This paper presents an innovative R2R(run to run)control strategy.This novel approach has made use of circuit design structure through virtually put up the structure before reach the actual structure developing step.T...This paper presents an innovative R2R(run to run)control strategy.This novel approach has made use of circuit design structure through virtually put up the structure before reach the actual structure developing step.The most significant difference between this approach and other R2R control strategies is this approach can solve issues caused by limitation of metrology instrument such as measuring target is inside a deep hole and cannot be measured clearly.Furthermore,the study proposed a multi-steps rolling wave control plan to safeguard the outcome of this control strategy.Although this control strategy has only performed trials on DRAM(Dynamic Random Access Memory)manufacturing process but it can be applied to other industry as well.展开更多
The mass production of primed electronics can be achieved by roll-to-roll（R2R） printing system, so highly accurate web tension is required that can minimize the register error and keep the thickness and roughness of...The mass production of primed electronics can be achieved by roll-to-roll（R2R） printing system, so highly accurate web tension is required that can minimize the register error and keep the thickness and roughness of printed devices in limits. The web tension of a R2R system is regulated by the use of integrated load cells and active dancer system for printed electronics applications using decentralized multi-input-single-output（MISO） regularized variable learning rate backpropagation artificial neural networks. The active dancer system is used before printing system to reduce disturbances in the web tension of process span. The classical PID control result in tension spikes with the change in roll diameter of winder and unwinder rolls. The presence of dancer in R2R system shows that improved web tension control in printing span and the web tension can be enhanced from 3.75 N to 4.75 N. The overshoot of system is less than ±2.5 N and steady state error is within ± 1 N where load cells have a signal noise of ±0.7 N. The integration of load cells and active dancer with self-adapting neural network control provide a solution to the web tension control of multispan roll-to-roll system.展开更多
基金supported by my department manager Haw-Jyue Luo for gently sharing his years of semiconductor manufacturing experience.
文摘This paper presents an innovative R2R(run to run)control strategy.This novel approach has made use of circuit design structure through virtually put up the structure before reach the actual structure developing step.The most significant difference between this approach and other R2R control strategies is this approach can solve issues caused by limitation of metrology instrument such as measuring target is inside a deep hole and cannot be measured clearly.Furthermore,the study proposed a multi-steps rolling wave control plan to safeguard the outcome of this control strategy.Although this control strategy has only performed trials on DRAM(Dynamic Random Access Memory)manufacturing process but it can be applied to other industry as well.
基金supported by Basic Science Research Program through the National Research Foundation of Korea(NRF),Ministry of Education,Science and Technology,Korea(Grant No.2010-0026163)Strategy Technology Development Project,Ministry of Knowledge Economy,Korea(Grant No.10032149)
文摘The mass production of primed electronics can be achieved by roll-to-roll（R2R） printing system, so highly accurate web tension is required that can minimize the register error and keep the thickness and roughness of printed devices in limits. The web tension of a R2R system is regulated by the use of integrated load cells and active dancer system for printed electronics applications using decentralized multi-input-single-output（MISO） regularized variable learning rate backpropagation artificial neural networks. The active dancer system is used before printing system to reduce disturbances in the web tension of process span. The classical PID control result in tension spikes with the change in roll diameter of winder and unwinder rolls. The presence of dancer in R2R system shows that improved web tension control in printing span and the web tension can be enhanced from 3.75 N to 4.75 N. The overshoot of system is less than ±2.5 N and steady state error is within ± 1 N where load cells have a signal noise of ±0.7 N. The integration of load cells and active dancer with self-adapting neural network control provide a solution to the web tension control of multispan roll-to-roll system.
