A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is ...A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems （MEMS）, etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.展开更多
Phase is one of the most important parameters of electromagnetic waves. It is the phase distribution that determines the propagation, reflection, refraction, focusing, divergence, and coupling features of light, and f...Phase is one of the most important parameters of electromagnetic waves. It is the phase distribution that determines the propagation, reflection, refraction, focusing, divergence, and coupling features of light, and further affects the intensity distribution. In recent years, the designs of surface plasmon polariton （SPP） devices have mostly been based on the phase modulation and manipulation. Here we demonstrate a phase sensitive multi-parameter heterodyne scanning near-field opti- cal microscope （SNOM） with an aperture probe in the visible range, with which the near field optical phase and amplitude distributions can be simultaneously obtained. A novel architecture combining a spatial optical path and a fiber optical path is employed for stability and flexibility. Two kinds of typical nano-photonic devices are tested with the system. With the phase-sensitive SNOM, the phase and amplitude distributions of any nano-optical field and localized field generated with any SPP nano-structures and irregular phase modulation surfaces can be investigated. The phase distribution and the interference pattern will help us to gain a better understanding of how light interacts with SPP structures and how SPP waves generate, localize, convert, and propagate on an SPP surface. This will be a significant guidance on SPP nano-structure design and optimization.展开更多
Utilizing reflection-based near-field scanning optical microscopy(NSOM) to image and analyze standing-wave patterns, we present a characterization technique potentially suitable for complex photonic integrated circuit...Utilizing reflection-based near-field scanning optical microscopy(NSOM) to image and analyze standing-wave patterns, we present a characterization technique potentially suitable for complex photonic integrated circuits. By raster scanning along the axis of a straight nano-waveguide in tapping mode and sweeping wavelength, detailed information of propagating waves in that waveguide has been extracted from analyses in both space and wavelength domains. Our technique needs no special steps for phase stabilization, thus allowing long-duration and environment-insensitive measurements. As a proof-of-concept test, in a silicon single-mode waveguide with a few of etched holes, the locations and reflection strengths of the inner defects have been quantified. The measurement uncertainty of the reflection amplitude is less than 25% at current stage. Our technique paves the way for non-destructively diagnosing photonic circuits on a chip with sub-wavelength spatial resolution and detailed information extraction.展开更多
Fiber optic Fourier transform white-light inter-fereometry is presented to interrogate the absolute optical path difference of an Maeh-Zehnder interferometer. The phase change of the interferometer caused by scanning ...Fiber optic Fourier transform white-light inter-fereometry is presented to interrogate the absolute optical path difference of an Maeh-Zehnder interferometer. The phase change of the interferometer caused by scanning wavelength can be calculated by a Fourier transform-based phase demodulation technique. A linear output is achieved.展开更多
基金Project supported by the National Natural Science Foundation of China （Grant No.50175037）
文摘A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems （MEMS）, etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.
基金supported by the National Natural Science Foundation of China(Grant Nos.61177089,61227014,and 60978047)
文摘Phase is one of the most important parameters of electromagnetic waves. It is the phase distribution that determines the propagation, reflection, refraction, focusing, divergence, and coupling features of light, and further affects the intensity distribution. In recent years, the designs of surface plasmon polariton （SPP） devices have mostly been based on the phase modulation and manipulation. Here we demonstrate a phase sensitive multi-parameter heterodyne scanning near-field opti- cal microscope （SNOM） with an aperture probe in the visible range, with which the near field optical phase and amplitude distributions can be simultaneously obtained. A novel architecture combining a spatial optical path and a fiber optical path is employed for stability and flexibility. Two kinds of typical nano-photonic devices are tested with the system. With the phase-sensitive SNOM, the phase and amplitude distributions of any nano-optical field and localized field generated with any SPP nano-structures and irregular phase modulation surfaces can be investigated. The phase distribution and the interference pattern will help us to gain a better understanding of how light interacts with SPP structures and how SPP waves generate, localize, convert, and propagate on an SPP surface. This will be a significant guidance on SPP nano-structure design and optimization.
基金Project supported by National Key R&D Program of China(Grant No.2017YFA0303800)National Natural Science Foundation of China(Grant No.61575218)Defense Industrial Technology Development Program,China(Grant No.JCKY201601C006)
文摘Utilizing reflection-based near-field scanning optical microscopy(NSOM) to image and analyze standing-wave patterns, we present a characterization technique potentially suitable for complex photonic integrated circuits. By raster scanning along the axis of a straight nano-waveguide in tapping mode and sweeping wavelength, detailed information of propagating waves in that waveguide has been extracted from analyses in both space and wavelength domains. Our technique needs no special steps for phase stabilization, thus allowing long-duration and environment-insensitive measurements. As a proof-of-concept test, in a silicon single-mode waveguide with a few of etched holes, the locations and reflection strengths of the inner defects have been quantified. The measurement uncertainty of the reflection amplitude is less than 25% at current stage. Our technique paves the way for non-destructively diagnosing photonic circuits on a chip with sub-wavelength spatial resolution and detailed information extraction.
基金supported by the Program for New Century Excellent Talents (NCET) in the University of China and National 863 Program under Grant No. 2008AA04Z406.
文摘Fiber optic Fourier transform white-light inter-fereometry is presented to interrogate the absolute optical path difference of an Maeh-Zehnder interferometer. The phase change of the interferometer caused by scanning wavelength can be calculated by a Fourier transform-based phase demodulation technique. A linear output is achieved.
