The problem of maximizing the throughput of Semiconductor Wafer Fabrication Systems is addressed.We model the fabrication systems as a Stochastic Timed Automata and design a discrete-event simulation scheme.The simula...The problem of maximizing the throughput of Semiconductor Wafer Fabrication Systems is addressed.We model the fabrication systems as a Stochastic Timed Automata and design a discrete-event simulation scheme.The simulation scheme is explicit,fast and achieves high fidelity which captures the feature of reentrant process flow and is flexible to accommodate diversified wafer lot scheduling policies.A series of Marginal Machine Allocation Algorithms are proposed to sequentially allocate machines.Numerical experiments suggest the designed methods are efficient to find good allocation solutions.展开更多
基金supported in partial by the National Natural Science Foundation of China(NSFC)under Grant No.U2268209。
文摘The problem of maximizing the throughput of Semiconductor Wafer Fabrication Systems is addressed.We model the fabrication systems as a Stochastic Timed Automata and design a discrete-event simulation scheme.The simulation scheme is explicit,fast and achieves high fidelity which captures the feature of reentrant process flow and is flexible to accommodate diversified wafer lot scheduling policies.A series of Marginal Machine Allocation Algorithms are proposed to sequentially allocate machines.Numerical experiments suggest the designed methods are efficient to find good allocation solutions.
