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Simulation of the effects of defects in low temperature Ge buffer layer on dark current of Si-based Ge photodiodes
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作者 Xiaohui Yi Zhiwei Huang +5 位作者 Guangyang Lin Cheng Li Songyan Chen Wei Huang Jun Li Jianyuan Wang 《Journal of Semiconductors》 EI CAS CSCD 2017年第4期1-5,共5页
The influence of defects in low temperature Ge layer on electrical characteristics of p-Ge/i-Ge/n-Si and n-Ge/i-Ge/p-Ge photodiodes(PDs) was studied.Due to a two-step growth method,there are high defect densities in... The influence of defects in low temperature Ge layer on electrical characteristics of p-Ge/i-Ge/n-Si and n-Ge/i-Ge/p-Ge photodiodes(PDs) was studied.Due to a two-step growth method,there are high defect densities in low-temperature buffer Ge layer.It is shown that the defects in low-temperature Ge layer change the band diagrams and the distribution of electric field,leading to the increase of the total dark current for p-Ge/i-Ge/n-Si PDs,whereas these defects have no influence on the dark current for n-Ge/i-Ge/p-Ge PDs.As a complement,a three-dimensional simulation of the total current under illumination was also performed. 展开更多
关键词 germanium photodiodes defects dark current simulation
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