As an important optical component in laser system,silicon mirror surface is required to have micron-level flatness and subnanometer-level roughness.The research concentrates on how to improve roughness as far as possi...As an important optical component in laser system,silicon mirror surface is required to have micron-level flatness and subnanometer-level roughness.The research concentrates on how to improve roughness as far as possible while maintaining flatness of silicon mirror surface during chemical mechanical polishing(CMP)process.A polishing edge effect model is established to explain the reason of flatness deterioration,and a roughness theoretical model is set up to get the limit of perfect surface roughness.Based on the models above,a polishing device is designed to maintain the surface flatness,and the optimized polishing process parameters are obtained by orthogonal tests to get a near-perfect surface roughness.Finally the maintenance of flatness and the improvement of roughness can be achieved at the same time in one step of CMP process.This work can be a guide for silicon mirror manufacture to improve optical reflection performance significantly.展开更多
According to the design requirement and on the basis of the principle that the thermal expansion coefficient of the support structure should match with that of the mirror, a lightweight silicon carbide primary mirror ...According to the design requirement and on the basis of the principle that the thermal expansion coefficient of the support structure should match with that of the mirror, a lightweight silicon carbide primary mirror assembly was designed. Finite element analysis combined with the parameter-optimized method was used during the design. Lightweight cell and rigid rib structure were used for the mirror assembly. The static, dynamic and thermal properties of the primary mirror assembly were analyzed. It is shown that after optimization, the lightweight ratio of the silicon carbide mirror is 52.5%, and the rigidity of the silicon carbide structure is high enough to support the required mirror. When temperature changes, the deformation of the mirror surface is in proportion to the temperature difference.展开更多
To reduce the mass of the mirror,silicon carbide was used as the material and four light-mass structures were designed. The properties of SiC mirror open back structure with triangular cell,open back structure with he...To reduce the mass of the mirror,silicon carbide was used as the material and four light-mass structures were designed. The properties of SiC mirror open back structure with triangular cell,open back structure with hexagonal cell,sandwich structure with triangular cell,sandwich structure with hexagonal cell,were analyzed by using finite element method. The results of the static,dynamic,and thermal properties of the four kinds of SiC mirror indicate that the surface figures of the SiC mirrors are all satisfactory with the design requirements. The properties of the mirrors with sandwich structure are better than those with open back structure,except the high cost. And the mirror with triangular cell has better combination properties than the mirror with hexagonal cell. Considering the overall performance and the cost,open back structure with triangular cell is the most suitable for the SiC mirror.展开更多
Primary mirror is one of the key components in the space remote sensing system. To minimize the mass of the mirror without compromising its stiffness and decrease the deformation of the mirror surface at the different...Primary mirror is one of the key components in the space remote sensing system. To minimize the mass of the mirror without compromising its stiffness and decrease the deformation of the mirror surface at the different temperatures are the mainly two objects in the development of the primary mirror. Silicon carbide (SiC), the most promising optical material, was used as the material of the primary mirror with triangle lightmass structure in a Cassegrain system. By using finite element method, the properties of the SiC mirror were compared with that of the traditional Be mirror and fused silica mirror. The results of static, dynamic and thermo-mechanical analysis indicate that the deformation of the mirror surface caused by temperature field is much bigger than that caused by gravity field. The SiC mirror has the best overall properties, and the SiC material is much suitable for the primary mirror.展开更多
Based on the principle that the thermal expansion coefficient of the support structure should match that of the mirror, three schemes of primary mirror assembly were designed. Of them, the first is fused silica mirror...Based on the principle that the thermal expansion coefficient of the support structure should match that of the mirror, three schemes of primary mirror assembly were designed. Of them, the first is fused silica mirror plus 4J32 flexible support plus ZTC4 support back plate, the second K9 mirror plus 4J45 flexible support plus ZTC4 support back plate, and the third SiC mirror plus SiC rigid support back plate. A coupled thermo-mechanical analysis of the three primary mirror assemblies was made with finite element method. The results show that the SiC assembly is the best of all schemes in terms of their combination properties due to its elimination of the thermal expansion mismatch between the materials. The analytical results on the cryogenic property of the SiC primary mirror assembly show a higher surface finish of the SiC mirror even under the cryogenic condition.展开更多
The electrical performance of a photovoltaic (PV) silicon solar cell is described by its current–voltage (I–V) character-istic curve, which is in turn determined by device and material properties. In this study, an ...The electrical performance of a photovoltaic (PV) silicon solar cell is described by its current–voltage (I–V) character-istic curve, which is in turn determined by device and material properties. In this study, an investigation of the performance and device parameters of photovoltaic single crystalline silicon (Si.) solar cell of the construction n+pp++ PESC(Passivatted Emitter Solar Cell) at different conditions of solar irradiance, title angle and mirror boosting effects had been studied. Also the paper reports on the performance data of the Si. cell, using standard I–V characteristic curves to obtain output parameters and to show that there are possible performance degrading defects presents.展开更多
基金supported by the National Basic Research Program of China(Grant No.2015CB057203)the National Natural Science Foundation of China(Grant No.91323302)
文摘As an important optical component in laser system,silicon mirror surface is required to have micron-level flatness and subnanometer-level roughness.The research concentrates on how to improve roughness as far as possible while maintaining flatness of silicon mirror surface during chemical mechanical polishing(CMP)process.A polishing edge effect model is established to explain the reason of flatness deterioration,and a roughness theoretical model is set up to get the limit of perfect surface roughness.Based on the models above,a polishing device is designed to maintain the surface flatness,and the optimized polishing process parameters are obtained by orthogonal tests to get a near-perfect surface roughness.Finally the maintenance of flatness and the improvement of roughness can be achieved at the same time in one step of CMP process.This work can be a guide for silicon mirror manufacture to improve optical reflection performance significantly.
文摘According to the design requirement and on the basis of the principle that the thermal expansion coefficient of the support structure should match with that of the mirror, a lightweight silicon carbide primary mirror assembly was designed. Finite element analysis combined with the parameter-optimized method was used during the design. Lightweight cell and rigid rib structure were used for the mirror assembly. The static, dynamic and thermal properties of the primary mirror assembly were analyzed. It is shown that after optimization, the lightweight ratio of the silicon carbide mirror is 52.5%, and the rigidity of the silicon carbide structure is high enough to support the required mirror. When temperature changes, the deformation of the mirror surface is in proportion to the temperature difference.
文摘To reduce the mass of the mirror,silicon carbide was used as the material and four light-mass structures were designed. The properties of SiC mirror open back structure with triangular cell,open back structure with hexagonal cell,sandwich structure with triangular cell,sandwich structure with hexagonal cell,were analyzed by using finite element method. The results of the static,dynamic,and thermal properties of the four kinds of SiC mirror indicate that the surface figures of the SiC mirrors are all satisfactory with the design requirements. The properties of the mirrors with sandwich structure are better than those with open back structure,except the high cost. And the mirror with triangular cell has better combination properties than the mirror with hexagonal cell. Considering the overall performance and the cost,open back structure with triangular cell is the most suitable for the SiC mirror.
文摘Primary mirror is one of the key components in the space remote sensing system. To minimize the mass of the mirror without compromising its stiffness and decrease the deformation of the mirror surface at the different temperatures are the mainly two objects in the development of the primary mirror. Silicon carbide (SiC), the most promising optical material, was used as the material of the primary mirror with triangle lightmass structure in a Cassegrain system. By using finite element method, the properties of the SiC mirror were compared with that of the traditional Be mirror and fused silica mirror. The results of static, dynamic and thermo-mechanical analysis indicate that the deformation of the mirror surface caused by temperature field is much bigger than that caused by gravity field. The SiC mirror has the best overall properties, and the SiC material is much suitable for the primary mirror.
文摘Based on the principle that the thermal expansion coefficient of the support structure should match that of the mirror, three schemes of primary mirror assembly were designed. Of them, the first is fused silica mirror plus 4J32 flexible support plus ZTC4 support back plate, the second K9 mirror plus 4J45 flexible support plus ZTC4 support back plate, and the third SiC mirror plus SiC rigid support back plate. A coupled thermo-mechanical analysis of the three primary mirror assemblies was made with finite element method. The results show that the SiC assembly is the best of all schemes in terms of their combination properties due to its elimination of the thermal expansion mismatch between the materials. The analytical results on the cryogenic property of the SiC primary mirror assembly show a higher surface finish of the SiC mirror even under the cryogenic condition.
文摘The electrical performance of a photovoltaic (PV) silicon solar cell is described by its current–voltage (I–V) character-istic curve, which is in turn determined by device and material properties. In this study, an investigation of the performance and device parameters of photovoltaic single crystalline silicon (Si.) solar cell of the construction n+pp++ PESC(Passivatted Emitter Solar Cell) at different conditions of solar irradiance, title angle and mirror boosting effects had been studied. Also the paper reports on the performance data of the Si. cell, using standard I–V characteristic curves to obtain output parameters and to show that there are possible performance degrading defects presents.
