On the Temperature Profile of the Thermally Excited Resonant Silicon Micro Structural Pressure Sensor

According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...

Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

The purpose of the present work is to quantify the influences of the discrete nature, the surface effects, and the large deformation on the bending resonant properties of long and ultrathin （100） silicon nanocantilevers. We accomplish this by using an analytical semi-continuum Keating model within the framework of nonlinear, finite deformation kinematics. The semi-continuum model shows that the elastic behaviors of the silicon nanocantilevers are size-dependent and surface- dependent, which agrees well with the molecular dynamics results. It also indicates that the dominant effect on the fundamental resonant frequency shift of the silicon nanocantilever is adsorption-induced surface stress, followed by the discrete nature and surface reconstruction, whereas surface relaxation has the least effect. In particular, it is found that a large deformation tends to increase the nonlinear fundamental frequency of the silicon nanocantilever, depending not only on its size but also on the surface effects. Finally, the resonant frequency shifts due to the adsorption-induced surface stress predicted by the current model are quantitatively compared with those obtained from the experimental measurement and the other existing approach. It is noticed that the length-to-thickness ratio is the key parameter that correlates the deviations in the resonant frequencies predicted from the current model and the empirical formula.

Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures

Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh＇s method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters. Three micromachined lateral resonant resonators with different beam widths were fabricated. Their resonant frequencies were experimentally measured to be 64.5,147.2, and 255.5kHz, respectively, which are in good agreement with the simulated resonant frequency. It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young＇s modulus.

Ultrahigh-resolution on-chip spectrometer with silicon photonic resonators

A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution.It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators for achieving a broadened working window.The present on-chip spectrometer has a footprint as compact as 0.35 mm^(2),and is realized with standard multi-project-wafer foundry processes.The measurement results show that the on-chip spectrometer has an ultra-high resolution Δλ of 5 pm and a wide working window of 10 nm.The dynamic range defined as the ratio of the working window and the wavelength resolution is as large as 1940,which is the largest for on-chip dispersive spectro-meters to the best of our knowledge.The present high-performance on-chip spectrometer has great potential for high-resolution spectrum measurement in the applications of gas sensing,food monitoring,health analysis,etc.

Diffusion Coefficient at Resonance Frequency as Applied to n+/p/p+ Silicon Solar Cell Optimum Base Thickness Determination

The modelling and determination of the geometric parameters of a solar cell are important data, which influence the evaluation of its performance under specific operating conditions, as well as its industrial development for a low cost. In this work, an n+/p/p+ crystalline silicon solar cell is studied under monochromatic illumination in modulation and placed in a constant magnetic field. The minority carriers’ diffusion coefficient (D(ω, B), in the (p) base leads to maximum values (Dmax) at resonance frequencies (ωr). These values are used in expressions of AC minority carriers recombination velocity (Sb(Dmax, H)) in the rear of the base, to extract the optimum thickness while solar cell is subjected to these specific conditions. Optimum thickness modelling relationships, depending respectively on Dmax, ωr and B, are then established, and will be data for industrial development of low-cost solar cells for specific use.

Sub-nanosecond optical switch based on silicon racetrack resonator

We experimentally demonstrate a small-size and high-speed silicon optical switch based on the free carrier plasma dispersion in silicon. Using an embedded racetrack resonator with a quality factor of 7400, the optical switch shows an extinction ratio exceeding 13 dB with a footprint of only 2.2 × 10-3 mm^2. Moreover, a novel pre-emphasis technique is introduced to improve the optical response performance and the rise and the fall times are reduced down to 0.24 ns and 0.42 ns respectively, which are 25% and 44% lower than those without the pre-emphasis.

Power supply for generating frequency-variable resonant magnetic perturbations on the J-TEXT tokamak

To further research the response of the tearing mode（TM） to dynamic resonant magnetic perturbation（DRMP） on the J-TEXT tokamak, a modified series resonant inverter power supply（MSRIPS） with a function of discrete variable frequency is designed for DRMP coils in this study. The MSRIPS is an AC–DC–AC converter, including a phase-controlled rectifier, an LC filter, an insulated gate bipolar transistor（IGBT） full bridge, a matching transformer, three resonant capacitors with different capacitance values, and three corresponding silicon controlled rectifier（SCR） switches. The function of discrete variable frequency is realized by switching over different resonant capacitors with corresponding SCR switches while matching the corresponding driving frequency of the IGBT full bridge. A detailed switching strategy of the SCR switch is put forward to obtain sinusoidal current waveform and realize current waveform smooth transition during frequency conversion. In addition, a resistor and thyristor bleeder is designed to protect the SCR switch from overvoltage. Manufacturing of the MSRIPS is completed, and the MSRIPS equipment can output current with an amplitude of 1.5 kA when its working frequency jumps among different frequencies. Moreover, the current waveform is sinusoidal and can smoothly transition during frequency conversion. Furthermore, the transition time when the current amplitude rises from zero to a steady state is less than 2 ms during frequency conversion. By using the MSRIPS, the expected discrete variable frequency DRMP is generated, and the phenomenon of the TM being locked to the discrete variable frequency DRMP is observed on the J-TEXT tokamak.

Improving the UV-light stability of silicon heterojunction solar cells through plasmon-enhanced luminescence downshifting of YVO_(4):Eu^(3+),Bi^(3+)nanophosphors decorated with Ag nanoparticles

The ultraviolet(UV)light stability of silicon heterojunction(SHJ)solar cells should be addressed before large-scale production and applications.Introducing downshifting(DS)nanophosphors on top of solar cells that can convert UV light to visible light may reduce UV-induced degradation(UVID)without sacrificing the power conversion efficiency(PCE).Herein,a novel composite DS nanomaterial composed of YVO_(4):Eu^(3+),Bi^(3+)nanoparticles(NPs)and AgNPs was synthesized and introduced onto the incident light side of industrial SHJ solar cells to achieve UV shielding.The YVO_(4):Eu^(3+),Bi^(3+)NPs and Ag NPs were synthesized via a sol-gel method and a wet chemical reduction method,respectively.Then,a composite structure of the YVO_(4):Eu^(3+),Bi^(3+)NPs decorated with Ag NPs was synthesized by an ultrasonic method.The emission intensities of the YVO_(4):Eu^(3+),Bi^(3+)nanophosphors were significantly enhanced upon decoration with an appropriate amount of~20 nm Ag NPs due to the localized surface plasmon resonance(LSPR)effect.Upon the introduction of LSPR-enhanced downshifting,the SHJ solar cells exhibited an~0.54%relative decrease in PCE degradation under UV irradiation with a cumulative dose of 45 k W h compared to their counterparts,suggesting excellent potential for application in UV-light stability enhancement of solar cells or modules.

Bandwidth-tunable silicon nitride microring resonators

We designed a reconfigurable dual-interferometer coupled silicon nitride microring resonator.By tuning the integrated heater on interferometer's arms,the"critical coupling"bandwidth of resonant mode is continuously adjustable whose quality factor varies from 7.9×10^(4) to 1.9×10^(5) with the extinction ratio keeping higher than 25 dB.Also a variety of coupling spanning from"under-coupling"to"over-coupling"were achieved,showing the ability to tune the quality factor from 6.0×10^(3) to 2.3×10^(5).Our design can provide an adjustable filtering method on silicon nitride photonic chip and contribute to optimize the nonlinear process for quantum photonics and all-optical signal processing.

Four-wave mixing in silicon-nanocrystal embedded high-index doped silica micro-ring resonator

A nonlinear integrated optical platform that allows the fabrication of waveguide circuits with different material composition,and at small dimensions,offers advantages in terms of field enhancement and increased interaction length,thereby facilitating the observation of nonlinear optics effects at a much lower power level.To enhance the nonlinearity of the conventional waveguide structure,in this work,we propose and demonstrate a microstructured waveguide where silicon rich layer is embedded in the core of the conventional waveguide in order to increase its nonlinearity.By embedding a 20 nm thin film of silicon nanocrystal(Si-nc),we achieve a twofold increase of the nonlinear parameter,γ.The linear relationship between the fourwave mixing conversion efficiency and pump power reveals the negligible nonlinear absorption and small dispersion in the micro-ring resonators.This simple approach of embedding an ultra-thin Si-nc layer into conventional high-index doped silica dramatically increases its nonlinear performance,and could potentially find applications in all-optical processing functions.

Bright 547-dimensional Hilbert-space entangled resource in 28-pair modes biphoton frequency comb from a reconfigurable silicon microring resonator

High-dimensional entanglement provides valuable resources for quantum technologies,including quantum communication,quantum optical coherence tomography,and quantum computing.Obtaining a high brightness and dimensional entanglement source has significant value.Here we utilize a tunable asymmetric Mach–Zehnder interferometer coupled silicon microring resonator with 100 GHz free spectral range to achieve this goal.With the strategy of the tunable coupler,the dynamical and extensive tuning range of quality factors of the microring can be obtained,and then the biphoton pair generation rate can be optimized.By selecting and characterizing 28 pairs from a more than 30-pair modes biphoton frequency comb,we obtain a Schmidt number of at least 23.4 and on-chip pair generation rate of 19.9 MHz/m W;under a low on-chip pump power,which corresponds to 547 dimensions Hilbert space in frequency freedom.These results will prompt the wide applications of quantum frequency comb and boost the further large density and scalable on-chip quantum information processing.

Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators

This study focuses on the mechanical response of silicon on porous silicon bilayer cantilevers ended with a seismic mass. The porous silicon is intended to provide an alternative to decrease the cantilever stiffness for low-frequency MEMS applications. The first eigenfrequency of the cantilever is obtained using static deflection obtained under classical Euler-Bernoulli assumptions and Rayleigh method. In order to estimate the errors due to small-strain approximation and Euler-Bernoulli theory, the analytical results were validated through 3D finite element simulations for different cantilever geometries and porosities. Both bulk silicon and silicon on porous silicon bilayer cantilevers ended with a seismic mass were fabricated and we measured the first eigenfrequency (f0) and quality factor (Q) by using a laser Doppler vibrometer. In agreement with the theoretical predictions we found that, when compared to bulk silicon cantilevers, the first eigenfrequency of a bilayer cantilever containing 6% porous silicon (at 50% porosity) on 94% bulk silicon is lowered by 5%, from (5447 ±120) Hz to ≈5198 Hz. This decrease is also accompanied by a reduction of the quality factor by two.

Design,fabrication and characterization of a high-performance microring resonator in silicon-on-insulator

A high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. The design and the experimental realization of this device are presented in detail. In addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. We have measured a quality factor of 21,200 and an extinction ratio of 12.SdB at a resonant wavelength of 1549.32nm. Meanwhile, a low propagation loss of 0.89dB/mm in a curved waveguide with a bending radius of 40μm is demonstrated as well.

Modeling and analysis of silicon-on-insulator elliptical microring resonators for future high-density integrated photonic circuits

We propose a novel resonator containing an elliptical microring based on a silicon-on-insulator platform. Simu- lations using the three-dimensional finite-difference time-domain method show that the novel elliptical microring can efficiently enhance the mode coupling between straight bus waveguides and resonator waveguides or between adjacent resonators while preserving relatively high intrinsic quality factors with large free spectral range. The proposed resonator would be an alternative choice for future high-density integrated photonic circuits.

Design and simulation of a silicon-based hybrid integrated optical gyroscope system

By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper.The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link,which provides a theoretical design reference to improve the system's sensitivity.When the wavelength is 1550 nm,the conversion frequency of the dual-ring optical path is 50 MHz,the coupling coefficient is 0.2,and the radius R is 1000μm,the quality factor of the silicon-based Si_(3)N_(4)resonator is 2.58×10^(5),which is 1.58 times that of the silicon-on-insulator resonator.Moreover,the effective number of times the light travels around the ring before leaving the micro-ring is 5.93,which is 1.62 times that of the silicon-on-insulator resonator.The work fits the gyro dynamic output diagram,and solves the problem of low sensitivity at low speed by setting the phase offset.This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.

An Effective Method for Improving Silicon Micro-resonator System Performance

The working principle of silicon micro-resonator system was firstly introduced. An intelligent silicon micro-resonator system design and realization was presented in focus. There are two steps working flows for roughness and fine searching. Meanwhile the digital interface technology was analyzed in detail. Combined with experimental data and sweeping curve, two different searching results came out in different vacuum circumstance and its working performance was well evaluated.

乳腺假体并发症的Silicone序列MRI特征

目的分析乳腺假体植入术后并发症的MRI表现,探讨其诊断价值。方法回顾性分析本院2013年6月至2015年6月收治的9例乳腺假体MRI特征。结果 1假体退行性样改变:Silicone-Sup序列上表现为片状不规则混杂信号或气泡样无信号结节。2假体包膜挛缩、假体变形移位:表现为假体边缘呈波浪状,囊壁增厚。3假体破裂(分囊内破裂和包膜破裂):囊内破裂Silicone-only序列表现囊内曲线状、弧线状低信号;包膜破裂表现为假体包膜连续性中断、假体周围间隙内存在结节状或片状假体信号。结论 MRI是诊断乳腺假体并发症的首选方法,视野全面,无需压迫,诊断准确率高。

All-silicon low-loss THz temporal differentiator based on microring waveguide resonator platform

Microring resonators have been widely used in passive optical devices such as wavelength division multiplexers,differentiators,and integrators.Research on terahertz(THz)components has been accelerated by these photonics technologies.Compact and integrated time-domain differentiators that enable low-loss,high-speed THz signal processing are necessary for THz applications.In this study,an on-chip THz temporal differentiator based on all-silicon photonic technology was developed.This device primarily consisted of a microring waveguide resonator and was packaged with standard waveguide compatibility.It performed time-domain differentiation on input signals at a frequency of 405.45 GHz with an insertion loss of 2.5 dB and a working bandwidth of 0.36 GHz.Various periodic waveforms could be handled by this differentiator.This device could work as an edge detector,which detected step-like edges in high-speed input signals through differential effects.This development holds significant promise for future THz data processing technologies and THz communication systems.

核磁共振氢谱法测定注射用微球专用溶剂中硅油的含量

目的:建立测定注射用微球专用溶剂中硅油含量的定量核磁共振氢谱(qHNMR)法。方法:采用Bruker Avance NEO 600型核磁共振波谱仪测定核磁共振氢谱(^(1)H NMR),脉冲序列zg30,弛豫延迟时间15 s,采样次数16,测定温度25℃,以咖啡因为内标,不加四甲基硅烷(TMS)的氘代氯仿为溶剂,对注射用微球专用溶剂中的硅油进行定量研究,以硅油定量峰与内标定量峰面积之比对其含量(μg)绘制标准曲线,计算注射用微球专用溶剂中硅油含量。结果:硅油含量在6~100μg范围内线性关系良好,r=0.9999,低、中、高浓度的平均回收率为97.8%(n=9),重复性RSD为9.8%。结论:该方法操作简单快捷、灵敏度高、结果准确,可用于注射用微球专用溶剂中硅油含量的测定。

Characterize and optimize the four-wave mixing in dual-interferometer coupled silicon microrings

By designing and fabricating a series of dual-interferometer coupled silicon microrings, the coupling condition of the pump, signal, and idler beams can be engineered independently and then we carried out both the continuous-wave and pulse pumped four-wave mixing experiments to verify the dependence of conversion efficiency on the coupling conditions of the four interacting beams, respectively. Under the continuous-wave pump, the four-wave mixing efficiency gets maximized when both the pump and signal/idler beams are closely operated at the critical coupling point, while for the pulse pump case, the efficiency can be enhanced greatly when the pump and converted idler beams are all overcoupled. These experiment results agree well with our theoretical calculations. Our design provides a platform for explicitly characterizing the four-wave mixing under different pumping conditions, and offers a method to optimize the four-wave mixing, which will facilitate the development of on-chip all-optical signal processing with a higher efficiency or reduced pump power.