The sheath criterion for an electronegative plasma composed of hot electrons,hot negative ions and cold positive ions in an oblique magnetic field is investigated.We discuss the effects of negative ions and external m...The sheath criterion for an electronegative plasma composed of hot electrons,hot negative ions and cold positive ions in an oblique magnetic field is investigated.We discuss the effects of negative ions and external magnetic field on the sheath criterion.We find that the ion Mach number is of relatively low value because of Coulomb attraction between positive and negative ions.Also the ion Mach number depends on the magnitude and the angle of the magnetic field as well as the initial velocity of ion flow.展开更多
The sheaths of a plasma containing two species of positive ion generated in a low pressure discharge （- mTorr） are studied using a fluid model. It is shown analytically that for the weakly collisional presheath, as ...The sheaths of a plasma containing two species of positive ion generated in a low pressure discharge （- mTorr） are studied using a fluid model. It is shown analytically that for the weakly collisional presheath, as long as the ion-ion streaming instability is absent, each ion species enters the sheath satisfying each individual Bohm criterion. The fluid equations of electrons and ions, including the time derivative terms, are solved numerically to follow the temporal evolution of the plasma and sheath. Our numerical results show that in the parameter range explored, the ion-ion streaming instability is not observed, and each ion species has its own Bohm criterion independent of the relative concentrations of the two ion species. In addition, the RF sheath is studied numerically and the similar conclusion is drawn.展开更多
A hydrodynamic model is used to investigate the characteristics of positive ions in the sheath region of a low-pressure magnetized electronegative discharge. Positive ions are modeled as a cold fluid, while the electr...A hydrodynamic model is used to investigate the characteristics of positive ions in the sheath region of a low-pressure magnetized electronegative discharge. Positive ions are modeled as a cold fluid, while the electron and negative ion density distributions obey the Boltzmann distribution with two different temperatures. By taking into account the ion-neutral collision effect in the sheath region and assuming that the momentum transfer cross section has a power law dependence on the velocity of positive ions, the sheath formation criterion （modified Bohm＇s criterion） is derived and it is shown that there are specified maximum and minimum limits for the ion Mach number M. Considering these two limits of M, the behaviors of electrostatic potential, charged particle density distributions and positive ion velocities in the sheath region are studied for different values of ion-neutral collision frequency.展开更多
The sheath structures of strongly electronegative plasmas are investigated on basis of the accurate Bohm criterion obtained by Sagdeev potential. It is found that the presheath transition between the bulk plasma and t...The sheath structures of strongly electronegative plasmas are investigated on basis of the accurate Bohm criterion obtained by Sagdeev potential. It is found that the presheath transition between the bulk plasma and the sheath almost does not exist there, and that distributions of electrons, negative and positive ions in the sheath form a pure positive ion sheath near the boundary of the electrode. Furthermore, the density distribution of space net charge has a peak near the sheath edge, the spatial potential within the sheath falls faster, and the sheath thickness becomes thinner.展开更多
The characteristics of dust plasma sheath in an oblique magnetic field are investigated with a fluid model. Hot electrons, cold ions, neutral particles, and dust grains are taken into account in this system. We perfor...The characteristics of dust plasma sheath in an oblique magnetic field are investigated with a fluid model. Hot electrons, cold ions, neutral particles, and dust grains are taken into account in this system. We perform a numerical simulation of the sheath. The results reveal that the magnetic field has significant effects on the sheath structure, and it also makes the suspension position of dust shift away from the wall.展开更多
A hydrodynamic model is used to investigate the properties of positive space-charge and net current density in the sheath region of magnetized, collisional plasmas with warm positive ions. It is shown that an increase...A hydrodynamic model is used to investigate the properties of positive space-charge and net current density in the sheath region of magnetized, collisional plasmas with warm positive ions. It is shown that an increase in the ion-neutral collision frequency, as well as the magnitude of the external magnetic field, leads to an increase in the net current density across the sheath region. The results also show that the accumulation of positive ions in the sheath region increases by increasing the ion-neutral collision frequency and the magnitude of the magnetic field. In addition, it is seen that an increase in the positive ion temperatures causes a decrease in the accumulation of positive ions and the net current density in the sheath region.展开更多
基金supported by National Natural Science Foundation of China(Nos.11005015,51002017)Program Funded by Liaoning Province Education Administration(No.L2011069)
文摘The sheath criterion for an electronegative plasma composed of hot electrons,hot negative ions and cold positive ions in an oblique magnetic field is investigated.We discuss the effects of negative ions and external magnetic field on the sheath criterion.We find that the ion Mach number is of relatively low value because of Coulomb attraction between positive and negative ions.Also the ion Mach number depends on the magnitude and the angle of the magnetic field as well as the initial velocity of ion flow.
文摘The sheaths of a plasma containing two species of positive ion generated in a low pressure discharge （- mTorr） are studied using a fluid model. It is shown analytically that for the weakly collisional presheath, as long as the ion-ion streaming instability is absent, each ion species enters the sheath satisfying each individual Bohm criterion. The fluid equations of electrons and ions, including the time derivative terms, are solved numerically to follow the temporal evolution of the plasma and sheath. Our numerical results show that in the parameter range explored, the ion-ion streaming instability is not observed, and each ion species has its own Bohm criterion independent of the relative concentrations of the two ion species. In addition, the RF sheath is studied numerically and the similar conclusion is drawn.
文摘A hydrodynamic model is used to investigate the characteristics of positive ions in the sheath region of a low-pressure magnetized electronegative discharge. Positive ions are modeled as a cold fluid, while the electron and negative ion density distributions obey the Boltzmann distribution with two different temperatures. By taking into account the ion-neutral collision effect in the sheath region and assuming that the momentum transfer cross section has a power law dependence on the velocity of positive ions, the sheath formation criterion （modified Bohm＇s criterion） is derived and it is shown that there are specified maximum and minimum limits for the ion Mach number M. Considering these two limits of M, the behaviors of electrostatic potential, charged particle density distributions and positive ion velocities in the sheath region are studied for different values of ion-neutral collision frequency.
文摘The sheath structures of strongly electronegative plasmas are investigated on basis of the accurate Bohm criterion obtained by Sagdeev potential. It is found that the presheath transition between the bulk plasma and the sheath almost does not exist there, and that distributions of electrons, negative and positive ions in the sheath form a pure positive ion sheath near the boundary of the electrode. Furthermore, the density distribution of space net charge has a peak near the sheath edge, the spatial potential within the sheath falls faster, and the sheath thickness becomes thinner.
文摘The characteristics of dust plasma sheath in an oblique magnetic field are investigated with a fluid model. Hot electrons, cold ions, neutral particles, and dust grains are taken into account in this system. We perform a numerical simulation of the sheath. The results reveal that the magnetic field has significant effects on the sheath structure, and it also makes the suspension position of dust shift away from the wall.
文摘A hydrodynamic model is used to investigate the properties of positive space-charge and net current density in the sheath region of magnetized, collisional plasmas with warm positive ions. It is shown that an increase in the ion-neutral collision frequency, as well as the magnitude of the external magnetic field, leads to an increase in the net current density across the sheath region. The results also show that the accumulation of positive ions in the sheath region increases by increasing the ion-neutral collision frequency and the magnitude of the magnetic field. In addition, it is seen that an increase in the positive ion temperatures causes a decrease in the accumulation of positive ions and the net current density in the sheath region.
