臂的刀具损伤视觉检测系统对准对焦调节耗时长、计算分析方法鲁棒性差等难题,提出了一种融合YOLOv5网络智能感兴趣区域(region of interest, ROI)的机器人视觉系统自动对准对焦方法。首先,利用...为解决数控机床刀具无拆卸条件下,基于机械臂的刀具损伤视觉检测系统对准对焦调节耗时长、计算分析方法鲁棒性差等难题,提出了一种融合YOLOv5网络智能感兴趣区域(region of interest, ROI)的机器人视觉系统自动对准对焦方法。首先,利用ROI模型检测并定位刀具中心,通过九点标定法计算机械臂末端对准坐标;然后自适应筛选ROI对焦窗口,采用改进的Laplacian函数计算清晰度评价值以确定最佳刀具图像。在实际设备上开展实验后结果表明,所提方法比一般方法灵敏度至少提高1.63倍,平均中心点误差为3.76像素,有效提升了刀具损伤视觉检测系统的准确度和灵活性。展开更多
基金supported in part by the National Natural Science Foundation of China(61673123,61803397,61603100)Science and Technology Development Fund(FDCT)Macao SAR of China(0017/2019/A1,005/2018/A1,011/2017/A)
文摘Integrated circuit chips are produced on silicon wafers.Robotic cluster tools are widely used since they provide a reconfigurable and efficient environment for most wafer fabrication processes.Recent advances in new semiconductor materials bring about new functionality for integrated circuits.After a wafer is processed in a processing chamber,the wafer should be removed from there as fast as possible to guarantee its high-quality integrated circuits.Meanwhile,maximization of the throughput of robotic cluster tools is desired.This work aims to perform post-processing time-aware scheduling for such tools subject to wafer residencytime constraints.To do so,closed-form expression algorithms are derived to compute robot waiting time accurately upon the analysis of particular events of robot waiting for singlearm cluster tools.Examples are given to show the application and effectiveness of the proposed algorithms.
基金Supported by National Natural Science Foundation of China(Grant Nos.U1613208,51335007)National Basic Research Program of China(973 Program,Grant No.2013CB035501)+1 种基金Science Fund for Creative Research Groups of the National Natural Science Foundation of China(Grant No.51421092)Science and Technology Commission of Shanghai-based ‘‘Innovation Action Plan’’ Project(Grant No.16DZ1201001)
文摘Current door-opening methods are mainly developed on tracked, wheeled and biped robots by applying multi-DOF manipulators and vision systems. However, door-opening methods for six-legged robots are seldom studied, especially using 0-DOF tools to operate and only force sensing to detect. A novel door-opening method for six-legged robots is developed and imple- mented to the six-parallel-legged robot. The kinematic model of the six-parallel-legged robot is established and the model of measuring the positional relationship between the robot and the door is proposed. The measurement model is completely based on only force sensing. The real- time trajectory planning method and the control strategy are designed. The trajectory planning method allows the maximum angle between the sagittal axis of the robot body and the normal line of the door plane to be 45°. A 0-DOF tool mounted to the robot body is applied to operate. By integrating with the body, the tool has 6 DOFs and enough workspace to operate. The loose grasp achieved by the tool helps release the inner force in the tool. Experiments are carried out to validate the method. The results show that the method is effective and robust in opening doors wider than 1 m. This paper proposes a novel door-opening method for six-legged robots, which notably uses a O-DOF tool and only force sensing to detect and open the door.
基金supported by National Hi-tech Research and Development Program of China (863 Program, Grant No. 2007AA04Z2443)State Key Laboratory for Man ufacturing Systems Engineering of Xi’an Jiaotong University of China
文摘Off-line programming （OLP） system becomes one of the most important programming modules for the robotic belt grinding process, however there lacks research on increasing the grinding dexterous space depending on the OLP system. A new type of grinding robot and a novel robotic belt grinding workcell are forwarded, and their features are briefly introduced. An open and object-oriented off-line programming system is developed for this robotic belt grinding system. The parameters of the trimmed surface are read from the initial graphics exchange specification （IGES） file of the CAD model of the workpiece. The deBoor-Cox basis function is used to sample the grinding target with local contact frame on the workpiece. The numerical formula of inverse kinematics is set up based on Newton＇s iterative procedure, to calculate the grinding robot configurations corresponding to the grinding targets. After the grinding path is obtained, the OLP system turns to be more effective than the teach-by-showing system. In order to improve the grinding workspace, an optimization algorithm for dynamic tool frame is proposed and performed on the special robotic belt grinding system. The initial tool frame and the interval of neighboring tool frames are defined as the preparation of the algorithm. An optimized tool local frame can be selected to grind the complex surface for a maximum dexterity index of the robot. Under the optimization algorithm, a simulation of grinding a vane is included and comparison of grinding workspace is done before and after the tool frame optimization. By the algorithm, the grinding workspace can be enlarged. Moreover the dynamic tool frame can be considered to add one degree-of-freedom to the grinding kinematical chain, which provides the theoretical support for the improvement of robotic dexterity for the complex surface grinding.
文摘为解决数控机床刀具无拆卸条件下,基于机械臂的刀具损伤视觉检测系统对准对焦调节耗时长、计算分析方法鲁棒性差等难题,提出了一种融合YOLOv5网络智能感兴趣区域(region of interest, ROI)的机器人视觉系统自动对准对焦方法。首先,利用ROI模型检测并定位刀具中心,通过九点标定法计算机械臂末端对准坐标;然后自适应筛选ROI对焦窗口,采用改进的Laplacian函数计算清晰度评价值以确定最佳刀具图像。在实际设备上开展实验后结果表明,所提方法比一般方法灵敏度至少提高1.63倍,平均中心点误差为3.76像素,有效提升了刀具损伤视觉检测系统的准确度和灵活性。
