This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resol...This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.展开更多
基金the National Basic Research Program under Grant No.2004CB719801
文摘This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
