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Fabrication and adhesion of hierarchical micro-seta 被引量:1
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作者 ZHANG Hao WU LianWei +2 位作者 JIA ShiXing GUO DongJie DAI ZhenDong 《Chinese Science Bulletin》 SCIE CAS 2012年第11期1343-1349,共7页
Spark-erosion perforating technology was used to fabricate a Cu-based template characterized by pores with radius of 0.5 mm inclined at 75°. A commercial silicone elastomer of poly(dimethylsiloxane) (PDMS) with a... Spark-erosion perforating technology was used to fabricate a Cu-based template characterized by pores with radius of 0.5 mm inclined at 75°. A commercial silicone elastomer of poly(dimethylsiloxane) (PDMS) with a rich Si-H content was used to produce an inclined array of primary setae. The technique of argon ion plasma etching on crystalline silicon was used to fabricate negative templates with radii of 5, 10, and 20 μm. The Si-H rich PDMS was used to cast three types of fine array templates, which acted as the secondary setae. A vinyl-rich PDMS precursor was used to bind the primary and secondary setae by a hydrosilylation reaction, thus allowing the formation of three different hierarchical arrangements of setae. Adhesion tests demonstrated that shear adhesion was anisotropic, first increasing in strength then decreasing to a stable level as slippage occurred. The adhesion strength was significantly influenced by the nature of the secondary setae, showing a strong correlation with aspect-ratio and concentration. 展开更多
关键词 刚毛 粘附 制造 聚二甲基硅氧烷 PDMS 粘合强度 硅氢化反应 射孔技术
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