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Design and application of thickness measurement calibration system based on laser displacement sensor
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作者 SUN Jin YU Zijin 《Baosteel Technical Research》 CAS 2024年第2期39-46,共8页
This study aims to improve the accuracy and safety of steel plate thickness calibration.A differential noncontact thickness measurement calibration system based on laser displacement sensors was designed to address th... This study aims to improve the accuracy and safety of steel plate thickness calibration.A differential noncontact thickness measurement calibration system based on laser displacement sensors was designed to address the problems of low precision of traditional contact thickness gauges and radiation risks of radiation-based thickness gauges.First,the measurement method and measurement structure of the thickness calibration system were introduced.Then,the hardware circuit of the thickness system was established based on the STM32 core chip.Finally,the system software was designed to implement system control to filter algorithms and human-computer interaction.Experiments have proven the excellent performance of the differential noncontact thickness measurement calibration system based on laser displacement sensors,which not only considerably improves measurement accuracy but also effectively reduces safety risks during the measurement process.The system offers guiding significance and application value in the field of steel plate production and processing. 展开更多
关键词 steel plate thickness high precision measurement noncontact thickness measurement laser displace-ment sensor
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Measurement and Analysis of Vibration Effect of Free-falling Corner Cube Driving Mechanism in Free Fall Absolute Gravimeter
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作者 ZHANG Bing ZHU Xiaoyi +7 位作者 WU Qiong XUE Bing XING Lili WU Yanxiong SU Peng WANG Xiaolei WANG Yuru WANG Chuhan 《Acta Geologica Sinica(English Edition)》 SCIE CAS CSCD 2024年第S01期84-86,共3页
The vibration interference of the reference corner cube runs through the free flight process of the free-falling corner cube,which is superimposed on the whole laser interference fringes.Thus,it is necessary to solve ... The vibration interference of the reference corner cube runs through the free flight process of the free-falling corner cube,which is superimposed on the whole laser interference fringes.Thus,it is necessary to solve the interference fringes with the entire fringe to analyze the quantitative influence of vibration on gravity measurements. 展开更多
关键词 laser interference absolute gravimeter gravity measurement vibration influence
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In-situ 3D contour measurement for laser powder bed fusion based on phase guidance
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作者 Yuze Zhang Pan Zhang +3 位作者 Xin Jiang Siyuan Zhang Kai Zhong Zhongwei Li 《Theoretical & Applied Mechanics Letters》 CAS CSCD 2023年第2期113-119,共7页
In-situ layerwise imaging measurement of laser powder bed fusion(LPBF)provides a wealth of forming and defect data which enables monitoring of components quality and powder bed homogeneity.Using high-resolution camera... In-situ layerwise imaging measurement of laser powder bed fusion(LPBF)provides a wealth of forming and defect data which enables monitoring of components quality and powder bed homogeneity.Using high-resolution camera layerwise imaging and image processing algorithms to monitor fusion area and powder bed geometric defects has been studied by many researchers,which successfully monitored the contours of components and evaluated their accuracy.However,research for the methods of in-situ 3D contour measurement or component edge warping identification is rare.In this study,a 3D contour mea-surement method combining gray intensity and phase difference is proposed,and its accuracy is verified by designed experiments.The results show that the high-precision of the 3D contours can be achieved by the constructed energy minimization function.This method can detect the deviations of common ge-ometric features as well as warpage at LPBF component edges,and provides fundamental data for in-situ quality monitoring tools. 展开更多
关键词 laser powder bed fusion In-situ measurement Active contours 3D contour measurement accuracy
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Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System
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作者 Hongfang Chen Mengyang Sun +3 位作者 Yinglun Ma Liang Tang Yu Wang Huixu Song 《Journal of Harbin Institute of Technology(New Series)》 CAS 2023年第4期37-49,共13页
A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performa... A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems. 展开更多
关键词 interference fringe contrast laser tracing measurement high precision measurement ZEMAX.
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Novel Method for Spatial Angle Measurement Based on Rotating Planar Laser Beams 被引量:19
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作者 YANG Linghui YANG Xueyou ZHU Jigui DUAN Muqiong LAO Dabao 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2010年第6期758-764,共7页
Spatial angle measurement, especially the measurement of horizontal and vertical angle, is a basic method used for industrial large-scale coordinate measurement. As main equipments in use, both theodolites and laser t... Spatial angle measurement, especially the measurement of horizontal and vertical angle, is a basic method used for industrial large-scale coordinate measurement. As main equipments in use, both theodolites and laser trackers can provide very high accuracy for spatial angle measurement. However, their industrial applications are limited by low level of automation and poor parallelism. For the purpose of improving measurement efficiency, a lot of studies have been conducted and several alternative methods have been proposed. Unfortunately, all these means are either low precision or too expensive. In this paper, a novel method of spatial angle measurement based on two rotating planar laser beams is proposed and demonstrated. Photoelectric receivers placed on measured points are used to receive the rotating planner laser signals transmitted by laser transmitters. The scanning time intervals of laser planes were measured, and then measured point's horizontal/vertical angles can be calculated. Laser plane's angle parameters are utilized to establish the abstract geometric model of transmitter. Calculating formulas of receiver's horizontal/vertical angles have been derived. Measurement equations' solvability conditions and judgment method of imaginary solutions are also presented after analyzing. Proposed method for spatial angle measurement is experimentally verified through a platform consisting of one laser transmitter and one optical receiver. The transmitters used in new method are only responsible for providing rotating light plane signals carrying angle information. Receivers automatically measure scanning time of laser planes and upload data to the workstation to calculate horizontal angle and vertical angle. Simultaneous measurement of multiple receivers can be realized since there is no human intervention in measurement process .Spatial angle measurement result indicates that the repeatable accuracy of new method is better than 10". Proposed method can improve measurement's automation degree and speed while ensuring measurement accuracy. 展开更多
关键词 large-scale coordinate measurement spatial angle measurement rotating planar laser beams measurement automation
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Review of low timing jitter mode-locked fiber lasers and applications in dual-comb absolute distance measurement 被引量:9
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作者 Haosen Shi Youjian Song +6 位作者 Runmin Li Yuepeng Li Hui Cao Haochen Tian Bowen Liu Lu Chai Minglie Hu 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2018年第4期205-217,共13页
Passively mode-locked fiber lasers emit femtosecond pulse trains with excellent short-term stability. The quantum-limited timing jitter of a free running femtosecond erbium-doped fiber laser working at room temperatur... Passively mode-locked fiber lasers emit femtosecond pulse trains with excellent short-term stability. The quantum-limited timing jitter of a free running femtosecond erbium-doped fiber laser working at room temperature is considerably below one femtosecond at high Fourier frequency. The ultrashort pulse train with ultralow timing jitter enables absolute time-of-flight measurements based on a dual-comb implementation, which is typically composed of a pair of optical frequency combs generated by femtosecond lasers. Dead-zone-free absolute distance measurement with sub-micrometer precision and kHz update rate has been routinely achieved with a dual-comb configuration, which is promising for a number of precision manufacturing applications, from large step-structure measurements prevalent in microelectronic profilometry to three coordinate measurements in large-scale aerospace manufacturing and shipbuilding. In this paper, we first review the sub-femtosecond precision timing jitter characterization methods and approaches for ultralow timing jitter mode-locked fiber laser design. Then, we provide an overview of the state-of-the-art dual-comb absolute ranging technology in terms of working principles, experimental implementations, and measurement precisions. Finally, we discuss the impact of quantum-limited timing jitter on the dual-comb ranging precision at a high update rate. The route to highprecision dual-comb range finder design based on ultralow jitter femtosecond fiber lasers is proposed. 展开更多
关键词 TIMING JITTER MODE-LOCKED lasers Dual-comb ABSOLUTE distance measurement
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Measurement of Cavity Loss and Quasi-Fermi-Level Separation for Fabry-Pérot Semiconductor Lasers
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作者 韩春林 刘瑞喜 +2 位作者 国伟华 于丽娟 黄永箴 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第8期789-793,共5页
A fitting process is used to measure the cavity loss and the quasi Fermi level separation for Fabry Pérot semiconductor lasers.From the amplified spontaneous emission (ASE) spectrum,the gain spectrum and sing... A fitting process is used to measure the cavity loss and the quasi Fermi level separation for Fabry Pérot semiconductor lasers.From the amplified spontaneous emission (ASE) spectrum,the gain spectrum and single pass ASE obtained by the Cassidy method are applied in the fitting process.For a 1550nm quantum well InGaAsP ridge waveguide laser,the cavity loss of about ~24cm -1 is obtained. 展开更多
关键词 semiconductor lasers measurement technique cavity loss
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New Measurement Method for Spline Shaft Rolling Performance Evaluation using Laser Displacement Sensor 被引量:4
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作者 Hong-Wei Li Zhi-Qiang Liang +3 位作者 Jia-Jie Pei Li Jiao Li-Jing Xie Xi-Bin Wang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2018年第4期124-132,共9页
In order to control the quality of spline shaft in rolling process, an efficient measurement method for rolling performance evaluation is essential. Here, a newly developed on-machine non-contact measurement prototype... In order to control the quality of spline shaft in rolling process, an efficient measurement method for rolling performance evaluation is essential. Here, a newly developed on-machine non-contact measurement prototype based on laser displacement sensor and rotary encoder is proposed. The prototype is intended for the automated evaluation of the spline shaft rolling performance by measuring the dimensional change of tooth root, which is correlated with the surface residual stress and micro-hardness. Laser displacement sensor and rotary encoder are used to record the polar radius and polar angle of each point on measuring section. Data are displayed in a polar coordinate system and fitted in a gear. Through multipoint curvature method, the roots of spline shaft are recognized automatically. Then, the dimensional change can be calculated by fitting the radius of the tooth root circle before and after rolling. Systematic error covering offset error is also analyzed and calibrated. At last, measurement test results show that the system has advantages of simple structure, high measurement precision(radius error < 0.6 μm), high measurement efficiency(measuring time < 2 s) and automatic control ability, providing a new opportunity for the efficient evaluation of various spline shafts in high-precision mechanical processing. 展开更多
关键词 laser measurement Spline shaft Rolling performance Dimensional change
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Non-contact angle measurement based on parallel multiplex laser feedback interferometry 被引量:4
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作者 张松 谈宜东 张书练 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第11期320-324,共5页
We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry (PLFI), which outputs two parallel laser beams and thus their displacement difference reflects the angle ... We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry (PLFI), which outputs two parallel laser beams and thus their displacement difference reflects the angle variation of the target. Due to its ultrahigh sensitivity to the feedback light, PLFI realizes the direct non-contact measurement of non- cooperative targets. Experimental results show that PLFI has an accuracy of 8" within a range of 1400". The yaw of a guide is also measured and the experimental results agree with those of the dual-frequency laser interferometer Agilent 5529A. 展开更多
关键词 laser feedback angle measurement non-cooperative targets
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Measurement of 3db Bandwidth of Laser Diode Chips
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作者 徐遥 王圩 王子宇 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第8期794-797,共4页
An accurate technique for measuring the frequency response of semiconductor laser diode chips is proposed and experimentally demonstrated.The effects of test jig parasites can be completely removed in the measurement ... An accurate technique for measuring the frequency response of semiconductor laser diode chips is proposed and experimentally demonstrated.The effects of test jig parasites can be completely removed in the measurement by a new calibration method.In theory,the measuring range of the measurement system is only determined by the measuring range of the instruments network analyzer and photo detector.Diodes' bandwidth of 7 5GHz and 10GHz is measured.The results reveal that the method is feasible and comparing with other method,it is more precise and easier to use. 展开更多
关键词 bandwidth measurement CALIBRATION frequency response semiconductor laser diode chips
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External-cavity birefringence feedback effects of microchip Nd:YAG laser and its application in angle measurement 被引量:2
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作者 任成 谈宜东 张书练 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第8期3438-3443,共6页
External-cavity birefringence feedback effects of the microchip Nd:YAG laser are presented. When a birefringence element is placed in the external feedback cavity of the laser, two orthogonally polarized laser beams ... External-cavity birefringence feedback effects of the microchip Nd:YAG laser are presented. When a birefringence element is placed in the external feedback cavity of the laser, two orthogonally polarized laser beams with a phase difference are output. The phase difference is twice as large as the phase retardation in the external cavity along the two orthogonal directions. The variable extra-cavity birefringence, caused by rotation of the external-cavity birefringenee element, results in tunable phase difference between the two orthogonally polarized beams. This means that the roll angle information has been translated to phase difference of two output laser beams. A theoretical analysis based on the Fabry-Perot cavity equivalent model and refractive index ellipsoid is presented, which is in good agreement with the experimental results. This phenomenon has potential applications for roll angle measurement. 展开更多
关键词 microchip laser external-cavity birefringence feedback orthogonally polarized lasers angle measurement
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Numerical investigation of multi-beam laser heterodyne measurement with ultra-precision for linear expansion coefficient of metal based on oscillating mirror modulation 被引量:1
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作者 李彦超 王春晖 +5 位作者 曲杨 高龙 丛海芳 杨彦玲 高洁 王遨游 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第1期398-404,共7页
This paper proposes a novel method of multi-beam laser heterodyne measurement for metal linear expansion coefficient. Based on the Doppler effect and heterodyne technology, the information is loaded of length variatio... This paper proposes a novel method of multi-beam laser heterodyne measurement for metal linear expansion coefficient. Based on the Doppler effect and heterodyne technology, the information is loaded of length variation to the frequency difference of the multi-beam laser heterodyne signal by the frequency modulation of the oscillating mirror, this method can obtain many values of length variation caused by temperature variation after the multi-beam laser heterodyne signal demodulation simultaneously. Processing these values by weighted-average, it can obtain length variation accurately, and eventually obtain the value of linear expansion coefficient of metal by the calculation. This novel method is used to simulate measurement for linear expansion coefficient of metal rod under different temperatures by MATLAB, the obtained result shows that the relative measurement error of this method is just 0.4%. 展开更多
关键词 linear expansion coefficient multi-beam laser heterodyne laser Doppler technique contactless measurement
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Improved calibration method for displacement transformation coefficient in optical and visual measurements
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作者 Haopeng Li Zurong Qiu 《Nanotechnology and Precision Engineering》 CAS CSCD 2023年第1期12-25,共14页
Optical and visual measurement technology is used widely in fields that involve geometric measurements,and among such technology are laser and vision-based displacement measuring modules(LVDMMs).The displacement trans... Optical and visual measurement technology is used widely in fields that involve geometric measurements,and among such technology are laser and vision-based displacement measuring modules(LVDMMs).The displacement transformation coefficient(DTC)of an LVDMM changes with the coordinates in the camera image coordinate system during the displacement measuring process,and these changes affect the displacement measurement accuracy of LVDMMs in the full field of view(FFOV).To give LVDMMs higher accuracy in the FFOV and make them adaptable to widely varying measurement demands,a new calibration method is proposed to improve the displacement measurement accuracy of LVDMMs in the FFOV.First,an image coordinate system,a pixel measurement coordinate system,and a displacement measurement coordinate system are established on the laser receiving screen of the LVDMM.In addition,marker spots in the FFOV are selected,and the DTCs at the marker spots are obtained from calibration experiments.Also,a fitting method based on locally weighted scatterplot smoothing(LOWESS)is selected,and with this fitting method the distribution functions of the DTCs in the FFOV are obtained based on the DTCs at the marker spots.Finally,the calibrated distribution functions of the DTCs are applied to the LVDMM,and experiments conducted to verify the displacement measurement accuracies are reported.The results show that the FFOV measurement accuracies for horizontal and vertical displacements are better than±15μm and±19μm,respectively,and that for oblique displacement is better than±24μm.Compared with the traditional calibration method,the displacement measurement error in the FFOV is now 90%smaller.This research on an improved calibration method has certain significance for improving the measurement accuracy of LVDMMs in the FFOV,and it provides a new method and idea for other vision-based fields in which camera parameters must be calibrated. 展开更多
关键词 Displacement transformation coefficient(DTC) laser and vision-based displacement measuring module(LVDMM) Displacement measurement Locally weighted scatterplot smoothing(LOWESS) Calibration method
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Measurement of the surface morphology of plasma facing components on the EAST tokamak by a laser speckle interferometry approach 被引量:1
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作者 Hongbei WANG Xiaoqian CUI +4 位作者 Yuanbo LI Mengge ZHAO Shuhua LI Guangnan LUO Hongbin DING 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第3期172-178,共7页
The laser speckle interferometry approach provides the possibility of an in situ optical noncontacted measurement for the surface morphology of plasma facing components(PFCs),and the reconstruction image of the PFC su... The laser speckle interferometry approach provides the possibility of an in situ optical noncontacted measurement for the surface morphology of plasma facing components(PFCs),and the reconstruction image of the PFC surface morphology is computed by a numerical model based on a phase unwrapping algorithm.A remote speckle interferometry measurement at a distance of three meters for real divertor tiles retired from EAST was carried out in the laboratory to simulate a real detection condition on EAST.The preliminary surface morphology of the divertor tiles was well reproduced by the reconstructed geometric image.The feasibility and reliability of this approach for the real-time measurement of PFCs have been demonstrated. 展开更多
关键词 plasma facing components laser speckle interferometry morphology measurement
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Comparison of GUF and Monte Carlo methods to evaluate task-specific uncertainty in laser tracker measurement 被引量:1
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作者 杨景照 李国喜 +2 位作者 吴宝中 龚京忠 王杰 《Journal of Central South University》 SCIE EI CAS 2014年第10期3793-3804,共12页
Measurement uncertainty plays an important role in laser tracking measurement analyses. In the present work, the guides to the expression of uncertainty in measurement(GUM) uncertainty framework(GUF) and its supplemen... Measurement uncertainty plays an important role in laser tracking measurement analyses. In the present work, the guides to the expression of uncertainty in measurement(GUM) uncertainty framework(GUF) and its supplement, the Monte Carlo method, were used to estimate the uncertainty of task-specific laser tracker measurements. First, the sources of error in laser tracker measurement were analyzed in detail, including instruments, measuring network fusion, measurement strategies, measurement process factors(such as the operator), measurement environment, and task-specific data processing. Second, the GUM and Monte Carlo methods and their application to laser tracker measurement were presented. Finally, a case study involving the uncertainty estimation of a cylindricity measurement process using the GUF and Monte Carlo methods was illustrated. The expanded uncertainty results(at 95% confidence levels) obtained with the Monte Carlo method are 0.069 mm(least-squares criterion) and 0.062 mm(minimum zone criterion), respectively, while with the GUM uncertainty framework, none but the result of least-squares criterion can be got, which is 0.071 mm. Thus, the GUM uncertainty framework slightly underestimates the overall uncertainty by 10%. The results demonstrate that the two methods have different characteristics in task-specific uncertainty evaluations of laser tracker measurements. The results indicate that the Monte Carlo method is a practical tool for applying the principle of propagation of distributions and does not depend on the assumptions and limitations required by the law of propagation of uncertainties(GUF). These features of the Monte Carlo method reduce the risk of an unreliable measurement of uncertainty estimation, particularly in cases of complicated measurement models, without the need to evaluate partial derivatives. In addition, the impact of sampling strategy and evaluation method on the uncertainty of the measurement results can also be taken into account with Monte Carlo method, which plays a guiding role in measurement planning. 展开更多
关键词 task-specific uncertainty laser tracker measurement uncertainty evaluation Monte Carlo method uncertainy framework(GUF)
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The Approach of Compensation of Air Refractive Index in Thermal Expansion Coefficients Measurement Based on Laser Feedback Interferometry 被引量:2
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作者 郑发松 丁迎春 +2 位作者 谈宜东 林静 张书练 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第7期17-20,共4页
We present the thermal expansion coefficient (TEC) measurement technology of compensating for the effect of variations in the refractive index based on a Nd: YA G laser feedback system, the beam frequency is shifte... We present the thermal expansion coefficient (TEC) measurement technology of compensating for the effect of variations in the refractive index based on a Nd: YA G laser feedback system, the beam frequency is shifted by a pair of aeousto-optic modulators and then the heterodyne phase measurement technique is used. The sample measured is placed in a muffle furnace with two coaxial holes opened on the opposite furnace walls. The measurement beams hit perpendicularly and coaxially on each surface of the sample. The reference beams hit on the reference mirror and the high-refiectivity mirror, respectively. By the heterodyne configuration and computing, the influences of the vibration, distortion of the sample supporter and the effect of variations in the refractive index are measured and largely minimized. For validation, the TECs of aluminum samples are determined in the temperature range of 29-748K, confirming not only the precision within 5 × 10-7 K-1 and the accuracy within 0.4% from 298K to 448K but also the high sensitivity non-contact measurement of the lower reflectivity surface induced by the sample oxidization from 448 K to 748 K. 展开更多
关键词 In TEC The Approach of Compensation of Air Refractive Index in Thermal Expansion Coefficients measurement Based on laser Feedback Interferometry
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Development of 2D Temperature and Concentration Measurement Method Using Tunable Diode Laser Absorption Spectroscopy 被引量:7
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作者 Yoshihiro Deguchi Daisuke Yasui Akira Adachi 《Journal of Mechanics Engineering and Automation》 2012年第9期543-549,共7页
Exhaust gas temperature is an important factor in NOx, THC and PM emissions of engines. Especially 2D temperature and concentration distribution plays an important role for the engine efficiency. A thermocouple is int... Exhaust gas temperature is an important factor in NOx, THC and PM emissions of engines. Especially 2D temperature and concentration distribution plays an important role for the engine efficiency. A thermocouple is intrinsically a point temperature measurement method and noncontact 2D temperature distribution cannot be attained by thermocouples. Recently, as a measurement technique with high sensitivity and high response, laser diagnostics has been developed and applied to the actual engine combustions. With these engineering developments, transient phenomena such as start-ups and load changes in engines have been gradually elucidated in various conditions. In this study, the theoretical and experimental research has been conducted in order to develop the noncontact and fast response 2D temperature and concentration distribution measurement method. The method is based on a Computed Tomography (CT) method using absorption spectra of water vapor at 1388 nm. It has been demonstrated that the method has been successfully applied to engine exhausts to measure 2D temperature distributions. 展开更多
关键词 2D temperature measurement tunable diode laser absorption spectroscopy CT (computed tomography) engine exhausts.
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Mirror Mapping of Laser Interferometer Measurement System on Ultra-precise Movement Stage 被引量:1
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作者 周云飞 于宝成 《Journal of Southwest Jiaotong University(English Edition)》 2006年第4期355-362,共8页
The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new ... The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage (UPMS) with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm. 展开更多
关键词 laser interferometer measurement system (LIMS) Ultra-precise movement stage (UPMS) Mirror mapping Splineinterpolation Mirror map data tables
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Measurement of Refractive Index Ranging from 1.42847 to 2.48272 at 1064 nm Using a Quasi-Common-Path Laser Feedback System 被引量:1
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作者 徐玲 谈宜东 +1 位作者 张书练 孙利群 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第9期21-24,共4页
Wavelength 1064 nm is one of the most widely used laser wavelengths in industries and science. The high-precision measurement of the refractive index of optical materials at 1064 nm is significant for improving the op... Wavelength 1064 nm is one of the most widely used laser wavelengths in industries and science. The high-precision measurement of the refractive index of optical materials at 1064 nm is significant for improving the optical design. We study the direct measurement of refractive index at 1064nm of lasers, including cMcium fluoride (CaF2), fused silica and zinc selenide (ZnSe), whose refractive indices cover a large range from 1.42847 to 2.48272. The measurement system is built based on the quasi-common-path Nd:YAG laser feedback interferometry. The thickness can be measured simultaneously with the refractive index. The results demonstrate that the system has absolute uncertainties of ~10-5 and ~10-4 mm in refractive index and thickness measurement, respectively. 展开更多
关键词 In measurement of Refractive Index Ranging from 1.42847 to 2.48272 at 1064 nm Using a Quasi-Common-Path laser Feedback System AOM
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Laser triangulation measurement of the level in a coal silo 被引量:2
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作者 Sun Jiping Jiang Jing 《Mining Science and Technology》 EI CAS 2011年第6期881-884,共4页
Laser triangulation theory was used to develop a novel contact-free method for measuring the coal level in a silo under harsh environmental conditions found in coal mines, such as the presence of dense dust, high humi... Laser triangulation theory was used to develop a novel contact-free method for measuring the coal level in a silo under harsh environmental conditions found in coal mines, such as the presence of dense dust, high humidity, and low illumination. A laser source and a camera were mounted at the top of the silo. The laser spot projected into the silo was imaged by the camera. The pinhole imaging principle allows the level to be found from the lateral shift of the spot image on the sensor. A pre-calibrated look-up table of the coal depth versus spot position was used to obtain the depth. The measurement accuracy depends on the step size used during pre-calibration. The actual application of a device designed according to these principles shows that it is easy to implement. The detection of the coal level in a silo at the low illumination level found in coal mines is demonstrated. 展开更多
关键词 laser triangulation measurement Coal level of coal silo Image segmentation Look-up table
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