Hydrostatic guideways have various applications in precision machine tools due to their high motion accuracy. The analysis of motion straightness in hydrostatic guideways is generally ignoring the external load on the...Hydrostatic guideways have various applications in precision machine tools due to their high motion accuracy. The analysis of motion straightness in hydrostatic guideways is generally ignoring the external load on the slider. A variation force also exists, caused by the different working positions, together with the dead load of the slider and that of other auxiliary devices. The effect of working position on vertical motion straightness is investigated based on the equivalent static model, considering the error averaging effort of pressured oil film in open hydrostatic guideways. Open hydrostatic guideways in LGF1000 are analyzed with this approach. The theoretical results show that the slider has maximum vertical motion straightness when the working position is closer the guiderail of Y axis. The vertical motion straightness reaches a minimum value as the working position is located at the center of the two guiderails on the Y axis. The difference between the maximum and minimum vertical motion straightness is 34.7%. The smaller vertical motion straightness is attributed to the smaller spacing of the two pads centers, along the Y direction. The experimental results show that the vertical motion straightness is 4.15 μm/1200 mm, when the working position is located in the middle of the Xbeam, and 5.08 pro/1200 mm, when the working position is approaching the Y guiderails, denoting an increase of 18.3%. The changing trends of the measured results validate the correctness of the theoretical model. The research work can be used to reveal the variation law of accuracy of the open hydrostatic guideways, under different working positions, to predict the machining precision, and provides the basis for an error compensation strategy for gantry type grinding machines.展开更多
The dynamic interaction between maglev vehicle and three-span continuous guideway is discussed. With the consideration of control system, the dynamic interaction model has been developed. Numerical simulation has been...The dynamic interaction between maglev vehicle and three-span continuous guideway is discussed. With the consideration of control system, the dynamic interaction model has been developed. Numerical simulation has been performed to study dynamic characteristics of the guideway. The results show that bending rigidity, vehicle speed, span ratio and primary frequency all have important influences on the dynamic characteristics of the guideway and there is no distinct trend towards resonance vibration when fl/(v/l) equals 1.0. The definite way is to control impact coefficient and acceleration of the guideway. The conclusions can serve the design of high-speed maglev three-span continuous guideway.展开更多
Aiming at the approximate error of commonly used methods on calculation of hydrostatic pressures of closed hydrostatic guideways with multiple pockets, a more accurate solution is proposed. Taking design of beam & sl...Aiming at the approximate error of commonly used methods on calculation of hydrostatic pressures of closed hydrostatic guideways with multiple pockets, a more accurate solution is proposed. Taking design of beam & slide-rest guideways for a heavy duty CNC vertical turning mill as an example, under an assumption that stiffnesses of guideways and their jointing structure are sufficiently large, the pressures of the pockets can be attained by adding a co-planarity equation that constrains pocket centers. Then, an optimization model is built to minimize the highest pocket pressure under additional constraints that are posed on the highest seal margin pressure, the highest levitating pressure of the pockets, and the maximum deformation of the guideways. The optimization problem is solved sequentially by using the methods of design of experiments and adaptive simulated annealing on iSIGHT software platform. The results show significant improvements to the original design. Optimized maximum hydrostatic pressure meets the requirement of hydraulic system.展开更多
Based on the Floquet theory on ordinary differential equationswith periodically variable coefficients and the bifurcation approachto nonlinear equations, a numerical approach to determining thestability region of cont...Based on the Floquet theory on ordinary differential equationswith periodically variable coefficients and the bifurcation approachto nonlinear equations, a numerical approach to determining thestability region of control parameters is established for a dynamiccontrol system composed of a moving body levitated magnetically overflexible guideways. The system is nonlinearly coupled among theelastic deformation of guideways, disturbance the levitation positionof the body and electromagnet- ic control forces.展开更多
A compact multi-throttle aerostatic guideway is the preferred structure for high precision and acceleration motion in the variable-slit system(VS)of photolithography.The presence of microstructure,such as recesses and...A compact multi-throttle aerostatic guideway is the preferred structure for high precision and acceleration motion in the variable-slit system(VS)of photolithography.The presence of microstructure,such as recesses and grooves,on the guideway working surface has been found to improve the loading performance.Nevertheless,the effects on the guideway performance of changing the microstructure on the micron level are not yet clear.The mesh adaptation method,which was proposed by the authors,is employed in this paper to quantitatively study the influences of four microstructure parameters.The effect of tuning these parameters on the loading performance is revealed.The level of impact determines the proposed design process of the parameters.The characteristic feature of the proposed design process is that the working points of carrying capacity,stiffness,and rotational stiffness are unified under twoway adjusting by means of recess parameters.According to the proposed design process and tuning method,the restriction of supply pressure is lifted to a certain extent and the mutual tradeoff among the loading performances is relieved.The experimental results show that the rotational stiffness of the designed guideway,based on the tuned parameters,reached 2.14×10^(4) Nmrad1 and increased by 69.8%.In a scanning test of the applied VS on argon fluoride laser(ArF)photolithography,the average scanning acceleration reached 67.5 m·s^(-2),meeting the design specification.展开更多
The structure of a high-speed maglev guideway is taken as the research object.With the aim of identifying the inconsistency of modal parameters between the simulation model and the actual model,and based on the 600 km...The structure of a high-speed maglev guideway is taken as the research object.With the aim of identifying the inconsistency of modal parameters between the simulation model and the actual model,and based on the 600 km/h high-speed maglev vehicle and the high-speed maglev test line,the arrangement of sensors and the vibration acceleration data collection of the 12.384 m concrete guideway were conducted.The modal parameters were identified from the guideway response signal using wavelet transform,after which the wavelet ridge was extracted by using the maximum slope method.Next,the vibration modes and frequency parameters of the interaction vibration characteristics of the high-speed maglev guideway and 600 km/h maglev vehicle were analyzed.The updating objective function for the finite element model of the guideway was established,and the initial guideway finite element model was modified and updated by repeatedly iterating the parameters.In doing so,the model structure of the high-speed maglev guideway was obtained,which is consistent with the actual structure.The accuracy of the updated guideway model in the calculation of the dynamic response was verified by combining this with the vehicle-guideway coupling dynamic model of the high-speed maglev system with 18 degrees of freedom.The research results reveal that the model update method based on the wavelet transform and the maximum slope method has the characteristics of high accuracy and fast recognition speed.This can effectively obtain an accurate guideway model that ensures the correctness of the vehicle-guideway coupling dynamic analysis and calculation while meeting the parameters of the measured structure model.This method is also suitable for updating other structural models of high-speed maglev systems.展开更多
基金Supported by National Natural Science Foundation of China(Grant No.51275395)National Science and Technology Major Project of Ministry of Science and Technology of China(Grant No.2012ZX04002–091)the Scientific Research Foundation of Shandong University of Science and Technology for Recruited Talents,China(Grant No.2014RCJJ022)
文摘Hydrostatic guideways have various applications in precision machine tools due to their high motion accuracy. The analysis of motion straightness in hydrostatic guideways is generally ignoring the external load on the slider. A variation force also exists, caused by the different working positions, together with the dead load of the slider and that of other auxiliary devices. The effect of working position on vertical motion straightness is investigated based on the equivalent static model, considering the error averaging effort of pressured oil film in open hydrostatic guideways. Open hydrostatic guideways in LGF1000 are analyzed with this approach. The theoretical results show that the slider has maximum vertical motion straightness when the working position is closer the guiderail of Y axis. The vertical motion straightness reaches a minimum value as the working position is located at the center of the two guiderails on the Y axis. The difference between the maximum and minimum vertical motion straightness is 34.7%. The smaller vertical motion straightness is attributed to the smaller spacing of the two pads centers, along the Y direction. The experimental results show that the vertical motion straightness is 4.15 μm/1200 mm, when the working position is located in the middle of the Xbeam, and 5.08 pro/1200 mm, when the working position is approaching the Y guiderails, denoting an increase of 18.3%. The changing trends of the measured results validate the correctness of the theoretical model. The research work can be used to reveal the variation law of accuracy of the open hydrostatic guideways, under different working positions, to predict the machining precision, and provides the basis for an error compensation strategy for gantry type grinding machines.
基金Project (No. 2005AA505440) supported by the Hi-Tech Researchand Development Program (863) of China
文摘The dynamic interaction between maglev vehicle and three-span continuous guideway is discussed. With the consideration of control system, the dynamic interaction model has been developed. Numerical simulation has been performed to study dynamic characteristics of the guideway. The results show that bending rigidity, vehicle speed, span ratio and primary frequency all have important influences on the dynamic characteristics of the guideway and there is no distinct trend towards resonance vibration when fl/(v/l) equals 1.0. The definite way is to control impact coefficient and acceleration of the guideway. The conclusions can serve the design of high-speed maglev three-span continuous guideway.
基金This project is supported by National Natural Science Foundation of China(No.60573178)Provincial Natural Science Foundation of Hubei China(No.2006ABA074).
文摘Aiming at the approximate error of commonly used methods on calculation of hydrostatic pressures of closed hydrostatic guideways with multiple pockets, a more accurate solution is proposed. Taking design of beam & slide-rest guideways for a heavy duty CNC vertical turning mill as an example, under an assumption that stiffnesses of guideways and their jointing structure are sufficiently large, the pressures of the pockets can be attained by adding a co-planarity equation that constrains pocket centers. Then, an optimization model is built to minimize the highest pocket pressure under additional constraints that are posed on the highest seal margin pressure, the highest levitating pressure of the pockets, and the maximum deformation of the guideways. The optimization problem is solved sequentially by using the methods of design of experiments and adaptive simulated annealing on iSIGHT software platform. The results show significant improvements to the original design. Optimized maximum hydrostatic pressure meets the requirement of hydraulic system.
基金NSFC(No.19725207)the Pre-research Project of the Committee of Science and Tchnology for Defence of Chinathe Science Foundation of Education Ministry of China for Ph.D Programmes
文摘Based on the Floquet theory on ordinary differential equationswith periodically variable coefficients and the bifurcation approachto nonlinear equations, a numerical approach to determining thestability region of control parameters is established for a dynamiccontrol system composed of a moving body levitated magnetically overflexible guideways. The system is nonlinearly coupled among theelastic deformation of guideways, disturbance the levitation positionof the body and electromagnet- ic control forces.
基金This work was funded by the National Natural Science Foundation of China(51675136)the National Science and Technology Major Project(2017ZX02101006-005)the Heilongjiang Natural Science Foundation(E2017032).
文摘A compact multi-throttle aerostatic guideway is the preferred structure for high precision and acceleration motion in the variable-slit system(VS)of photolithography.The presence of microstructure,such as recesses and grooves,on the guideway working surface has been found to improve the loading performance.Nevertheless,the effects on the guideway performance of changing the microstructure on the micron level are not yet clear.The mesh adaptation method,which was proposed by the authors,is employed in this paper to quantitatively study the influences of four microstructure parameters.The effect of tuning these parameters on the loading performance is revealed.The level of impact determines the proposed design process of the parameters.The characteristic feature of the proposed design process is that the working points of carrying capacity,stiffness,and rotational stiffness are unified under twoway adjusting by means of recess parameters.According to the proposed design process and tuning method,the restriction of supply pressure is lifted to a certain extent and the mutual tradeoff among the loading performances is relieved.The experimental results show that the rotational stiffness of the designed guideway,based on the tuned parameters,reached 2.14×10^(4) Nmrad1 and increased by 69.8%.In a scanning test of the applied VS on argon fluoride laser(ArF)photolithography,the average scanning acceleration reached 67.5 m·s^(-2),meeting the design specification.
基金The National 13th Five-Year Science and Technology Support Program of China(No.2016YFB1200602).
文摘The structure of a high-speed maglev guideway is taken as the research object.With the aim of identifying the inconsistency of modal parameters between the simulation model and the actual model,and based on the 600 km/h high-speed maglev vehicle and the high-speed maglev test line,the arrangement of sensors and the vibration acceleration data collection of the 12.384 m concrete guideway were conducted.The modal parameters were identified from the guideway response signal using wavelet transform,after which the wavelet ridge was extracted by using the maximum slope method.Next,the vibration modes and frequency parameters of the interaction vibration characteristics of the high-speed maglev guideway and 600 km/h maglev vehicle were analyzed.The updating objective function for the finite element model of the guideway was established,and the initial guideway finite element model was modified and updated by repeatedly iterating the parameters.In doing so,the model structure of the high-speed maglev guideway was obtained,which is consistent with the actual structure.The accuracy of the updated guideway model in the calculation of the dynamic response was verified by combining this with the vehicle-guideway coupling dynamic model of the high-speed maglev system with 18 degrees of freedom.The research results reveal that the model update method based on the wavelet transform and the maximum slope method has the characteristics of high accuracy and fast recognition speed.This can effectively obtain an accurate guideway model that ensures the correctness of the vehicle-guideway coupling dynamic analysis and calculation while meeting the parameters of the measured structure model.This method is also suitable for updating other structural models of high-speed maglev systems.