Eccentric error and compensation in rotationally symmetric laser triangulation

Rotationally symmetric triangulation(RST)sensor has more flexibility and less uncertainty limits because of the abaxial rotationally symmetric optical system.But if the incident laser is eccentric,the symmetry of the image will descend,and it will result in the eccentric error especially when some part of the imaged ring is blocked.The model of rotationally symmetric triangulation that meets the Schimpflug condition is presented in this paper.The error from eccentric incident laser is analysed.It is pointed out that the eccentric error is composed of two parts,one is a cosine in circumference and proportional to the eccentric departure factor,and the other is a much smaller quadric factor of the departure.When the ring is complete,the first error factor is zero because it is integrated in whole ring, but if some part of the ring is blocked,the first factor will be the main error.Simulation verifies the result of the a- nalysis.At last,a compensation method to the error when some part of the ring is lost is presented based on neural network.The results of experiment show that the compensation will make the absolute maximum error descend to half,and the standard deviation of error descends to 1/3.

Identification the Motion Error of Machine Tool Based on the Correlation Analysis

Machine tool has been widely used in the production of the military and civilian.The machining precision of the workpiece is the direct reflection for the machining performance of machine tool.With the improvement for requirement of the machining precision,improving the accuracy of machining is becoming important.Guideway and spindle are the key motion components that decided the shape,the relative position and the surface roughness of the workpiece.In order to adapt to the requirements of the workpiece machining,this paper analyzes the errors of guideway and spindle that affect the accuracy of the processing,establishes the motion relations for every errors of guideway in machining process,identifies the regular for the straightness,bending of the guideway and rotating error of spindle that influences the workpiece surface.Finally,according to the correlation analysis of the measured and the simulation results,the motion error of machine tool is identified,which lays the foundation for improving the accuracy of machine tool in next step.

High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide

This paper proposes a new method for measurement of the roll error motion of a slide table in a precision linear slide. The proposed method utilizes a pair of clinometers in the production process of a precision linear slide, where the roll error motion measurement will be carried out repeatedly to confirm whether the surface form errors of slide guideways in the linear slide are su ciently corrected by hand scraping process. In the proposed method, one of the clinometers is mounted on the slide table, while the other is placed on a vibration isolation table, on which the precision linear slide is mounted, so that influences of external disturbances can be cancelled. An experimental setup is built on a vibration isolation table, and some experiments are carried out to verify the feasibility of the proposed method.

Analyzing Rotor Rotating Error by Using Fractal Theory

Based on the judgement of fractional Br ow nian motion, this paper analyzes the radial rotating error of a precision rotor. The results indicate that the rotating error motion of the precision rot or is characterized by basic fractional Brownian motions, i.e. randomicity, non -sequencity, and self-simulation insinuation to some extent. Also, this paper calculates the fractal box counting dimension of radial rotating error and judges that the rotor error motion is of stability, indicating that the motion range of the future track of the axes is relatively stable.

Investigation of Rotor Radial Rotating Error upon AMB System

This paper first suggests the use of the Fourier frequency transmission method of two dimensions function （ 2D FFT） to analyze radial rotating errors that occurred in a rotor. Based on this method a magnetic rotor is measured. The authors point out that the main cause to affect radial rotating accuracy of the rotating shaft at a high speed is the dynamic imbalance of the shaft itself. Finally the feedforward control scheme is suggested to improve the accuracy of the shaft in an active magnetic bearing （ AMB ） system.

旋转非对称项面形误差绝对检测的仿真分析

为满足光学元件的高精度检测要求,绝对检测技术取代传统相对检测技术被越来越多的用于光学检测过程中。然而传统绝对检测法检测都有各自适用的范围且检测过程复杂对实验仪器的精度要求较高。在某些只需要获得旋转非对称面型误差的检测领域旋转平均法成为一种简单易行的绝对检测手段。旋转平均法适用于平面、球面与非球面旋转非对称面型检测。本文对旋转平均法的原理进行了介绍,利用光学设计软件对旋转平均法的检测过程进行仿真。利用仿真检测对待测面形的旋转非对称项误差及kNθ旋转对称项进行量化分析,仿真分析出的结果与理论结果较好的吻合。仿真分析的实验结果表明:利用旋转平移法可有效提高非旋转对称面形检测的精度,实验仿真模型可有效对实际检测过程进行仿真。

点衍射干涉仪系统误差标定算法研究

为评估面形检测点衍射干涉仪的检测精度,提出用被检镜倾斜旋转法标定点衍射干涉仪的系统误差,研究可同时分离出被检球面镜旋转对称及旋转非对称面形误差的标定算法。将被检球面镜绕初始光轴及相对成小角度的倾斜光轴作两次平分角度旋转检测,利用单次平分旋转检测数据估计出被检镜面形的旋转非对称部分,利用两次旋转检测重叠区域各点系统误差不变性构建旋转对称部分的差值方程,运用最小二乘法求解用泽尼克多项式表述的旋转对称部分的系数,估计出的被检镜面形的旋转对称部分,两者相加估计得被检镜的真实面形。从干涉仪测试数据中减去被检镜的真实面形数据计算得系统误差。分析标定原理,推导标定算法公式,并仿真验证算法正确性。仿真研究结果表明,经算法估计的被检镜面形和系统误差与仿真输入值吻合,方均根误差的差值均小于0.03 nm,残差的方均根值均小于0.3 nm,满足亚纳米级标定精度需求。

旋转对称三角传感器中的光斑偏移

针对旋转对称三角传感器中的光斑偏移现象,建立了不同测量角度下成像圆环半径与光斑偏移量关系的数学模型,讨论了不同光斑偏移时的圆环平均半径变化规律,并对光斑偏移引起的光线角度偏移进行了分析.结果表明,所得实验现象与数学模型推导结果一致,数学模型能够反映传感器的光斑偏移规律.

Investigating Averaging Effect by Using Three Dimension Spectrum

The eddy current displacement sensor＇s averaging effect has been investigated in this paper, and the frequency spectrum property of the averaging effect was also deduced. It indicates that the averaging effect has no influences on measuring a rotor＇s rotating error, but it has visible influences on measuring the rotor＇s profile error. According to the frequency spectrum of the averaging effect, the actual sampling data can be adjusted reasonably, thus measuring precision is improved.

基于旋转平均补偿算法的旋转非对称面形绝对检测

旋转法是一种用于获得被测面旋转非对称面形的绝对检测技术。旋转平均补偿算法是在N次等间隔旋转的基础上增加一次不同角度的旋转测量,称为N+1次旋转法。通过附加的一次旋转测量,采用泽尼克多项式拟合求解旋转平均法的丢失面形。推导了理论计算公式,仿真分析了存在旋转角度和偏心误差时,补偿算法的有效性以及附加旋转角度对补偿面形计算精度的影响。验证实验的结果与仿真相符,表明在选择合适的附加角度之后,该算法可有效补偿丢失信息。与旋转平均法相比,只需增加一次旋转,就能得到更完整的面形,极大地提高了检测效率和精度,实验中补偿率达到61%,检测精度提高了约1倍。