This study investigated the hydrogenation of silicon tetrachloride （SIC14） in microwave plasma. A new launcher of argon （Ar） and hydrogen （Ha） plasma was introduced to produce a non-thermodynamic equilibrium act...This study investigated the hydrogenation of silicon tetrachloride （SIC14） in microwave plasma. A new launcher of argon （Ar） and hydrogen （Ha） plasma was introduced to produce a non-thermodynamic equilibrium activation plasma. The plasma state exhibited a characteristic temperature related to the equilibrium constant, which was termed ＂Reactive Temperature＂ in this study. Thus, the hydrogenation of SIC14 in the plasma could easily be handled with high conversion ratio and very high selectivity to trichlorosilane （SiHC13）. The effects of SiC14/Ar and H2/Ar ratios on the conversion were also investigated using a mathematical model developed to determine the op- timum experimental parameters. The highest hydrogenation conversion ratio was produced at a H2/SiCl4 molar ratio of 1, with mixtures of SICl4 and H2 to Ar molar ratio of 1.2 to 1.4. In this plasma, the special system pressure and incident power were required for the highest energy efficiency of hydrogenating SIC14, while the optimum system pressure varies from 26.6 to 40 kPa depending on input power, and the optimum feed gas （He and SiCI4） molar en- ergy input was about 350 kJ. mo1-1.展开更多
研究发现,四氯化硅气相法制备高硅Y型沸石与稀土离子交换相结合,能使高硅Y型沸石中RE_2O_3含量达到6％～9％,在晶胞常数相近的情况下,与水热法制备USY相比,RE_2O_3含量提高近3倍,有效地提高了高硅Y型沸石的裂化活性和氢转移活性。用XBD...研究发现,四氯化硅气相法制备高硅Y型沸石与稀土离子交换相结合,能使高硅Y型沸石中RE_2O_3含量达到6％～9％,在晶胞常数相近的情况下,与水热法制备USY相比,RE_2O_3含量提高近3倍,有效地提高了高硅Y型沸石的裂化活性和氢转移活性。用XBD、FT-IB,^(27)Al MAS NMB及BET-N_2吸附方法进行表征,从反应机理和制备工艺上探讨了两种制备方法提高稀土含量的差异,提出及时清理硅铝碎片,保持孔道畅通,是有效提高高硅Y型沸石中稀土含量的关键。展开更多
文摘This study investigated the hydrogenation of silicon tetrachloride （SIC14） in microwave plasma. A new launcher of argon （Ar） and hydrogen （Ha） plasma was introduced to produce a non-thermodynamic equilibrium activation plasma. The plasma state exhibited a characteristic temperature related to the equilibrium constant, which was termed ＂Reactive Temperature＂ in this study. Thus, the hydrogenation of SIC14 in the plasma could easily be handled with high conversion ratio and very high selectivity to trichlorosilane （SiHC13）. The effects of SiC14/Ar and H2/Ar ratios on the conversion were also investigated using a mathematical model developed to determine the op- timum experimental parameters. The highest hydrogenation conversion ratio was produced at a H2/SiCl4 molar ratio of 1, with mixtures of SICl4 and H2 to Ar molar ratio of 1.2 to 1.4. In this plasma, the special system pressure and incident power were required for the highest energy efficiency of hydrogenating SIC14, while the optimum system pressure varies from 26.6 to 40 kPa depending on input power, and the optimum feed gas （He and SiCI4） molar en- ergy input was about 350 kJ. mo1-1.
文摘研究发现,四氯化硅气相法制备高硅Y型沸石与稀土离子交换相结合,能使高硅Y型沸石中RE_2O_3含量达到6％～9％,在晶胞常数相近的情况下,与水热法制备USY相比,RE_2O_3含量提高近3倍,有效地提高了高硅Y型沸石的裂化活性和氢转移活性。用XBD、FT-IB,^(27)Al MAS NMB及BET-N_2吸附方法进行表征,从反应机理和制备工艺上探讨了两种制备方法提高稀土含量的差异,提出及时清理硅铝碎片,保持孔道畅通,是有效提高高硅Y型沸石中稀土含量的关键。
