期刊文献+
共找到12篇文章
< 1 >
每页显示 20 50 100
Molecular dynamic simulations of surface morphology and pulsed laser deposition growth of lithium niobate thin films on silicon substrate
1
作者 刘悦 朱浩楠 +2 位作者 裴子栋 孔勇发 许京军 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第5期464-467,共4页
The molecular dynamic simulation of lithium niobate thin films deposited on silicon substrate is carried out by using the dissipative particle dynamics method. The simulation results show that the Si (111) surface i... The molecular dynamic simulation of lithium niobate thin films deposited on silicon substrate is carried out by using the dissipative particle dynamics method. The simulation results show that the Si (111) surface is more suitable for the growth of smooth LiNbO3 thin films compared to the Si(100) surface, and the optimal deposition temperature is around 873 K, which is consistent with the atomic force microscope results. In addition, the calculation molecular number is increased to take the electron spins and other molecular details into account. 展开更多
关键词 lithium niobate silicon dissipative particle dynamics
下载PDF
Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO<sub>3</sub>) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software
2
作者 Ahmad M.Alsaad Ahmad A.Ahmad +2 位作者 Qais M.Al-Bataineh Nermeen S.Daoud Mais H.Khazaleh 《Open Journal of Applied Sciences》 2019年第4期181-197,共17页
Interest in energy harvesters has grown rapidly over the last decade. The cantilever shaped piezoelectric energy harvesting beam is one of the most employed designs, due to its simplicity and flexibility for further p... Interest in energy harvesters has grown rapidly over the last decade. The cantilever shaped piezoelectric energy harvesting beam is one of the most employed designs, due to its simplicity and flexibility for further performance enhancement. The research effort in the MEMS Piezoelectric vibration energy harvester designed using three types of cantilever materials, Lithium Niobate (LiNbO3), Aluminum Nitride (AlN) and Zinc Oxide (ZnO) with different substrate materials: aluminum, steel and silicon using COMSOL Multiphysics package were designed and analyzed. Voltage, mechanical power and electrical power versus frequency for different cantilever materials and substrates were modeled and simulated using Finite element method (FEM). The resonant frequencies of the LiNbO3/Al, AlN/Al and ZnO/Al systems were found to be 187.5 Hz, 279.5 Hz and 173.5 Hz, respectively. We found that ZnO/Al system yields optimum voltage and electrical power values of 8.2 V and 2.8 mW, respectively. For ZnO cantilever on aluminum, steel and silicon substrates, we found the resonant frequencies to be 173.5 Hz, 170 Hz and 175 Hz, respectively. Interestingly, ZnO/steel yields optimal voltage and electrical power values of 9.83 V and 4.02 mW, respectively. Furthermore, all systems were studied at different differentiate frequencies. We found that voltage and electrical power have increased as the acceleration has increased. 展开更多
关键词 MEMS PIEZOELECTRIC Energy Harvester CANTILEVER Lithium niobate (LiNbO3) Aluminum Nitride (AlN) Zinc Oxide (ZnO) Aluminium SUBSTRATE Steel SUBSTRATE silicon SUBSTRATE COMSOL Finite Element Method
下载PDF
高侧壁垂直度超浅铌酸锂光栅耦合器的加工工艺及耦合效率 被引量:1
3
作者 瞿敏妮 刘思琦 +4 位作者 刘民 李进喜 陈舒静 付学成 程秀兰 《微纳电子技术》 CAS 2024年第1期131-136,共6页
利用聚焦离子束(FIB)在铌酸锂(LN)表面形成100 nm及以下深度的超浅光栅耦合器结构。为了提高刻蚀侧壁垂直度、避免开口展宽效应对光栅形貌的影响,在LN表面覆盖非晶硅(α-Si)作为掩膜层,实际刻蚀深度为α-Si层厚度和LN表面目标刻蚀深度之... 利用聚焦离子束(FIB)在铌酸锂(LN)表面形成100 nm及以下深度的超浅光栅耦合器结构。为了提高刻蚀侧壁垂直度、避免开口展宽效应对光栅形貌的影响,在LN表面覆盖非晶硅(α-Si)作为掩膜层,实际刻蚀深度为α-Si层厚度和LN表面目标刻蚀深度之和,且刻蚀过程中产生的开口效应仅存在于α-Si层。通过氢氧化钾(KOH)溶液选择性地去除α-Si层,留下的LN表面结构侧壁陡直且无开口展宽效应。制备了刻蚀深度108 nm的超浅光栅耦合器,在924 nm波长处,其耦合效率为23.3%。制备了刻蚀深度70 nm的超浅光栅耦合器,在935 nm波长处,其耦合效率为14.4%。该研究为LN光栅耦合器的发展与应用提供了有益指导。 展开更多
关键词 超浅光栅耦合器 高侧壁垂直度 聚焦离子束(FIB) 铌酸锂(LN) 非晶硅(α-Si)
下载PDF
基于亚波长光栅辅助定向耦合器的集成铌酸锂偏振分束器
4
作者 陈力 周旭东 +2 位作者 袁明瑞 肖恢芙 田永辉 《人工晶体学报》 CAS 北大核心 2024年第3期465-471,共7页
绝缘体上铌酸锂(LNOI)是实现高速光子集成回路(PICs)的理想平台。通过充分利用铌酸锂(LN)的优势,LNOI平台能够实现高速电光和高效非线性光学集成器件。偏振分束器(PBS)作为分离和组合两种正交偏振光模式的关键无源器件之一,在实现片上... 绝缘体上铌酸锂(LNOI)是实现高速光子集成回路(PICs)的理想平台。通过充分利用铌酸锂(LN)的优势,LNOI平台能够实现高速电光和高效非线性光学集成器件。偏振分束器(PBS)作为分离和组合两种正交偏振光模式的关键无源器件之一,在实现片上偏振复用系统并提升光通信系统数据传输容量方面发挥着至关重要的作用。近年来,基于不同结构的PBS已经被成功实现,其中,基于亚波长光栅辅助定向耦合结构的PBS表现出优异的器件性能和紧凑的器件尺寸。本文基于氮化硅-铌酸锂异质集成的间接刻蚀方案,实现了一种亚波长光栅辅助定向耦合结构的高性能PBS。仿真结果表明,当波长在1500~1600 nm时,器件的偏振消光比均大于24.49 dB。实验数据进一步证实,当波长在1500~1580 nm时,器件偏振消光比均大于18.06 dB。 展开更多
关键词 薄膜铌酸锂集成光子学 氮化硅-铌酸锂 偏振调控器件 偏振分束器 亚波长光栅 定向耦合器
下载PDF
Quantum prospects for hybrid thin-film lithium niobate on silicon photonics 被引量:3
5
作者 Jeremy C.Adcock Yunhong Ding 《Frontiers of Optoelectronics》 EI CSCD 2022年第1期73-79,共7页
Photonics is poised to play a unique role in quantum technology for computation,communications and sensing.Meanwhile,integrated photonic circuits-with their intrinsic phase stability and high-performance,nanoscale com... Photonics is poised to play a unique role in quantum technology for computation,communications and sensing.Meanwhile,integrated photonic circuits-with their intrinsic phase stability and high-performance,nanoscale components-offer a route to scaling.However,each integrated platform has a unique set of advantages and pitfalls,which can limit their power.So far,the most advanced demonstrations of quantum photonic circuitry has been in silicon photonics.However,thin-film lithium niobate(TFLN)is emerging as a powerful platform with unique capabilities;advances in fabrication have yielded loss metrics competitive with any integrated photonics platform,while its large second-order nonlinearity provides efficient nonlinear processing and ultra-fast modulation.In this short review,we explore the prospects of dynamic quantum circuits-such as multiplexed photon sources and entanglement generation-on hybrid TFLN on silicon(TFLN/Si)photonics and argue that hybrid TFLN/Si photonics may have the capability to deliver the photonic quantum technology of tomorrow. 展开更多
关键词 Quantum photonics Quantum information Quantum communications Lithium niobate(LN) silicon photonics
原文传递
紧凑型纳米薄膜铌酸锂复合波导光电子可逆逻辑门
6
作者 陈直 《半导体光电》 CAS 北大核心 2023年第1期32-38,共7页
基于纳米薄膜铌酸锂与氮化硅复合波导结构,构建了光电子可逆逻辑门,应用于神经形态光子学和量子计算。该光电子可逆逻辑门的主体由两个马赫-曾德尔调制器级联而成,结构紧凑,全长仅为4.4 mm,是普通质子交换铌酸锂调制器长度的百分之一。... 基于纳米薄膜铌酸锂与氮化硅复合波导结构,构建了光电子可逆逻辑门,应用于神经形态光子学和量子计算。该光电子可逆逻辑门的主体由两个马赫-曾德尔调制器级联而成,结构紧凑,全长仅为4.4 mm,是普通质子交换铌酸锂调制器长度的百分之一。工作在1.55μm波长时,该马赫-曾德尔调制器仅需4.9 V电压就可以实现一次完整的功率交换,很好地与CMOS工艺相兼容。器件特性研究表明,该光电子可逆逻辑门能够实现可逆逻辑运算功能。此外,该器件在1.4~1.6μm波长范围内,插入损耗均值为0.6 dB,输出端口的最小串扰为-47 dB,消光比的最大值为41 dB;在4~6 V电压范围内,插入损耗均值为0.63 dB,输出端口的最小串扰为-26 dB,消光比的最大值为22 dB,显示出了良好的响应特性。 展开更多
关键词 纳米薄膜铌酸锂 铌酸锂-氮化硅复合波导 马赫-曾德尔调制器 可逆逻辑运算
下载PDF
Recent progress in integrated electro-optic frequency comb generation 被引量:2
7
作者 Hao Sun Mostafa K.halil +1 位作者 Zifei Wang Lawrence R.Chen 《Journal of Semiconductors》 EI CAS CSCD 2021年第4期5-16,共12页
Optical frequency combs have emerged as an important tool enabling diverse applications from test-and-measurement,including spectroscopy,metrology,precision distance measurement,sensing,as well as optical and microwav... Optical frequency combs have emerged as an important tool enabling diverse applications from test-and-measurement,including spectroscopy,metrology,precision distance measurement,sensing,as well as optical and microwave waveform synthesis,signal processing,and communications.Several techniques exist to generate optical frequency combs,such as mode-locked lasers,Kerr micro-resonators,and electro-optic modulation.Important characteristics of optical frequency combs include the number of comb lines,their spacing,spectral shape and/or flatness,and intensity noise.While mode-locked lasers and Kerr micro-resonators can be used to obtain a large number of comb lines compared to electro-optic modulation,the latter provides increased flexibility in tuning the comb spacing.For some applications in optical communications and microwave photonics,a high degree of integration may be more desirable over a very large number of comb lines.In this paper,we review recent progress on integrated electro-optic frequency comb generators,including those based on indium phosphide,lithium niobate,and silicon photonics. 展开更多
关键词 electro-optic frequency comb generation integrated photonics silicon photonics integrated lithium niobate indium phosphide
下载PDF
高性能硅和铌酸锂异质集成薄膜电光调制器(特邀) 被引量:5
8
作者 孙时豪 蔡鑫伦 《红外与激光工程》 EI CSCD 北大核心 2021年第7期22-24,共3页
硅基光子集成平台因其高集成度、CMOS工艺兼容性等特点在光通信领域受到了广泛的关注,而电光调制器作为光通信系统中最为重要的器件之一,承担着将电信号加载至光信号上的关键作用,为打破硅基调制器的性能限制,可利用硅和铌酸锂的大面积... 硅基光子集成平台因其高集成度、CMOS工艺兼容性等特点在光通信领域受到了广泛的关注,而电光调制器作为光通信系统中最为重要的器件之一,承担着将电信号加载至光信号上的关键作用,为打破硅基调制器的性能限制,可利用硅和铌酸锂的大面积键合技术以及铌酸锂低损耗波导刻蚀技术实现高性能硅和铌酸锂异质集成薄膜电光调制器,目前该类调制器的性能可达半波电压3 V,3 dB电光带宽超过70 GHz,插入损耗小于1.8 dB,消光比大于40 dB。文中对比了硅和铌酸锂异质集成调制器的研究现状并介绍了该异质集成薄膜调制器的结构设计与工艺实现方法。 展开更多
关键词 光通信 硅基光子学 硅和铌酸锂异质集成 薄膜电光调制器
下载PDF
基于硅-铌酸锂复合波导的偏振复用器设计
9
作者 公姿苏 季伟 +5 位作者 尹锐 胡卉 蔡璐彤 张世成 李江月 王军宝 《南京大学学报(自然科学版)》 CAS CSCD 北大核心 2017年第3期415-420,共6页
结合铌酸锂薄膜的研究现状,提出一种硅与铌酸锂复合集成的波导结构,该波导结构能够将硅基的成熟工艺与铌酸锂材料的特性结合,利用铌酸锂的高双折射特性,该波导结构在实现偏振控制器件方面具有一系列独特的优势.基于硅与铌酸锂复合的波... 结合铌酸锂薄膜的研究现状,提出一种硅与铌酸锂复合集成的波导结构,该波导结构能够将硅基的成熟工艺与铌酸锂材料的特性结合,利用铌酸锂的高双折射特性,该波导结构在实现偏振控制器件方面具有一系列独特的优势.基于硅与铌酸锂复合的波导结构,设计了两类无源器件:定向耦合型偏振分离器和定向耦合型偏振分离转换器.分别采用光束传输法(BPM)和时域有限差分法(FDTD)对两类器件进行了仿真与性能分析,仿真计算结果表明,偏振分离器能够实现TE模和TM模的分离,且消光比高于30dB,在保证消光比大于10dB的情况下,其带宽约为70nm,工艺容差达100nm;偏振分离转换器能够实现TM模向TE模的转换,且消光比达20dB.两类器件均具有尺寸小、结构简单、工艺上易于实现等优点. 展开更多
关键词 硅与铌酸锂复合集成波导 定向耦合 偏振分离器 偏振分离转换器
下载PDF
X-切薄膜铌酸锂高效率光栅耦合器的设计 被引量:2
10
作者 罗砚浓 蔡鑫伦 《半导体光电》 CAS 北大核心 2022年第2期280-284,共5页
基于X-切绝缘体上薄膜铌酸锂平台,提出并设计了一种高耦合效率的切趾一维光栅耦合器。采用非晶硅覆盖层材料,结合亚波长光子晶体等效方案和遗传算法增强光栅耦合效率。在中心波长1550 nm处,光栅的峰值耦合效率为-1.08 dB,通过引入底部... 基于X-切绝缘体上薄膜铌酸锂平台,提出并设计了一种高耦合效率的切趾一维光栅耦合器。采用非晶硅覆盖层材料,结合亚波长光子晶体等效方案和遗传算法增强光栅耦合效率。在中心波长1550 nm处,光栅的峰值耦合效率为-1.08 dB,通过引入底部金属反射镜可进一步提高至-0.53 dB,其1 dB带宽约为61 nm。 展开更多
关键词 铌酸锂 光栅耦合器 非晶硅 高耦合效率
下载PDF
Patterned Nanofoam Fabrication from a Variety of Materials via Femtosecond Laser Pulses
11
作者 James A. Grant-Jacob Benita S. Mackay +6 位作者 James A. G. Baker Yunhui Xie Michael D. T. McDonnell Daniel J. Health Matthew Praeger Robert W. Eason Ben Mills 《Materials Sciences and Applications》 2019年第3期186-196,共11页
High-repetition-rate femtosecond lasers enable the precise production of nanofoam from a wide range of materials. Here, the laser-based fabrication of nanofoam from silicon, borosilicate glass, sodalime glass, gallium... High-repetition-rate femtosecond lasers enable the precise production of nanofoam from a wide range of materials. Here, the laser-based fabrication of nanofoam from silicon, borosilicate glass, sodalime glass, gallium lanthanum sulphide and lithium niobate is demonstrated, where the pore size of the nanofoam is shown to depend strongly on the material used, such that the pore width and nanofibre width appear to increase with density and thermal expansion coefficient of the material. In addition, the patterning of nanofoam on a glass slide, with fabricated pattern pixel resolution of ~35 μm, is demonstrated. 展开更多
关键词 Laser Ablation NANOFIBRES Nanofoam QR Code Patterning Lithium niobate GALLIUM Lanthanum SULPHIDE silicon Silica
下载PDF
基于薄膜铌酸锂的双偏振光学模式复用器(特邀)
12
作者 蒋永恒 李星峰 +7 位作者 沈健 肖恢芙 袁明瑞 张朴 李颖弢 张永 苏翼凯 田永辉 《光学学报》 EI CAS CSCD 北大核心 2024年第15期101-110,共10页
双偏振模式复用器由于只需要单个波长的激光源即可实现多信道复用,从而降低光链路的成本和功耗,目前已经受到研究人员的广泛关注。然而,由于绝缘体上铌酸锂(LNOI)平台中存在模式杂化现象,在该平台上制备双偏振模式复用器仍然具有一定的... 双偏振模式复用器由于只需要单个波长的激光源即可实现多信道复用,从而降低光链路的成本和功耗,目前已经受到研究人员的广泛关注。然而,由于绝缘体上铌酸锂(LNOI)平台中存在模式杂化现象,在该平台上制备双偏振模式复用器仍然具有一定的挑战。本文在SiN-LNOI平台上提出并实验验证了具有6个数据通道的双偏振光学模式复用器,使用亚波长光栅调控不同模式的色散,以抑制模式杂化引入的串扰。所测得的器件插入损耗和模间串扰分别为3.1 dB和-10.1 dB。此外,成功演示了总净数据容量为1.52 Tbit/s的动态数据传输实验,这表明所提器件在未来高速大容量光通信中具有较大的应用潜力。 展开更多
关键词 集成光学 薄膜铌酸锂 氮化硅 偏振复用 模式复用 亚波长光栅
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部