We demonstrate high-performance In0.23 Ga0.77 As channel metal-oxide-semiconductor field-effect transistors （ MOS- FETs） with high on-current to off-current （Ion/Ioff） ratio grown on semi-insulating GaAs wafers by...We demonstrate high-performance In0.23 Ga0.77 As channel metal-oxide-semiconductor field-effect transistors （ MOS- FETs） with high on-current to off-current （Ion/Ioff） ratio grown on semi-insulating GaAs wafers by metal-organic chemical vapor deposition （MOCVD）. The 2μm channel-length devices exhibit a peak extrinsic transeonductance of 150 mS/mm and a drain current up to 500 mA/mm. The maximum effective mobility is 1680 cm2/Vs extracted by the split C-V method. Furthermore, the Ion/Ioff ratio is significantly improved from approximately 4.5 × 10^3 up to approximately 4.32 × 10^4 by controlling the etch thickness of In0.49Ga0.51P, The high drain current and high Ion/Ioff ratio of the In0.23Ga0.77As channel MOSFETs are achieved due to the high effective mobility and the low gate leakage current density.展开更多
The microprecipitates in the as-grown undoped and In-doped semi-insulating GaAs single crystals have been ex- amined by JEM 200 CX transmission electron microscope.The microprecipitates consist of GaAs polycrystalline...The microprecipitates in the as-grown undoped and In-doped semi-insulating GaAs single crystals have been ex- amined by JEM 200 CX transmission electron microscope.The microprecipitates consist of GaAs polycrystalline grains of 5～100nm in size have been evidenced in dislocated crystals.Energy dispersive X-ray analysis shows that the mieropreeipitates are predominately arsenic-rich GaAs.The As/Ga atomic ratio of the microprecipitates in In-doped crystal is higher than that of undoped crystal.It is suggested that the formation of the microprecipitates may be induced by the local fluctuation of compositional undercooling during crystal growth.展开更多
It has advantages of accuracy, rapidity and non-destruction that EL2 distribution in semi-insulating LECGaAs crystal has been measured by near infrared absorption method with a high spatial resolution. Now EL2defect e...It has advantages of accuracy, rapidity and non-destruction that EL2 distribution in semi-insulating LECGaAs crystal has been measured by near infrared absorption method with a high spatial resolution. Now EL2defect existed in all wafer is directly observed by 1 .0972 μm and 2 μm absorption curves obtained from a suc-cessive and automatical horizontal scan across the different bands parallelly ranged with tbe diameter of asemi-insulating GaAs wafer. Not only EL2 distribution across the wafer corresponding with that of dislocationdensities has been indicated but also the fine structure found.展开更多
Metal-semiconductor-metal photodetectors on semi-insulating Ga As with interdigital electrodes showed significant enhancement in the spectral response in the near-infrared region as the electrode spacing is reduced. T...Metal-semiconductor-metal photodetectors on semi-insulating Ga As with interdigital electrodes showed significant enhancement in the spectral response in the near-infrared region as the electrode spacing is reduced. The photocurrent for the device with 5 μm interdigital spacing is five orders of magnitude higher than the dark current, and the room temperature detectivity is on the order of 2.4 × 1012cm Hz1∕2W-1at 5 V bias. Furthermore,the spectral response of this device possesses strong dependence on the polarization of incident light showing potential plasmonic effects with only microscale dimensions. These experimental data were analyzed using optical simulation to confirm the response of the devices.展开更多
Annealing was carried out at 950 and 1120 degreesC under various As pressure for undoped (ND) semi-insulating (SI) LECGaAs. The effects of annealing on native defects and electrical properties were investigated. Exper...Annealing was carried out at 950 and 1120 degreesC under various As pressure for undoped (ND) semi-insulating (SI) LECGaAs. The effects of annealing on native defects and electrical properties were investigated. Experimental results indicate that, after an annealing at 950 degreesC for 14 h under low As pressure, the Hall mobility decreases and the resistivity increases dramatically for the samples. These changes in electrical properties are due to the generation of intrinsic acceptor defects, and the generation of the intrinsic acceptor defects originates from the outdiffusion of As interstitial at high temperature. The generation of the intrinsic defects and these changes in electrical properties can be suppressed by increasing the applied As pressure during annealing. The concentration of the main donor defect E12 (AsGaVGa) can be decreased by about one order of magnitude by an evacuated annealing at 1120 degreesC for 2-8 h followed by a fast cooling. The decrease in E12 concentration can also be suppressed by increasing the As pressure during annealing.展开更多
Undoped (ND) semi-insulating (SI) liquid encapsulated Czochralski (LEC) GaAscrystals were investigated by photocurrent and temperature-dependent Hall measurements. It isindicated that strong nonuniformities in the dis...Undoped (ND) semi-insulating (SI) liquid encapsulated Czochralski (LEC) GaAscrystals were investigated by photocurrent and temperature-dependent Hall measurements. It isindicated that strong nonuniformities in the distributions of impurities and defects can occur forthe NDSILEC GaAs crystal grown under a condition with strong constitutional supercooling. In suchcase, the deep level that dominates Fermi level is spacial location dependent, and the GaAs crystalbecomes a composite consisting of a large number of elementary domains with differentconductivities. The sub-bandgap photocurrent response and the carrier transport properties for thiskind of composite are quite different from those for homogeneous NDSILEC GaAs.展开更多
GaAs single crystal has been grown in recoverable satellite. Hall measurements indicate that the GaAs shows semi-insulating behavior. The structural properties of the crystal have been improved obviously, and their un...GaAs single crystal has been grown in recoverable satellite. Hall measurements indicate that the GaAs shows semi-insulating behavior. The structural properties of the crystal have been improved obviously, and their uniformity has been improved as well. The stoichiometry and its distribution in space-grown GaAs are improved greatly compared with the GaAs single crystal grown terrestrially. The properties of integrated circuits made by direct ion-implantation on space-grown GaAs are better than those made on ground-grown materials. These results show that the stoichiometry in semi-insulating GaAs seriously affects the properties of related devices.展开更多
文摘We demonstrate high-performance In0.23 Ga0.77 As channel metal-oxide-semiconductor field-effect transistors （ MOS- FETs） with high on-current to off-current （Ion/Ioff） ratio grown on semi-insulating GaAs wafers by metal-organic chemical vapor deposition （MOCVD）. The 2μm channel-length devices exhibit a peak extrinsic transeonductance of 150 mS/mm and a drain current up to 500 mA/mm. The maximum effective mobility is 1680 cm2/Vs extracted by the split C-V method. Furthermore, the Ion/Ioff ratio is significantly improved from approximately 4.5 × 10^3 up to approximately 4.32 × 10^4 by controlling the etch thickness of In0.49Ga0.51P, The high drain current and high Ion/Ioff ratio of the In0.23Ga0.77As channel MOSFETs are achieved due to the high effective mobility and the low gate leakage current density.
文摘The microprecipitates in the as-grown undoped and In-doped semi-insulating GaAs single crystals have been ex- amined by JEM 200 CX transmission electron microscope.The microprecipitates consist of GaAs polycrystalline grains of 5～100nm in size have been evidenced in dislocated crystals.Energy dispersive X-ray analysis shows that the mieropreeipitates are predominately arsenic-rich GaAs.The As/Ga atomic ratio of the microprecipitates in In-doped crystal is higher than that of undoped crystal.It is suggested that the formation of the microprecipitates may be induced by the local fluctuation of compositional undercooling during crystal growth.
文摘It has advantages of accuracy, rapidity and non-destruction that EL2 distribution in semi-insulating LECGaAs crystal has been measured by near infrared absorption method with a high spatial resolution. Now EL2defect existed in all wafer is directly observed by 1 .0972 μm and 2 μm absorption curves obtained from a suc-cessive and automatical horizontal scan across the different bands parallelly ranged with tbe diameter of asemi-insulating GaAs wafer. Not only EL2 distribution across the wafer corresponding with that of dislocationdensities has been indicated but also the fine structure found.
基金supported by the Air Force Office of Scientific Research (Grant No. FA9550-10-1-0136)NASA (Grant No. 242026-1BBX11AQ36A)+1 种基金supported by a University of Arkansas Honors College Undergraduate Research grantthe Microelectronics–Photonics program at the University of Arkansas for the COMSOL license
文摘Metal-semiconductor-metal photodetectors on semi-insulating Ga As with interdigital electrodes showed significant enhancement in the spectral response in the near-infrared region as the electrode spacing is reduced. The photocurrent for the device with 5 μm interdigital spacing is five orders of magnitude higher than the dark current, and the room temperature detectivity is on the order of 2.4 × 1012cm Hz1∕2W-1at 5 V bias. Furthermore,the spectral response of this device possesses strong dependence on the polarization of incident light showing potential plasmonic effects with only microscale dimensions. These experimental data were analyzed using optical simulation to confirm the response of the devices.
文摘Annealing was carried out at 950 and 1120 degreesC under various As pressure for undoped (ND) semi-insulating (SI) LECGaAs. The effects of annealing on native defects and electrical properties were investigated. Experimental results indicate that, after an annealing at 950 degreesC for 14 h under low As pressure, the Hall mobility decreases and the resistivity increases dramatically for the samples. These changes in electrical properties are due to the generation of intrinsic acceptor defects, and the generation of the intrinsic acceptor defects originates from the outdiffusion of As interstitial at high temperature. The generation of the intrinsic defects and these changes in electrical properties can be suppressed by increasing the applied As pressure during annealing. The concentration of the main donor defect E12 (AsGaVGa) can be decreased by about one order of magnitude by an evacuated annealing at 1120 degreesC for 2-8 h followed by a fast cooling. The decrease in E12 concentration can also be suppressed by increasing the As pressure during annealing.
基金This work was financially supported by the Natural Science Foundation of Tianjin (No. 02380411)the Natural Science Foundation of Hebei Province (No. 601048)
文摘Undoped (ND) semi-insulating (SI) liquid encapsulated Czochralski (LEC) GaAscrystals were investigated by photocurrent and temperature-dependent Hall measurements. It isindicated that strong nonuniformities in the distributions of impurities and defects can occur forthe NDSILEC GaAs crystal grown under a condition with strong constitutional supercooling. In suchcase, the deep level that dominates Fermi level is spacial location dependent, and the GaAs crystalbecomes a composite consisting of a large number of elementary domains with differentconductivities. The sub-bandgap photocurrent response and the carrier transport properties for thiskind of composite are quite different from those for homogeneous NDSILEC GaAs.
文摘GaAs single crystal has been grown in recoverable satellite. Hall measurements indicate that the GaAs shows semi-insulating behavior. The structural properties of the crystal have been improved obviously, and their uniformity has been improved as well. The stoichiometry and its distribution in space-grown GaAs are improved greatly compared with the GaAs single crystal grown terrestrially. The properties of integrated circuits made by direct ion-implantation on space-grown GaAs are better than those made on ground-grown materials. These results show that the stoichiometry in semi-insulating GaAs seriously affects the properties of related devices.
