C-mode scanning acoustical microscopy, C-SAM, is widely used in plastic package evaluations and for failure analysis. It permits to detect subsurface delaminations, cracks and pores （air bubbles） for different micro...C-mode scanning acoustical microscopy, C-SAM, is widely used in plastic package evaluations and for failure analysis. It permits to detect subsurface delaminations, cracks and pores （air bubbles） for different microelectronics packages. In this study, abnormality was observed in C-SAM daily test, the images showed no delaminations but inhomogeneities on the IC surface. Corrosion was found by optical microscope and scanning electron microscope after decapsulation. It can be revealed as the acoustic impedance is different between corrosion and normal area. The presence of inhomogeneities and discontinuities along ultrasonic waves＇ propagation paths inside the matter causes modifications in the amplitude and polarity of ultrasonic waves. However, C-SAM＇s capability in detecting IC surface corrosion has not been presented. The capability will be illustrated and the inspection mechanism will be discussed in this paper.展开更多
Photoacoustic imaging is a potential candidate for in vivo brain imaging,whereas,its imaging performance could be degraded by inhomogeneous multi-layered media,consisted of scalp and skull.In this work,we propose a lo...Photoacoustic imaging is a potential candidate for in vivo brain imaging,whereas,its imaging performance could be degraded by inhomogeneous multi-layered media,consisted of scalp and skull.In this work,we propose a low-artifact photoacoustic microscopy(LAPAM)scheme,which combines conventional acoustic-resolution photoacoustic microscopy with scanning acoustic microscopy to suppress the reflection artifacts induced by multi-layers.Based on similar propagation characteristics of photoacoustic signals and ultrasonic echoes,the ultrasonic echoes can be employed as the filters to suppress the reflection artifacts to obtain low-artifact photoacoustic images.Phantom experiment is used to validate the effectiveness of this method.Furthermore,LAPAM is applied for in-vivo imaging mouse brain without removing the scalp and the skull.Experimental results show that the proposed method successfully achieves the low-artifact brain image,which demonstrates the practical applicability of LAPAM.This work might improve the photoacoustic imaging quality in many biomedical applications which involve tissues with complex acoustic properties,such as brain imaging through scalp and skull.展开更多
Scanning electron acoustic microscopy (SEAM) is a new technique for imasing and characterization ofthermal, elastic and pyroelectric property variations on a microscale resolution. The signal generation mechanisms and...Scanning electron acoustic microscopy (SEAM) is a new technique for imasing and characterization ofthermal, elastic and pyroelectric property variations on a microscale resolution. The signal generation mechanisms and the application of scanning electron acoustic microscopy in GalnAsSb alloy grown by MOCVD wereinvestigated. Defects below the surface of GalnAsSb alloy were found by SEAM images and cathodelumi-nescence. The results show that electronacoustic imaging has its own features over secondary electron imag-ing.展开更多
文摘C-mode scanning acoustical microscopy, C-SAM, is widely used in plastic package evaluations and for failure analysis. It permits to detect subsurface delaminations, cracks and pores （air bubbles） for different microelectronics packages. In this study, abnormality was observed in C-SAM daily test, the images showed no delaminations but inhomogeneities on the IC surface. Corrosion was found by optical microscope and scanning electron microscope after decapsulation. It can be revealed as the acoustic impedance is different between corrosion and normal area. The presence of inhomogeneities and discontinuities along ultrasonic waves＇ propagation paths inside the matter causes modifications in the amplitude and polarity of ultrasonic waves. However, C-SAM＇s capability in detecting IC surface corrosion has not been presented. The capability will be illustrated and the inspection mechanism will be discussed in this paper.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.12027808,11874217,11834008,81900875,and 81770973)Natural Science Foundation of Jiangsu Province,China(Grant No.BK 20181077)。
文摘Photoacoustic imaging is a potential candidate for in vivo brain imaging,whereas,its imaging performance could be degraded by inhomogeneous multi-layered media,consisted of scalp and skull.In this work,we propose a low-artifact photoacoustic microscopy(LAPAM)scheme,which combines conventional acoustic-resolution photoacoustic microscopy with scanning acoustic microscopy to suppress the reflection artifacts induced by multi-layers.Based on similar propagation characteristics of photoacoustic signals and ultrasonic echoes,the ultrasonic echoes can be employed as the filters to suppress the reflection artifacts to obtain low-artifact photoacoustic images.Phantom experiment is used to validate the effectiveness of this method.Furthermore,LAPAM is applied for in-vivo imaging mouse brain without removing the scalp and the skull.Experimental results show that the proposed method successfully achieves the low-artifact brain image,which demonstrates the practical applicability of LAPAM.This work might improve the photoacoustic imaging quality in many biomedical applications which involve tissues with complex acoustic properties,such as brain imaging through scalp and skull.
文摘Scanning electron acoustic microscopy (SEAM) is a new technique for imasing and characterization ofthermal, elastic and pyroelectric property variations on a microscale resolution. The signal generation mechanisms and the application of scanning electron acoustic microscopy in GalnAsSb alloy grown by MOCVD wereinvestigated. Defects below the surface of GalnAsSb alloy were found by SEAM images and cathodelumi-nescence. The results show that electronacoustic imaging has its own features over secondary electron imag-ing.
