We investigate influences of series resistances on the performance of 1.55 μm waveguide-type germanium photodetectors（Ge-PDs） on a silicon-on-insulator substrate. The current-voltage characteristics, responsivities...We investigate influences of series resistances on the performance of 1.55 μm waveguide-type germanium photodetectors（Ge-PDs） on a silicon-on-insulator substrate. The current-voltage characteristics, responsivities,saturation photo-current characteristics, electrical reflection coefficients, and photodetection frequency responses of Ge-PDs, having different series resistances, are measured, and their equivalent circuit models are established. By analyzing the resulting circuit model parameters, we determine how much Ge-PD series resistances influence Ge-PD saturation photo-currents and photodetection bandwidth. These results should be of great use for optimization of Ge-PD fabrication processes and device parameters for target applications.展开更多
A silicon-based PIN photodetector structure with the characteristics of high responsibility and high cut-off frequency fabricated with the PERL(the passivated emitter and the rear locally-diffused)technologies is intr...A silicon-based PIN photodetector structure with the characteristics of high responsibility and high cut-off frequency fabricated with the PERL(the passivated emitter and the rear locally-diffused)technologies is introduced in this paper.After making some tiny adjustments of the structure,Silvaco software is used to simulate three similar structures of PIN photodetector by measuring the spectral response,dark current,cut-off frequency and dc characteristics.From the results,it is concluded that PIN photodetector with the middle shallow diffusion area is superior to the other two ones in dark current,at least 35% lower.The responsibility of these three kinds of detector reaches the degree of 0.3A/W,and the highest spectral response is around 600nm.Their cut-off frequencies are all over 108Hz.展开更多
Silicon sub-bandgap photodetectors can detect light at the infrared telecommunication wavelengths but with relatively weak photo-response.In this work,we demonstrate the enhancement of sub-bandgap photodetection in si...Silicon sub-bandgap photodetectors can detect light at the infrared telecommunication wavelengths but with relatively weak photo-response.In this work,we demonstrate the enhancement of sub-bandgap photodetection in silicon by helium-ion implantation,without afecting the transparency that is an important benefcial feature of this type of photodetectors.With an implantation dose of 1×10^(13)ions/cm^(2),the minimal detectable optical power can be improved from−33.2 to−63.1 dBm,or,by 29.9 dB,at the wavelength of 1550 nm,and the photo-response at the same optical power(−10 dBm)can be enhanced by approximately 18.8 dB.Our work provides a method for strategically modifying the intrinsic trade-of between transparency and strong photo-responses of this type of photodetectors.展开更多
基金supported in part by the National Research Foundation of Korea through the Korean Ministry of Science,ICTFuture Planning under Grant No.2015R1A2A2A01007772in part by the Materials and Parts Technology Research and Development Program through the Korean Ministry of Trade,Industry & Energy under Project No.10065666
文摘We investigate influences of series resistances on the performance of 1.55 μm waveguide-type germanium photodetectors（Ge-PDs） on a silicon-on-insulator substrate. The current-voltage characteristics, responsivities,saturation photo-current characteristics, electrical reflection coefficients, and photodetection frequency responses of Ge-PDs, having different series resistances, are measured, and their equivalent circuit models are established. By analyzing the resulting circuit model parameters, we determine how much Ge-PD series resistances influence Ge-PD saturation photo-currents and photodetection bandwidth. These results should be of great use for optimization of Ge-PD fabrication processes and device parameters for target applications.
文摘A silicon-based PIN photodetector structure with the characteristics of high responsibility and high cut-off frequency fabricated with the PERL(the passivated emitter and the rear locally-diffused)technologies is introduced in this paper.After making some tiny adjustments of the structure,Silvaco software is used to simulate three similar structures of PIN photodetector by measuring the spectral response,dark current,cut-off frequency and dc characteristics.From the results,it is concluded that PIN photodetector with the middle shallow diffusion area is superior to the other two ones in dark current,at least 35% lower.The responsibility of these three kinds of detector reaches the degree of 0.3A/W,and the highest spectral response is around 600nm.Their cut-off frequencies are all over 108Hz.
基金supported by the National Key Research and Development Program of China(No.2019YFB2203600)the Open Project Program of Wuhan National Laboratory for Optoelectronics(No.2020WNLOKF003).
文摘Silicon sub-bandgap photodetectors can detect light at the infrared telecommunication wavelengths but with relatively weak photo-response.In this work,we demonstrate the enhancement of sub-bandgap photodetection in silicon by helium-ion implantation,without afecting the transparency that is an important benefcial feature of this type of photodetectors.With an implantation dose of 1×10^(13)ions/cm^(2),the minimal detectable optical power can be improved from−33.2 to−63.1 dBm,or,by 29.9 dB,at the wavelength of 1550 nm,and the photo-response at the same optical power(−10 dBm)can be enhanced by approximately 18.8 dB.Our work provides a method for strategically modifying the intrinsic trade-of between transparency and strong photo-responses of this type of photodetectors.
