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背面Ar^+轰击对n-MOSFET低频噪声的影响 被引量:1
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作者 黄美浅 李观启 +1 位作者 李斌 曾绍鸿 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第3期307-311,共5页
研究了低能量背面Ar+轰击对n沟MOSFET低频噪声的影响 .用低能量 ( 5 5 0eV)的氩离子束轰击n沟MOSFET芯片的背面 ,能改善其饱和区和线性区的低频噪声频谱密度 .饱和区低频噪声的减小可用载流子迁移率模型解释 ,而线性区低频噪声的减小可... 研究了低能量背面Ar+轰击对n沟MOSFET低频噪声的影响 .用低能量 ( 5 5 0eV)的氩离子束轰击n沟MOSFET芯片的背面 ,能改善其饱和区和线性区的低频噪声频谱密度 .饱和区低频噪声的减小可用载流子迁移率模型解释 ,而线性区低频噪声的减小可用载流子数模型解释 ;其变化的原因可能与氩离子束背面轰击后反型层电子的有效迁移率、二氧化硅中的固定电荷密度以及硅 二氧化硅界面的界面态密度的变化有关 . 展开更多
关键词 n-mosfet 背面Ar^+轰击 低频噪声 迁移率 界面态
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超薄栅n-MOSFETs热载流子寿命预测模型
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作者 穆甫臣 许铭真 +1 位作者 谭长华 段小蓉 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第10期1306-1309,共4页
对氧化层厚度为 4和 5 nm的 n- MOSFETs进行了沟道热载流子应力加速寿命实验 ,研究了饱和漏电流在热载流子应力下的退化 .在饱和漏电流退化特性的基础上提出了电子流量模型 ,此模型适用于氧化层厚度为 4— 5
关键词 热载流子效应 n-mosfet 寿命预测 场效应晶体管
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热载流子应力感应n-MOSFETsGIDL特性退化的机理
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作者 徐静平 黎沛涛 《Journal of Semiconductors》 EI CAS CSCD 北大核心 1999年第12期1087-1092,共6页
对不同栅氧化物n-MOSFETs 的GIDL(Gate-Induced Drain Leakage)特性在不同热载流子应力下的退化行为进行了研究.发现GIDL的漂移对栅电压十分敏感,在VG= 0.5VD 的应力条件下呈现... 对不同栅氧化物n-MOSFETs 的GIDL(Gate-Induced Drain Leakage)特性在不同热载流子应力下的退化行为进行了研究.发现GIDL的漂移对栅电压十分敏感,在VG= 0.5VD 的应力条件下呈现最大.通过对漏极附近二维电场及载流子分布的模拟,引入“亚界面陷阱”概念,对所涉及的机理提出了新见解,认为:在应力期间,亚界面和体氧化物空穴陷阱的解陷分别相应于VG= 0.5VD 和VG= VD 两种典型应力下GIDL的漂移.实验还观察到N2O氮化,特别是N2O 退火NH3 氮化的n-MOSFETs比常规热氧化n-MOSFETs 有小得多的GIDL漂移,表明这种氮化氧化物能大大抑制亚界面和体空穴陷阱. 展开更多
关键词 n-mosfetS GIDL 热载流子应力 退化
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1/f~γ Noise Characteristics of an n-MOSFET Under DC Hot Carrier Stress
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作者 刘宇安 余晓光 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第7期1263-1267,共5页
The 1/fγ noise characteristic parameter Sfγ model in an n-MOSFET under DC hot carrier stress is studied. A method characterizing the MOSFET abilities of an anti-hot carrier with noise parameter Sfγ is presented. Th... The 1/fγ noise characteristic parameter Sfγ model in an n-MOSFET under DC hot carrier stress is studied. A method characterizing the MOSFET abilities of an anti-hot carrier with noise parameter Sfγ is presented. The hot carrier degradation effect of n-MOSFET in high-,mid-,and low gate stresses and its 1/fγ noise feature are studied. Experimental results agree well with the developed model. 展开更多
关键词 n-mosfet hot carrier 1/fγ noise
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Investigation of short-channel design on performance optimization effect of Hall thruster with large height–radius ratio 被引量:1
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作者 Haotian FAN Yongjie DING +3 位作者 Chunjin MO Liqiu WEI Hong LI Daren YU 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第2期1-9,共9页
In this study,the neutral gas distribution and steady-state discharge under different discharge channel lengths were studied via numerical simulations.The results show that the channel with a length of 22 mm has the a... In this study,the neutral gas distribution and steady-state discharge under different discharge channel lengths were studied via numerical simulations.The results show that the channel with a length of 22 mm has the advantage of comprehensive discharge performance.At this time,the magnetic field intensity at the anode surface is 10%of the peak magnetic field intensity.Further analysis shows that the high-gas-density zone moves outward due to the shortening of the channel length,which optimizes the matching between the gas flow field and the magnetic field,and thus increases the ionization rate.The outward movement of the main ionization zone also reduces the ion loss on the wall surface.Thus,the propellant utilization efficiency can reach a maximum of 96.8%.Moreover,the plasma potential in the main ionization zone will decrease with the shortening of the channel.The excessively short-channel will greatly reduce the voltage utilization efficiency.The thrust is reduced to a minimum of 46.1 m N.Meanwhile,because the anode surface is excessively close to the main ionization zone,the discharge reliability is also difficult to guarantee.It was proved that the performance of Hall thrusters can be optimized by shortening the discharge channel appropriately,and the specific design scheme of short-channel of HEP-1350 PM was defined,which serves as a reference for the optimization design of Hall thruster with large height–radius ratio.The shortchannel design also helps to reduce the thruster axial dimension,further consolidating the advantages of lightweight and large thrust-to-weight ratio of the Hall thruster with large height–radius ratio. 展开更多
关键词 Hall thruster large height-radius ratio short-channel design discharge performance numerical simulation
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Utilizing a shallow trench isolation parasitic transistor to characterize the total ionizing dose effect of partially-depleted silicon-on-insulator input/output n-MOSFETs 被引量:1
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作者 彭超 胡志远 +5 位作者 宁冰旭 黄辉祥 樊双 张正选 毕大炜 恩云飞 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期154-160,共7页
we investigate the effects of 60^Co γ-ray irradiation on the 130 nm partially-depleted silicon-on-isolator (PDSOI) input/output (I/O) n-MOSFETs. A shallow trench isolation (STI) parasitic transistor is responsi... we investigate the effects of 60^Co γ-ray irradiation on the 130 nm partially-depleted silicon-on-isolator (PDSOI) input/output (I/O) n-MOSFETs. A shallow trench isolation (STI) parasitic transistor is responsible for the observed hump in the back-gate transfer characteristic curve. The STI parasitic transistor, in which the trench oxide acts as the gate oxide, is sensitive to the radiation, and it introduces a new way to characterize the total ionizing dose (TID) responses in the STI oxide. A radiation enhanced drain induced barrier lower (DIBL) effect is observed in the STI parasitic transistor. It is manifested as the drain bias dependence of the radiation-induced off-state leakage and the increase of the DIBL parameter in the STI parasitic transistor after irradiation. Increasing the doping concentration in the whole body region or just near the STI sidewall can increase the threshold voltage of the STI parasitic transistor, and further reduce the radiation-induced off-state leakage. Moreover, we find that the radiation-induced trapped charge in the buried oxide leads to an obvious front-gate threshold voltage shift through the coupling effect. The high doping concentration in the body can effectively suppress the radiation-induced coupling effect. 展开更多
关键词 partially depleted silicon-on-isolator n-mosfet sidewall implant shallow trench isolation totalionizing dose
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New aspects of HCI test for ultra-short channel n-MOSFET devices
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作者 马晓华 郝跃 +2 位作者 王剑屏 曹艳荣 陈海峰 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第11期2742-2745,共4页
Hot carriers injection (HCI) tests for ultra-short channel n-MOSFET devices were studied. The experimental data of short channel devices (75-90 nm), which does not fit formal degradation power law well, will bring... Hot carriers injection (HCI) tests for ultra-short channel n-MOSFET devices were studied. The experimental data of short channel devices (75-90 nm), which does not fit formal degradation power law well, will bring severe error in lifetime prediction. This phenomenon usually happens under high drain voltage (Vd) stress condition. A new model was presented to fit the degradation curve better. It was observed that the peak of the substrate current under low drain voltage stress cannot be found in ultra-short channel device. Devices with different channel lengths were studied under different Vd stresses in order to understand the relations between peak of substrate current (/sub) and channel length/stress voltage. 展开更多
关键词 HCI n-mosfet short channel
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带超薄HfO2栅介质和多晶硅栅的n-MOSFET的热载流子可靠性
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《电子产品可靠性与环境试验》 2003年第6期70-70,共1页
关键词 超薄HfO2栅介质 多晶硅栅 n-mosfet 热载流子 可靠性
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FDS3572:N-MOSFET
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《世界电子元器件》 2005年第1期42-42,共1页
飞兆半导体公司日前推出具有组合性能优势的SO-8封装的80V N沟道MOSFET FDS3572,它能在DC/DC转换器初级边和同步整流开关电源次级边设计中提供良好的系统整体效率。FDS3572的米勒电荷(Qgd)为7.5nnC,比有相似Rds(on)额定数值的产品要... 飞兆半导体公司日前推出具有组合性能优势的SO-8封装的80V N沟道MOSFET FDS3572,它能在DC/DC转换器初级边和同步整流开关电源次级边设计中提供良好的系统整体效率。FDS3572的米勒电荷(Qgd)为7.5nnC,比有相似Rds(on)额定数值的产品要低38%。该器件的低米勒电荷和低导通电阻Rds(on)(16mΩ)降低了噪音(FOM=Rds(on)×Qgd)。 展开更多
关键词 n-mosfet SO-8封装 开关电源 N沟道 飞兆半导体公司 低导通电阻 FOM 体效率 FDS 产品
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Ar+背面轰击对SiOxNy栅介质的n—MOSFET迁移率和跨导的影响 被引量:5
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作者 李观启 黄美浅 +1 位作者 曾绍鸿 曾旭 《Journal of Semiconductors》 EI CAS CSCD 北大核心 1996年第10期775-779,共5页
用低能量氩离子束轰击芯片背面,能改善以热氮化和快速热氮化SiOxNy为栅介质的n沟MOSFET的特性.结果表明,在能量为550eV和束流密度为0.5mA/cm2时,随着轰击时间的增加,跨导、沟道电导和有效迁移率增大,... 用低能量氩离子束轰击芯片背面,能改善以热氮化和快速热氮化SiOxNy为栅介质的n沟MOSFET的特性.结果表明,在能量为550eV和束流密度为0.5mA/cm2时,随着轰击时间的增加,跨导、沟道电导和有效迁移率增大,然后这些变化趋于减缓,甚至开始呈恶化趋势.快速热氮化SiOxNy为介质的MOSFET的改善效果要比常规热氮化的好.实验证明,上述参数的改善是由于界面态密度和固定电荷密度减小的结果.文中利用杂质吸除和应力补偿的机理进行分析. 展开更多
关键词 氩离子轰击 SiOxNy栅介质 n-mosfet 迁移率 跨导
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用于电路模拟的4H-SiC MOSFET高温沟道电子迁移率模型
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作者 戴振清 杨瑞霞 杨克武 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第8期1252-1255,共4页
提出了适用于电路模拟的4H-SiCn-MOSFET高温沟道电子迁移率模型.在新模型中,引入了横向有效电场和表面粗糙散射的温度依赖性,电子饱和漂移速度与横向有效电场和温度的关系,以及改进的界面陷阱电荷和固定氧化物电荷库仑散射模型等因素.... 提出了适用于电路模拟的4H-SiCn-MOSFET高温沟道电子迁移率模型.在新模型中,引入了横向有效电场和表面粗糙散射的温度依赖性,电子饱和漂移速度与横向有效电场和温度的关系,以及改进的界面陷阱电荷和固定氧化物电荷库仑散射模型等因素.采用与温度-阈值电压实验曲线拟合的方法,确定了界面态参数和固定氧化物电荷.基于新迁移率模型的模拟结果与实验吻合. 展开更多
关键词 4H-SIC n-mosfet 阈值电压 界面态参数 高温迁移率
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短沟道MOSFET器件特性的理论研究
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作者 薛严冰 李晖 《大连铁道学院学报》 2005年第2期56-59,共4页
通过求解泊松方程,从沟道长度调制效应、阈值电压变化及源极同沟道间的势垒变化三个方面详细分析了短沟道MOSFET的器件特性.给出了在短沟道下,描述上述三个参量的数学表达式,为短沟道MOSFET器件的结构设计提供了理论依据.
关键词 短沟道 N沟道MOSFET 阈值电压 势垒
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The Bipolar Field-Effect Transistor:Ⅳ.Short Channel Drift-Diffusion Current Theory(Two-MOS-Gates on Pure-Base)
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作者 揭斌斌 薩支唐 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第2期193-200,共8页
This paper gives the short channel analytical theory of the bipolar field-effect transistor (BiFET) with the drift and diffusion currents separately computed in the analytical theory. As in the last-month paper whic... This paper gives the short channel analytical theory of the bipolar field-effect transistor (BiFET) with the drift and diffusion currents separately computed in the analytical theory. As in the last-month paper which represented the drift and diffusion current by the single electrochemical (potential-gradient) current, the two-dimensional transistor is partitioned into two sections, the source and drain sections, each can operate as the electron or hole emitter or collector under specific combinations of applied terminal voltages. Analytical solution is then obtained in the source and drain sections by separating the two-dimensional trap-free Shockley Equations into two one-dimensional equations parametrically coupled via the surface-electric-potential and by using electron current continuity and hole current continuity at the boundary between the emitter and collector sections. Total and the drift and diffusion components of the electron-channel and hole-channel currents and output and transfer conductances, and the electrical lengths of the two sections are computed and presented in graphs as a function of the D. C. terminal voltages for the model transistor with two identical and connected metal-oxide-silicon-gates (MOS-gates) on a thin pure-silicon base over practical ranges of thicknesses of the silicon base and gate oxide. Deviations of the two-section short-channel theory from the one-section long-channel theory are described. 展开更多
关键词 bipolar field-effect transistor theory MOS field-effect transistor simultaneous electron and hole surface and volume channels surface potential two-section short-channel theory double-gate pure-base
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The Theory of Field-Effect Transistors:XI. The Bipolar Electrochemical Currents(1-2-MOS-Gates on Thin-Thick Pure-Impure Base)
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作者 薩支唐 揭斌斌 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第3期397-409,共13页
The field-effect transistor is inherently bipolar, having simultaneously electron and hole surface and volume channels and currents. The channels and currents are controlled by one or more externally applied transvers... The field-effect transistor is inherently bipolar, having simultaneously electron and hole surface and volume channels and currents. The channels and currents are controlled by one or more externally applied transverse electric fields. It has been known as the unipolar field-effect transistor for 55-years since Shockley's 1952 invention,because the electron-current theory inevitably neglected the hole current from over-specified internal and boundary conditions, such as the electrical neutrality and the constant hole-electrochemical-potential, resulting in erroneous solutions of the internal and terminal electrical characteristics from the electron channel current alone, which are in gross error when the neglected hole current becomes comparable to the electron current, both in subthreshold and strong inversion. This report presents the general theory, that includes both electron and hole channels and currents. The rectangular ( x, y, z) parallelepiped transistors,uniform in the width direction (z-axis),with one or two MOS gates on thin and thick,and pure and impure base, are used to illustrate the two-dimensional effects and the correct internal and boundary conditions for the electric and the electron and hole electrochemical potentials. Complete analytical equations of the DC current-voltage characteristics of four common MOS transistor structures are derived without over-specification: the 1-gate on semi-infinite-thick impure-base (the traditional bulk transistor), the 1-gate on thin impure-silicon layer over oxide-insulated silicon bulk (SOI) ,the 1-gate on thin impure-silicon layer deposited on insulating glass (SOI TFT), and the 2-gates on thin pure-base (FinFETs). 展开更多
关键词 bipolar field-effect transistor theory MOS field-effect transistor simultaneous electron and hole surface and volume channels and currents surface potential two-section short-channel theory double-gate impure-base theory
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EPR在体测量专用调制磁场驱动装置 被引量:1
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作者 范凯 郭俊旺 +4 位作者 邹洁芮 丛建波 马蕾 董国福 吴可 《波谱学杂志》 CAS CSCD 北大核心 2017年第3期365-371,共7页
利用电子顺磁共振(electron paramagnetic resonance,EPR)在体测量人牙齿可以实现无损伤地快速评估人体辐射剂量,具有实际应用价值.本文针对EPR在体测量牙齿剂量的应用特点,研制了专用调制磁场驱动装置,包括功率放大器、调制磁场激励线... 利用电子顺磁共振(electron paramagnetic resonance,EPR)在体测量人牙齿可以实现无损伤地快速评估人体辐射剂量,具有实际应用价值.本文针对EPR在体测量牙齿剂量的应用特点,研制了专用调制磁场驱动装置,包括功率放大器、调制磁场激励线圈、调制频率设定模块、感应型调制幅度显示模块等.功率放大器采用脉冲功率放大方式取代传统的线性放大方式,用多N-MOSFET管H桥电路,功率容量大、效率高、结构简单,且调制频率设定自如.实验结果表明:(1)此装置可在大于9 cm磁极间距的中心样品位置产生调制幅度为0~0.9 mT的调制磁场,调制频率为10~100 kHz;(2)用该装置与EPR在体测量谱仪配合使用,可以明显观测到1,1-二苯基-2-三硝基苯肼(1,1-diphenyl-2-picrylhydrazyl,DPPH)样品谱线调制增宽过程以及辐射诱发的整体牙齿中的自由基信号,验证了该装置的高调制效率和实用性. 展开更多
关键词 电子顺磁共振(EPR) 辐射剂量 调制磁场驱动装置 n-mosfet管H桥电路
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离子注入剥离法制备绝缘体上应变硅及其表征
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作者 陆子同 母志强 +4 位作者 薛忠营 刘林杰 陈达 狄增峰 张苗 《半导体技术》 CAS CSCD 北大核心 2014年第7期522-526,558,共6页
基于弛豫锗硅衬底上生长双轴应变硅技术、离子注入工艺以及选择性腐蚀方法,制备了8英寸(1英寸=2.54 cm)双轴张应变的绝缘体上应变硅(sSOI)材料。利用喇曼光谱分析、缺陷优先腐蚀以及透射电子显微镜(TEM)等方法表征了sSOI材料的应变度、... 基于弛豫锗硅衬底上生长双轴应变硅技术、离子注入工艺以及选择性腐蚀方法,制备了8英寸(1英寸=2.54 cm)双轴张应变的绝缘体上应变硅(sSOI)材料。利用喇曼光谱分析、缺陷优先腐蚀以及透射电子显微镜(TEM)等方法表征了sSOI材料的应变度、缺陷密度以及晶体质量;制备了基于sSOI材料的n型金属-氧化层-半导体场效晶体管(n-MOSFET)以表征其电学性能,同时在相同工艺下制备了基于SOI材料的n-MOSFET器件作对比。结果表明,制备的sSOI材料顶层应变硅薄膜的应变为1.01%,并且在800℃热处理后仍能保持;应变硅薄膜厚度为18 nm,缺陷密度为4.0×104cm-2,具有较高的晶体质量;制备的sSOI n-MOSFET器件的开关电流比(Ion/Ioff)达到108,亚阈值斜率为69.31 mV/dec,相比SOI n-MOSFET,其驱动电流提高了10倍。 展开更多
关键词 离子剥离 绝缘体上应变硅 n-mosfet 器件电学性能 电子迁移率
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Fabrication and characterization of groove-gate MOSFETs based on a self-aligned CMOS process 被引量:1
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作者 马晓华 郝跃 +6 位作者 孙宝刚 高海霞 任红霞 张进城 张金凤 张晓菊 张卫东 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第1期195-198,共4页
N and P-channel groove-gate MOSFETs based on a self-aligned CMOS process have been fabricated and characterized. For the devices with channel length of 140nm, the measured drain induced barrier lowering (DIBL) was 6... N and P-channel groove-gate MOSFETs based on a self-aligned CMOS process have been fabricated and characterized. For the devices with channel length of 140nm, the measured drain induced barrier lowering (DIBL) was 66mV/V for n-MOSFETs and 82mV/V for p-MOSFETs. The substrate current of a groove-gate n-MOSFET was 150 times less than that of a conventional planar n-MOSFET, These results demonstrate that groove-gate MOSFETs have excellent capabilities in suppressing short-channel effects. It is worth emphasizing that our groove-gate MOSFET devices are fabricated by using a simple process flow, with the potential of fabricating devices in the sub-100nm range. 展开更多
关键词 SELF-ALIGNED groove-gate MOSFETs DIBL short-channel effects
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Short-gate AlGaN/GaN high-electron mobility transistors with BGaN buffer 被引量:1
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作者 Tie-Cheng Han Hong-Dong Zhao Xiao-Can Peng 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第4期326-331,共6页
Using the semi-insulating property and small lattice constant a of wurtzite BGaN alloy, we propose a BGaN buffer with a B-content of 1% to enhance two-dimensional electron gas(2 DEG) confinement in a short-gate AlGaN/... Using the semi-insulating property and small lattice constant a of wurtzite BGaN alloy, we propose a BGaN buffer with a B-content of 1% to enhance two-dimensional electron gas(2 DEG) confinement in a short-gate AlGaN/GaN highelectron mobility transistor(HEMT). Based on the two-dimensional TCAD simulation, the direct current(DC) and radio frequency(RF) characteristics of the AlGaN/GaN/B_(0.01)Ga_(0.99)N structure HEMTs are theoretically studied. Our results show that the BGaN buffer device achieves good pinch-off quality and improves RF performance compared with GaN buffer device. The BGaN buffer device can allow a good immunity to shift of threshold voltage for the aspect ratio(LG/d)down to 6, which is much lower than that the GaN buffer device with L_G/d=11 can reach. Furthermore, due to a similar manner of enhancing 2 DEG confinement, the B_(0.01)Ga_(0.99)N buffer device has similar DC and RF characteristics to those the AlGaN buffer device possesses, and its ability to control short-channel effects(SCEs) is comparable to that of an Al_(0.03)Ga_(0.97)N buffer. Therefore, this BGaN buffer with very small B-content promises to be a new method to suppress SCEs in GaN HEMTs. 展开更多
关键词 ALGAN/GAN HEMT BGAN back barrier short-channel effects(SCEs)
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Simulation study of InAlN/GaN high-electron mobility transistor with AlInN back barrier 被引量:1
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作者 韩铁成 赵红东 +1 位作者 杨磊 王杨 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第10期433-437,共5页
In this work, we use a 3-nm-thick Al0.64In0.36N back-barrier layer in In0.17Al0.83N/GaN high-electron mobility transistor (HEMT) to enhance electron confinement. Based on two-dimensional device simulations, the infl... In this work, we use a 3-nm-thick Al0.64In0.36N back-barrier layer in In0.17Al0.83N/GaN high-electron mobility transistor (HEMT) to enhance electron confinement. Based on two-dimensional device simulations, the influences of Al0.64In0.36N back-barrier on the direct-current (DC) and radio-frequency (RF) characteristics of InAlN/GaN HEMT are investigated, theoretically. It is shown that an effective conduction band discontinuity of approximately 0.5 eV is created by the 3-nm-thick Al0.64In0.36N back-barrier and no parasitic electron channel is formed. Comparing with the conventional InAlN/GaN HEMT, the electron confinement of the back-barrier HEMT is significantly improved, which allows a good immunity to short-channel effect (SCE) for gate length decreasing down to 60 nm (9-nm top barrier). For a 70-nm gate length, the peak current gain cut-off frequency (fT) and power gain cut-off frequency (fmax) of the back-barrier HEMT are 172 GHz and 217 GHz, respectively, which are higher than those of the conventional HEMT with the same gate length. 展开更多
关键词 InAlN/GaN HEMT back barrier electron confinement short-channel effect (SCE)
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风扇PWM控制方法 被引量:1
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作者 Michael huang 《电子产品世界》 2003年第06B期79-80,共2页
关键词 风扇 PWM控制 脉宽调制 电机转速调节 n-mosfet
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